Patents
Patents for B24B 49 - Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation (8,827)
11/2001
11/29/2001US20010046831 Improved methods and apparatus for chemical mechanical planarization (cmp) of a semiconductor wafer
11/28/2001CN1075422C Automatic wafer lapping system
11/27/2001US6322422 Apparatus for accurately measuring local thickness of insulating layer on semiconductor wafer during polishing and polishing system using the same
11/27/2001US6321947 Multiple dispensing valve closure with threaded attachment to a container and with a twist-open spout
11/22/2001WO2001087541A2 Pneumatic diaphragm head having an independent retaining ring and multi-region pressure control, and method to use the same
11/22/2001US20010044268 Carrier head for a chemical mechanical polishing apparatus
11/22/2001US20010044267 Lapping machine
11/22/2001US20010044263 Polish pad with non-uniform groove depth to improve wafer polish rate uniformity
11/22/2001US20010044261 Apparatus for in-situ optical endpointing on web-format planarizing machines in mechanical or chemical-mechanical planarization of microelectronic-device substrate assemblies and methods for making and using same
11/22/2001US20010044258 Method for lapping and a lapping apparatus
11/22/2001US20010044257 Methods for predicting polishing parameters of polishing pads, and methods and machines for planarizing microelectronic substrate assemblies in mechanical or chemical-mechanical planarization
11/22/2001US20010042313 Control system for eyeglass tracer
11/21/2001EP1155780A2 Grinding machine with direct drive rotary wheelhead
11/21/2001EP1155775A2 Eyeglass lens processing apparatus
11/20/2001US6319420 Method and apparatus for electrically endpointing a chemical-mechanical planarization process
11/20/2001US6319106 Wafer polishing apparatus
11/20/2001US6319094 Method and apparatus for controlling abrasive flow machining
11/20/2001US6319093 Chemical-mechanical polishing system and method for integrated spin dry-film thickness measurement
11/15/2001US20010041526 Carrier head with a flexible membrane for a chemical mechanical polishing system
11/15/2001US20010041520 Polishing pad conditioning apparatus in chemical mechanical polishing apparatus
11/15/2001US20010041509 Processing apparatus and method
11/15/2001US20010041501 System for real-time control of semiconductor wafer polishing
11/15/2001DE10013650C1 Verfahren zum Bearbeiten von Brillengläsern mittels einer CNC-gesteuerten Brillenglasbearbeitungsmaschine und Vorrichtung zur Durchführung des Verfahrens A method for machining spectacle lenses by means of a CNC spectacle-lens machining unit and a device for carrying out the method
11/14/2001CN1322374A Polishing body, polisher, method for adjusting polisher, method for measuring thickness of polished film or end point of polishing, method for producing semiconductor device
11/13/2001US6316276 Apparatus and method of planarizing a semiconductor wafer that includes a first reflective substance and a second reflective substance
11/13/2001US6315917 Using ARL to decrease EPD noise in CMP process
11/13/2001US6315641 Method and apparatus for chemical mechanical polishing
11/13/2001US6315636 Lapping machine, row tool, and lapping method
11/13/2001US6315635 Method and apparatus for slurry temperature control in a polishing process
11/08/2001WO2001083165A1 Apparatus for mechanically treating a surface, as well as a method for mechanically treating a surface
11/08/2001WO2001061746A9 Test structure for metal cmp process control
11/08/2001US20010039170 Low temperature chemical mechanical polishing of dielectric materials
11/08/2001US20010039166 Dissolution of metal particles produced by polishing
11/08/2001US20010039163 Methods for predicting polishing parameters of polishing pads, and methods and machines for planarizing microelectronic substrate assemblies in mechanical or chemical-mechanical planarization
11/08/2001US20010039064 Layer-thickness detection methods and apparatus for wafers and the like, and polishing apparatus comprising same
11/06/2001US6312558 Method and apparatus for planarization of a substrate
11/06/2001US6312314 Guidewire position locator
11/01/2001WO2001081902A1 Apparatus and methods for detecting killer particles during chemical mechanical polishing
11/01/2001US20010036805 Forming a transparent window in a polishing pad for a chemical mehcanical polishing apparatus
11/01/2001US20010036793 Method and apparatus for detecting an end-point in chemical mechanical polishing of metal layers
11/01/2001US20010036738 Semiconductor device manufacturing method
11/01/2001US20010036676 Semiconductor wafer polishing endpoint detecting system and method therefor
11/01/2001US20010035933 Apparatus for displaying lens contour, apparatus for processing lens contour data, and apparatus for grinding edge of eyeglass lens with the same
10/2001
10/31/2001EP1149274A1 Sensor for determining the temperature in the contact zone situated between two bodies which can move in relation to one another, especially between a grinding wheel and a workpiece
10/31/2001CN1073911C Apparatus for polishing dielectric layer formed on substrate
10/30/2001US6309555 Method for determining thickness of material layer and chemical mechanical polishing endpoint
10/30/2001US6309290 Chemical mechanical polishing head having floating wafer retaining ring and wafer carrier with multi-zone polishing pressure control
10/30/2001US6309277 System and method for achieving a desired semiconductor wafer surface profile via selective polishing pad conditioning
10/30/2001US6309276 Endpoint monitoring with polishing rate change
10/25/2001WO2001080226A1 Polish cleaning apparatus and method in manufacture of hga
10/25/2001WO2001078945A1 Method and apparatus for in-situ endpoint detection using electrical sensors
10/25/2001US20010034186 Polishing apparatus
10/24/2001EP1147854A1 Spectacle lens production
10/24/2001EP1147853A1 Spectacle lens production
10/24/2001EP1147852A1 Spectacle lens production
10/24/2001EP1146996A1 Apparatus for monitoring tread thickness during tire buffing
10/23/2001US6307628 Method and apparatus for CMP end point detection using confocal optics
10/23/2001US6306009 System for real-time control of semiconductor wafer polishing
10/23/2001US6306008 Apparatus and method for conditioning and monitoring media used for chemical-mechanical planarization
10/23/2001US6306007 Rolling mill equipped with on-line roll grinding system and grinding wheel
10/18/2001WO2001076818A1 A polishing apparatus and a method of detecting an end point of polishing
10/18/2001US20010031614 Random orbital finishing apparatus
10/18/2001US20010031610 Polishing pad with a transparent portion
10/18/2001US20010031609 Glass product machining apparatus
10/18/2001US20010031608 Apparatus for optical inspection of wafers during polishing
10/18/2001US20010030171 Cleaning uneven surfaces
10/18/2001DE10017719A1 Vorrichtung zum Schleifen von Messern Device for sharpening knives
10/17/2001EP1145800A1 Device for sharpening knives
10/16/2001US6303507 In-situ feedback system for localized CMP thickness control
10/16/2001US6302764 Process and device for dressing high-speed grinding worms
10/16/2001US6302762 Wafer polishing apparatus
10/11/2001WO2001074536A2 Carrier head providing uniform upward and downward force on a wafer
10/11/2001WO2001074534A2 A workpiece carrier with adjustable pressure zones and barriers
10/11/2001WO2001074533A2 Methods for performing wafer preparation operations on vertically oriented semiconductor wafers
10/11/2001WO2001074532A1 Method of polishing wafers
10/11/2001US20010029161 Polishing apparatus and method of manufacturing grinding plate
10/11/2001US20010029154 Method and apparatus for controlling a temperature of a polishing pad used in planarizing substrates
10/11/2001US20010029153 Rolling mill equipped with on-line roll grinding system and grinding wheel
10/11/2001US20010029152 Method and apparatus for wireless transfer of chemical-mechanical planarization measurements
10/11/2001US20010029150 Polishing apparatus and method
10/11/2001US20010029148 Apparatus for sharpening blades
10/09/2001US6301009 In-situ metrology system and method
10/09/2001US6301006 Endpoint detector and method for measuring a change in wafer thickness
10/09/2001US6299506 Polishing apparatus including holder and polishing head with rotational axis of polishing head offset from rotational axis of holder and method of using
10/09/2001US6298571 Apparatus for checking diametral dimensions of rotating cylindrical parts
10/04/2001WO2001072471A1 Work holding panel for polishing, and device and method for polishing
10/04/2001WO2001072470A1 Process end point detection apparatus and method, polishing apparatus, semiconductor device manufacturing method, and recording medium recorded with signal processing program
10/04/2001WO2001020304A3 Self-clearing optical measurement apparatus and methods of use
10/04/2001US20010027080 Method and apparatus for determining polishing endpoint with multiple light sources
10/04/2001US20010026948 Method for appraising the condition of a semiconductor polishing cloth
10/04/2001US20010026364 Test structure for metal CMP process control
10/04/2001EP1139406A2 Chemical mechanical polishing process for low dishing of metal lines in semiconductor wafer fabrication
10/04/2001EP1138071A1 A method and system for polishing semiconductor wafers
10/04/2001EP1137515A1 Method and grinding machine for controlling the process during rough grinding of a workpiece
10/02/2001US6296548 Method and apparatus for optical monitoring in chemical mechanical polishing
09/2001
09/27/2001WO2001070459A1 Method and device for treating spectacle glasses by means of a cnc-controlled spectacle glass treatment machine
09/27/2001WO2001070456A2 Automatic gage head positioning system
09/27/2001US20010024934 Method of grinding an axially asymmetric aspherical mirror
09/27/2001US20010024930 Method and apparatus for wireless transfer of chemical-mechanical planarization measurements
09/27/2001US20010024929 Method and apparatus for wireless transfer of chemical-mechanical planarization measurements
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