Patents
Patents for B24B 49 - Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation (8,827)
11/2002
11/21/2002US20020173233 Modular controlled platen preparation system and method
11/21/2002US20020173230 Point-of-use regulating system for use in the chemical-mechanical planarization of semiconductor wafers
11/21/2002US20020173229 Wafer planarization apparatus
11/21/2002US20020173227 Embedded lapping guide
11/21/2002US20020173225 Chemical mechanical polishing endpoint detection
11/21/2002US20020173224 Method of and apparatus for removing material
11/21/2002US20020173223 Method and apparatus for polishing control with signal peak analysis
11/21/2002DE10135139C1 Numerically-controlled workpiece finishing device has force measuring device for measuring pressure force acting on tool spindle during finishing
11/20/2002EP1258317A1 A carrier head with flexible membrane for a chemical mechanical polishing system
11/20/2002EP1257386A1 Polishing pad with a transparent portion
11/20/2002EP1126950B1 Apparatuses and methods for polishing semiconductor wafers
11/20/2002EP1021272B1 Apparatus for machining workpieces
11/19/2002US6482732 Method and apparatus for polishing semiconductor wafer
11/19/2002US6481109 Control system for eyeglass tracer
11/14/2002WO2002090050A1 Wafer polishing method and wafer polishing device
11/14/2002WO2002090047A1 Apparatus for the diameter checking of eccentric portions of a mechanical piece in the course of the machining in a grinding machine
11/14/2002WO2001023141A9 Polishing pad
11/14/2002US20020168922 Automated drill bit re-sharpening and verification system
11/14/2002US20020166252 Apparatus for the in-process dimensional checking of cylindrical parts
11/14/2002DE10123570A1 Grinder for processing exposed contours monitors material removal so defined grinding pressure, grinding speed (rate of cut) and grinding time lead to removal result that is reproducible
11/13/2002EP1005626B1 Method and apparatus for detecting the endpoint in chemical-mechanical polishing of semiconductor wafers
11/12/2002US6480017 Evaluating pattern for measuring an erosion of a semiconductor wafer polished by a chemical mechanical polishing
11/12/2002US6478657 Eyeglass lens processing apparatus
11/12/2002US6477755 Gear burnishing system having pre-checking station
11/07/2002WO2002087826A1 Method for controlling a process in a multi-zonal apparatus
11/07/2002WO2002087825A1 Integrated endpoint detection system with optical and eddy current monitoring
11/07/2002WO2002072311A3 Method for thinning and polishing the die of integrated circuits
11/07/2002WO2002017381A3 Method for preventing damage to wafers in a sequential multiple steps polishing process
11/07/2002US20020164938 Carrier head with a compressible film
11/07/2002US20020164925 Integrated endpoint detection system with optical and eddy current monitoring
11/07/2002US20020164924 Method for controlling a process in a multi-zonal apparatus
11/06/2002EP1255286A1 Monitor, method of monitoring, polishing device, and method of manufacturing semiconductor wafer
11/06/2002EP1253993A1 Interface assembly for lapping control feedback
11/06/2002EP1173308B1 Rotary abrasive tool
11/06/2002EP0790101B1 Shape control method and nc machine using the method
11/06/2002CN1093790C Polishing method of substrate and polishing device therefor
11/05/2002US6477447 Methods to generate numerical pressure distribution data for developing pressure related components
11/05/2002US6476921 In-situ method and apparatus for end point detection in chemical mechanical polishing
11/05/2002US6475064 Multipoint bending apparatus for lapping heads of a data storage device
11/05/2002US6475062 Film thickness measuring method, polishing method, fabrication method of thin film magnetic head and substrate for forming the thin film magnetic head
10/2002
10/31/2002WO2002043129A3 Method for determinating an endpoint during cmp of a semiconductor wafer
10/31/2002US20020160697 Workpiece holder for polishing, polishing apparatus and polishing method
10/31/2002US20020160691 Planarization apparatus and method
10/31/2002US20020159626 Detection of an end point of polishing a substrate
10/31/2002US20020158395 Chemical mechanical polishing method and semiconductor device manufacturing method
10/31/2002DE10119662A1 Verfahren zur Randbearbeitung von optischen Linsen A method for edge machining optical lenses
10/30/2002EP1251998A1 Endpoint monitoring with polishing rate change
10/30/2002EP1251997A1 Polishing head for a polishing machine
10/30/2002EP1251995A1 Grinder
10/30/2002CN1376950A Photosensitive object regenerative method and device, photosensitive object, image forming device
10/29/2002US6472325 Method and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies
10/24/2002US20020155795 Optical endpoint detection for buff module on CMP tool
10/24/2002US20020155794 Recession control via thermal expansion coefficient differences in recording heads during lapping
10/24/2002US20020155790 Method and apparatus for grinding eccentric cylindrical portions of workpiece with diameter measuring device
10/24/2002US20020155789 Learning method and apparatus for predictive determination of endpoint during chemical mechanical planarization using sparse sampling
10/24/2002US20020155788 Method and apparatus for using optical reflection data to obtain a continuous predictive signal during cmp
10/24/2002US20020155787 Method and device for treating spectacle glasses by means of a cnc-controlled spectacle glass treatment machine
10/24/2002US20020153347 Pressure suppression device for chemical mechanical polishing machine and method thereof
10/24/2002US20020152616 Method and apparatus for superfinishing tapered roller bearing
10/23/2002EP1251415A2 Method and apparatus for grinding eccentric cylindrical portions of workpiece with diameter measuring device
10/23/2002EP1250979A2 Method for edge processing of ophtalmic lenses
10/23/2002EP1250215A1 System and method for controlled polishing and planarization of semiconductor wafers
10/23/2002EP1250214A1 Pre-cutter and edger machine
10/22/2002US6468912 Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies
10/22/2002US6468131 Method to mathematically characterize a multizone carrier
10/22/2002US6467181 Device for measuring radius of grindstone in grinding machine
10/17/2002WO2001056744A9 Endpoint monitoring with polishing rate change
10/17/2002US20020151259 Polishing apparatus
10/17/2002US20020151251 Method of chemical mechanical polishing with controllable pressure and loading area
10/17/2002US20020151127 Optically-based method and apparatus for detecting and characterizing surface pits in a metal film during chemical mechanical polish
10/17/2002US20020149360 Eddy current test method and appratus for selecting calibration standard to measure thickness of micro thin film metal coating on wafer products by using noncontact technique
10/17/2002DE10214522A1 Poliervorrichtung Polishing apparatus
10/16/2002EP1089851B1 Wafer edge polishing method and apparatus
10/16/2002EP1001864B1 A carrier head with local pressure control for a chemical mechanical polishing apparatus
10/15/2002US6464824 Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies
10/15/2002US6464571 Polishing apparatus and method with belt drive system adapted to extend the lifetime of a refreshing polishing belt provided therein
10/15/2002US6464564 System for real-time control of semiconductor wafer polishing
10/15/2002US6464563 Method and apparatus for detecting dishing in a polished layer
10/15/2002US6464562 System and method for in-situ monitoring slurry flow rate during a chemical mechanical polishing process
10/15/2002US6464561 System for real-time control of semiconductor wafer polishing
10/15/2002US6464560 System for real-time control of semiconductor wafer polishing
10/10/2002WO2002079887A2 Apparatus and methods with resolution enhancement feature for improving accuracy of conversion of required chemical mechanical polishing pressure to force to be applied by polishing head to wafer
10/10/2002WO2002078905A1 Method and apparatus for end point triggering with integrated steering
10/10/2002WO2002078901A1 A chemical mechanical planarization system with an adjustable force applying air platen
10/10/2002WO2002078899A1 Chemical mechanical polishing apparatus having edge, center and annular zone control of material removal
10/10/2002US20020146970 Polishing apparatus and methods having high processing workload for controlling polishing pressure applied by polishing head
10/10/2002US20020146969 CD refacing system
10/10/2002US20020146962 Grinding machine having a safety device
10/09/2002EP1247616A1 Method and arrangement for conditioning a polishing pad surface
10/08/2002US6462402 Microelectronic substrate comprised of etch stop layer, stiffening layer, and endpointing layer
10/08/2002US6461965 Method for effecting a finishing operation on a semiconductor workpiece
10/08/2002US6461964 Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies
10/08/2002US6461228 Grinding and polishing machines
10/08/2002US6461224 Off-diameter method for preparing semiconductor wafers
10/08/2002US6461222 Planarizing and polishing apparatus and planarizing and polishing method
10/03/2002WO2002077705A1 Methods and apparatus for polishing and planarization
10/03/2002WO2002076676A1 Method of reducing thermal distortion in grinding machines
10/03/2002WO2002076328A1 An apparatus and a method for producing a dental restoration
10/03/2002WO2002060643A3 Spherical drive assembly for chemical mechanical planarization
10/03/2002WO2000026609A3 Method and apparatus for measuring substrate layer thickness during chemical mechanical polishing
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