| Patents for B24B 49 - Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation (8,827) |
|---|
| 10/03/2002 | US20020142710 Adjustable force applying air platen and spindle system, and methods for using the same |
| 10/03/2002 | US20020142706 Method and configuration for conditioning a polishing pad surface |
| 10/03/2002 | US20020142704 Linear chemical mechanical polishing apparatus equipped with programmable pneumatic support platen and method of using |
| 10/03/2002 | US20020142703 Polishing apparatus |
| 10/03/2002 | CA2435959A1 Method of reducing thermal distortion in grinding machines |
| 10/02/2002 | EP1244907A1 In-situ metalization monitoring using eddy current measurements and optical measurements |
| 10/02/2002 | CN1371782A Method for working ultrafine conical rolling bearing |
| 10/01/2002 | US6459945 System and method for facilitating determining suitable material layer thickness in a semiconductor device fabrication process |
| 10/01/2002 | US6458015 Chemical-mechanical planarization machine and method for uniformly planarizing semiconductor wafers |
| 10/01/2002 | US6458014 Polishing body, polishing apparatus, polishing apparatus adjustment method, polished film thickness or polishing endpoint measurement method, and semiconductor device manufacturing method |
| 10/01/2002 | US6458013 Method of chemical mechanical polishing |
| 10/01/2002 | US6458012 Polishing apparatus |
| 09/26/2002 | WO2002074491A1 In situ detection of a thin metal-interface using optical interference during a cmp process |
| 09/26/2002 | US20020137436 System and method for controlled polishing and planarization of semiconductor wafers |
| 09/26/2002 | US20020137434 Method and apparatus for measuring properties of a polishing pad |
| 09/26/2002 | US20020137431 Methods and apparatus for polishing and planarization |
| 09/26/2002 | US20020136565 Photoreceptor regenerating apparatus and image forming apparatus using regenerated photoreceptor and method of regenerating photoreceptor |
| 09/25/2002 | EP1243973A1 Photoreceptor regenerating apparatus and image forming apparatus using regenerated photoreceptor and method of regenerating photoreceptor |
| 09/24/2002 | US6454630 Rotatable platen having a transparent window for a chemical mechanical polishing apparatus and method of making the same |
| 09/24/2002 | US6454629 Method for the production of medical fittings, in particular dental fittings |
| 09/19/2002 | WO2002072311A2 Method for thinning and polishing the die of integrated circuits |
| 09/19/2002 | US20020132559 Polishing apparatus |
| 09/18/2002 | EP1240977A2 Polishing apparatus |
| 09/17/2002 | US6451700 Method and apparatus for measuring planarity of a polished layer |
| 09/17/2002 | US6450866 Sharpening apparatus |
| 09/17/2002 | US6450861 Rolling mill equipped with on-line roll grinding system and grinding wheel |
| 09/17/2002 | US6450859 Method and apparatus for abrading a substrate |
| 09/12/2002 | WO2002071445A2 Polishing chemical delivery for small head chemical mechanical planarization |
| 09/12/2002 | WO2002070195A1 Apparatus for checking dimensional and geometrical features of pins |
| 09/12/2002 | WO2002053320A3 Wafer support for chemical mechanical planarization |
| 09/12/2002 | US20020127951 Method and apparatus for monitoring polishing state, polishing device, process wafer, semiconductor device, and method of manufacturing semiconductor device |
| 09/12/2002 | US20020127950 Method of detecting and measuring endpoint of polishing processing and its apparatus and method of manufacturing semiconductor device using the same |
| 09/12/2002 | US20020124957 Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies |
| 09/12/2002 | US20020124373 Polishing apparatus |
| 09/11/2002 | EP1238756A1 Chemical mechanical polishing with multiple polishing pads |
| 09/11/2002 | EP1238755A1 Table of wafer polisher, method of polishing wafer, and method of manufacturing semiconductor wafer |
| 09/10/2002 | US6447369 Planarizing machines and alignment systems for mechanical and/or chemical-mechanical planarization of microelectronic substrates |
| 09/10/2002 | US6447368 Carriers with concentric balloons supporting a diaphragm |
| 09/10/2002 | US6446509 Method and apparatus for ultrasonic testing of the surface of columnar structures, and method for grinding rolls by use of them |
| 09/06/2002 | WO2002031866A3 Infrared end-point system for cmp |
| 09/05/2002 | US20020122620 Optical fiber polishing system |
| 09/04/2002 | EP1235662A1 Computer controlled grinding machine |
| 09/04/2002 | EP1177069A4 Grinding of cutting tools with wavy cutting edges |
| 09/04/2002 | EP1053075B1 Method fro marking or drilling holes in glass lenses and device for realising the same |
| 09/04/2002 | CN1367066A Equipment for grinding die-cutting cylinder cutting edge and making integral detection and its detection method |
| 09/03/2002 | US6446013 Method for determining a peening element speed limit ratio when peening the internal surface of a hollow part |
| 09/03/2002 | US6443818 Grinding machine |
| 08/29/2002 | WO2002007154A3 Process and apparatus for finishing a magnetic slider |
| 08/29/2002 | US20020119736 Precision glass grinding |
| 08/29/2002 | US20020119731 Devices and methods for in-situ control of mechanical or chemical-mechanical planarization of microelectronic-device substrate assemblies |
| 08/29/2002 | DE10120341A1 Verfahren zur Bestimmung aktueller Positionsdaten eines Bearbeitungswerkzeuges und Vorrichtung hierzu A method of determining current position data of a machining tool and apparatus therefor |
| 08/28/2002 | EP0906174B1 Workpiece inspection and handling |
| 08/27/2002 | US6440319 Method and apparatus for predicting process characteristics of polyurethane pads |
| 08/27/2002 | US6440263 Indirect endpoint detection by chemical reaction and chemiluminescence |
| 08/27/2002 | US6439964 Method of controlling a polishing machine |
| 08/27/2002 | US6439963 System and method for mitigating wafer surface disformation during chemical mechanical polishing (CMP) |
| 08/22/2002 | WO2002064315A1 Polishing disk with end-point detection port |
| 08/22/2002 | US20020115734 Method of altering and preserving the surface properties of a polishing pad and specific applications therefor |
| 08/22/2002 | US20020115397 System and method for CMP head having multi-pressure annular zone subcarrier material removal control |
| 08/22/2002 | US20020115381 Eyeglass lens processing apparatus |
| 08/22/2002 | US20020115380 Polishing end point detecting device for wafer polishing apparatus |
| 08/22/2002 | US20020115379 Polishing disk with end-point detection port |
| 08/22/2002 | US20020115283 Planarization by selective electro-dissolution |
| 08/22/2002 | US20020112343 Determination of track width of magnetoresistive sensors during magnetic head fabrication using magnetic fields |
| 08/21/2002 | EP1019219B1 Measuring device on a machine for machining workpieces with cutting teeth, especially saw blades |
| 08/20/2002 | US6437868 In-situ automated contactless thickness measurement for wafer thinning |
| 08/20/2002 | US6435956 Wafer holder and polishing device |
| 08/20/2002 | US6435945 Chemical mechanical polishing with multiple polishing pads |
| 08/20/2002 | US6435942 Chemical mechanical polishing processes and components |
| 08/15/2002 | WO2002062525A1 System and method for automated fiber polishing |
| 08/15/2002 | WO2002033737A3 Multiprobe detection system for chemical-mechanical planarization tool |
| 08/15/2002 | US20020111122 Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece |
| 08/15/2002 | US20020111121 Method and apparatus for electrochemical-mechanical planarization |
| 08/15/2002 | US20020108417 Device for the fixed-rolling of crankshafts |
| 08/14/2002 | EP1230068A1 Method and apparatus for lapping of workpieces |
| 08/14/2002 | EP1124666B1 Use of zeta potential during chemical mechanical polishing for end point detection |
| 08/13/2002 | US6432728 Method for integration optimization by chemical mechanical planarization end-pointing technique |
| 08/13/2002 | US6431969 Device for Grinding of Card Clothings |
| 08/13/2002 | US6431968 Carrier head with a compressible film |
| 08/13/2002 | US6431964 Planarization apparatus and method |
| 08/13/2002 | US6431963 Tire uniformity machine grinder |
| 08/13/2002 | US6431953 CMP process involving frequency analysis-based monitoring |
| 08/13/2002 | US6431950 Point-of-use fluid regulating system for use in the chemical-mechanical planarization of semiconductor wafers |
| 08/13/2002 | US6430909 Grinding arrangement |
| 08/13/2002 | US6430832 Apparatus for the in-process dimensional checking of cylindrical parts |
| 08/08/2002 | WO2002060643A2 Spherical drive assembly for chemical mechanical planarization |
| 08/08/2002 | US20020106974 Lapping sensor used in fabrication of magnetic head with magnetoresistive effect element and lapping control method using the sensor |
| 08/08/2002 | US20020106971 Method and apparatus for conditioning a polishing pad |
| 08/07/2002 | EP1213094A9 Polishing apparatus having interlock function |
| 08/06/2002 | US6429130 Method and apparatus for end point detection in a chemical mechanical polishing process using two laser beams |
| 08/06/2002 | US6428403 Polishing apparatus |
| 08/06/2002 | US6428397 Wafer edge polishing method and apparatus |
| 08/06/2002 | US6428389 Polishing apparatus |
| 08/06/2002 | US6428388 Finishing element with finishing aids |
| 08/06/2002 | US6428386 Planarizing pads, planarizing machines, and methods for mechanical and/or chemical-mechanical planarization of microelectronic-device substrate assemblies |
| 08/06/2002 | US6428385 Grinding machine for grinding bar member for magnetic head and method of grinding the same |
| 08/01/2002 | WO2002059943A2 Chemical mechanical polishing of copper-oxide damascene structures |
| 08/01/2002 | US20020102924 Selective chemical-mechanical polishing properties of a cross-linked polymer and specific applications therefor |
| 08/01/2002 | US20020102917 Polishing method using dynamic feedback recipe |
| 08/01/2002 | US20020102916 Method of determining current position data of a machining tool and apparatus therefor |