Patents
Patents for B24B 49 - Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation (8,827)
02/2001
02/27/2001US6194231 Method for monitoring polishing pad used in chemical-mechanical planarization process
02/27/2001US6194230 Endpoint detection by chemical reaction and light scattering
02/27/2001US6193584 Apparatus and method of device stripe height control
02/22/2001DE10027086A1 Method for cutting permanent magnets involves providing the cutting blade with a cutting edge consisting of grinding grains and a heat resistant resin, and cutting the magnet with supply of a coolant at controlled temperature
02/21/2001CN1284710A Method and device for production of magneto-resistive element, production control and valuation software and system
02/20/2001US6191864 Method and apparatus for detecting the endpoint in chemical-mechanical polishing of semiconductor wafers
02/20/2001US6191038 Apparatus and method for chemical/mechanical polishing
02/20/2001US6191037 Methods, apparatuses and substrate assembly structures for fabricating microelectronic components using mechanical and chemical-mechanical planarization processes
02/20/2001US6190494 Method and apparatus for electrically endpointing a chemical-mechanical planarization process
02/20/2001US6190234 Endpoint detection with light beams of different wavelengths
02/15/2001WO2001010599A1 Method and apparatus for in-situ measurement of workpiece displacement during chemical mechanical polishing
02/15/2001DE19919311C1 Method and device for non-contact scanning of a spectacle glass opening in a spectacle frame has a carrier at a spectacle glass opening's centre turning on an axis with a light source transmitting towards a facet groove.
02/14/2001EP1076044A1 Sheet glass working machine
02/14/2001EP1075351A1 Apparatus and method for chemical-mechanical polishing (cmp) using a head having direct pneumatic wafer polishing pressure system
02/13/2001US6187681 Method and apparatus for planarization of a substrate
02/13/2001US6186872 Polisher
02/13/2001US6186865 Apparatus and method for performing end point detection on a linear planarization tool
02/13/2001US6186864 Method and apparatus for monitoring polishing pad wear during processing
02/13/2001CA2088512C A mobile floor grinding vehicle
02/07/2001EP1074342A1 Method for peening the internal surface of a hollow part
02/07/2001EP1073877A1 Endpoint detection in chemical mechanical polishing (cmp) by substrate holder elevation detection
02/07/2001EP1073542A1 Chemical mechanical polishing with multiple polishing pads
02/06/2001US6184924 Method and device for the automatic detection of surface defects for continuously cast products with continuous mechanical removal of the material
02/06/2001US6184571 Method and apparatus for endpointing planarization of a microelectronic substrate
02/06/2001US6183656 Method of detecting end point of polishing of wafer and apparatus for detecting end point of polishing
02/06/2001US6183354 Carrier head with a flexible membrane for a chemical mechanical polishing system
02/06/2001US6183344 Method for grinding glass funnel seal edge and apparatus therefor
02/06/2001US6183341 Slurry pump control system
02/01/2001WO2001007208A1 Cmp polishing head with three chambers and method for using the same
02/01/2001WO2000069595A3 Method and apparatus for automatically adjusting the contour of a wafer carrier surface
01/2001
01/31/2001EP1072360A1 Device and method for machining in which cool air cooling is used
01/31/2001EP1072359A2 Semiconductor wafer polishing apparatus
01/31/2001EP1072358A2 Apparatus for machining the edge of glass plates
01/30/2001US6179709 In-situ monitoring of linear substrate polishing operations
01/30/2001US6179691 Method for endpoint detection for copper CMP
01/30/2001US6179690 Substrate polishing apparatus
01/30/2001US6179688 Method and apparatus for detecting the endpoint of a chemical-mechanical polishing operation
01/25/2001WO2000054933A3 Chemical mechanical polishing head having floating wafer retaining ring and wafer carrier with multi-zone polishing pressure control
01/25/2001DE19933946A1 Druckbalken Pressure bar
01/24/2001EP1070567A1 Pressure beam
01/24/2001EP0844920A4 Method and apparatus for shaping an orifice with an abrasive slurry
01/23/2001US6176764 Polishing chucks, semiconductor wafer polishing chucks, abrading methods, polishing methods, simiconductor wafer polishing methods, and methods of forming polishing chucks
01/18/2001DE19930859A1 Verfahren zur Erstellung von medizinischen, insbesondere zahnmedizinischen Paßkörpern A process for the preparation of medical, in particular dental medical fittings
01/17/2001EP1068928A2 Chemical mechanical polishing processes and components
01/17/2001EP1068047A1 Apparatus and method for film thickness measurement integrated into a wafer load/unload unit
01/17/2001EP1068045A1 Grinding device for rounding off edges of an opening in a work piece
01/17/2001CN1280530A Improved grinding machine
01/17/2001CN1280049A Conducting real time control to chemical mechanical polishing process of measuring shaft deformation
01/17/2001CN1060711C Intelligent feed control method and device for grinding machines
01/16/2001US6174222 Process for fabrication of semiconductor device, semiconductor wafer for use in the process and process for the preparation of the wafer
01/16/2001US6174218 Bow compensated lapping
01/11/2001WO2001002133A2 Improvement in and relating to edge grinding
01/10/2001EP1066925A2 Closed loop control of wafer polishing in a chemical mechanical polishing system
01/10/2001EP1066918A2 Eyeglass lens processing apparatus
01/10/2001EP1066801A1 Method and device for the manufacture of medical in particular dental prosthesis
01/10/2001CN1279506A Flat grinding device
01/09/2001US6172756 Rapid and accurate end point detection in a noisy environment
01/09/2001US6171467 Silicon wafers in electrolytic baths, applying voltage and planarizing
01/09/2001US6171174 System and method for controlling a multi-arm polishing tool
01/09/2001US6170149 Magnetoresistive type magnetic head and method of manufacturing the same and apparatus for polishing the same
01/04/2001WO2001000907A1 Polishing of fluoride crystal optical lenses and preforms using cerium oxide for microlithography
01/03/2001EP1065030A2 Determining when to replace a retaining ring used in substrate polishing operations
01/03/2001CN2412694Y Electrostritive ceramic block
01/03/2001CN1278472A Double-edge automatic processing machine for processing edges of glass or stone plate materials
01/02/2001US6168499 Grinding apparatus for semiconductor wafers
12/2000
12/28/2000DE10012420A1 Wafer polishing head for polishing semiconductor wafers relying upon a chemical-mechanical polishing (CMP) method, has wafer carrier being moved relative to retainer ring and to body portion
12/27/2000EP1063056A2 Method and apparatus for measuring a pad profile and closed loop control of a pad conditioning process
12/27/2000EP1063055A2 Apparatus and method for chemical mechanical polishing
12/27/2000EP1063053A2 Bilateral automatic machine for edge-machining plates of glass, stone-like materials and the like
12/27/2000EP1063052A2 Apparatus for measuring dimensional errors of eccentric cylinder by utilizing movement of measuring member held in contact with such eccentric cylinder
12/27/2000EP1062476A2 Head, apparatus and method for the linear dimension checking of mechanical pieces
12/26/2000US6165057 Apparatus for localized planarization of semiconductor wafer surface
12/26/2000US6165052 Method and apparatus for chemical/mechanical planarization (CMP) of a semiconductor substrate having shallow trench isolation
12/26/2000US6165050 Method of manufacturing semiconductor device using precision polishing apparatus with detecting means
12/26/2000US6165049 Golf ball deburring method
12/21/2000WO2000076725A1 Optical view port for chemical mechanical planarization endpoint detection
12/21/2000WO2000076723A1 Table of wafer polisher, method of polishing wafer, and method of manufacturing semiconductor wafer
12/20/2000EP1060835A2 Method and apparatus for controlling flatness of polished semiconductor wafers
12/12/2000US6159284 Process and device for producing a cylindrical single crystal and process for cutting semiconductor wafers
12/12/2000US6159080 Chemical mechanical polishing with a small polishing pad
12/12/2000US6159075 Method and system for in-situ optimization for semiconductor wafers in a chemical mechanical polishing process
12/12/2000US6159074 Caliper assembly for a grinding machine
12/12/2000US6159073 Method and apparatus for measuring substrate layer thickness during chemical mechanical polishing
12/12/2000CA2182953C Method and apparatus for correcting diametrical taper on a workpiece
12/07/2000WO2000073020A1 Abrasive processing apparatus and method employing encoded abrasive product
12/07/2000DE19924904A1 Radius grinding device with feed device, with height registering device for each curved tool segment
12/06/2000CN1275468A Device fr method for cutting magnetic element
11/2000
11/30/2000WO2000071971A1 Optical techniques for measuring layer thicknesses
11/30/2000WO2000071294A2 Method of and apparatus for removing material
11/29/2000EP1055903A1 Optical techniques for measuring layer thicknesses and other surface characteristics of objects such as semiconductor wafers
11/28/2000US6153116 Method of detecting end point and monitoring uniformity in chemical-mechanical polishing operation
11/28/2000US6153043 Elimination of photo-induced electrochemical dissolution in chemical mechanical polishing
11/28/2000US6152808 Microelectronic substrate polishing systems, semiconductor wafer polishing systems, methods of polishing microelectronic substrates, and methods of polishing wafers
11/28/2000US6152804 Grinding method and grinding apparatus
11/28/2000US6152803 Substrate dicing method
11/23/2000WO2000069595A2 Method and apparatus for automatically adjusting the contour of a wafer carrier surface
11/22/2000EP1053828A2 Method and apparatus for dressing polishing cloth
11/22/2000EP1053076A1 Polishing apparatus and polishing table therefor
11/22/2000EP1053075A1 Method fro marking or drilling holes in glass lenses and device for realising the same
11/22/2000EP1053074A1 Apparatus for machining glass lenses
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