Patents
Patents for B24B 49 - Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation (8,827)
04/2000
04/27/2000WO2000023228A1 Wafer grinder and method of detecting grinding amount
04/27/2000WO1999064205A9 Method and apparatus for endpoint detection for chemical mechanical polishing
04/26/2000EP0995548A1 Method and apparatus for grinding lenses
04/25/2000US6054388 Apparatus for lapping semiconductor wafers and method of lapping thereof
04/19/2000EP0993907A1 Work outer periphery polishing device
04/19/2000EP0809557A4 Determining the coefficient of friction of a polishing pad
04/18/2000US6050885 Device for the chemical-mechanical polishing of an object, in particular a semiconductor wafer
04/13/2000WO2000020170A1 Burnishing method and apparatus for providing a layer of compressive residual stress in the surface of a workpiece
04/13/2000DE19846260A1 Device for grinding and polishing optical lenses connects to a cast metal machine frame with feeder channels for heating and cooling agents while operating slides for grinding tools
04/12/2000EP0992322A1 Polishing device
04/11/2000CA2191264C Reciprocating drive mechanism
04/06/2000DE19842954A1 Chemical mechanical polishing (CMP) system for semiconductor wafer
04/05/2000EP0990484A1 Eyeglass lens processing system
04/05/2000CN1249814A Method and apparatus for ultrasonically detecting flaw on surface of circular cylinder, and method of grinding roll utilizing same
04/04/2000US6047224 Machining guide for magnetic recording reproduce heads
04/04/2000US6045439 Forming a transparent window in a polishing pad for a chemical mechanical polishing apparatus
04/04/2000US6045434 Method and apparatus of monitoring polishing pad wear during processing
04/04/2000US6045433 Apparatus for optical inspection of wafers during polishing
03/2000
03/28/2000US6042454 System for detecting the endpoint of the polishing of a semiconductor wafer by a semiconductor wafer polisher
03/23/2000WO1999067052A3 Grinding machine, computer software to operate such a machine, and their uses therefor
03/22/2000EP0987744A1 Method for optimizing the control of metal CMP processes
03/21/2000US6040244 Polishing pad control method and apparatus
03/21/2000US6039636 Precision grinding of a part-spherical recess
03/16/2000WO2000013852A1 Apparatuses and methods for polishing semiconductor wafers
03/16/2000WO2000013848A1 Grinding of cutting tools with wavy cutting edges
03/16/2000DE19842086A1 Finishing method for tungsten carbide surface of cylindrical article e.g. calendar roll
03/15/2000EP0985496A1 Machine tool
03/14/2000US6036585 Grinder and grinding method
03/14/2000US6036578 Numerical control unit incorporating ultrasonically oscillating tool
03/09/2000WO2000012263A1 Method and apparatus for wireless transfer of chemical-mechanical planarization measurements
03/09/2000WO1999064205A8 Method and apparatus for endpoint detection for chemical mechanical polishing
03/08/2000EP0984343A2 Method and apparatus for grinding corporate workpieces
03/08/2000CN1246401A Abrasive belt grinding machine
03/07/2000US6033987 Method for mapping and adjusting pressure distribution of CMP processes
03/07/2000US6033292 Wafer polishing apparatus with retainer ring
03/02/2000DE19901338C1 Procedure for profiling grinding worm for continuous roller grinding process has grinding worm profiled corresponding to requirements of workpiece, working profile measured exactly, then measured values converted into control data
03/02/2000DE19837858A1 Schleifmaschine Grinding machine
02/2000
02/29/2000US6030276 Automated drill bit re-shapening and verification system
02/29/2000US6030275 Variable control of carrier curvature with direct feedback loop
02/23/2000EP0980739A2 Grinding machine
02/22/2000US6028006 Monitoring the ph of the polishing slurry circulating through wafer polishing apparatus, mixing an agent into the polishing slurry to adjust the ph of the polishing slurry as needed
02/22/2000US6027398 Wafer polishing apparatus
02/22/2000US6027397 Dual element lapping guide system
02/15/2000US6024628 Method of determining real time removal rate for polishing
02/10/2000WO2000007230A1 Method and apparatus for chemical mechanical polishing
02/09/2000CN1243771A Method for operation of rolling mill with online roller grinding device
02/02/2000EP0976495A1 Belt grinding machine
02/01/2000US6021361 Robot control system
02/01/2000US6020264 Method and apparatus for in-line oxide thickness determination in chemical-mechanical polishing
02/01/2000US6020262 Methods and apparatus for chemical mechanical planarization (CMP) of a semiconductor wafer
02/01/2000US6019671 Carrier head for a chemical/mechanical polishing apparatus and method of polishing
02/01/2000US6019669 Lens shape measuring apparatus
01/2000
01/27/2000WO2000003839A1 Device for the non-contacting scanning of the spectacle lens opening in a spectacle frame or the circumference of a spectacle lens or a spectacle lens former
01/27/2000DE19833085A1 Making numerically controlled cylindrical adjustments during machining of work pieces on rotary grinding machine, by interpolating machine adjustment axis with work piece machining direction axis
01/27/2000DE19831304A1 Contactless scanner for groove in spectacles frame opening or lens periphery or former, incorporates light source on support, sensor matrix, transducer and focuser
01/25/2000US6017264 Deflection lapping apparatus and method for hydrodynamic bearing slider
01/20/2000WO2000002705A1 Abrasive machine
01/18/2000US6015754 Chemical mechanical polishing apparatus and method
01/18/2000US6015337 Polishing apparatus
01/18/2000US6015333 Method of forming planarized layers in an integrated circuit
01/11/2000US6014218 Device and method for end-point monitoring used in the polishing of components, in particular semiconductor components
01/11/2000US6012966 Precision polishing apparatus with detecting means
01/11/2000US6012965 Manufacturing ophthalmic lenses using lens structure cognition and spatial positioning system
01/06/2000WO2000000873A1 System and method for controlling a multi-arm polishing tool
01/05/2000EP0968790A2 Eyeglass lens grinding apparatus
01/04/2000US6010538 In situ technique for monitoring and controlling a process of chemical-mechanical-polishing via a radiative communication link
12/1999
12/29/1999WO1999067054A1 Wafer edge polishing method and apparatus
12/29/1999WO1999067052A2 Grinding machine, computer software to operate such a machine, and their uses therefor
12/29/1999EP0967048A1 Two-sided flattening apparatus
12/29/1999CA2335806A1 Grinding machine, computer software to operate such a machine, and their uses therefor
12/28/1999US6008891 Automatic flaw removing method for long materials
12/28/1999US6007408 Method and apparatus for endpointing mechanical and chemical-mechanical polishing of substrates
12/28/1999US6007405 Method and apparatus for endpoint detection for chemical mechanical polishing using electrical lapping
12/23/1999WO1999066546A1 Method and apparatus for improving die planarity and global uniformity of semiconductor wafers in a chemical mechanical polishing context
12/23/1999DE19825698A1 Belt grinder with contact wheel and belt guide rollers
12/22/1999EP0965839A1 Method and apparatus for ultrasonically detecting flaw on surface of circular cylinder, and method of grinding roll utilizing the same
12/21/1999US6004189 Finishing of tungsten carbide surfaces
12/21/1999US6004187 Method and apparatus for measuring film thickness and film thickness distribution during polishing
12/21/1999US6003361 System for predicting accurate MR sensor height
12/16/1999WO1999064205A1 Method and apparatus for endpoint detection for chemical mechanical polishing
12/16/1999DE19824828A1 Control of a CNC machine tool
12/14/1999US6002549 Dither microactors for stiction release in magnetic disc drives
12/14/1999US6000998 System for calibrating wafer edge-grinder
12/14/1999US6000997 Temperature regulation in a CMP process
12/09/1999DE19825051A1 Verfahren und Vorrichtung zur Herstellung eines zylinderförmigen Einkristalls und Verfahren zum Abtrennen von Halbleiterscheiben Method and apparatus for producing a cylindrical single crystal and method for separating semiconductor wafers
12/08/1999EP0962284A1 Method and apparatus for manufacturing a cylindrical single crystal and method for slicing wafers
12/08/1999CN1237497A Glass product machining apparatus
12/07/1999US5997384 Method and apparatus for controlling planarizing characteristics in mechanical and chemical-mechanical planarization of microelectronic substrates
12/01/1999EP0960691A2 Glass product machining apparatus
12/01/1999EP0960689A1 Eyeglass lens grinding apparatus
11/1999
11/30/1999US5993303 Hand-held cutting tool for cutting fiber-cement siding
11/30/1999US5993294 Method and spectacle lens grinding machine for shape grinding the circumferential edge of spectacle lenses and optionally for subsequently grinding a facet
11/30/1999US5993291 Specimen block preparation for TEM analysis
11/30/1999US5993289 Methods for the in-process detection of workpieces in a CMP environment
11/25/1999WO1999059777A1 Automated drill bit re-sharpening and verification system
11/25/1999WO1999059775A1 Wafer polishing with improved backing arrangement
11/24/1999EP0859689B1 Apparatus for checking the diameter of crankpins rotating with an orbital motion
11/24/1999EP0771249B1 Grinding method and apparatus
11/17/1999EP0957331A2 Angle gauge for grinding sharp-edged tools
11/17/1999EP0956924A1 Tool carrier for a double-spindle grinding machine
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