| Patents for B24B 49 - Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation (8,827) |
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| 11/02/2004 | US6811473 Process for machining a wafer-like workpiece |
| 11/02/2004 | US6811466 System and method for in-line metal profile measurement |
| 11/02/2004 | US6811465 Workpiece grinding method which achieves a constant stock removal rate |
| 10/28/2004 | WO2004091857A1 Device for cleaning and/or deburring workpieces |
| 10/28/2004 | WO2004091856A2 Grinding apparatus and method |
| 10/28/2004 | WO2004071750A3 Method and device for mechanically buffing worn-down tires |
| 10/28/2004 | US20040214509 Systems and methods for mechanical and/or chemical-mechanical polishing of microfeature workpieces |
| 10/27/2004 | CN1173334C Terminal test in chemical machinery polishing of cloisonnee structure |
| 10/27/2004 | CN1172774C Method for working ultrafine conical rolling bearing and appts. thereof |
| 10/26/2004 | US6809032 Method and apparatus for detecting the endpoint of a chemical-mechanical polishing operation using optical techniques |
| 10/26/2004 | US6808438 Constant spindle power grinding method |
| 10/26/2004 | CA2294479C Machining apparatus and method |
| 10/21/2004 | WO2004090502A2 Whole-substrate spectral imaging system for cmp |
| 10/21/2004 | WO2004069471A3 Method for calibrating a grinding machine |
| 10/21/2004 | US20040209558 Method and device for centerless cylindrical grinding |
| 10/21/2004 | US20040209546 Lapping machine, lapping method, and method of manufacturing magnetic head |
| 10/20/2004 | EP1467840A1 Process control in electro-chemical mechanical polishing |
| 10/20/2004 | EP1467839A2 Method and apparatus for applying downward force on wafer during cmp |
| 10/19/2004 | US6806948 System and method of broad band optical end point detection for film change indication |
| 10/19/2004 | US6806098 Method and device for assessing surface uniformity of semiconductor device treated by CMP |
| 10/19/2004 | US6805613 Multiprobe detection system for chemical-mechanical planarization tool |
| 10/14/2004 | WO2004087375A1 Chip customized polish pads for chemical mechanical planarization (cmp) |
| 10/14/2004 | WO2004087372A1 Finishing method and finishing device |
| 10/14/2004 | WO2004087371A1 Machining method and machining device |
| 10/14/2004 | US20040203328 Measuring apparatus |
| 10/14/2004 | US20040203322 Method and system for in-situ monitoring of mixing ratio of high selectivity slurry |
| 10/14/2004 | US20040203321 Manufacturing method of semiconductor device, automatic operation method and automatic operation system of semiconductor manufacturing apparatus, and automatic operation method of CMP apparatus |
| 10/14/2004 | US20040201093 Evaluating pattern for measuring and erosion of a semiconductor wafer polished by a chemical mechanical polishing |
| 10/14/2004 | DE10315218A1 Fine processing of workpiece surface involves regulating at least one parameter describing surface quality by varying influencing parameter(s) using defined function if maximum deviation exceeded |
| 10/14/2004 | CA2519942A1 Chip customized polish pads for chemical mechanical planarization (cmp) |
| 10/13/2004 | EP1467105A1 Proportional pressure regulator having positive and negative pressure delivery capability |
| 10/13/2004 | EP1324859A4 Polishing pad with built-in optical sensor |
| 10/13/2004 | CN1537324A Polising method and device |
| 10/13/2004 | CN1537038A Apparatus and method for controlling wafer temp. in chemical mechanical polishing |
| 10/13/2004 | CN1170656C Method for grinding non-axial-symmetry and non-ball-surface mirror |
| 10/12/2004 | US6802763 Apparatus for sharpening blades |
| 10/12/2004 | US6802759 Grinder |
| 10/07/2004 | US20040198196 Grinding apparatus and method |
| 10/07/2004 | US20040198193 Method of manufacturing glass substrate for data recording medium |
| 10/07/2004 | US20040198186 Polishing apparatus |
| 10/07/2004 | US20040198185 Linear polishing sheet with window |
| 10/07/2004 | US20040198183 Turbidity monitoring methods, apparatuses, and sensors |
| 10/07/2004 | US20040198182 Apparatus and method for rubbing LCD substrate |
| 10/07/2004 | US20040198181 Polishing apparatus with abrasive tape, polishing method using abrasive tape and manufacturing method for magnetic disk |
| 10/06/2004 | EP1368157B1 Polishing disk with end-point detection port |
| 10/06/2004 | CN1535196A Feed and feedback control of chemical mechanical polishing pad conditioning |
| 10/05/2004 | US6801326 Method and apparatus for monitoring a chemical mechanical planarization process applied to metal-based patterned objects |
| 10/05/2004 | US6801322 Method and apparatus for IN SITU measuring a required feature of a layer during a polishing process |
| 09/30/2004 | WO2002087825A8 Integrated endpoint detection system with optical and eddy current monitoring |
| 09/30/2004 | US20040192174 Method for controlling PH during planarization and cleaning of microelectronic substrates |
| 09/30/2004 | US20040192173 Carrier head with flexible membrane to provide controllable pressure and loading area |
| 09/30/2004 | US20040192171 Method of producing a glass substrate for a mask blank and method of producing a mask blank |
| 09/30/2004 | US20040192170 Eyeglass lens processing apparatus |
| 09/30/2004 | US20040192169 Chemical mechanical polishing endpoint detection system and method |
| 09/30/2004 | US20040192168 Arrangement and method for conditioning a polishing pad |
| 09/30/2004 | US20040192063 Method of producing a glass substrate for a mask blank and method of producing a mask blank |
| 09/30/2004 | US20040188273 Measurement electrical resistance of electroconductive coatings on substrate; detection of end-points |
| 09/30/2004 | DE102004014335A1 Vorrichtung zur Bearbeitung von Werkstücken mit gekrümmter Oberfläche Apparatus for machining of workpieces with a curved surface |
| 09/29/2004 | CN2644097Y Grinding head altitude controlling and grinding material detecting device of rock polisher |
| 09/29/2004 | CN2644081Y Gripper and positioner of digital controlled internal grinder |
| 09/29/2004 | CN1533595A Polishing method and grinding fluid |
| 09/28/2004 | US6799136 Method of estimation of wafer polish rates |
| 09/28/2004 | US6798529 In-situ method and apparatus for end point detection in chemical mechanical polishing |
| 09/28/2004 | US6796880 Linear polishing sheet with window |
| 09/28/2004 | US6796878 NC machine tool with tiltable spindle unit |
| 09/23/2004 | US20040185752 Fixture for attaching indicator to grinding machine |
| 09/23/2004 | US20040182721 Process control in electro-chemical mechanical polishing |
| 09/23/2004 | DE10306741B3 Verfahren und Vorrichtung zum maschinellen Abrauhen von abgenutzten Reifen Method and apparatus for the mechanical roughening of worn tires |
| 09/23/2004 | DE10304430B3 Verfahren zum Kalibrieren einer Schleifmaschine A method of calibrating a grinding machine |
| 09/22/2004 | EP1459358A1 Methods and apparatus for conditioning and temperature control of a processing surface |
| 09/22/2004 | EP1458522A1 Apparatus and methods for controlling wafer temperature in chemical mechanical polishing |
| 09/22/2004 | CN1530205A Reflective resistant layer for polsihig pad window |
| 09/21/2004 | US6794206 Method of polishing a film |
| 09/21/2004 | US6793557 Removable lapping guide for magnetic recording head and method of use |
| 09/21/2004 | CA2300611C Sharpening apparatus |
| 09/16/2004 | WO2004078411A2 Method and apparatus for local polishing control |
| 09/16/2004 | US20040179310 Embedded lapping guide |
| 09/15/2004 | CN2640701Y Siemens digital control system applied in roller grinder work piece measuring device |
| 09/14/2004 | US6790763 Substrate processing method |
| 09/14/2004 | US6790125 Backside integrated circuit die surface finishing technique and tool |
| 09/14/2004 | US6790123 Method for processing a work piece in a multi-zonal processing apparatus |
| 09/09/2004 | US20040177297 Apparatus with resolution enhancement feature for improving accuracy of conversion of required chemical mechanical polishing pressure to force to be applied by polishing head to wafer |
| 09/09/2004 | US20040176018 Systems and methods for monitoring characteristics of a polishing pad used in polishing micro-device workpieces |
| 09/09/2004 | US20040176015 Method of determining the endpoint of a planarization process |
| 09/09/2004 | US20040176014 Chemical mechanical polishing apparatus with non-conductive elements |
| 09/09/2004 | US20040176013 Multi-chambered, compliant apparatus for restraining workpiece and applying variable pressure thereto during lapping to improve flatness characteristics of workpiece |
| 09/09/2004 | US20040173461 Method and apparatus for local polishing control |
| 09/08/2004 | CN2638925Y Infrared outline detector of stone polishing machine |
| 09/07/2004 | US6786810 Curing abrasive coating having a backing to make transparent to visible light |
| 09/07/2004 | US6786800 Grinding stone with motor coupled capable to cause rotation; lock and engageable receiver |
| 09/07/2004 | US6786799 Method and apparatus for wireless transfer of chemical-mechanical planarization measurements |
| 09/02/2004 | US20040171336 End face polishing apparatus |
| 09/02/2004 | US20040171332 End face polishing apparatus |
| 09/02/2004 | US20040171331 Chemical mechanical polishing head assembly having floating wafer carrier and retaining ring |
| 09/02/2004 | US20040171329 Fabrication of devices with fibers engaged to grooves on substrates |
| 09/02/2004 | US20040171269 Substrate processing method |
| 09/01/2004 | CN1525899A Centreless grinding process of cylindrical surfaces and apparatus for making the same |
| 09/01/2004 | CN1525216A Liquid crystal panel surface grinding unit and grinding method |
| 08/31/2004 | US6785585 Method for marking or drilling holes in glass lenses and device for realizing the same |
| 08/31/2004 | US6785010 Substrate film thickness measurement method, substrate film thickness measurement apparatus and substrate processing apparatus |