Patents
Patents for B24B 49 - Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation (8,827)
06/2006
06/13/2006US7059005 Polish cleaning apparatus and method in manufacture of HGA
06/08/2006WO2006059667A1 On-line grinding method for work roll
06/08/2006WO2006022452A3 Polishing apparatus and polishing method
06/08/2006US20060121832 Pressure feed grinding of AMLCD substrate edges
06/08/2006US20060121829 Bit sharpening apparatus and method of using
06/08/2006US20060121828 Method and apparatus for pivot point determination and machine tool adjustment
06/08/2006US20060121632 Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies
06/08/2006US20060119191 Positioning device
06/08/2006DE102004058133A1 Method for monitoring chemical-mechanical polishing process
06/07/2006EP1663576A1 Polished state monitoring apparatus and polishing apparatus using the same
06/07/2006EP1663573A1 Grinding machine with a concentricity correction system
06/07/2006CN1784777A Method and apparatus for monitoring a semiconductor wafer during a spin drying operation
06/07/2006CN1781666A Method for monitoring a cmp polishing method and arrangement for a cmp polishing method
06/06/2006US7057744 Method and apparatus for measuring thickness of thin film and device manufacturing method using same
06/06/2006US7056190 Pad conditioner test apparatus and method
06/06/2006US7056189 Grinding method of a workpiece and grinding apparatus
06/06/2006US7056188 Rock saw
06/01/2006US20060116051 Polishing pad with built-in optical sensor
06/01/2006US20060113036 Computer integrated manufacturing control system for oxide chemical mechanical polishing
05/2006
05/30/2006US7052920 Layer-thickness detection methods and apparatus for wafers and the like, and polishing apparatus comprising same
05/30/2006US7052370 High-precision machining system
05/30/2006US7052369 Methods and systems for detecting a presence of blobs on a specimen during a polishing process
05/30/2006US7052368 Polishing pad for chemical mechanical polishing apparatus
05/30/2006US7052366 Endpoint detection system for wafer polishing
05/30/2006US7052365 Semiconductor wafer chemical-mechanical planarization process monitoring and end-point detection method and apparatus
05/30/2006US7052364 Real time polishing process monitoring
05/26/2006WO2006054772A1 Manufacturing facility and super finishing apparatus for ball bearing
05/25/2006US20060111019 Toolholder
05/24/2006CN1775476A Method for monitoring honing bar state during internal hole vertical honing process
05/23/2006US7048614 Apparatus and method for fabricating liquid crystal display panel
05/23/2006US7048609 Pressure control system and polishing apparatus
05/23/2006US7048608 Semiconductor wafer material removal apparatus and method for operating the same
05/23/2006US7047658 Apparatus and method to measure the dimensional and form deviation of crankpins at the place of grinding
05/18/2006WO2006053189A1 Razor blade sharpener
05/18/2006WO2006051243A1 Method and device for measuring semiconductor plates
05/18/2006US20060105685 System and method for CMP having multi-pressure zone loading for improved edge and annular zone material removal control
05/18/2006US20060105681 Grinding apparatus for grinding an out-of-round trunnion or tire for a rotary kiln
05/18/2006US20060105679 Substrate polishing apparatus
05/18/2006US20060105676 Robust Signal Processing Algorithm For End-Pointing Chemical-Mechanical Polishing Processes
05/18/2006US20060105675 Grinding apparatus for buttons on rock drill bit
05/18/2006US20060103990 Magnetic head manufacturing method, magnetic head, angle setting device and lapping device
05/18/2006CA2587365A1 Razor blade sharpener
05/17/2006EP1657024A1 Method and device for grinding work in the form of non-circular rotary body, and cam shaft
05/17/2006EP1656237A1 Control of a grinding device with grinding rollers on winding shafts
05/17/2006CN1256617C Apparatus and method for rubbing LCD substrate
05/16/2006US7047099 Integrating tool, module, and fab level control
05/16/2006US7046001 Frequency measuring device, polishing device using the same and eddy current sensor
05/16/2006US7044838 Chemical mechanical polishing head assembly having floating wafer carrier and retaining ring
05/16/2006US7044833 Apparatus for transporting and polishing wafers
05/16/2006US7044832 Load cup for chemical mechanical polishing
05/16/2006US7044831 Multi-port sandblasting manifold and method
05/16/2006US7044830 Numeric controller
05/11/2006US20060099885 Wear indication apparatus and method
05/11/2006US20060096702 Apparatus for monitoring and controlling force applied on workpiece surface during electrochemical mechanical processing
05/11/2006DE10242422B4 Läppscheibe, die eine Schicht aufweist, die Krümmungen optischer Flächen auf Linsen anpaßbar ist und Verfahren für die Feinbearbeitung optischer Flächen Lapping disc having a layer, the curvatures of optical surfaces can be adapted to lenses and methods for fine machining optical surfaces
05/11/2006DE102004053848A1 Handwerkzeugmaschine Hand tool
05/10/2006EP1655103A1 Method of making an abrasive article
05/10/2006CN1771355A Method and apparatus for local polishing control
05/09/2006US7042581 Optical techniques for measuring layer thicknesses and other surface characteristics of objects such as semiconductor wafers
05/09/2006US7040971 Carrier head with a flexible membrane
05/09/2006US7040963 Table of wafer polishing apparatus, method for polishing semiconductor wafer, and method for manufacturing semiconductor wafer
05/09/2006US7040958 Torque-based end point detection methods for chemical mechanical polishing tool which uses ceria-based CMP slurry to polish to protective pad layer
05/09/2006US7040957 Platen and manifold for polishing workpieces
05/09/2006US7040956 Control of chemical mechanical polishing pad conditioner directional velocity to improve pad life
05/09/2006US7040954 Methods of and apparatus for controlling polishing surface characteristics for chemical mechanical polishing
05/04/2006US20060094337 Pad conditioner test apparatus and method
05/04/2006DE112004001051T5 Substratpoliervorrichtung und Substratpolierverfahren Substrate polishing apparatus and substrate polishing method
05/03/2006CN1767000A Thin film magnetic head structure, manufacturing method thereof, and manufacturing method of thin film magnetic head
05/03/2006CN1254679C Grinding method for drum using supersonic flaw detection method and device
05/02/2006US7037403 In-situ real-time monitoring technique and apparatus for detection of thin films during chemical/mechanical polishing planarization
05/02/2006US7037172 Advanced wafer planarizing
04/2006
04/27/2006WO2006044127A2 System and method for planarizing a substrate
04/27/2006US20060089089 Rotary table apparatus
04/27/2006US20060089086 Working device and method for working a stack of plate-shaped elements
04/27/2006DE102005047114A1 Schleifprozess und Vorrichtung mit Anordnung zum Schleifen mit konstanter Schleiflast Grinding process and apparatus arrangement for grinding with a constant grinding load
04/26/2006EP1490830B1 Abrasive articles and methods for the manufacture and use of same
04/26/2006CN1762658A Clamp for grinding magnetic head, grinding apparatus and grinding method
04/26/2006CN1253853C Method and device for production of magneto-resistive element, production control and valuation software and system
04/26/2006CN1253713C Ultrasonic flaw detection method on cylinder surface
04/25/2006US7033254 Grinding machine for double-sided grinding of saw tooth edges
04/25/2006US7033251 Carrier assemblies, polishing machines including carrier assemblies, and methods for polishing micro-device workpieces
04/25/2006US7033249 Dry ice blasting cleaning apparatus
04/25/2006US7033248 Systems and methods for monitoring characteristics of a polishing pad used in polishing micro-device workpieces
04/25/2006US7033246 Systems and methods for monitoring characteristics of a polishing pad used in polishing micro-device workpieces
04/25/2006US7033245 Lapping apparatus and lapping method
04/25/2006CA2230440C Positioning control for combined milling machine and internally positioned grinding wheel
04/20/2006US20060082041 Aligning and squaring tool apparatus and method of use
04/19/2006EP1404486B1 Apparatus and method for checking the machining process of a machine tool
04/19/2006EP1345734B1 Crosslinked polyethylene polishing pad for chemical-mechnical polishing and polishing apparatus
04/18/2006US7030018 Methods and systems for monitoring a parameter of a measurement device during polishing, damage to a specimen during polishing, or a characteristic of a polishing pad or tool
04/18/2006US7029596 Computer integrated manufacturing control system for oxide chemical mechanical polishing
04/18/2006US7029382 Apparatus for chemical-mechanical polishing (CMP) head having direct pneumatic wafer polishing pressure
04/18/2006US7029371 Jig for guiding a grinder
04/18/2006US7029370 Grinding machines for depression patterns along roads
04/18/2006US7029369 End-point detection apparatus
04/18/2006US7029368 Apparatus for controlling wafer temperature in chemical mechanical polishing
04/18/2006US7029367 Automated polishing process for mechanical parts in titanium or titanium alloy
04/18/2006US7029365 Pad assembly for electrochemical mechanical processing
04/13/2006US20060079157 Apparatus and method for manufacturing or working optical elements and/or optical forming elements, and such element
04/13/2006DE10134808B4 Schleifvorrichtung für eine Reifenabrichtmaschine A grinding apparatus for a Reifenabrichtmaschine
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