| Patents for B24B 49 - Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation (8,827) |
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| 02/16/2006 | US20060034021 Methods of manufacturing magnetic heads with reference and monitoring devices |
| 02/15/2006 | EP1626392A1 Method of manufacturing magnetic heads with reference and monitoring lapping guides |
| 02/15/2006 | EP1625613A1 Substrate holding apparatus and polishing apparatus |
| 02/15/2006 | CN1735480A Apparatus and methods for detecting transitions of wafer surface properties in chemical mechanical polishing for process status and control |
| 02/15/2006 | CN1735478A Method and apparatus of eddy current monitoring for chemical mechanical polishing |
| 02/15/2006 | CN1242460C Method for determinating endpoint and semiconductor wafer |
| 02/14/2006 | US6998013 CMP apparatus polishing head with concentric pressure zones |
| 02/14/2006 | US6997779 Device for the simultaneous double-side grinding of a workpiece in wafer form |
| 02/14/2006 | US6997778 Polishing apparatus |
| 02/14/2006 | US6997777 Ultrasonic welding method for the manufacture of a polishing pad comprising an optically transmissive region |
| 02/14/2006 | US6997776 Process for producing a semiconductor wafer |
| 02/09/2006 | US20060030244 Substrate polishing apparatus |
| 02/09/2006 | US20060030154 Polishing inhibiting layer forming additive, slurry and cmp method |
| 02/09/2006 | US20060027045 Automated drill bit re-sharpening and verification system |
| 02/09/2006 | DE102004031584A1 Knife grinding tool has grinding disc on swivel mount presented to the knife edge at a chamfer angle |
| 02/09/2006 | DE102004031583A1 Sharpening machine for sharpening blades comprises a blade holder having holding elements for holding flat a blade to be sharpened along positions spaced from each other |
| 02/08/2006 | EP1622743A2 Whole-substrate spectral imaging system for cmp |
| 02/08/2006 | CN1732068A Substrate holding mechanism, substrate polishing apparatus and substrate polishing method |
| 02/08/2006 | CN1732066A Device for detecting eccentric part diameter of machine element in course of gold processing on grinding machine |
| 02/07/2006 | US6995850 Monitoring apparatus for polishing pad and method thereof |
| 02/07/2006 | US6995091 Process for chemically mechanically polishing wafers |
| 02/07/2006 | US6994608 Methods of manufacturing sliders |
| 02/07/2006 | US6994607 Polishing pad with window |
| 02/02/2006 | US20060025052 Method and apparatus of eddy current monitoring for chemical mechanical polishing |
| 02/02/2006 | US20060025051 Wire sawing apparatus |
| 02/02/2006 | US20060025050 Gear grinding machine |
| 02/02/2006 | US20060025048 Abrasive article detection system and method |
| 02/02/2006 | US20060025047 Grading system and method for abrasive article |
| 02/02/2006 | US20060025046 Abrasive article splicing system and methods |
| 02/02/2006 | US20060025045 System and method for detecting abrasive article orientation |
| 02/01/2006 | CN2754810Y Planar gate automatic polisher with digital display and stone material |
| 02/01/2006 | CN1727118A Thicknesser and grinding appts. |
| 02/01/2006 | CN1239962C Photosensitive object regenerative method and device, photosensitive object, image forming device |
| 01/31/2006 | US6991521 Edge finishing process for glass or ceramic disks used in disk drive data storage devices |
| 01/31/2006 | US6991520 Abrasive machine and method of abrading work piece |
| 01/31/2006 | US6991518 Automated system for precision grinding of feedstock |
| 01/31/2006 | US6991517 Linear polishing sheet with window |
| 01/31/2006 | US6991515 Ultra fine particle film forming method and apparatus |
| 01/31/2006 | US6991514 Optical closed-loop control system for a CMP apparatus and method of manufacture thereof |
| 01/31/2006 | US6991513 Magnetic head grinding device and method |
| 01/26/2006 | WO2006009304A1 Polishing apparatus and substrate processing method |
| 01/26/2006 | WO2006009222A1 Plate glass crack detection method and detector, and plate glass polishing method and device |
| 01/26/2006 | US20060019578 Machining device |
| 01/26/2006 | US20060016856 Apparatus and method for sealing a container |
| 01/26/2006 | DE19845284B4 Konizitätskorrektur-Vorrichtung für eine Schleifmaschine Konizitätskorrektur device for a grinding machine |
| 01/26/2006 | DE19648972B4 Linear-Schwingantrieb Linear vibratory drive |
| 01/25/2006 | EP1618991A1 In-situ endpoint detection and process monitoring method and apparatus for chemical mechanical polishing |
| 01/25/2006 | EP1294534B2 In-situ endpoint detection and process monitoring method and apparatus for chemical mechanical polishing |
| 01/25/2006 | CN1726116A Polishing state monitoring apparatus and polishing apparatus and method |
| 01/25/2006 | CN1724217A On line testing method for precisely curve grinding based on pattern recognition |
| 01/25/2006 | CN1238161C Abrasive article having window system for polishing wafers, and using methods |
| 01/25/2006 | CN1238159C Liquid crystal display for defining indicator of grinding amount and detection method |
| 01/24/2006 | US6988933 Truing method and apparatus |
| 01/24/2006 | US6988434 Multi-axis tool positioner and related methods |
| 01/19/2006 | WO2005082588A3 Saw for a semiconductor device |
| 01/19/2006 | US20060014476 Method of fabricating a window in a polishing pad |
| 01/19/2006 | US20060014475 Grindstone tool |
| 01/19/2006 | US20060014474 Gear grinding machine |
| 01/19/2006 | US20060014473 Many-headed grinding machine and grinding method using many-headed grinding machine |
| 01/19/2006 | US20060012740 Apparatus and method for rubbing lcd substrate |
| 01/19/2006 | US20060011585 Method for controlling ph during planarization and cleaning of microelectronic substrates |
| 01/19/2006 | DE102004009352B4 Vorrichtung zum Herstellen einer Fertigkontur eines Werkstücks durch Schleifen und Verfahren dazu An apparatus for manufacturing a finished contour of a workpiece by grinding and method thereof |
| 01/18/2006 | EP1616662A1 Both side grinding method and both side grinder of thin disc-like work |
| 01/18/2006 | EP1615747A1 Device for cleaning and/or deburring workpieces |
| 01/18/2006 | EP1294534B1 In-situ endpoint detection and process monitoring method and apparatus for chemical mechanical polishing |
| 01/18/2006 | EP1261530A4 Package with multiple chambers and valves |
| 01/18/2006 | CN1237582C Abrasive cloth, polishing device and method for manufacturing semiconductor device |
| 01/18/2006 | CN1236895C Chemical machinery flattening system, chemical machinery polishing system and adjustable plate |
| 01/17/2006 | US6986701 Polishing pad with built-in optical sensor |
| 01/17/2006 | US6986700 Apparatuses for in-situ optical endpointing on web-format planarizing machines in mechanical or chemical-mechanical planarization of microelectronic-device substrate assemblies |
| 01/17/2006 | US6986699 Method and apparatus for determining polishing endpoint with multiple light sources |
| 01/17/2006 | US6986698 Wafer refining |
| 01/12/2006 | US20060009132 Chemical mechanical polishing apparatus with non-conductive elements |
| 01/12/2006 | US20060009131 Data processing for monitoring chemical mechanical polishing |
| 01/12/2006 | US20060009129 Feedforward and feedback control for conditioning of chemical mechanical polishing pad |
| 01/12/2006 | US20060009128 Eddy current sensing of metal removal for chemical mechanical polishing |
| 01/12/2006 | US20060009127 Method for estimating polishing profile or polishing amount, polishing method and polishing apparatus |
| 01/12/2006 | US20060009126 Method and apparatus for producing optical glasses |
| 01/12/2006 | US20060009125 Both side grinding method and both side grinder of thin disc-like work |
| 01/12/2006 | DE10134803B4 Doppelschleifscheibe Double grinding wheel |
| 01/11/2006 | EP1614505A1 Polishing device and method |
| 01/11/2006 | EP1613794A2 Algorithm for real-time process control of electro-polishing |
| 01/11/2006 | CN1718370A 磨削装置 Grinding equipment |
| 01/10/2006 | US6985791 Grinding wheel system |
| 01/10/2006 | US6984164 Polishing apparatus |
| 01/10/2006 | US6984163 Polishing pad with high optical transmission window |
| 01/10/2006 | US6984162 Apparatus methods for controlling wafer temperature in chemical mechanical polishing |
| 01/05/2006 | US20060003673 Apparatus and method for conditioning and monitoring media used for chemical-mechanical planarization |
| 01/05/2006 | US20060003671 CMP apparatus and method |
| 01/05/2006 | DE102004058797A1 Method for processing functional elements with curved surfaces comprises adjusting the geometry of a tool contour depending on the pivoting angle and rotary angle of the tool during rotation of a polishing tool about its own axis |
| 01/05/2006 | DE102004027846A1 Schleifwerkzeug mit integrierten mikromagnetischen Sensoren Grinding tool with integrated micro-magnetic sensors |
| 01/04/2006 | EP1610929A1 Chip customized polish pads for chemical mechanical planarization (cmp) |
| 01/03/2006 | US6981909 Method for conditioning superabrasive tools |
| 01/03/2006 | US6981908 Ferrule polishing control machine, ferrule polishing method, and ferrule polishing computer program |
| 12/29/2005 | WO2005123337A1 Real time polishing process monitoring |
| 12/29/2005 | WO2005123335A1 Polishing apparatus and polishing method |
| 12/29/2005 | WO2005018878A3 Cnc abrasive fluid-jet m illing |
| 12/29/2005 | US20050287929 Integrated endpoint detection system with optical and eddy current monitoring |
| 12/29/2005 | US20050287928 Method and apparatus for post-CMP cleaning of a semiconductor work piece |
| 12/29/2005 | US20050287927 Method to monitor pad wear in CMP processing |