| Patents for H05H 1 - Generating plasma; Handling plasma (22,647) |
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| 08/17/1999 | US5938883 Plasma processing apparatus |
| 08/17/1999 | US5938854 Exposing surface with contaminants to steady state radio frequency uniform glow dischage plasma for set period of time |
| 08/12/1999 | WO1999040758A2 Remote exposure of workpieces using a one atmosphere uniform glow discharge plasma |
| 08/12/1999 | WO1999040609A1 Plasma assisted processing chamber with separate control of species density |
| 08/12/1999 | WO1999040608A1 High selectivity etch using an external plasma discharge |
| 08/12/1999 | WO1999040607A1 Methods for reducing mask erosion during plasma etching |
| 08/12/1999 | WO1999039860A1 Permanent magnet ecr plasma source with magnetic field optimization |
| 08/12/1999 | DE19839612A1 Plasma generator, esp. for processes such as etching, cleaning and thin film production on semiconducting surfaces |
| 08/11/1999 | EP0935406A2 Ratiometric autotuning algorithm for RF plasma generator |
| 08/11/1999 | EP0935405A1 Electrode for plasma torch |
| 08/11/1999 | EP0934684A1 Apparatus and method for improved assembly concentricity in a plasma arc torch |
| 08/10/1999 | US5936481 System for impedance matching and power control for apparatus for high frequency plasma treatment |
| 08/10/1999 | US5936413 Method and device for measuring an ion flow in a plasma |
| 08/10/1999 | US5936352 Plasma processing apparatus for producing plasma at low electron temperatures |
| 08/10/1999 | US5935461 Pulsed high energy synthesis of fine metal powders |
| 08/10/1999 | US5935460 Method of performing high-efficiency machining by high-density radical reaction using a rotating electrode, device for performing the method and the rotating electrode used therefor |
| 08/10/1999 | US5935455 Method and an electrode system for excitation of a plasma |
| 08/10/1999 | US5935390 Generating a plsama by using radio frequency, feeding hydrogen chloride with inert plasma-forming gas into plasma and heating to high temperature to convert hydrogen chloride into hydrogen and chlorine, cooling and recovring |
| 08/10/1999 | US5935374 Electronic device fabrication apparatus |
| 08/10/1999 | US5935373 Plasma processing apparatus |
| 08/10/1999 | US5935335 Film-forming apparatus and film-forming method |
| 08/10/1999 | US5935293 Fast quench reactor method |
| 08/10/1999 | US5934068 Method and apparatus for pressure pulse arcjet starting |
| 08/05/1999 | WO1999039183A1 Increasing the sensitivity of an in-situ particle monitor |
| 08/05/1999 | WO1999038639A1 Low voltage electrical based parts-in-place (pip) system for contact start torch |
| 08/05/1999 | WO1999019898A3 Method and apparatus to produce large inductive plasma for plasma processing |
| 08/05/1999 | CA2261313A1 Electrode for a plasma torch |
| 08/04/1999 | EP0933982A2 Plasma generator device |
| 08/04/1999 | EP0933981A1 Nozzle/nozzle holder arrangement for a plasma torch |
| 08/04/1999 | EP0933009A1 Integral spring consumables for plasma arc torch using contact starting system |
| 08/04/1999 | EP0829185B1 Slow-wave high-power discharge cavity operating in the radiofrequency range |
| 08/03/1999 | US5932116 Power supply for multi-electrode discharge |
| 08/03/1999 | CA2134891C High temperature plasma gun assembly |
| 08/03/1999 | CA2073986C Gas cooled cathode for an arc torch |
| 07/29/1999 | WO1999038365A1 Torch for cutting processes |
| 07/28/1999 | EP0932183A1 Linear microwave plasma source with permanent magnets |
| 07/28/1999 | EP0931853A2 Method of depositing barrier coatings by plasma assisted chemical vapour deposition |
| 07/28/1999 | EP0931329A1 Rf plasma etch reactor with internal inductive coil antenna and electrically conductive chamber walls |
| 07/28/1999 | EP0931176A1 Improved plasma jet system |
| 07/28/1999 | EP0792572B1 An apparatus for generation of a linear arc discharge for plasma processing |
| 07/28/1999 | EP0640022B1 High temperature plasma gun assembly |
| 07/27/1999 | US5930313 Method and apparatus for transporting an intense ion beam |
| 07/27/1999 | US5929732 Apparatus and method for amplifying a magnetic beam |
| 07/27/1999 | US5929717 In a vacuum plasma chamber processing a workpiece |
| 07/27/1999 | US5929570 Micro-wave plasma device with a metal cooling wire wrapped around the insulating tube |
| 07/27/1999 | US5928461 RF plasma source for cleaning spacecraft surfaces |
| 07/22/1999 | DE19801366A1 Plasma production arrangement |
| 07/21/1999 | EP0930810A1 Plasma torch with adjustable distributor and gas analysis system using such a torch |
| 07/21/1999 | EP0930376A1 Method of processing substrate |
| 07/20/1999 | US5925267 Plasma torch having a bypass unit |
| 07/20/1999 | US5925266 Mounting apparatus for induction coupled plasma torch |
| 07/20/1999 | US5925265 Exerting the actions of an electric field and a magnetic field on a processing gas; high etch selectivity between a mask and an underlying layer |
| 07/20/1999 | CA2186985C Plasma arc torch and method of operating the same |
| 07/20/1999 | CA2061022C Plasma arc torch |
| 07/15/1999 | WO1999035893A2 Paraelectric gas flow accelerator |
| 07/15/1999 | WO1999035666A1 Method of and apparatus for minimizing plasma instability in an rf processor |
| 07/15/1999 | WO1999035302A1 Coaxial resonant multiport microwave applicator for an ecr plasma source |
| 07/14/1999 | EP0929093A2 Plasma processor for large workpieces |
| 07/14/1999 | EP0928233A1 Fuel plasma vortex combustion system |
| 07/13/1999 | US5922134 Simultaneous discharge device |
| 07/08/1999 | WO1999034399A1 Plasma device including a powered non-magnetic metal member between a plasma ac excitation source and the plasma |
| 07/08/1999 | WO1999034398A1 Vacuum treatment system |
| 07/08/1999 | WO1999034396A2 Installation with an electron-cyclotron resonance ion source for doping stents with radioactive and non-radioactive atoms |
| 07/08/1999 | WO1999033673A1 Plasma discharge device and method with dynamic tuning |
| 07/08/1999 | WO1999020087A3 System for plasma ignition by fast voltage rise |
| 07/08/1999 | DE19757852A1 Implantation von radioaktiven ·3··2·P-Atomen Implantation of radioactive · 3 · · 2 · P atoms |
| 07/08/1999 | CA2314953A1 Implantation of radioactive p32 atoms |
| 07/07/1999 | EP0927594A1 Method for coating materials |
| 07/07/1999 | EP0815280B1 Thermal deposition method for depositing thin ceramic layers and an associated device |
| 07/07/1999 | CN1221967A Plasma treatment appts. and plasma treatment method |
| 07/07/1999 | CN1221807A In-situ monitoring plasma etching apparatus, its in-situ monitoring method, and in-situ cleaning method for removing residues in plasma ething chamber |
| 07/06/1999 | US5919382 Automatic frequency tuning of an RF power source of an inductively coupled plasma reactor |
| 07/06/1999 | CA2084281C Plasma torch for central injection depositing |
| 07/01/1999 | WO1999033087A1 Focus rings and methods therefor |
| 07/01/1999 | WO1999032214A1 Plasma assisted gas processing with titania |
| 07/01/1999 | WO1999032213A1 Plasma assisted gas processing with zirconia |
| 07/01/1999 | WO1999019526A3 Apparatus and method for adjusting density distribution of a plasma |
| 06/30/1999 | EP0925600A1 Thin film electrostatic shield for inductive plasma processing |
| 06/29/1999 | US5917286 Pulsed direct current power supply configurations for generating plasmas |
| 06/29/1999 | US5916411 Carbon electrode, cooling device in contact with electrode, temperature sensor, heat insulator covering, temperature controller |
| 06/29/1999 | US5916245 High capacity gas storage and dispensing system |
| 06/24/1999 | WO1999031290A1 Magnetron sputtering source |
| 06/24/1999 | WO1999019527A3 Apparatus and method for utilizing a plasma density gradient to produce a flow of particles |
| 06/24/1999 | DE19757568A1 Easily oxidized material is hard faced by plasma transferred arc powder weld deposition |
| 06/24/1999 | DE19756774A1 Microwave plasma source |
| 06/23/1999 | EP0924968A1 Ternary gas compound and its application to refractory material plasma spraying |
| 06/23/1999 | EP0923789A1 Plasma generation and plasma processing of materials |
| 06/23/1999 | EP0710429B1 Method for matching the generator in dipolar low-pressure glow processes |
| 06/22/1999 | US5914568 For processing a target substrate |
| 06/22/1999 | US5914492 Application accelerator system having bunch control |
| 06/17/1999 | WO1999030347A1 Method and device for improving surfaces |
| 06/17/1999 | WO1999030006A2 Method and apparatus for characterizing a combustion flame |
| 06/17/1999 | WO1999029923A1 Plasma reactor with a deposition shield |
| 06/17/1999 | DE19753696A1 Vorrichtung und Verfahren zur Erzeugung von Extrem-Ultraviolettstrahlung und weicher Röntgenstrahlung aus einer Gasentladung Apparatus and method for generating extreme ultraviolet radiation and soft x-ray radiation from a gas discharge |
| 06/17/1999 | CA2312777A1 Plasma reactor with a deposition shield |
| 06/16/1999 | EP0923276A1 Electrode body/electrode holder assembly for plasma torch |
| 06/16/1999 | EP0922122A1 Plasma cvd system with an array of microwave plasma electrodes and plasma cvd process |
| 06/16/1999 | EP0921849A1 Process and device for plasma-chemical decomposition and/or destruction of pollutants |
| 06/15/1999 | US5912939 Soft x-ray microfluoroscope |
| 06/15/1999 | US5912471 Apparatus and method for monitoring the coating process of a thermal coating apparatus |