Patents for H05H 1 - Generating plasma; Handling plasma (22,647)
04/1999
04/08/1999WO1999017334A1 Method and apparatus for treating the inside surface of plastic bottles in a plasma enhanced process
04/08/1999WO1999017333A1 Device and method for treating the inside surface of a plastic container with a narrow opening in a plasma enhanced process
04/08/1999WO1999016928A1 Large area microwave plasma apparatus with adaptable applicator
04/08/1999WO1999016925A1 Improved methods and apparatus for physical vapor deposition
04/08/1999WO1999016924A1 Ion plating apparatus
04/08/1999WO1999016922A1 Method and device for introducing powdery solids into a plasma
04/08/1999CA2304613A1 Method and apparatus for treating the inside surface of plastic bottles in a plasma enhanced process
04/08/1999CA2304224A1 Large area microwave plasma apparatus with adaptable applicator
04/06/1999US5892329 Plasma accelerator with closed electron drift and conductive inserts
04/06/1999US5892328 High-power, plasma-based, reactive species generator
04/06/1999US5892198 Method of and apparatus for electronically controlling r.f. energy supplied to a vacuum plasma processor and memory for same
04/06/1999US5891350 Adjusting DC bias voltage in plasma chambers
04/06/1999US5891349 Plasma enhanced CVD apparatus and process, and dry etching apparatus and process
04/06/1999US5891348 Process gas focusing apparatus and method
04/06/1999US5891312 Forming a thin metal coating on a substrate
04/01/1999WO1999016291A1 Method for generating energy by controlled plasma-induced nuclear fusion and device for the implementation of said method
04/01/1999WO1999015711A1 Laminate comprising a barrier layer of silicon oxide
04/01/1999DE19740792A1 Verfahren zur Erzeugung eines Plasmas durch Einstrahlung von Mikrowellen A method of generating a plasma by microwave irradiation
03/1999
03/31/1999EP0904674A1 Plasma torch system
03/31/1999CN2312518Y Low temp. plasma discharging tube
03/31/1999CN1212456A Plasma processing method and apparatus
03/30/1999CA2102284C Plasma spray apparatus for spraying powdery material
03/25/1999WO1999014855A1 Electrical impedance matching system and method
03/25/1999WO1999014789A1 Vacuum plasma processor having coil with intermediate portion coupling lower magnetic flux density to plasma than center and peripheral portions of the coil
03/25/1999WO1999014787A2 Method for producing plasma by microwave irradiation
03/25/1999WO1999014784A2 Vacuum plasma processor having coil with added conducting segments to its peripheral part
03/25/1999WO1999014394A1 Device and method for detecting and preventing arcing in rf plasma systems
03/24/1999EP0903059A1 Apparatus for generating and deflecting a plasma jet
03/24/1999EP0757884A4 Method of forming a fluorinated silicon oxide layer using plasma chemical vapor deposition
03/23/1999US5886473 Surface wave plasma processing apparatus
03/23/1999US5886315 Blow forward contact start plasma arc torch with distributed nozzle support
03/23/1999US5885472 Method for detecting etching endpoint, and etching apparatus and etching system using the method thereof
03/18/1999WO1999013489A2 Apparatus for improving etch uniformity and methods therefor
03/18/1999WO1999012693A1 Electrode with emissive element having conductive portions
03/18/1999WO1999012638A1 Treatment of gaseous emissions
03/18/1999CA2301045A1 Treatment of gaseous emissions
03/17/1999EP0902606A2 System and method for detecting nozzle and electrode wear
03/17/1999EP0902457A1 Fuzzy logic tuning of RF matching network
03/17/1999EP0901867A2 Method and automatic apparatus for marking by means of a plasma jet, in particular of metals
03/17/1999CN1210902A Nozzle-injector for arc plasma deposition apparatus
03/16/1999US5882411 Faceplate thermal choke in a CVD plasma reactor
03/11/1999DE19739527A1 Magnetically filtered vacuum arc plasma source
03/10/1999EP0735805B1 Plasma torch
03/09/1999US5880427 Method and apparatus for providing a stabilized plasma arc
03/09/1999US5880426 Indirectly-cooled plasma jet torch
03/09/1999US5879575 Self-cleaning plasma processing reactor
03/09/1999US5879523 Ceramic coated metallic insulator particularly useful in a plasma sputter reactor
03/04/1999WO1999010086A1 Method and apparatus for ionizing all the elements in a complex substance such as radioactive waste
03/03/1999CN1209941A Electrode for plasma generator and plasma generato including same, and process for treating solidifying liquid metal
03/02/1999US5877471 Plasma torch having a cooled shield assembly
03/02/1999US5877394 Centrifuging plasma arc furnaces
03/02/1999US5876684 Methods and apparati for producing fullerenes
02/1999
02/25/1999WO1998053486A3 Aluminum deposition shield
02/25/1999DE19756445A1 Method for monitoring wear state of plasma burner nozzle
02/24/1999CN1209036A Ion beam concentration apparatus for plasma thruster, and plasma thruster fitted with such apparatus
02/23/1999US5874807 Large area plasma processing system (LAPPS)
02/23/1999US5874707 Processing torch having a separably assembled torch base and torch head
02/23/1999US5874705 Method of and apparatus for microwave-plasma production
02/23/1999US5874704 Low inductance large area coil for an inductively coupled plasma source
02/23/1999US5874014 Durable plasma treatment apparatus and method
02/17/1999EP0896732A1 Sputtering installation with two longitudinally placed magnetrons
02/16/1999US5872426 For generating and maintaining a glow plasma discharge
02/11/1999WO1999007193A1 Blow forward contact start plasma arc torch with distributed nozzle support
02/11/1999WO1998052207A3 Central coil design for ionized metal plasma deposition
02/11/1999DE19831816A1 Plasma torch
02/11/1999CA2298612A1 Blow forward contact start plasma arc torch with distributed nozzle support
02/10/1999EP0895706A1 Method and apparatus for generating x-ray or euv radiation
02/10/1999CN1207368A Water treatment apparatus using plasma reactor and method thereof
02/09/1999US5869402 Plasma generating and processing method and apparatus thereof
02/09/1999US5868909 Method and apparatus for improving the energy efficiency for separating the elements in a complex substance such as radioactive waste with a large volume plasma processor
02/09/1999US5868897 Device and method for processing a plasma to alter the surface of a substrate using neutrals
02/04/1999WO1999005417A1 Hall-current ion source apparatus and method for processing materials
02/03/1999EP0894332A1 Use of a cleaning process, a cleaning process, a connecting process and work piece pair
02/03/1999EP0734459B1 Plasma-activated vapour-deposition process and device
02/02/1999US5866985 Stable matching networks for plasma tools
02/02/1999US5866871 Plasma gun and methods for the use thereof
02/02/1999US5866869 Plasma pilot arc control
02/02/1999US5865937 Broad-band adjustable power ratio phase-inverting plasma reactor
01/1999
01/28/1999WO1999004608A1 Device for exciting a gas by surface wave plasma
01/28/1999WO1999004607A1 Apparatus for the application of protective coatings using the plasma technique
01/28/1999WO1999004606A2 Compact microwave downstream plasma system
01/28/1999DE19742619C1 Method and apparatus for introducing powdery solids or liquids into an inductively coupled plasma
01/28/1999DE19725662A1 Toroidal plasma vessel production for use in nuclear fusion stellarator
01/27/1999EP0892983A1 Gas discharge device
01/26/1999US5863841 Plasma diffusion control apparatus
01/26/1999US5863339 Chamber etching of plasma processing apparatus
01/21/1999WO1999003313A1 Plasma processing apparatus
01/21/1999WO1999003312A1 Method for improved cleaning of substrate processing systems
01/20/1999EP0892422A2 Improvements in or relating to plasma reactors
01/19/1999US5861752 Method and apparatus for determining of absolute plasma parameters
01/19/1999US5861630 Thermal decomposition of specified metal borides to emit boron vapor which is ionized in plasma generating chamber
01/19/1999US5861601 Microwave plasma processing apparatus and method
01/19/1999US5861600 Fuel plasma vortex combustion system
01/19/1999US5861088 Ring coil surrounding a permanent magnet arranged to the center of the target and a ring associated with the periphery, forms a field line concentrator; arc stability, no contamination effects; arc discharge vaporizers
01/19/1999CA2133498C Plasma arc torch with integral gas exchange
01/14/1999WO1999001887A1 Plasma processing apparatus
01/13/1999EP0890739A1 Electrostatic propulsion systems and methods
01/13/1999EP0890296A1 Methods and apparatuses for controlling phase difference in plasma processing systems
01/13/1999CN2304229Y High-efficiency ion generator
01/13/1999CN1204939A Method and device for generating high-pressure non-balance plasma driven by magnet