| Patents for H05H 1 - Generating plasma; Handling plasma (22,647) |
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| 06/15/1999 | US5911852 Plasma processing apparatus |
| 06/15/1999 | CA2146369C Microwave apparatus for depositing thin films |
| 06/10/1999 | WO1999029146A1 Method and apparatus for monitoring and adjusting chamber impedance |
| 06/10/1999 | WO1999029145A1 Method and device for producing extreme ultraviolet and soft x-rays from a gaseous discharge |
| 06/10/1999 | WO1999028533A1 Mixed frequency cvd process and apparatus |
| 06/10/1999 | WO1999028525A1 Substrate processing chamber with tunable impedance |
| 06/10/1999 | WO1999028524A1 Use of an asymmetric waveform to control ion bombardment during substrate processing |
| 06/10/1999 | DE19854198A1 Substrate plasma processor with processing chamber for the substrate |
| 06/10/1999 | CA2255409A1 Ternary gas mixture and application of this mixture to the plasma projection of refractory materials |
| 06/09/1999 | EP0921713A2 Plasma processing apparatus and method |
| 06/09/1999 | CN1219279A Hall effect plasma thruster |
| 06/09/1999 | CN1219094A Plasma purifying method for controlling plasma treatment particles |
| 06/08/1999 | USRE36224 Microwave plasma processing process and apparatus |
| 06/08/1999 | US5910221 Bonded silicon carbide parts in a plasma reactor |
| 06/03/1999 | WO1999027758A1 Plasma processing apparatus having rotating magnets |
| 06/03/1999 | WO1999026796A1 Plasma processing methods and apparatus |
| 06/03/1999 | WO1999014784A3 Vacuum plasma processor having coil with added conducting segments to its peripheral part |
| 06/02/1999 | EP0919317A1 Method for the plasmic arc-welding of metals |
| 06/02/1999 | EP0919066A1 Magnetron |
| 06/02/1999 | EP0727922B1 Plasma torch |
| 06/02/1999 | CN1218541A Hall effect plasma accelerator |
| 06/01/1999 | US5909086 Plasma generator for generating unipolar plasma |
| 06/01/1999 | US5908602 Apparatus for generation of a linear arc discharge for plasma processing |
| 06/01/1999 | US5908567 Electrode for plasma arc torch |
| 06/01/1999 | US5908565 Line plasma vapor phase deposition apparatus and method |
| 06/01/1999 | US5908564 Tunable, self-powered arc plasma-melter electro conversion system for waste treatment and resource recovery |
| 06/01/1999 | US5908539 Plasma polymerization |
| 06/01/1999 | US5908508 Gas diffuser plate assembly and RF electrode |
| 06/01/1999 | CA2117328C A torch device for chemical processes having a lead into with a replaceable venturi nozzle |
| 06/01/1999 | CA2117324C A torch device for chemical processes comprising ferromagnetic material near the arc's area |
| 05/27/1999 | WO1999026274A1 Planar magnetron with moving magnet assembly |
| 05/27/1999 | WO1999026267A1 A plasma generating apparatus having an electrostatic shield |
| 05/27/1999 | WO1999025494A1 All-surface biasable and/or temperature-controlled electrostatically-shielded rf plasma source |
| 05/27/1999 | WO1999004606A9 Compact microwave downstream plasma system |
| 05/27/1999 | CA2310678A1 Planar magnetron with moving magnet assembly |
| 05/26/1999 | EP0918351A1 Improved planar magnetron with moving magnet assembly |
| 05/26/1999 | CN1217247A Plasma-arc application apparatus |
| 05/25/1999 | US5906758 Plasma arc torch |
| 05/25/1999 | US5906757 Liquid injection plasma deposition method and apparatus |
| 05/20/1999 | WO1999024637A1 Method for annealing an amorphous film using microwave energy |
| 05/19/1999 | EP0916153A1 Device for producing plasma |
| 05/14/1999 | WO1999023031A1 A plasma ozone generator |
| 05/14/1999 | CA2307590A1 A plasma ozone generator |
| 05/12/1999 | EP0914560A1 Device for concentrating ion beams for hydromagnetic propulsion means and hydromagnetic propulsion means equipped with same |
| 05/12/1999 | EP0914496A1 Microwave applicator for an electron cyclotron resonance plasma source |
| 05/12/1999 | EP0914292A1 Conversion of hydrocarbons assisted by gliding electric arcs |
| 05/12/1999 | DE19755902C1 Plasma surface treatment process involves hollow cathode self-cleaning |
| 05/11/1999 | US5903106 Plasma generating apparatus having an electrostatic shield |
| 05/11/1999 | US5903015 Field effect transistor using diamond |
| 05/11/1999 | US5902649 Vacuum treatment system for homogeneous workpiece processing |
| 05/11/1999 | US5902405 Plasma processing apparatus |
| 05/11/1999 | US5902404 Resonant chamber applicator for remote plasma source |
| 05/06/1999 | WO1999021706A1 Low dielectric constant materials prepared from photon or plasma assisted cvd |
| 05/06/1999 | WO1999021496A1 Device for plasma incision of matter with a specifically tuned radiofrequency electromagnetic field generator |
| 05/06/1999 | WO1999021495A1 Method of plasma incision of matter with a specifically tuned radiofrequency electromagnetic field generator |
| 05/06/1999 | WO1999014787A3 Method for producing plasma by microwave irradiation |
| 05/06/1999 | WO1999013489A3 Apparatus for improving etch uniformity and methods therefor |
| 05/06/1999 | EP0913074A1 Plasma etch reactor and method for emerging films |
| 05/06/1999 | EP0912288A1 Process for coating or welding easily oxidised materials and plasma torch for carrying out this process |
| 05/06/1999 | EP0462209B1 Electron cyclotron resonance plasma source and method of operation |
| 05/06/1999 | CA2307213A1 Method of plasma incision of matter with a specifically tuned radiofrequency electromagnetic field generator |
| 05/05/1999 | CN1215912A Plasm processing device and method |
| 05/04/1999 | US5900699 Plasma generator with a shield interposing the antenna |
| 05/04/1999 | US5900169 Safety circuit for a blow forward contact start plasma arc torch |
| 05/04/1999 | US5900168 Plasma cutting method |
| 05/04/1999 | US5900161 Apparatus and method for detecting end point of post treatment |
| 04/29/1999 | WO1999020809A1 Deposition of coatings using an atmospheric pressure plasma jet |
| 04/29/1999 | DE19846656A1 Loading aerosols |
| 04/28/1999 | EP0910468A1 Electrically assisted synthesis of particles and films with precisely controlled characteristics |
| 04/28/1999 | CN1215284A Fuzzy logic tuning of RF matching network |
| 04/27/1999 | US5897923 Plasma treatment device |
| 04/27/1999 | US5897795 Integral spring consumables for plasma arc torch using blow forward contact starting system |
| 04/27/1999 | US5897753 Continuous deposition of insulating material using multiple anodes alternated between positive and negative voltages |
| 04/27/1999 | US5897713 Plasma generating apparatus |
| 04/27/1999 | US5897712 Plasma uniformity control for an inductive plasma source |
| 04/27/1999 | US5897059 Nozzle for use in a torch head of a plasma torch apparatus |
| 04/27/1999 | CA2028270C Gas shrouded electrode for a plasma carburizing furnace |
| 04/22/1999 | WO1999020087A2 System for plasma ignition by fast voltage rise |
| 04/22/1999 | WO1999019898A2 Method and apparatus to produce large inductive plasma for plasma processing |
| 04/22/1999 | WO1999019527A2 Apparatus and method for utilizing a plasma density gradient to produce a flow of particles |
| 04/22/1999 | WO1999019526A2 Apparatus and method for adjusting density distribution of a plasma |
| 04/22/1999 | WO1999004606A3 Compact microwave downstream plasma system |
| 04/22/1999 | DE19813199A1 Plasma generator with microwave waveguide |
| 04/22/1999 | DE19744060A1 Method for surface treating of substrates |
| 04/22/1999 | CA2376059A1 Method and apparatus to produce large inductive plasma for plasma processing |
| 04/21/1999 | EP0910231A2 Mounting apparatus for induction coupled plasma torch |
| 04/21/1999 | EP0909605A2 Arc retract device and method |
| 04/21/1999 | EP0784861B1 Apparatus and method for magnetron in-situ cleaning of plasma reaction chamber |
| 04/21/1999 | EP0697935B1 Plasma arc cutting process and apparatus |
| 04/21/1999 | CN1214537A Plasma etching method for forming hole in masked silicon dioxide |
| 04/20/1999 | US5896407 High-efficiency plasma confining method, laser oscillating method and laser oscillator |
| 04/20/1999 | US5895548 High power microwave plasma applicator |
| 04/15/1999 | WO1999018593A1 Method and device for surface-treating substrates |
| 04/15/1999 | DE19741515A1 Verfahren zur Energiegewinnung mit plasmainduzierter, kontrollierter Kernfusion sowie Vorrichtung zur Durchführung des Verfahrens And power generation process of plasma-induced, controlled nuclear fusion, as well as apparatus for carrying out the method |
| 04/14/1999 | EP0908923A2 Method and apparatus to produce large inductive plasma for plasma processing |
| 04/13/1999 | US5893985 Plasma arc torch |
| 04/13/1999 | US5893962 Electrode unit for in-situ cleaning in thermal CVD apparatus |
| 04/13/1999 | CA2133321C Pulsed electrical discharge apparatus for treating liquid |
| 04/08/1999 | WO1999017336A1 Insulating ceramic coated metallic part in a plasma sputter reactor |
| 04/08/1999 | WO1999017335A1 Dual face shower head electrode for a magnetron plasma generating apparatus |