Patents for H05H 1 - Generating plasma; Handling plasma (22,647)
11/2003
11/18/2003WO2005049226A1 Method and device for continuous treatment of the surface of an elongate object
11/18/2003US6650059 Method of decomposing organic halide
11/18/2003US6649860 Transfer type plasma heating anode
11/18/2003US6649076 Method for performing plasma process on particles
11/18/2003US6649020 Plasma processing apparatus
11/18/2003US6648976 Apparatus and method for plasma processing
11/18/2003CA2546411A1 Method and device for continuous treatment of the surface of an elongate object
11/13/2003WO2003094581A1 Method of generating extreme ultraviolet radiation
11/13/2003WO2003093526A2 Method and device for treating the outer surface of a metal wire, particularly for carrying out a coating pretreatment.
11/13/2003WO2003093173A2 Diamond synthesis
11/13/2003WO2003075621A3 Electrode element for a plasma torch and method for the production
11/13/2003WO2003071004A3 Method for the plasma cleaning of the surface of a material coated with an organic substance and the installation for carrying out said method
11/13/2003US20030211754 Methods for use of pulsed voltage in a plasma reactor
11/13/2003US20030211233 Manufacturing method of organic electroluminescent element
11/13/2003US20030209525 Electrodes and nozzles having improved connection and quick release
11/13/2003US20030209430 Ion beam irradiation apparatus for suppressing charge up of substrate and method for the same
11/13/2003CA2483780A1 Diamond synthesis
11/12/2003EP1361782A1 Plasma device and plasma generating method
11/12/2003EP1360880A1 Plasma unit and method for generation of a functional coating
11/12/2003EP0876663B1 Apparatus for generating a plasma
11/12/2003CN2586330Y Internally feeding powder convergent-divergent nozzle of plasma welding gun
11/11/2003US6646386 Stabilized oscillator circuit for plasma density measurement
11/11/2003US6645441 Reactor for plasma assisted gas processing
11/11/2003US6645301 Ion source
11/11/2003CA2108121C Plasma arc cutting process and apparatus using an oxygen-rich gas shield
11/09/2003CA2584508A1 Method for producing single-wall carbon nanotubes
11/06/2003WO2003092338A1 Method for generating a cold plasma for sterilizing a gaseous medium and device therefor
11/06/2003WO2003092059A1 Window type probe, plasma monitoring device, and plasma processing device
11/06/2003WO2003092056A1 Exposure apparatus and device fabrication method using the same
11/06/2003WO2003092053A1 Mounting method and mounting device
11/06/2003WO2003092039A1 Device for treating surfaces of containers with plasma
11/06/2003WO2003091554A1 Plasmatron having an air jacket
11/06/2003WO2003090939A1 Method and apparatus for plasma deposition of chemically reactive groups on substrates chemically reactive substrates obtainable by the method and use thereof
11/06/2003WO2003073803A3 Modulator plasma arc torch
11/06/2003US20030207583 Method for processing wafer using single frequency RF power in plasma processing chamber
11/06/2003US20030206838 Highly efficient compact capacitance coupled plasma reactor/generator and method
11/06/2003US20030206571 Plasma thermal processing system having carbon sensing and control
11/06/2003US20030205557 Apparatus and method for controlling the voltage applied to an electrostatic shield used in a plasma generator
11/06/2003US20030205328 Actively-cooled distribution plate for reducing reactive gas temperature in a plasma processing system
11/06/2003US20030205327 Apparatus and methods for minimizing arcing in a plasma processing chamber
11/06/2003US20030205202 Plasma cvd device
11/06/2003DE20220316U1 Device for producing chlorine trifluoride for etching semiconductor substrates comprises a plasma reactor, plasma generating units for forming a plasma inside the reactor, and gas feeding for introducing gases into the reactor
11/05/2003EP1359611A1 Method and device for plasma cvd
11/05/2003EP1358666A1 Method of fabricating a coated process chamber component
11/05/2003EP1358030A1 Treating molten metals by moving electric arc
11/05/2003EP0939972A4 Plasma etch reactor and method
11/05/2003EP0916153B1 Device for producing plasma
11/05/2003EP0806126B1 Method and apparatus for generating plasma
11/05/2003CN1453830A Plasma etching electrode with excellent heat resistance and dry etching apparatus using the same
11/05/2003CN1453391A Film forming apparatus and method
11/04/2003US6642662 Plasma apparatus
11/04/2003US6642472 Plasma thermal processing system having carbon sensing and control
11/04/2003US6641698 Integrated circuit fabrication dual plasma process with separate introduction of different gases into gas flow
11/04/2003US6641673 Fluid injector for and method of prolonged delivery and distribution of reagents into plasma
10/2003
10/30/2003WO2003089183A1 Plasma arc torch
10/30/2003WO2003089182A1 Plasma arc torch electrode
10/30/2003WO2003089181A1 Plasma arc torch cooling system
10/30/2003WO2003089180A1 Plasma arc torch tip
10/30/2003WO2003089179A1 Plasma arc torch consumables cartridge
10/30/2003WO2003089178A1 Plasma arc torch head connections
10/30/2003WO2003089155A2 Method and device for hardening a coating
10/30/2003WO2003041112A3 Non-thermal plasma slit discharge apparatus
10/30/2003WO2003038850A3 Device for plasma incision of matter with a specifically tuned radiofrequency electromagnetic field generator
10/30/2003WO2003036681A3 Methods and apparatus for plasma doping by anode pulsing
10/30/2003WO2003026364A3 Plasma processor coil
10/30/2003WO2002058449A8 Activated water apparatus and methods
10/30/2003WO2002046839A3 Laser plasma from metals and nano-size particles
10/30/2003US20030203641 Plasma treatment apparatus and method of producing semiconductor device using the apparatus
10/30/2003US20030201737 Method for the stabilization of the radiation output of a gas discharge-coupled radiation source in pulsed operation
10/30/2003US20030201257 Plasma-arc spray anode and gun body
10/30/2003US20030201240 Maintenance method and system for plasma processing apparatus
10/30/2003US20030201174 Magnetron sputtering source and chamber therefor
10/30/2003US20030201162 Monitoring optical emission; determination power spectra
10/30/2003CA2480861A1 Process and device for curing a coating
10/29/2003EP1357576A2 Highly heat-resistant plasma etching electrode and dry etching device including the same
10/29/2003EP1356717A2 Magnetic and electrostatic confinement of plasma in a field reversed configuration
10/29/2003EP1356497A2 Icp window heater integrated with faraday shield or floating electrode between the source power coil and the icp window
10/29/2003EP1355734A2 Activated water apparatus and methods
10/29/2003CN1452852A Improved dielectric heating using inductive coupling
10/29/2003CN1452448A Multiple plasma generating device
10/28/2003US6639222 Device and method for extracting a constituent from a chemical mixture
10/28/2003US6639174 Plasma torch provided with a ceramic protective cap
10/28/2003US6638484 Conductor-single structural dielectric barrier- exhaust channel-conductor repeating arrangement
10/28/2003US6638403 Plasma processing apparatus with real-time particle filter
10/28/2003US6637255 Damped paddle wheel for plasma chamber shock tube
10/23/2003WO2003088406A2 Ion powered platform
10/23/2003WO2003088338A1 Plasma processing device and plasma processing method
10/23/2003WO2003087867A2 Extreme ultraviolet light source
10/23/2003WO2003086998A1 Method and device for manufacturing optical preforms, as well as the optical fibres obtained therewith
10/23/2003WO2003086615A1 Submerged plasma generator, method of generating plasma in liquid and method of decomposing toxic substance with plasma in liquid
10/23/2003WO2003043390A3 System for generating a local electron-cyclotron microwave low-pressure plasma at a predetermined location within the processing chamber
10/23/2003WO2003009646A3 Microwave desorber for removing contaminants from resin
10/23/2003WO2002068144B1 Contact start plasma torch
10/23/2003US20030197129 Ion sources for ion implantation apparatus
10/23/2003US20030196759 Highly heat-resistant plasma etching electrode and dry etching device including the same
10/23/2003US20030196754 Plasma processing methods and apparatus
10/23/2003US20030196611 Plasmatron having an air jacket and method for operating the same
10/23/2003DE10143100C2 Verfahren und Einrichtung zum Wolfram-Schutzgasschweißen und -Schutzgaslöten von Metallen Method and apparatus for gas tungsten arc welding of metals and -Schutzgaslöten
10/22/2003EP1354640A1 Process and apparatus for hardening a coating
10/22/2003EP1354336A2 Plasma generation apparatus and method