Patents for H05H 1 - Generating plasma; Handling plasma (22,647)
12/2003
12/03/2003EP1367867A1 Target steering system for a droplet generator in a EUV plasma source
12/03/2003EP1367866A1 Droplet target delivery method for high pulse-rate laser-plasma extreme ultraviolet light source
12/03/2003EP1367639A1 Plasma apparatus and production method thereof
12/03/2003EP1367445A1 Linear filament array sheet for EUV production
12/03/2003EP1367441A2 Gasdynamically-controlled droplets as the target in a laser-plasma extreme ultraviolet light source
12/03/2003EP1366647A1 Apparatus for generating low temperature plasma at atmospheric pressure
12/03/2003EP1366508A2 Apparatus and method for atmospheric pressure reactive atom plasma processing for surface modification
12/03/2003EP1366209A1 Processing materials inside an atmospheric-pressure radiofrequency nonthermal plasma discharge
12/03/2003EP1138055B1 Semiconductor processing equipment having tiled ceramic liner
12/03/2003EP0913074A4 Plasma etch reactor and method for emerging films
12/03/2003CN1460289A Plasma processing device and semiconductor mfg. device
12/03/2003CN1460288A Device and method for plasma processing and slow-wave plate
12/03/2003CN1460287A 等离子体处理装置 Plasma processing apparatus
12/03/2003CN1460285A 等离子体处理装置 Plasma processing apparatus
12/03/2003CN1459830A Process reaction room viewing window improvement
12/02/2003US6657719 Fiber optic tomographic plasma uniformity monitor
12/02/2003US6657395 Close coupled match structure for RF drive electrode
12/02/2003US6657394 Reflection coefficient phase detector
12/02/2003US6657206 Ultraviolet lamp system and methods
12/02/2003US6657153 Electrode diffusion bonding
12/02/2003US6657152 Torch head for plasma spraying
12/02/2003US6657151 Plasma processing device
12/02/2003US6656849 Plasma reactor
12/02/2003US6656535 Bead blasting component to provide surface roughness, dipping component into solution of hydrofluoric acid, hydrochloric acid, and nitric acid, forming aluminum coating by thermal spraying
12/02/2003US6656323 Plasma processing apparatus
12/02/2003US6656322 Plasma processing apparatus
11/2003
11/27/2003WO2003098980A1 Plasma torch for microwave induced plasmas
11/27/2003WO2003098041A2 Air breathing electrically powered hall effect thruster
11/27/2003WO2003098019A2 Fuel vaporization systems for vaporizing liquid fuel
11/27/2003WO2003097892A2 System and apparatus for control of sputter deposition process
11/27/2003WO2003097891A2 High-power microwave window
11/27/2003WO2003097521A1 Inductively coupled plasma reactor for producing nano-powder
11/27/2003WO2003073802A3 Plasma arc torch trigger system
11/27/2003WO2003073801A3 Torch handle gas control
11/27/2003WO2003070390A3 Cleaning apparatus using atmospheric pressure plasma
11/27/2003US20030218430 Ion source with external RF antenna
11/27/2003US20030218429 Ion source, method of operating the same, and ion source system
11/27/2003US20030218427 Capacitively coupled plasma reactor with magnetic plasma control
11/27/2003DE20308202U1 Nozzle attachment for atmospheric low temperature plasma generator, has non conductive surface and contains plasma collection chamber with exit openings
11/27/2003CA2486299A1 Plasma torch for microwave induced plasmas
11/26/2003EP1365446A1 Plasma treatment device and plasma treatment method
11/26/2003EP1363859A1 Apparatus and method for atmospheric pressure reactive atom plasma processing for shaping of damage free surfaces
11/26/2003EP0872851B1 Process for preparing metallic beryllium pebbles
11/26/2003CN1458966A Device and method for converting carbon containing feedstock into carbon containing materials, having defined nanostructure
11/26/2003CN1129351C Method and apparatus for heating metal parts by magneto-controlling arc plasma
11/26/2003CN1129229C Electrical impedance matching system and method
11/25/2003US6654446 Capillary discharge source
11/25/2003US6654433 Method and machine for producing energy by nuclear fusion reactions
11/25/2003US6653791 Method and apparatus for producing uniform process rates
11/25/2003US6653788 Magnetron having a lowered oscillation frequency and processing equipment employing the same
11/25/2003US6653591 Thermoelectric apparatus comprising electrodes supported on barrels and bores having insulation linings, vessels containing plasma gases, power sources and switches, used for oxidation of metals to form nanostructure powders
11/25/2003US6652717 Time averaging radio frequency voltage distributions
11/25/2003US6652711 Inductively-coupled plasma processing system
11/25/2003US6651597 Plasmatron having an air jacket and method for operating the same
11/20/2003WO2003096774A1 Plasma catalyst
11/20/2003WO2003096773A1 Plasma-assisted joining
11/20/2003WO2003096772A1 Plasma-assisted decrystallization
11/20/2003WO2003096771A1 Plasma generation and processing with multiple radiation sources
11/20/2003WO2003096770A1 Plasma-assisted coating
11/20/2003WO2003096769A1 High frequency reaction processing system
11/20/2003WO2003096768A1 Plasma assisted dry processing
11/20/2003WO2003096767A1 A plasma formed in a fluid
11/20/2003WO2003096766A1 Plasma control using phase and/or frequency of multiple radiation sources
11/20/2003WO2003096765A2 Apparatus and methods for minimizing arcing in a plasma processing chamber
11/20/2003WO2003096764A1 Method and arrangement for producing radiation
11/20/2003WO2003096749A1 Plasma-assisted heat treatment
11/20/2003WO2003096747A2 Plasma heating apparatus and methods
11/20/2003WO2003096400A1 Plasma processing equipment and plasma processing method
11/20/2003WO2003096383A2 Cavity shapes for plasma-assisted processing
11/20/2003WO2003096382A2 Methods and apparatus for plasma processing control
11/20/2003WO2003096381A2 Plasma-assisted processing in a manufacturing line
11/20/2003WO2003096380A2 Plasma-assisted nitrogen surface-treatment
11/20/2003WO2003096370A1 Methods and apparatus for forming and using plasma jets
11/20/2003WO2003096369A1 Plasma-assisted gas production
11/20/2003WO2003095807A1 Plasma-assisted engine exhaust treatment
11/20/2003WO2003095699A1 Plasma-assisted enhanced coating
11/20/2003WO2003095591A1 Plasma-assisted doping
11/20/2003WO2003095130A1 Plasma-assisted sintering
11/20/2003WO2003095090A1 Plasma-assisted carburizing
11/20/2003WO2003095089A1 Plasma-assisted formation of carbon structures
11/20/2003WO2003095058A2 Plasma-assisted multi-part processing
11/20/2003WO2003049499A3 Ultraviolet radiation generation with flame and electrical discharge
11/20/2003US20030215373 VHF-band circulator coupled to the amplifier and configured to isolate nonlinearities of the plasma chamber load from the amplifier.
11/20/2003US20030214263 Controlled fusion in a field reversed configuration and direct energy conversion
11/20/2003US20030214262 Controlled fusion in a field reversed configuration and direct energy conversion
11/20/2003US20030213800 High-power microwave window
11/20/2003US20030213784 Plasma arc torch consumables cartridge
11/20/2003US20030213783 Plasma arc torch cooling system
11/20/2003US20030213782 Plasma arc torch
11/20/2003US20030213781 Torch for powder plasma buildup welding
11/20/2003US20030213780 Device for plasma incision of matter with a specifically tuned radiofrequency electromagnetic generator
11/20/2003US20030213561 Atmospheric pressure plasma processing reactor
11/20/2003US20030213559 Stabilization of electronegative plasmas with feedback control of RF generator systems
11/20/2003CA2485195A1 Plasma catalyst
11/20/2003CA2483753A1 A plasma formed in a fluid
11/19/2003EP1363480A1 Abutment device for plasma torch
11/19/2003EP1363479A2 Plasma cutting torch device with interchangeable elements for pneumatic and electric arc striking
11/19/2003EP1362185A2 Magnetic field for small closed-drift thruster
11/19/2003EP0938596B1 Apparatus for reducing polymer deposition on substrate support
11/19/2003CN1128570C Surface plasma source for atmospheric discharge