Patents for H05H 1 - Generating plasma; Handling plasma (22,647)
02/2004
02/26/2004US20040035838 Method and plasma torch for treating a surface in a cavity and related filling-closure installation
02/26/2004US20040035837 Addition of power at selected harmonics of plasma processor drive frequency
02/26/2004US20040035692 Sputtering process comprising impressing DC magnetic field of first magnetic polarity parallel to central axis, injecting sputter working gas into chamber, electrically biasing target to excite working gas into plasma for sputtering, RF biasing
02/26/2004US20040035532 Etching apparatus for use in manufacturing a semiconductor device and shield ring for upper electrode thereof
02/26/2004US20040035529 Monitoring a process and compensating for radiation source fluctuations
02/26/2004US20040035365 Plasma processing apparatus
02/26/2004US20040035364 Plasma processing apparatus and method for asssembling the plasma processing apparatus
02/26/2004DE10326136A1 Entladungsplasma-Bearbeitungsanlage mit magnetischer neutraler Linie Discharge plasma processing system with magnetic neutral line
02/26/2004DE10257147A1 Power supply apparatus for plasma generating device, has power conversion circuit with amplifier circuit including switching units and load impedance conversion circuit to alter load impedance to delayed load
02/26/2004DE10235036A1 Ultraviolet light source, for carrying out photophysical or photochemical processes, has antenna(s) for emitting microwaves at distance from and directed towards vacuum container
02/25/2004EP1392087A1 Method for plasma-catalytic conversion of fuels that can be used in an internal combustion engine or a gas turbine into a synthetic gas and the plasma-catalytic converter used for same
02/25/2004EP1391911A1 Microwave plasma generator
02/25/2004EP1391142A1 Plasma torch
02/25/2004EP1390964A1 Dipole ion source
02/25/2004EP1390955A2 Laser plasma from metals and nano-size particles
02/25/2004EP1390558A1 Penning discharge plasma source
02/25/2004CN2604848Y Atmospheric radio-frequency cold plasma generator
02/25/2004CN2604847Y Atmospheric radio-frequency cylinder injective cold plasma generator
02/25/2004CN2604846Y Atmospheric radio-frequency cylinder external emission cold plasma generator
02/25/2004CN2604845Y Atmospheric radio-frequency and DC mixed cold plasma generator
02/25/2004CN1478291A Chamber configuration for confining plasma
02/25/2004CN1477682A Plasma processing device and method thereof
02/25/2004CN1477678A 感应耦合等离子体处理装置 Inductively coupled plasma processing apparatus
02/25/2004CN1140161C 微波等离子体源 Microwave plasma source
02/24/2004US6696792 Compact plasma accelerator
02/24/2004US6696662 Simple, economical and capable of atmospheric and sub-atmospheric pressure operation
02/24/2004US6695948 Plasma processing apparatus
02/24/2004CA2314922C Device for producing excited/ionized particles in a plasma
02/19/2004WO2004016052A1 Generation of diffuse non-thermal atmospheric plasmas
02/19/2004WO2003096747A3 Plasma heating apparatus and methods
02/19/2004WO2003055287A3 Plasma reactor with overhead rf electrode tuned to the plasma with arcing suppression
02/19/2004WO2003026363A8 Discharge source with gas curtain for protecting optics from particles
02/19/2004US20040032884 Device and method for inspecting wavelength-variable semiconductor laser, and method for inspecting coherent source
02/19/2004US20040032212 Power supply apparatus for generating plasma
02/19/2004US20040031776 Feedback enhanced plasma spray tool
02/19/2004US20040031564 Alumina, zirconium silicate, feldspar, pottery stone, siliceous limestone, kaolin, gairome clay (Japan), and black soil; compressed into blocks, dehydrated; storing thermal energy after being roasted for a short time, releasing the energy to produce progressive temperature rise; skin rehabilitation
02/19/2004US20040031289 Method of silica optical fiber preform production
02/19/2004US20040031288 Method for production of silica optical fiber preforms
02/19/2004DE10116502B4 Verfahren und Vorrichtung zur Ausbildung eines Plasmastrahls Method and device for forming a plasma jet
02/18/2004CN1476057A Plasma processor and variable impedance apparatus correcting method
02/17/2004US6693253 By combining multiple coils, output impedance of solid state power supply and input impedance of induction coils sustaining induction plasma can be substantially matched, thereby increasing overall energy coupling efficiency of torch
02/17/2004US6692704 Non-thermal plasma reactor and method-structural conductor
02/17/2004US6692623 Vacuum arc vapor deposition apparatus and vacuum arc vapor deposition method
02/17/2004US6692622 Plasma processing apparatus with an electrically conductive wall
02/17/2004US6692617 Sustained self-sputtering reactor having an increased density plasma
02/17/2004US6692600 Vacuum insulating glass window unit; plasma enhanced evacuation of the internal cavity of a vacuum ig unit
02/12/2004WO2004013661A2 Methods and apparatus for preparing specimens for microscopy
02/12/2004WO2004013469A1 Exhaust gas treating apparatus
02/12/2004WO2002062112A8 Magnetic and electrostatic confinement of plasma in a field reversed configuration
02/12/2004US20040029339 Plasma processing apparatus and plasma processing method
02/12/2004US20040027302 Radial antenna and plasma processing apparatus comprising the same
02/12/2004US20040027293 Plasma generator
02/12/2004US20040026412 Method and device for plasma treatment of moving metal substrates
02/12/2004US20040026385 Process for treating with an atmospheric plasma electrically conductive materials and a device therefor
02/12/2004US20040026235 System and apparatus for control of sputter deposition process
02/12/2004US20040026231 Connecting circuits; radio frequency for generating a plasma; low impedance capacitance coupling
02/12/2004US20040026040 Plasma processing apparatus
02/12/2004US20040026039 Microwave plasma processing apparatus, microwave processing method and microwave feeding apparatus
02/12/2004US20040026038 Plasma treatment apparatus
02/12/2004US20040026035 Method and apparatus for 2-d spatially resolved optical emission and absorption spectroscopy
02/12/2004US20040025788 Plasma processing device and exhaust ring
02/11/2004EP1388159A1 Magnetic mirror plasma source
02/11/2004EP1387876A1 The new chemical species of a magnecule
02/11/2004CN1474882A Method and device for atmospheric plasma processing
02/11/2004CN1137757C Treatment of gaseous emissions
02/10/2004US6689983 Torch handle gas control
02/05/2004WO2004012483A1 Inductively coupled plasma generator having lower aspect ratio
02/05/2004WO2004012235A2 Atmospheric pressure plasma processing reactor
02/05/2004WO2004012221A2 Method for adjusting voltage on a powered faraday shield
02/05/2004WO2004012220A2 Methods and apparatus for monitoring plasma parameters in plasma doping systems
02/05/2004WO2003083160A3 Evaluation of chamber components having textured coatings chamber components
02/05/2004US20040022945 Using an atmospheric pressure plasma discharge; plasma polymerization
02/05/2004US20040022669 Non-thermal disinfection of biological fluids using non-thermal plasma
02/05/2004US20040020900 Plasma arc torch
02/05/2004US20040020760 Pulsed highly ionized magnetron sputtering
02/05/2004US20040020598 Object processing apparatus and plasma facility comprising the same
02/05/2004US20040020431 Plasma treatment apparatus
02/04/2004EP1386525A1 High flux, high energy photon source
02/04/2004EP1386522A1 Rf power process apparatus and methods
02/04/2004CN1473206A Plasma electroplating
02/03/2004US6687284 Method and apparatus to facilitate restriking in an arc-furnace
02/03/2004US6687113 Electrostatic chuck
02/03/2004US6686559 Electrode for plasma arc torch and method of making the same
02/03/2004US6686555 Radio frequency-induced plasma beam; tangenital gas flow through metal expansion jet
02/03/2004US6685992 Method for partially treating a water-repellent glass sheet
01/2004
01/29/2004WO2004010747A1 Plasmatron for spraying of coatings
01/29/2004WO2004010458A2 Plasma implantation system and method with target movement
01/29/2004WO2004010457A1 Method and apparatus for producing uniform processing rates
01/29/2004WO2004010456A1 Plasma processing apparatus and plasma processing method
01/29/2004WO2003097892A3 System and apparatus for control of sputter deposition process
01/29/2004US20040016894 Plasma generation
01/29/2004US20040016641 Pulsed carbon plasma apparatus
01/29/2004US20040016406 Plasma processing comprising three rotational motions of an article being processed
01/29/2004US20040016402 Methods and apparatus for monitoring plasma parameters in plasma doping systems
01/29/2004DE19953928B4 Plasmaerzeugungseinrichtung zur Erzeugung von thermischen Lichtbogenplasmen Plasma generating means for generating thermal arc plasmas
01/29/2004DE10231739A1 Induktions-Plasmabrennervorrichtung Induction plasma torch device
01/29/2004DE10231738A1 Anpassungsvorrichtung für eine Induktions-Plasmabrennervorrichtung und Verfahren zur elektrischen Steuerung und Regelung einer Induktions-Plasmabrennervorrichtung Adaptation device for an induction plasma torch apparatus and method for the electrical control and regulation of an induction plasma torch device
01/29/2004DE10229340A1 Plasmareaktor, Verfahren zu dessen Herstellung und Einrichtung zur Behandlung von Abgasen in Verbrennungsmotoren mit dem Plasmareaktor A plasma reactor, process for its production and device for treatment of exhaust gases in internal combustion engines with the plasma reactor
01/29/2004DE10229037A1 Vorrichtung und Verfahren zur Erzeugung von Chlortrifluorid und Anlage zur Ätzung von Halbleitersubstraten mit dieser Vorrichtung Apparatus and method for generating chlorine trifluoride and apparatus for etching semiconductor substrates with this device
01/28/2004EP1385361A1 Plasma arc torch