| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 09/30/1997 | US5672241 Method of forming metal contact holes in semiconductor fabrication |
| 09/30/1997 | US5672240 Vapor depositing a plurality spaced apart diamond on substrate facings, bonding the diamond surface to a transfer rigid substrate |
| 09/30/1997 | US5672239 Having rinse step between etching and stripping |
| 09/30/1997 | US5672230 Central management system of wet chemical stations |
| 09/30/1997 | US5672212 Rotating with transducer, rinsing and spin drying |
| 09/30/1997 | US5672205 Coating apparatus |
| 09/30/1997 | US5672204 Apparatus for vapor-phase epitaxial growth |
| 09/30/1997 | US5672091 Polishing apparatus having endpoint detection device |
| 09/30/1997 | US5671764 Washing apparatus, and washing method |
| 09/30/1997 | US5671544 Substrate drying apparatus and substrate drying method |
| 09/30/1997 | US5671531 Fabrication process for circuit substrate having interconnection leads |
| 09/30/1997 | US5671530 Flip-chip mounting assembly and method with vertical wafer feeder |
| 09/30/1997 | CA2130978C Self-aligned buried strap for trench type dram cells |
| 09/30/1997 | CA2110647C Vapour generator for chemical vapour deposition systems |
| 09/30/1997 | CA2107795C Processes for electron lithography |
| 09/30/1997 | CA2071192C Method for forming a seed and a semiconductor film using said seed |
| 09/30/1997 | CA2070325C Process and apparatus for controllably separating framed working area from remainder of the membrane |
| 09/29/1997 | CA2201052A1 Backside thinning using ion-beam figuring |
| 09/25/1997 | WO1997035347A1 Semiconductor device |
| 09/25/1997 | WO1997035344A1 Semiconductor device shielded by an array of electrically conducting pins and a method to manufacture such a device |
| 09/25/1997 | WO1997035341A1 Semiconductor storage device and its manufacture |
| 09/25/1997 | WO1997035340A1 Heterolithic microwave integrated circuits and process of making hmic circuits |
| 09/25/1997 | WO1997035339A1 Method for constructing ferroelectric capacitor-like structures on silicon dioxide surfaces |
| 09/25/1997 | WO1997035338A1 Calibration standard for calibrating a defect inspection system and a method of forming same |
| 09/25/1997 | WO1997035337A1 Process control system |
| 09/25/1997 | WO1997035234A1 Alignment device and lithographic apparatus provided with such a device |
| 09/25/1997 | WO1997035231A2 Thermal treatment process of positive photoresist composition |
| 09/25/1997 | WO1997029222A3 Production of bevelled galvanic structures |
| 09/25/1997 | WO1997022893A3 Methods and compositions for producing microlenses and optical filters |
| 09/25/1997 | DE19708002A1 Semiconductor component for resin encapsulated component, e.g. quad-flat pack |
| 09/25/1997 | DE19654791A1 Semiconductor component manufacturing method for film and substrate separation |
| 09/25/1997 | DE19645568A1 Semiconductor wafer apparatus with integrated circuit forming region |
| 09/25/1997 | DE19611241A1 Drying process for wet semiconductor discs |
| 09/25/1997 | DE19611046A1 Halbleitervorrichtung Semiconductor device |
| 09/24/1997 | EP0797301A2 Method for controlling the turn-on of an IGBT and device for carrying out the method |
| 09/24/1997 | EP0797258A2 Method for making thin film semiconductor, solar cell, and light emitting diode |
| 09/24/1997 | EP0797257A2 Thyristor with reduced minority carrier lifetime and method of producing the same |
| 09/24/1997 | EP0797254A2 LSI package and manufacturing method thereof |
| 09/24/1997 | EP0797252A2 Silicon on insulator substrate for fabricating transistors and method for preparing such a substrate |
| 09/24/1997 | EP0797251A2 Semiconductor device planarization method |
| 09/24/1997 | EP0797250A2 Method of making contacts on a semiconductor device |
| 09/24/1997 | EP0797249A1 Single step process for blanket-selective CVD metal deposition |
| 09/24/1997 | EP0797248A2 Method for manufacturing a bonded wafer |
| 09/24/1997 | EP0797247A1 Substrate on which bumps are formed and method of forming the same |
| 09/24/1997 | EP0797246A1 Electronic TFT device manufacture |
| 09/24/1997 | EP0797245A2 Method of manufacturing a vertical MOS semiconductor device |
| 09/24/1997 | EP0797244A2 Thin ferroelectric film element and method for manufacturing the same |
| 09/24/1997 | EP0797243A2 Etching process for dielectric layers in semiconductor devices |
| 09/24/1997 | EP0797242A2 Etching high aspect contact holes in solid state devices |
| 09/24/1997 | EP0797241A2 Substrate processing apparatus |
| 09/24/1997 | EP0797240A2 Reduced footprint semiconductor processing system |
| 09/24/1997 | EP0797236A2 A charged particle beam exposure method and an apparatus therefor |
| 09/24/1997 | EP0797213A1 Non-volatile semiconductor memory |
| 09/24/1997 | EP0796933A2 A method for detecting crystal defects in a silicon single crystal substrate |
| 09/24/1997 | EP0796932A1 Method of compound semiconductor crystal growth amd semicoductor device fabricated thereby |
| 09/24/1997 | EP0796507A1 Contoured-tub fermi-threshold field effect transistor and method of forming same |
| 09/24/1997 | EP0796505A1 Plasma reactor and method of operating the same |
| 09/24/1997 | EP0796355A1 Apparatus for generating plasma by plasma-guided microwave power |
| 09/24/1997 | EP0796354A1 Sputtering apparatus having an on board service module |
| 09/24/1997 | EP0796353A1 Method of heat-treating oxygen-sensitive products |
| 09/24/1997 | EP0616724B1 Electronic device and production method therefor |
| 09/24/1997 | CN1160447A Process for producing smart card module for contactless smart cards |
| 09/24/1997 | CN1160293A Semiconductor device and method of fabricating the same |
| 09/24/1997 | CN1160292A Semiconductor device |
| 09/24/1997 | CN1160291A Semiconductor integrated circuit device, method for manufacturing the same and logical circuit |
| 09/24/1997 | CN1160290A Semiconductor wafer, semiconductor device and manufacturing method of semiconductor device |
| 09/24/1997 | CN1160287A Method and apparatus for ion beam formation in ion implanter |
| 09/24/1997 | CN1160286A Method for mfg. semiconductor device field oxide film |
| 09/24/1997 | CN1160285A Fabrication process and fabrication apparatus of SOI substrate |
| 09/24/1997 | CN1160261A Liquid crystal display |
| 09/24/1997 | CN1160228A Illumination method and apparatus for formation of micro patterns |
| 09/24/1997 | CN1160206A 半导体加速度传感器 Semiconductor acceleration sensor |
| 09/24/1997 | CN1160091A Czochralski growing apparatus suppressing growth striation of long large-diameter monocrystalline silicon |
| 09/24/1997 | CN1160007A Moisture barrier bag having window |
| 09/23/1997 | USRE35614 Process for improved quality of CVD copper films |
| 09/23/1997 | US5671437 Quantum dot-tunnel device and information processing apparatus and method using same |
| 09/23/1997 | US5671323 Zigzag heating device with downward directed connecting portions |
| 09/23/1997 | US5671315 Optical parts fixing apparatus and method of manufacturing the same |
| 09/23/1997 | US5671242 Strained quantum well structure |
| 09/23/1997 | US5671234 Programmable input/output buffer circuit with test capability |
| 09/23/1997 | US5671229 Flash eeprom system with defect handling |
| 09/23/1997 | US5671177 Non-volatile semiconductor storage apparatus |
| 09/23/1997 | US5671174 Ferroelectric memory device |
| 09/23/1997 | US5671173 Semiconductor integrated circuit device with oblique metallization lines over memory bit and word lines |
| 09/23/1997 | US5671165 Method of determining position offset of a pattern |
| 09/23/1997 | US5671148 Apparatus and method for checking logic circuit |
| 09/23/1997 | US5671119 Process for cleaning an electrostatic chuck of a plasma etching apparatus |
| 09/23/1997 | US5671117 Electrostatic chuck |
| 09/23/1997 | US5671116 Multilayered electrostatic chuck and method of manufacture thereof |
| 09/23/1997 | US5671111 Apparatus for electro-static discharge protection in a semiconductor device |
| 09/23/1997 | US5671057 For use with an exposure apparatus |
| 09/23/1997 | US5670907 VBB reference for pumped substrates |
| 09/23/1997 | US5670893 BiCMOS logic circuit with bipolar base clamping |
| 09/23/1997 | US5670889 Probe card for maintaining the position of a probe in high temperature application |
| 09/23/1997 | US5670888 Method for transporting and testing wafers |
| 09/23/1997 | US5670871 Polymeric film electrooptic sensor device |
| 09/23/1997 | US5670867 Current sensing circuit |
| 09/23/1997 | US5670828 Tunneling technology for reducing intra-conductive layer capacitance |
| 09/23/1997 | US5670827 Cytochrome and/or organella, such as mitochondria containing electroconductive protein electrode on hydroxy, chloro or fluoroapatite dielectric film deposited on a substrate; minimization of undesired electron transfer |
| 09/23/1997 | US5670826 Method for mounting a semiconductor device on a circuit board using a conductive adhesive and a thermosetting resin, and a circuit board with a semiconductor device mounted thereon using the method |