Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/1998
10/29/1998WO1998048457A1 Method of making nmos and pmos devices with reduced masking steps
10/29/1998WO1998048456A1 Nanowire arrays
10/29/1998WO1998048455A1 Interelectrode connecting structure, interelectrode connecting method, semiconductor device, semiconductor mounting method, liquid crystal device, and electronic equipment
10/29/1998WO1998048454A1 Method of forming redundant signal traces and corresponding electronic components
10/29/1998WO1998048453A1 Planarization compositions for cmp of interlayer dielectrics
10/29/1998WO1998048452A1 Method and device for exposure control, method and device for exposure, and method of manufacture of device
10/29/1998WO1998048450A1 Device for conveying substrates through a substrate processing plant
10/29/1998WO1998048449A2 Flip chip and chip scale package
10/29/1998WO1998048444A1 Method and apparatus for ionized sputtering of materials
10/29/1998WO1998048215A1 Gas supply facility
10/29/1998WO1998048168A2 In situ getter pump system and method
10/29/1998WO1998048079A1 Preparation of copper-indium-gallium-diselenide precursor films by electrodeposition for fabricating high efficiency solar cells
10/29/1998WO1998048074A1 Metered gas control in a substrate processing apparatus
10/29/1998WO1998047976A1 Buffer solutions for suspensions used in chemical-mechanical polishing
10/29/1998WO1998047944A1 Organohydridosiloxane resins with high organic content
10/29/1998WO1998047943A1 Stable inorganic polymers
10/29/1998WO1998047941A1 Synthesis of siloxane resins
10/29/1998WO1998047798A1 Air stream transfer apparatus
10/29/1998WO1998047663A1 Abrasive material for the needle point of a probe card
10/29/1998WO1998047662A1 Polishing pad for a semiconductor substrate
10/29/1998WO1998047661A1 Chemicals supply system and its use
10/29/1998DE19818452A1 Resin coated substrate socket
10/29/1998DE19811042A1 Semiconductor component with via structure
10/29/1998DE19803490A1 Electrodeposition unit for semiconductor wafer coating
10/29/1998DE19758430A1 IC structure including MOS transistor
10/29/1998DE19755387A1 Semiconductor wafer wet treatment process
10/29/1998DE19749602A1 Data input/output voltage detector for substrate voltage generator circuit
10/29/1998DE19743271C1 Metallic fuse segment linear arranging method, e.g. for integrated circuit and memory
10/29/1998DE19735404C1 Endless chip carrier tape
10/29/1998DE19717363A1 Platinum group metal structure production
10/29/1998CA2233205A1 Accelerator-decelerator electrostatic lens for variably focusing and mass resolving an ion beam in an ion implanter
10/28/1998EP0874438A2 Electronic circuit with reverse battery protection
10/28/1998EP0874428A2 Long wavelength VCSEL
10/28/1998EP0874405A2 GaN group crystal base member having low dislocation density, use thereof and manufacturing methods thereof
10/28/1998EP0874401A2 Semiconductor device having a protective wiring layer
10/28/1998EP0874398A2 Semiconductor integrated circuit
10/28/1998EP0874397A2 Parasitic isolation transistor having an adjustable threshold voltage
10/28/1998EP0874396A2 A method of determining a wafer characteristic using a film thickness monitor
10/28/1998EP0874394A2 GaAs vertical fet
10/28/1998EP0874393A2 Methods of forming integrated circuit capacitors having improved electrode and dielectric layer characteristics and capacitors formed thereby
10/28/1998EP0874392A1 Method for fabricating a capacitor structure on a silicon substrate in a MOS process
10/28/1998EP0874391A2 Process for depositing a Halogen-doped SiO2 layer
10/28/1998EP0874390A1 Grinding method of grinding device
10/28/1998EP0874389A1 A method of producing MOSFET transistors by means of tilted implants
10/28/1998EP0874388A2 Arrangement and method for treatment of a disc-like substrate
10/28/1998EP0874387A1 A furnace for continuous high throughput diffusion processes from various diffusion sources
10/28/1998EP0874386A2 Apparatus and process for remote microwave plasma generation
10/28/1998EP0874369A2 Semiconductor device comprising a UV-light shielding layer
10/28/1998EP0874282A1 Negative working image recording material
10/28/1998EP0874251A2 Process for fabricating a device having a hole at an extremity
10/28/1998EP0874193A2 Method and apparatus for dry vapor generation
10/28/1998EP0874069A1 Detecting method of impurity concentration in a crystal, method and apparatus for pulling up a single-crystal
10/28/1998EP0874065A1 Improved magnet design for a sputtering chamber
10/28/1998EP0874036A1 Fine particulate polishing agent, method for producing the same and method for producing semiconductor devices.
10/28/1998EP0873575A1 Device for producing oxidic thin films
10/28/1998EP0873542A1 Three-dimensional etching process
10/28/1998EP0873430A1 Sputtering device and liquid-cooled target assembly therefor
10/28/1998EP0873343A1 Metal complex source reagents for chemical vapor deposition
10/28/1998EP0873231A1 Closed mold for led alphanumeric displays
10/28/1998EP0838085A4 Low damage source and drain doping technique
10/28/1998EP0763149B1 Method and apparatus for low temperature deposition of cvd and pecvd films
10/28/1998EP0745273B1 Circuit arrangement, and junction field effect transistor suitable for use in such a circuit arrangement
10/28/1998EP0654167B1 Nonvolatile random access memory
10/28/1998CN1197547A Photodiode and process for mfg. the same
10/28/1998CN1197546A Resin-encapsulated semiconductor device and method of mfg. the same
10/28/1998CN1197545A Method of electrically connecting a semiconductor chip to at least one contact surface
10/28/1998CN1197544A Connecting multiple microelectronic elements with lead deformation
10/28/1998CN1197543A Method of modifying an exposed surface of semiconductor wafer
10/28/1998CN1197542A Grinding method of grinding device
10/28/1998CN1197541A Semiconductor processor with wafer face protection
10/28/1998CN1197514A Microelectronic contact structure and method of making same
10/28/1998CN1197332A Input/output voltage detection type substrate voltage generation circuit
10/28/1998CN1197330A Semiconductor delay circuit
10/28/1998CN1197295A CMOSFET and method for fabricating the same
10/28/1998CN1197293A Semiconductor device
10/28/1998CN1197292A Semiconductor device, lead frame, and lead bonding
10/28/1998CN1197291A Semiconductor device having metal alloy for electrodes
10/28/1998CN1197289A Device with asymmetrical channel dopant profile
10/28/1998CN1197288A Method for estimating qualified rate of integrated circuit device
10/28/1998CN1197287A Circuit board for screening detection and mfg. method of known qualified tube core
10/28/1998CN1197286A Dual modes microwave/mm wave integrated circuit sealing pack
10/28/1998CN1197285A Material for antireflection film to be formed on workpiece disposed on semiconductor substrate and method of manufacturing semiconductor device using said material
10/28/1998CN1197284A Pulverizing superpureness silicon on ice
10/28/1998CN1197283A Method of aligning semiconductor substrate with base stage and apparatus for doing the same
10/28/1998CN1197252A Mask pattern data creation method
10/28/1998CN1197246A Method of positioning semiconductor integrated circuit device and apparatus of carrying out the method
10/28/1998CN1197212A Method of analyzing semiconductor ingot
10/28/1998CN1197128A Device and method for pulling single crystal
10/28/1998CN1196984A Intermediate material for producing dual gauge strip and method for producing the same and method for producing dual gauge strip
10/28/1998CN1196884A Sterilizing composition for making ultrapure water in semiconductor devices fabrication process, method of sterilizing ultrapure water delivery system using this, and ultrapure water delivery system
10/27/1998US5828989 Semiconductor manufacturing system having a bar-code interface
10/27/1998US5828824 Method for debugging an integrated circuit using extended operating modes
10/27/1998US5828778 Method and apparatus for analyzing failure of semiconductor wafer
10/27/1998US5828673 Logical check apparatus and method for semiconductor circuits and storage medium storing logical check program for semiconductor circuits
10/27/1998US5828618 Line memory
10/27/1998US5828602 Memory system having multiple programmable reference cells
10/27/1998US5828600 Non-volatile semiconductor memory
10/27/1998US5828586 High speed device simulating method
10/27/1998US5828573 For exposing a circuit pattern defined by a mask onto a substrate
10/27/1998US5828572 Processing System and semiconductor device production method using the same including air conditioning control in operational zones