Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/1998
10/13/1998US5820650 Optical processing apparatus and optical processing method
10/13/1998US5820648 Anodic bonding process
10/13/1998US5820641 Fluid cooled trap
10/13/1998US5820448 Carrier head with a layer of conformable material for a chemical mechanical polishing system
10/13/1998US5820367 Boat for heat treatment
10/13/1998US5820366 Dual vertical thermal processing furnace
10/13/1998US5820329 Vacuum processing apparatus with low particle generating wafer clamp
10/13/1998US5820261 Method and apparatus for infrared pyrometer calibration in a rapid thermal processing system
10/13/1998US5820104 Vertical transfer system for a vacuum chamber and gate valve assembly
10/13/1998US5819858 Circuit board having a metal matrix composite inlay
10/13/1998US5819683 Trap apparatus
10/13/1998US5819434 Etch enhancement using an improved gas distribution plate
10/13/1998US5819407 Method of joining together a pair of members each having a high thermal conductivity
10/13/1998US5819403 Method of manufacturing a semiconductor chip carrier
10/13/1998CA2144092C Extraction of spatially varying dielectric function from ellipsometric data
10/10/1998CA2231224A1 Apparatus for machining, recording, and reproducing, using scanning probe microscope
10/09/1998CA2234532A1 Multiple detector alignment system for photolithography
10/08/1998WO1998044767A1 Rfq accelerator and ion implanter
10/08/1998WO1998044567A1 Nonvolatile semiconductor storage device and method for manufacturing the same and semiconductor device and method for manufacturing the same
10/08/1998WO1998044566A1 Display
10/08/1998WO1998044565A1 A scalable flash eeprom memory cell and array
10/08/1998WO1998044561A1 A thermal conducting trench in a semiconductor structure and method for forming the same
10/08/1998WO1998044558A1 Method and device for reducing electric field concentrations in soi semiconductor components
10/08/1998WO1998044553A1 Process for fabricating a diffused emitter bipolar transistor
10/08/1998WO1998044552A2 Method of manufacturing a non-volatile memory combining an eprom with a standard cmos process
10/08/1998WO1998044551A1 Semiconductor device and method for manufacturing the same
10/08/1998WO1998044550A1 Laser-induced cutting of metal interconnect
10/08/1998WO1998044549A1 Flattening process for epitaxial semiconductor wafers
10/08/1998WO1998044548A1 Method of forming a contact opening adjacent to an isolation trench in a semiconductor substrate
10/08/1998WO1998044547A1 Method for manufacturing semiconductor device
10/08/1998WO1998044546A1 Method to improve adhesion of a thin submicron fluoropolymer film on an electronic device
10/08/1998WO1998044545A1 Method to improve adhesion of a thin submicron fluoropolymer film on an electronic device
10/08/1998WO1998044544A1 Low dielectric constant material with improved dielectric strength
10/08/1998WO1998044543A1 Method for microwave plasma substrate heating
10/08/1998WO1998044542A1 Method and device for treating substrate
10/08/1998WO1998044541A1 Flattening process for semiconductor wafers
10/08/1998WO1998044540A1 Process for producing semiconductor device
10/08/1998WO1998044539A1 Method for manufacturing compound semiconductors
10/08/1998WO1998044538A2 Quartz glass component used in the production of semiconductors
10/08/1998WO1998044535A1 Method and apparatus for control of deposit build-up on an inner surface of a plasma processing chamber
10/08/1998WO1998044498A1 Electric or electronic component and application as non volatile memory and device with surface acoustic waves
10/08/1998WO1998044478A1 Screen and driver assembly for screen pixels
10/08/1998WO1998044451A1 Electronic module for chip card
10/08/1998WO1998044365A1 Optical detector to detect the presence of a semiconductor wafer
10/08/1998WO1998044330A2 Optical inspection module and method for detecting particles and defects on substrates in integrated process tools
10/08/1998WO1998044319A1 Circuit board and detector, and method for manufacturing the same
10/08/1998WO1998044175A1 Epitaxial growth furnace
10/08/1998WO1998044166A1 Method of manufacturing multistep substrate
10/08/1998WO1998044061A1 Planarization composition for removing metal films
10/08/1998WO1998043753A1 Method and apparatus for cleaning wafers and discs
10/08/1998WO1998021755A3 Patterns of electrically conducting polymers and their application as electrodes or electrical contacts
10/08/1998WO1998018152A3 Programmable integrated passive devices and methods therefor
10/08/1998DE19811850A1 IC testing method
10/08/1998DE19749649A1 Semiconductor wafer drier
10/08/1998DE19747589A1 Nonvolatile memory device
10/08/1998DE19739273C1 Monolithic integrated power output stage with protection of output transistor
10/08/1998DE19739072A1 Booster circuit for driving supply voltage using condenser unit, E.G for DRAM
10/08/1998DE19736959A1 Intermediate mask for pattern transfer in semiconductor manufacture
10/08/1998DE19713014A1 Bauteil aus Quarzglas für die Verwendung bei der Halbleiterherstellung Component of quartz glass for use in semiconductor manufacturing
10/08/1998DE19711481A1 Verfahren zur Herstellung eines vertikalen MOS-Transistors Process for the preparation of a vertical MOS transistor
10/08/1998CA2285278A1 Method and device for reducing electric field concentrations in soi semiconductor components
10/08/1998CA2283692A1 Electronic module for chip card
10/07/1998EP0869616A2 Output circuit, input circuit and input/output circuit
10/07/1998EP0869561A2 Avalanche photodiode and method of making the same
10/07/1998EP0869558A2 Insulated gate bipolar transistor with reduced electric fields
10/07/1998EP0869557A2 Ferroelectric memory cell and method of making the same
10/07/1998EP0869556A1 Microstructure and methods for fabricating such structure
10/07/1998EP0869555A2 Self-aligned contacts for semiconductor integrated circuits and method for producing the same
10/07/1998EP0869554A2 Dispensing pump for epoxy encapsulation of integrated circuits
10/07/1998EP0869553A2 Conductive feedthrough for a ceramic body and method of fabricating same
10/07/1998EP0869552A2 DRAM with asymmetrical channel doping
10/07/1998EP0869551A2 Interconnect structure between at least two areas of a first type of conductivity
10/07/1998EP0869550A2 Improved etching of contact holes
10/07/1998EP0869549A2 Solder bump formation
10/07/1998EP0869548A1 Resin-sealed wireless bonded semiconductor device
10/07/1998EP0869547A2 Semiconductor device and manufacture method thereof
10/07/1998EP0869546A1 Method for anisotropically etching tungsten using SF6, CHF3, and N2
10/07/1998EP0869545A2 Selective plasma etching of silicon nitride in presence of silicon or silicon oxides using mixture of (CH3F or CH2F2) and CF4 and O2
10/07/1998EP0869544A2 Method for depositing a diffusion barrier
10/07/1998EP0869543A2 Method and apparatus for reducing the first wafer effect
10/07/1998EP0869542A2 Cleaning and drying apparatus, wafer processing system and wafer processing method
10/07/1998EP0869535A2 A method to generate ionized metal plasma using electron beams and magnetic field
10/07/1998EP0869516A1 Composition and process for forming electrically insulating thin films
10/07/1998EP0869515A1 Composition and process for forming electrically insulating thin films
10/07/1998EP0869511A2 Semiconductor memory cell and method of manufacturing the same
10/07/1998EP0869396A2 Adjustable slit and method for varying line width
10/07/1998EP0869382A2 Projection optical system
10/07/1998EP0869352A1 Method for detecting metallic contaminants in submicron silicon surface layers of a semiconductor wafer
10/07/1998EP0869202A2 Single crystal pulling apparatus, single crystal support mechanism, and single crystal pulling method
10/07/1998EP0869199A1 Chamber design with isolation valve to preserve vacuum during maintenance
10/07/1998EP0869103A1 Organometallic single source precursors for inorganic films coatings and powders
10/07/1998EP0868977A2 Method and apparatus for adhesion of semiconductor substrate
10/07/1998EP0868836A1 Fluorine assisted stripping and residue removal in sapphire downstream plasma asher
10/07/1998EP0868752A1 Integrated circuit devices and methods employing amorphous silicon carbide resistor materials
10/07/1998EP0868749A1 Silicon bipolar junction transistor having reduced emitter line width
10/07/1998EP0868746A1 Reduced pitch laser redundancy fuse bank structure
10/07/1998EP0868745A2 Method of producing a neuron mos transistor on the basis of a cmos process
10/07/1998EP0868744A1 Process for producing contacts on electrical components suitable for a flip-chip assembly
10/07/1998EP0868742A2 Process for producing an mos transistor
10/07/1998EP0868741A1 Shape memory alloy lift pins for semiconductor processing equipment
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