Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/1998
11/04/1998EP0875931A1 Method for the production of a CMOS circuit arrangement
11/04/1998EP0875930A2 Planarization of an interconnection structure
11/04/1998EP0875929A2 Planarisation of an interconnect structure
11/04/1998EP0875928A2 Metallization in semiconductor devices
11/04/1998EP0875927A2 Method of manufacturing FET devices with maskless shallow trench isolation (STI)
11/04/1998EP0875926A2 Detergent for semiconductor circuit and method for manufacturing semiconductor circuit by use of same
11/04/1998EP0875925A2 Method of manufacturing capacitors in integrated circuits
11/04/1998EP0875924A2 Improved tantalum-containing barrier layers for copper
11/04/1998EP0875923A2 Multilayer metallization structure comprising a group IVA metal
11/04/1998EP0875922A1 Etching-free technology for integration of components
11/04/1998EP0875921A1 Wafer transfer apparatus
11/04/1998EP0875919A2 Self-cleaning focus ring
11/04/1998EP0875918A1 Accelerator-decelerator electrostatic lens for variably focusing and mass resolving an ion beam in an ion implanter
11/04/1998EP0875905A1 Low dielectric constant composite film for integrated circuits of an inorganic aerogel and an organic filler grafted to the inorganic material and method of fabrication
11/04/1998EP0875848A1 Placement method and apparatus
11/04/1998EP0875847A2 Process simulation method for calculating a surface oxidant concentration in oxidation process
11/04/1998EP0875790A2 Lamp instability detecting system
11/04/1998EP0875780A2 Micro-electromechanical (MEM) optical resonator and method
11/04/1998EP0875778A1 Image-focusing optical system for ultraviolet laser
11/04/1998EP0875607A1 Silicon single crystal with no crystal defect in peripheral part of wafer and process for producing the same
11/04/1998EP0875595A1 Process-gas supply apparatus
11/04/1998EP0875547A2 Polishing agent for semiconductor and method for its production
11/04/1998EP0875078A1 Iii-v/ii-vi semiconductor interface fabrication method
11/04/1998EP0875077A2 A SEMICONDUCTOR DEVICE WITH A LOW RESISTANCE OHMIC CONTACT BETWEEN A METAL LAYER AND A SiC-LAYER
11/04/1998EP0875074A1 Semiconductor devices, and methods for same
11/04/1998EP0875073A1 Vacuum compatible water vapor and rinse process module
11/04/1998EP0823098B1 Laminating device for joining a metal strip and an insulating material strip
11/04/1998EP0646285B1 Semiconductor wafer processing method and apparatus with heat and gas flow control
11/04/1998EP0632385B1 Semiconductor integrated circuit including test circuit
11/04/1998EP0490966B1 Radiation-sensitive compositions containing fully substituted novolak polymers
11/04/1998CN1198252A Metal stack for integrated circuit having two thin layers of titanium with dedicated chamber depositions
11/04/1998CN1198251A Semiconductor device
11/04/1998CN1198250A Method for manufacturing semiconductor device
11/04/1998CN1198234A Enhanced security semiconductor, semiconductor circuit arrangement, and method of production thereof
11/04/1998CN1198229A 芯片模块 Chip Module
11/04/1998CN1198110A On-site ammonia purification for semiconductor manufacture
11/04/1998CN1198102A On-site generation of ultra-high-purity buffered HF for semiconductor processing
11/04/1998CN1198072A Plasma immersion implantation with pulsed anode
11/04/1998CN1198028A 半导体装置 Semiconductor device
11/04/1998CN1198020A Process for producing semiconductor substrate
11/04/1998CN1198019A Field effect transistor and power amplifier including the same
11/04/1998CN1198018A Semiconductor device for shortening channel length
11/04/1998CN1198017A Pull-up and pull-down circuit
11/04/1998CN1198015A Multilevel interconnecting structure in semiconductor device and method of forming the same
11/04/1998CN1198014A Semiconductor device and fabrication process thereof
11/04/1998CN1198013A Semiconductor device and method of fabricating the same
11/04/1998CN1198012A Bonding structure to semiconductor chip and semiconductor device having the same
11/04/1998CN1198011A Semiconductor device free from short-circuit between bump electrodes and separation from circuit board and process of fabrication thereof
11/04/1998CN1198008A Fabrication method of semiconductor device with CMOS structure
11/04/1998CN1198007A Crack stops
11/04/1998CN1198006A Check pattern for via-hole opening examination
11/04/1998CN1198005A Semiconductor package and method of manufacturing the same
11/04/1998CN1198004A Bead array type IC package method without base and tin bead
11/04/1998CN1198003A MOS-gated semiconductor devices
11/04/1998CN1198002A Semiconductor device capable of having amorphous carbon flooride film of low dielectric constant as interlayer insulation material and method of manufacturing the same
11/04/1998CN1198001A Method and apparatus for wet treatment of semiconductor wafer
11/04/1998CN1198000A Method of manufacturing semiconductor device
11/04/1998CN1197999A Ion implantation in semiconductor substrate
11/04/1998CN1197998A Epitaxial chip and its manufacture
11/04/1998CN1197987A Oxide magnetic materials, making method, antenna coils, and inductance elements
11/04/1998CN1197965A Model parameter abstracting method and device
11/04/1998CN1040524C Substrate conveyer
11/03/1998US5832177 Method for controlling apparatus for supplying steam for ashing process
11/03/1998US5831991 Methods and apparatus for electrically verifying a functional unit contained within an integrated cirucuit
11/03/1998US5831912 Semiconductor memory having space-efficient layout
11/03/1998US5831906 Read/write collison-free static random access memory
11/03/1998US5831903 Electrically erasable programmable read-only memory with threshold value controller for data programming and method of programming the same
11/03/1998US5831898 Static random access memory semiconductor layout
11/03/1998US5831897 SRAM memory cell design having complementary dual pass gates
11/03/1998US5831871 Integrated structure layout and layout of interconnections for an instruction execution unit of an integrated circuit chip
11/03/1998US5831854 Method and device for supporting the repair of defective substrates
11/03/1998US5831851 Apparatus and method for controlling high throughput sputtering
11/03/1998US5831833 Bear chip mounting printed circuit board and a method of manufacturing thereof by photoetching
11/03/1998US5831828 Flexible circuit board and common heat spreader assembly
11/03/1998US5831776 Projection optical system and projection exposure apparatus
11/03/1998US5831770 Projection optical system and exposure apparatus provided therewith
11/03/1998US5831739 Alignment method
11/03/1998US5831738 Apparatus and methods for viewing identification marks on semiconductor wafers
11/03/1998US5831716 Slit-scanning type light exposure apparatus
11/03/1998US5831715 Projection exposure apparatus with means to vary spherical aberration
11/03/1998US5831694 TFT panel for high resolution- and large size- liquid crystal display
11/03/1998US5831467 Termination circuit with power-down mode for use in circuit module architecture
11/03/1998US5831458 Output circuit having BiNMOS inverters
11/03/1998US5831421 Semiconductor device with supply voltage-lowering circuit
11/03/1998US5831378 Insulative barrier useful in field emission displays for reducing surface leakage
11/03/1998US5831338 Power MOSFET and method of preparing the same
11/03/1998US5831337 Vertical-type transistor device, having a bump electrode that has a shape with no interior angle exceeding 270°
11/03/1998US5831336 Ternary solder for the enhancement of C-4 fatigue life
11/03/1998US5831335 Semiconductor device contains refractory metal or metal silicide with less than 1% weight of halogen atom
11/03/1998US5831334 Field effect transistors comprising electrically conductive plugs having monocrystalline and polycrystalline silicon
11/03/1998US5831331 Self-shielding inductor for multi-layer semiconductor integrated circuits
11/03/1998US5831329 Layered system with an electrically activatable layer
11/03/1998US5831328 Semiconductor device and manufacturing method of the device
11/03/1998US5831326 Semiconductor device with resistive load element
11/03/1998US5831324 Electromagnetic wave suppression method in a semiconductor manufacturing process
11/03/1998US5831323 Semiconductor device having an element isolating oxide film and method of manufacturing the same
11/03/1998US5831321 Semiconductor device in which an anti-reflective layer is formed by varying the composition thereof
11/03/1998US5831320 High voltage metal oxide silicon field effect transistor
11/03/1998US5831319 Conductive spacer lightly doped drain (LDD) for hot carrier effect (HCE) control
11/03/1998US5831318 Radhard mosfet with thick gate oxide and deep channel region
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