Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/1998
11/03/1998US5831317 Semiconductor device and manufacture thereof
11/03/1998US5831314 Trench-shaped read-only memory and its method of fabrication
11/03/1998US5831313 Structure for improving latch-up immunity and interwell isolation in a semiconductor device
11/03/1998US5831310 Semiconductor device for checking quality of a semiconductor region
11/03/1998US5831309 Quartz substrate
11/03/1998US5831308 MOSFET having a particular SOI structure
11/03/1998US5831307 Silicon damage free process for double poly emitter and reverse MOS in BICMOS application
11/03/1998US5831306 Asymmetrical transistor with lightly doped drain region, heavily doped source and drain regions, and ultra-heavily doped source region
11/03/1998US5831305 CMOS devices having minimized drain contact area
11/03/1998US5831304 Semiconductor memory device that converges a floating gate threshold voltage to a predetermined positive value during data erasure
11/03/1998US5831301 Memory cell
11/03/1998US5831300 Semiconductor integrated circuit device including a memory device having memory cells with increased information storage capacitance and method of manufacturing same
11/03/1998US5831299 Thin ferroelectric film element having a multi-layered thin ferroelectric film and method for manufacturing the same
11/03/1998US5831296 Semiconductor device
11/03/1998US5831288 Silicon carbide metal-insulator semiconductor field effect transistor
11/03/1998US5831287 Bipolar semiconductor device having semiconductor layers of SiC and a method for producing a semiconductor device of SiC
11/03/1998US5831285 Semiconductor static random access memory device
11/03/1998US5831284 Liquid crystal display unit having a capacitor and method of manufacturing same
11/03/1998US5831283 Passivation of copper with ammonia-free silicon nitride and application to TFT/LCD
11/03/1998US5831282 Method of producing an HSG structure using an amorphous silicon disorder layer as a substrate
11/03/1998US5831281 Thin film transistor
11/03/1998US5831280 Device and method for programming a logic level within an integrated circuit using multiple mask layers
11/03/1998US5831277 III-nitride superlattice structures
11/03/1998US5831272 Low energy electron beam lithography
11/03/1998US5831270 Magnetic deflectors and charged-particle-beam lithography systems incorporating same
11/03/1998US5831248 Heat-controlling device
11/03/1998US5831247 Apparatus and method for producing an electronic component provided with bumps
11/03/1998US5831219 Joint structure for multilayer interconnections
11/03/1998US5831181 Automated tool for precision machining and imaging
11/03/1998US5830808 Plasma reactor with magnet for protecting an electroacoustic chuck from the plasma
11/03/1998US5830807 Successive dry etching of alternating laminate
11/03/1998US5830806 Wafer backing member for mechanical and chemical-mechanical planarization of substrates
11/03/1998US5830805 Electroless deposition equipment or apparatus and method of performing electroless deposition
11/03/1998US5830804 Encapsulated dielectric and method of fabrication
11/03/1998US5830803 Method for filling contact holes using a doctor blade
11/03/1998US5830802 Process for reducing halogen concentration in a material layer during semiconductor device fabrication
11/03/1998US5830801 Resistless methods of gate formation in MOS devices
11/03/1998US5830800 Packaging method for a ball grid array integrated circuit without utilizing a base plate
11/03/1998US5830799 Method for forming embedded diffusion layers using an alignment mark
11/03/1998US5830798 Method for forming a field effect transistor
11/03/1998US5830797 Interconnect methods and apparatus
11/03/1998US5830796 Method of manufacturing a semiconductor device using trench isolation
11/03/1998US5830795 Simplified masking process for programmable logic device manufacture
11/03/1998US5830794 Method of fabricating semiconductor memory
11/03/1998US5830793 Method of selective texfturing for patterned polysilicon electrodes
11/03/1998US5830792 Method of making a stack capacitor in a DRAM cell
11/03/1998US5830790 High voltage transistor of semiconductor memory devices
11/03/1998US5830789 Masking
11/03/1998US5830788 Method for forming complementary MOS device having asymmetric region in channel region
11/03/1998US5830787 Method for fabricating a thin film transistor
11/03/1998US5830786 Process for fabricating electronic circuits with anodically oxidized scandium doped aluminum wiring
11/03/1998US5830785 Direct multilevel thin-film transistors production method
11/03/1998US5830784 Method for producing a semiconductor device including doping with a group IV element
11/03/1998US5830783 Monolithic semiconductor device having an edge structure and method for producing said structure
11/03/1998US5830782 Microelectronic element bonding with deformation of leads in rows
11/03/1998US5830781 Semiconductor device soldering process
11/03/1998US5830778 Method of manufacturing a charge transfer device
11/03/1998US5830776 Method of manufacturing thin film transistor
11/03/1998US5830775 Semiconductors
11/03/1998US5830774 Method for forming a metal pattern on a substrate
11/03/1998US5830773 Method for forming semiconductor field region dielectrics having globally planarized upper surfaces
11/03/1998US5830772 Semiconductors
11/03/1998US5830771 Manufacturing method for semiconductor device
11/03/1998US5830624 Method for forming resist patterns comprising two photoresist layers and an intermediate layer
11/03/1998US5830623 Pattern lithography method
11/03/1998US5830619 Blend of polymer and acid generating material
11/03/1998US5830606 Mask for manufacturing semiconductor device and method of manufacture thereof
11/03/1998US5830605 Accuracy; desired distribution of exposure light intensity
11/03/1998US5830575 Memory device using movement of protons
11/03/1998US5830565 High planarity and low thermal coefficient of expansion base for semi-conductor reliability screening
11/03/1998US5830532 In vacuum; controlling oxygen concentration
11/03/1998US5830403 Method of post mold curing plastic encapsulated semiconductor chips mounted on lead frames by operating a post mold curing apparatus in association with a molding line system
11/03/1998US5830376 Topographical selective patterns
11/03/1998US5830375 Automated method for monitoring and controlling the orthophosphoric acid etch rate of silicon nitride insulator layers
11/03/1998US5830372 Thermal sensor/actuator in semiconductor material
11/03/1998US5830332 Sputter deposition of hydrogenated amorphous carbon film and applications thereof
11/03/1998US5830330 Method and apparatus for low pressure sputtering
11/03/1998US5830310 Apparatus and method for detecting end point of post treatment
11/03/1998US5830280 Washing liquid for post-polishing and polishing-cleaning method in semiconductor process
11/03/1998US5830279 Cleaning semiconductor wafer and manufacturing chamber
11/03/1998US5830277 Thermal processing system with supplemental resistive heater and shielded optical pyrometry
11/03/1998US5830270 Electrons
11/03/1998US5830045 Polishing apparatus
11/03/1998US5829942 Apparatus for loading and unloading circuit boards along a conveyor system
11/03/1998US5829939 Treatment apparatus
11/03/1998US5829668 Method for forming solder bumps on bond pads
11/03/1998US5829658 Method and device for carrying out the cleavage in ultra-high vacuum environment of portions of a processed semiconductor wafer
11/03/1998US5829514 Bonded cast, pin-finned heat sink and method of manufacture
11/03/1998US5829512 Heatsink and method of forming a heatsink
11/03/1998US5829156 Spin dryer apparatus
11/03/1998US5829128 Method of mounting resilient contact structures to semiconductor devices
11/03/1998US5829126 Method of manufacturing probe card
11/03/1998US5829125 Wireless bonding method
11/03/1998US5829087 Substrate spin cleaning apparatus
11/03/1998CA2135508C Method for forming solder balls on a semiconductor substrate
11/03/1998CA2105743C Electrostatic discharge control during jet spray
10/1998
10/30/1998CA2236068A1 Lamp stability diagnostic system
10/29/1998WO1998048492A1 Electronic devices formed from pre-patterned structures that are bonded
10/29/1998WO1998048462A1 Metal contact scheme using selective silicon growth
10/29/1998WO1998048459A1 Integrated circuit with several components and method for the production thereof