Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/1998
10/06/1998US5817576 Utilization of SiH4 soak and purge in deposition processes
10/06/1998US5817574 Method of forming a high surface area interconnection structure
10/06/1998US5817573 Semiconductor processing method of providing an electrically conductive interconnecting plug between an elevationally inner electrically conductive node and an elevationally outer electrically conductive node
10/06/1998US5817572 Method for forming multileves interconnections for semiconductor fabrication
10/06/1998US5817571 Integrated circuits
10/06/1998US5817570 Semiconductor structure for an MOS transistor and method for fabricating the semiconductor structure
10/06/1998US5817569 Method of reducing wafer particles after partial saw
10/06/1998US5817568 Method of forming a trench isolation region
10/06/1998US5817567 Shallow trench isolation method
10/06/1998US5817566 Trench filling method employing oxygen densified gap filling silicon oxide layer formed with low ozone concentration
10/06/1998US5817565 Method of fabricating a semiconductor memory cell having a tree-type capacitor
10/06/1998US5817564 Depth of diffusion
10/06/1998US5817563 Method for fabricating an LDD transistor
10/06/1998US5817562 Method for making improved polysilicon FET gate electrode structures and sidewall spacers for more reliable self-aligned contacts (SAC)
10/06/1998US5817561 Insulated gate semiconductor device and method of manufacture
10/06/1998US5817560 Ultra short trench transistors and process for making same
10/06/1998US5817559 Production method for a semiconductor device
10/06/1998US5817558 Method of forming a T-gate Lightly-Doped Drain semiconductor device
10/06/1998US5817557 Process of fabricating tunnel-oxide nonvolatile memory devices
10/06/1998US5817556 Method of manufacturing a semiconductor memory device including memory cells having connected source regions
10/06/1998US5817555 Method for fabricating capacitor of semiconductor device using hemispherical grain (HSG) polysilicon
10/06/1998US5817554 Use of a grated top surface topography for capacitor structures
10/06/1998US5817553 Process for manufacturing capacitors in a solid state configuration
10/06/1998US5817552 Packing density
10/06/1998US5817551 Semiconductor device and method of manufacturing the same
10/06/1998US5817550 Method for formation of thin film transistors on plastic substrates
10/06/1998US5817549 Method for manufacturing a semiconductor device
10/06/1998US5817548 Method for fabricating thin film transistor device
10/06/1998US5817547 Method for fabricating a metal oxide semiconductor field effect transistor having a multi-layered gate electrode
10/06/1998US5817546 Process of making a MOS-technology power device
10/06/1998US5817545 Pressurized underfill encapsulation of integrated circuits
10/06/1998US5817542 Method for bonding electronic components
10/06/1998US5817541 Methods of fabricating an HDMI decal chip scale package
10/06/1998US5817539 Production method for a micromechanical component with a movable structure
10/06/1998US5817538 Method of making quantum box semiconductor device
10/06/1998US5817536 Method to optimize p-channel CMOS ICs using Qbd as a monitor of boron penetration
10/06/1998US5817534 RF plasma reactor with cleaning electrode for cleaning during processing of semiconductor wafers
10/06/1998US5817533 High-yield methods of fabricating large substrate capacitors
10/06/1998US5817532 Ferroelectric thin film device and method for making the same
10/06/1998US5817446 Method of forming airbridged metallization for integrated circuit fabrication
10/06/1998US5817445 Method for inspecting process defects occurring in semiconductor devices
10/06/1998US5817444 Polyhydroxystyrene substituted with tetrahydropyran groups, polyhydroxystyrene substituted with alkoxyalkyl groups
10/06/1998US5817442 Pattern projection method with charged particle beam utilizing continuous movement to perform projection
10/06/1998US5817437 Method for detecting phase error of a phase shift mask
10/06/1998US5817406 Ceramic susceptor with embedded metal electrode and brazing material connection
10/06/1998US5817404 Thermoconductivity
10/06/1998US5817368 Method for forming a thin film
10/06/1998US5817367 Method of forming a thin film of copper
10/06/1998US5817366 Method for manufacturing organic electroluminescent element and apparatus therefor
10/06/1998US5817281 Temperature regulator in an ozone generating apparatus
10/06/1998US5817194 Tin base soldering/brazing material
10/06/1998US5817185 Method for washing substrates
10/06/1998US5817182 Dielectric on semiconductor wafer
10/06/1998US5817179 GaAs anneal boat design and method for use
10/06/1998US5817178 Apparatus for baking photoresist applied on substrate
10/06/1998US5817170 Low temperature seeding process for ferroelectric memory device
10/06/1998US5817156 Substrate heat treatment table apparatus
10/06/1998US5816798 Conveying apparatus and continuous furnace equipped therewith
10/06/1998US5816482 Method and apparatus for attaching balls to a substrate
10/06/1998US5816481 Pin block method of dispensing solder flux onto the I/O pads of an integrated circuit package
10/06/1998US5816480 Method for cleaning a bonding tool used on covered bonding wires
10/06/1998US5816478 Fluxless flip-chip bond and a method for making
10/06/1998US5816477 Wire bonding apparatus and method
10/06/1998US5816473 Method of fabricating electronic circuit device and apparatus for performing the same method
10/06/1998US5816472 Bonding tool for tape automated assembly
10/06/1998US5816415 Integrated wafer cassette holder and wafer cassette box
10/06/1998US5816410 Wafer cushions for wafer shipper
10/06/1998US5816274 Apparartus for cleaning semiconductor wafers
10/06/1998US5816158 Process for printing a design on a surface to be printed
10/06/1998US5815947 Method and apparatus for maintaining sensitive articles in a contaminant-free environment
10/06/1998US5815942 Vapor drying system and method
10/06/1998CA2143265C Method of forming single-crystalline thin film
10/06/1998CA2122402C Dual jet spray cleaner
10/06/1998CA2011986C Substrate for a semiconductor device and method of preparation thereof
10/01/1998WO1998043465A1 Method for producing two communicating cavities in a substrate of monocrystalline material by chemical anisotropic etching
10/01/1998WO1998043322A1 Initiation connector for airbag systems
10/01/1998WO1998043307A2 Soldering globule assembly device for bga components
10/01/1998WO1998043304A1 Photovoltaic element and method for manufacture thereof
10/01/1998WO1998043303A1 Extended wavelength opto-electronic devices
10/01/1998WO1998043302A1 Apparatus for simulating a biological neuron
10/01/1998WO1998043299A2 SiC SEMICONDUCTOR ARRAY WITH ENHANCED CHANNEL MOBILITY
10/01/1998WO1998043298A1 Semiconductor capacitance device and semiconductor device made by using the same
10/01/1998WO1998043295A1 Circuit board and production method thereof
10/01/1998WO1998043294A1 Integration of low-k polymers into interlevel dielectrics using controlled electron-beam radiation
10/01/1998WO1998043293A1 Method for producing planar trenches
10/01/1998WO1998043292A1 Trench isolation
10/01/1998WO1998043291A1 Unbalanced bipolar electrostatic chuck power supplies and methods therefor
10/01/1998WO1998043290A1 Method for manufacturing semiconductor apparatus, and film carrier tape
10/01/1998WO1998043289A1 Semiconductor device, film carrier tape, and method for manufacturing them
10/01/1998WO1998043288A1 Semiconductor device and method for manufacturing the same
10/01/1998WO1998043287A1 Semiconductor device and method for manufacturing the same
10/01/1998WO1998043286A1 Tunable dielectric constant oxide and method of manufacture
10/01/1998WO1998043285A1 Direct vapor delivery of enabling chemical for enhanced hf etch process performance
10/01/1998WO1998043284A1 Titanium metal treatment method, method of forming an electrically conductive interconnect, and method of reducing contact resistance of an elemental titanium contact
10/01/1998WO1998043283A1 System for transferring wafers from cassettes to furnaces and method
10/01/1998WO1998043191A1 Method for continuous, non lot-based integrated circuit manufacturing
10/01/1998WO1998043186A2 Circuit simulation
10/01/1998WO1998042897A1 Susceptor designs for silicon carbide thin films
10/01/1998WO1998042791A1 Chemical-mechanical polishing slurry formulation and method for tungsten and titanium thin films
10/01/1998WO1998042790A1 Chemical-mechanical polishing slurry formulation and method for tungsten and titanium thin films
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