Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/1998
10/01/1998WO1998026449A3 A method for purification of acids for use in semiconductor processing
10/01/1998DE19813669A1 Bonded wafer especially silicon wafer
10/01/1998DE19811834A1 Semiconductor memory with transistor on substrate main surface
10/01/1998DE19755159A1 Thin-film coating installation
10/01/1998DE19753494A1 Silicon wafer especially SOI wafer production
10/01/1998DE19751544A1 Fault analyser for analysing origins of semiconductor faults
10/01/1998DE19750919A1 Semiconductor device e.g. DRAM
10/01/1998DE19750911A1 Resist imaging with UV radiation and positive chemical enhancement, giving high dry etching rate
10/01/1998DE19744687A1 FET with short gate length
10/01/1998DE19742616A1 Semiconductor memory device
10/01/1998DE19740947A1 Semiconductor component with first conductive substrate with main surface
10/01/1998DE19730117C1 Integrated CMOS circuit production
10/01/1998DE19727436C1 DRAM-cell arrangement with dynamic self-amplifying storage cells
10/01/1998DE19723652A1 NAND structure ROM device production
10/01/1998DE19719177C1 Solder ball application method for ball grid array component
10/01/1998DE19714385A1 Application of components, e.g. computer components in COB form
10/01/1998DE19711483A1 Vertikaler MOS-Transistor und Verfahren zu dessen Herstellung Vertical MOS transistor and method of producing the
10/01/1998CA2285627A1 Method for producing planar trenches
10/01/1998CA2285478A1 Apparatus for simulating a biological neuron
10/01/1998CA2285273A1 Trench isolation
10/01/1998CA2284771A1 Susceptor designs for silicon carbide thin films
10/01/1998CA2284760A1 Integration of low-k polymers into interlevel dielectrics using controlled electron-beam radiation
09/1998
09/30/1998EP0867984A2 Manufacture of photonic integrated circuits
09/30/1998EP0867948A2 Semiconductor light emitting device, method of producing the same, and optical device
09/30/1998EP0867945A2 High density gate array cell architecture
09/30/1998EP0867944A2 Compound semiconductor device and method for controlling characteristics of the same
09/30/1998EP0867941A2 An interconnect structure for use in an intergrated circuit
09/30/1998EP0867940A2 An underlayer for an aluminum interconnect
09/30/1998EP0867938A2 Semiconductor device comprising electrode pads and leads
09/30/1998EP0867936A2 Semiconductor device having a barrier film for preventing penetration of moisture
09/30/1998EP0867934A1 A method of fabricating an integrated circuit using crack stops
09/30/1998EP0867933A2 Electrostatic chuck having a unidirectionally conducting coupler layer
09/30/1998EP0867932A2 Method for making wire connections
09/30/1998EP0867931A1 Method of forming an oxide layer not wettable by solder
09/30/1998EP0867930A1 Method and device for electronic parts mounting and dispenser used therefor
09/30/1998EP0867929A2 Electronic interconnect structure and method for manufacturing it
09/30/1998EP0867928A2 Heat treatment method for a silicon wafer and a silicon wafer heat-treated by the method
09/30/1998EP0867927A2 A capacitor and method for making a capacitor
09/30/1998EP0867926A1 Capacitor electrode made of platinum metal
09/30/1998EP0867925A2 Organic protective film for silicon
09/30/1998EP0867924A2 Method for removing organic contaminants from a semiconductor surface
09/30/1998EP0867923A2 Thin film forming process
09/30/1998EP0867922A2 Semiconductor substrate and method of manufacturing the same
09/30/1998EP0867921A2 Substrate and production method thereof
09/30/1998EP0867920A2 Thin film formation process
09/30/1998EP0867919A2 Semiconductor substrate and process for producing same
09/30/1998EP0867918A2 Process for producing semiconductor substrate
09/30/1998EP0867917A2 Method and apparatus for separating composite member using fluid
09/30/1998EP0867916A2 Thermal processing apparatus
09/30/1998EP0867913A1 Plasma processing system and plasma processing method
09/30/1998EP0867819A2 Method for designing integrated circuit device based on maximum load capacity
09/30/1998EP0867818A2 Method, apparatus and computer program product for simulating ion implantation
09/30/1998EP0867776A2 Exposure method, exposure apparatus and method for making an exposure apparatus
09/30/1998EP0867775A2 Proximity exposure device with distance adjustment device
09/30/1998EP0867774A2 Exposure apparatus
09/30/1998EP0867773A2 Stage apparatus and method for producing circuit device utilizing the same
09/30/1998EP0867772A2 Illumination system and exposure apparatus
09/30/1998EP0867769A1 Negative type image recording material
09/30/1998EP0867751A2 Liquid crystal display panel
09/30/1998EP0867727A2 Probeless testing of pad buffers on a wafer
09/30/1998EP0867538A1 Heating apparatus
09/30/1998EP0867534A2 Semiconductor single crystal manufacturing apparatus
09/30/1998EP0867525A1 Titanium nitride films
09/30/1998EP0867070A1 Zero power fuse circuit
09/30/1998EP0867039A1 Method of characterizing group iii-v epitaxial semiconductor wafers incorporating an etch stop layer
09/30/1998EP0867038A1 Self-aligned trench isolation for memory array using sidewall spacers
09/30/1998EP0867037A1 Method of forming dielectric films with reduced metal contamination
09/30/1998EP0866742A1 Wide wrist articulated arm transfer device
09/30/1998EP0866735A1 USE OF PALLADIUM IMMERSION DEPOSITION TO SELECTIVELY INITIATE ELECTROLESS PLATING ON Ti AND W ALLOYS FOR WAFER FABRICATION
09/30/1998EP0846040A4 Polishing pads
09/30/1998EP0562035B1 Minimization of particle generation in cvd reactors and methods
09/30/1998EP0539481B1 Method of producing microchips
09/30/1998CN1194726A Method for manufacturing thin film transistor, liquid crystal display and electronic device both produced by the method
09/30/1998CN1194722A Semiconductor device
09/30/1998CN1194697A Thin film device having coating film, liquid crystal panel, electronic apparatus and method of manufacturing the thin film device
09/30/1998CN1194693A Microelectronic spring contact element
09/30/1998CN1194677A Method for overall regulation of the headbox and/or the former of a paper machine or equivalent
09/30/1998CN1194468A Semiconductor device with damp-proof separator
09/30/1998CN1194466A 半导体器件 Semiconductor devices
09/30/1998CN1194465A Semiconductor device and its producing method
09/30/1998CN1194464A Lead frame and method for producing semiconductor device using said lead frame
09/30/1998CN1194459A Packaging body of semiconductor device
09/30/1998CN1194458A Spherical lattice semiconductor device shell and its producing technology
09/30/1998CN1194457A Process for producing electronic devices
09/30/1998CN1194456A Chip connection method and device
09/30/1998CN1194455A Hard tape type automatic welding and packaging method with out evaporation plating
09/30/1998CN1194454A Cleaning device and cleaning method
09/30/1998CN1194453A Polishing technology for different conducting layer in semiconductor device
09/30/1998CN1194452A Film forming technology
09/30/1998CA2230821A1 Dispensing pump for epoxy encapsulation of integrated circuits
09/29/1998US5815685 Apparatus and method for correcting light proximity effects by predicting mask performance
09/29/1998US5815684 Configuration simulating method employing string model for simulating layer configuration of silicon wafer
09/29/1998US5815637 Humidifier for control of semi-conductor manufacturing environments
09/29/1998US5815607 Image reading device, and inspection apparatus and exposure apparatus using the device
09/29/1998US5815594 Semiconductor exposure method and apparatus
09/29/1998US5815520 light emitting semiconductor device and its manufacturing method
09/29/1998US5815494 Laser irradiation apparatus and laser irradiation method
09/29/1998US5815449 Semiconductor memory device
09/29/1998US5815446 Semiconductor memory device
09/29/1998US5815441 Non-volatile semiconductor memory device
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