| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
|---|
| 02/02/1999 | US5866934 Parallel and series-coupled transistors having gate conductors formed on sidewall surfaces of a sacrificial structure |
| 02/02/1999 | US5866933 Integrated circuit security system and method with implanted interconnections |
| 02/02/1999 | US5866932 Insulating film formed using an organic silane and method of producing semiconductor device |
| 02/02/1999 | US5866930 Semiconductor device and method of manufacturing the same |
| 02/02/1999 | US5866927 Integrated circuit devices having contact pads which are separated by sidewall spacers |
| 02/02/1999 | US5866926 Semiconductor device |
| 02/02/1999 | US5866925 Gallium nitride junction field-effect transistor |
| 02/02/1999 | US5866923 Semiconductor integrated circuit device having fundamental cells and method of manufacturing the semiconductor integrated circuit device using the fundamental cells |
| 02/02/1999 | US5866920 Semiconductor device and manufacturing method of the same |
| 02/02/1999 | US5866485 Borophosphosilicate glass |
| 02/02/1999 | US5866484 Semiconductor device and process of producing same |
| 02/02/1999 | US5866483 Method for anisotropically etching tungsten using SF6, CHF3, and N2 |
| 02/02/1999 | US5866482 Method for masking conducting layers to abate charge damage during plasma etching |
| 02/02/1999 | US5866481 Selective partial curing of spin-on-glass by ultraviolet radiation to protect integrated circuit dice near the wafer edge |
| 02/02/1999 | US5866478 Metallization process using artificial gravity |
| 02/02/1999 | US5866477 Method of polishing a chamfered portion of a semiconductor silicon substrate |
| 02/02/1999 | US5866476 Methods for forming moisture blocking layers |
| 02/02/1999 | US5866475 Method of forming solder bumps |
| 02/02/1999 | US5866474 Method for manufacturing gate oxide layers |
| 02/02/1999 | US5866473 Method of manufacturing a polysilicon gate having a dimension below the photolithography limitation |
| 02/02/1999 | US5866472 Direct gas-phase doping of semiconductor wafers using an organic dopant source |
| 02/02/1999 | US5866471 Method of forming semiconductor thin film and method of fabricating solar cell |
| 02/02/1999 | US5866470 Method of using an interface layer for stacked lamination sizing and sintering |
| 02/02/1999 | US5866468 Forming silicon oxide on silicon semiconductor |
| 02/02/1999 | US5866467 Method of improving oxide isolation in a semiconductor device |
| 02/02/1999 | US5866466 Methods of fabricating trench isolation regions with risers |
| 02/02/1999 | US5866465 Semiconductor processing method of forming a contact opening to a region adjacent a field isolation mass |
| 02/02/1999 | US5866463 Method of manufacturing a semiconductor apparatus |
| 02/02/1999 | US5866462 Double-spacer technique for forming a bipolar transistor with a very narrow emitter |
| 02/02/1999 | US5866460 Method of forming a multiple inplant lightly doped drain (MILDD) field effect transistor |
| 02/02/1999 | US5866459 Method of fabricating a contact structure for an MOS transistor entirely on isolation oxide |
| 02/02/1999 | US5866458 Method for fabricating a CMOS |
| 02/02/1999 | US5866457 Semiconductor read-only memory device and method of fabricating the same |
| 02/02/1999 | US5866456 Method for fabricating a semiconductor memory device |
| 02/02/1999 | US5866455 Method for forming a dram cell with a multiple pillar-shaped capacitor |
| 02/02/1999 | US5866454 Method of fabricating a capacitor structure for a dynamic random access memory cell with cellular voids |
| 02/02/1999 | US5866453 Etch process for aligning a capacitor structure and an adjacent contact corridor |
| 02/02/1999 | US5866452 Process for producing a silicon capacitor |
| 02/02/1999 | US5866451 Method of making a semiconductor device having 4t sram and mixed-mode capacitor in logic |
| 02/02/1999 | US5866450 Method for fabricating crown-shaped DRAM capacitor |
| 02/02/1999 | US5866449 Method of making polysilicon-via structure for four transistor, triple polysilicon layer SRAM cell including two polysilicon layer load resistor |
| 02/02/1999 | US5866448 Procedure for forming a lightly-doped-drain structure using polymer layer |
| 02/02/1999 | US5866447 Modified zero layer align method of twin well MOS fabrication |
| 02/02/1999 | US5866446 Method of manufacturing bimos device |
| 02/02/1999 | US5866445 High density CMOS circuit with split gate oxide |
| 02/02/1999 | US5866444 Integrated circuit and method of fabricating the same |
| 02/02/1999 | US5866443 Very dense integrated circuit package and method for forming the same |
| 02/02/1999 | US5866442 Method and apparatus for filling a gap between spaced layers of a semiconductor |
| 02/02/1999 | US5866441 Inverted chip bonded module with high packaging efficiency |
| 02/02/1999 | US5866438 Field emission type electron emitting device and method of producing the same |
| 02/02/1999 | US5866437 Dynamic process window control using simulated wet data from current and previous layer data |
| 02/02/1999 | US5866436 Process of manufacturing an intergrated circuit having an interferometrically profiled mounting film |
| 02/02/1999 | US5866435 Methods of fabricating profiled device isolation trenches in integrated circuits |
| 02/02/1999 | US5866306 Polyalkylphenylsilane |
| 02/02/1999 | US5866305 Mixture of ethyl lactate, gamma butyrolactone and ethyl3-ethoxypropionate |
| 02/02/1999 | US5866303 Resist developing method by magnetic field controlling, resist developing apparatus and method of fabricating semiconductor device |
| 02/02/1999 | US5866302 Pattern formation method |
| 02/02/1999 | US5866301 Method of manufacturing thin film diode |
| 02/02/1999 | US5866300 Method of and system for exposing pattern on object by charged particle beam |
| 02/02/1999 | US5866299 Negative photoresist composition |
| 02/02/1999 | US5866283 Method of monitoring a photolithographic process through utilization of fractional radiant energy test pattern |
| 02/02/1999 | US5866280 Exposure mask and manufacturing method thereof |
| 02/02/1999 | US5866250 Adhesive tape for electronic parts and liquid adhesive |
| 02/02/1999 | US5866226 Polishing agent used for polishing semiconductor wafers and polishing method using the same |
| 02/02/1999 | US5866213 Method for producing thin films by low temperature plasma-enhanced chemical vapor deposition using a rotating susceptor reactor |
| 02/02/1999 | US5866198 Method of fabricating a compound semiconductor having a plurality of layers using a flow compensation technique |
| 02/02/1999 | US5866197 Method for producing thick crack-free coating from hydrogen silsequioxane resin |
| 02/02/1999 | US5866094 Method of feeding dopant for continuously-charged method and a dopant composition |
| 02/02/1999 | US5866044 Lead free conductive composites for electrical interconnections |
| 02/02/1999 | US5866031 Slurry formulation for chemical mechanical polishing of metals |
| 02/02/1999 | US5866020 Method of manufacturing TAB tapes and laminated body for producing the same |
| 02/02/1999 | US5865938 Wafer chuck for inducing an electrical bias across wafer heterojunctions |
| 02/02/1999 | US5865937 Broad-band adjustable power ratio phase-inverting plasma reactor |
| 02/02/1999 | US5865920 Method of forming electrode on ceramic green sheet and method of manufacturing multilayer ceramic electronic component |
| 02/02/1999 | US5865902 Method for cleaning electronic hardware components |
| 02/02/1999 | US5865901 Wafer surface cleaning apparatus and method |
| 02/02/1999 | US5865900 Etch method for removing metal-fluoropolymer residues |
| 02/02/1999 | US5865897 Method of producing film of nitrogen-doped II-VI group compound semiconductor |
| 02/02/1999 | US5865893 Spin coating apparatus |
| 02/02/1999 | US5865891 Planarization process using artificial gravity |
| 02/02/1999 | US5865888 Semiconductor device epitaxial layer lateral growth rate control method using CBr4 |
| 02/02/1999 | US5865879 Gas scrubber used in fabricating semiconductor devices and gas filtering method using the same |
| 02/02/1999 | US5865588 Chamber, at least for the transport of workpieces, a chamber combination, a vacuum treatment facility as well as a transport method |
| 02/02/1999 | US5865421 Valve structure for use in a vaporizer |
| 02/02/1999 | US5865365 Method of fabricating an electronic circuit device |
| 02/02/1999 | US5865321 Slip free vertical rack design |
| 02/02/1999 | US5865163 Dicing saw alignment for array ultrasonic transducer fabrication |
| 02/02/1999 | US5864966 Method for drying a sample substrate |
| 02/02/1999 | US5864946 Method of making contact tip structures |
| 02/02/1999 | US5864932 Partially or completely encapsulated top electrode of a ferroelectric capacitor |
| 02/02/1999 | CA2061624C Sub-micron device fabrication |
| 01/28/1999 | WO1999004606A2 Compact microwave downstream plasma system |
| 01/28/1999 | WO1999004453A1 Contact and method for producing a contact |
| 01/28/1999 | WO1999004440A1 Microelectronic components and electronic networks comprising dna |
| 01/28/1999 | WO1999004437A1 Vertical power mosfet |
| 01/28/1999 | WO1999004436A1 Method for making a vertical mos transistor |
| 01/28/1999 | WO1999004434A2 Hemispherical grained polysilicon semiconductor capacitor structure and method |
| 01/28/1999 | WO1999004431A1 Integrated circuit and method for the production thereof |
| 01/28/1999 | WO1999004430A1 Semiconductor flip-chip package and method for the fabrication thereof |
| 01/28/1999 | WO1999004428A1 Method for producing a matrix from thin film transistors with storage capacities |