| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
|---|
| 07/27/1999 | US5929176 Vinyl 4-tetrahydropyranyloxybenzal-vinyl 4-hydroxybenzal-vinyl tetrahydropyranyl ether-vinyl acetate copolymer, vinyl 4-tetrahydropyranyloxybenzal-vinyl tetrahydropyranyl ether-vinyl acetate copolymer and preparation methods thereof |
| 07/27/1999 | US5928969 Ammonium fluoride and ammonium hydroxide etchants |
| 07/27/1999 | US5928967 Selective oxide-to-nitride etch process using C4 F8 /CO/Ar |
| 07/27/1999 | US5928966 Forming multilayer electrodes with patterns |
| 07/27/1999 | US5928965 Method for dry-etching of silicon substrate |
| 07/27/1999 | US5928964 System and method for anisotropic etching of silicon nitride |
| 07/27/1999 | US5928963 Plasma etching method |
| 07/27/1999 | US5928962 Process for forming a semiconductor device |
| 07/27/1999 | US5928961 Wear resistance during polishing |
| 07/27/1999 | US5928960 Process for reducing pattern factor effects in CMP planarization |
| 07/27/1999 | US5928959 Integrated circuits and multilayers with reduced dishing caused by polishing |
| 07/27/1999 | US5928837 Negative-working chemical-sensitization photoresist composition comprising oxime sulfonate compounds |
| 07/27/1999 | US5928818 Photoresist compositions |
| 07/27/1999 | US5928816 Lithography technique in semiconductor industry; bilayer structure |
| 07/27/1999 | US5928813 Attenuated phase shift mask |
| 07/27/1999 | US5928791 Low dielectric constant material with improved dielectric strength |
| 07/27/1999 | US5928786 Monocrystalline silicon wafer and method of thermally oxidizing a surface thereof |
| 07/27/1999 | US5928768 Silicon nitride circuit board |
| 07/27/1999 | US5928732 Method of forming silicon oxy-nitride films by plasma-enhanced chemical vapor deposition |
| 07/27/1999 | US5928598 Acoustic wave frequency selection components. |
| 07/27/1999 | US5928595 Method of manufacturing a semiconductor component |
| 07/27/1999 | US5928537 Pneumatic pickup tool for small parts |
| 07/27/1999 | US5928528 Plasma treatment method and plasma treatment system |
| 07/27/1999 | US5928526 Method for manufacturing a substrate having an irregular shape |
| 07/27/1999 | US5928506 Water purifier for drinking water |
| 07/27/1999 | US5928458 Flip chip bonding with non conductive adhesive |
| 07/27/1999 | US5928428 Apparatus and method for manufacturing a semiconductor device |
| 07/27/1999 | US5928427 Apparatus for low pressure chemical vapor deposition |
| 07/27/1999 | US5928426 Method and apparatus for treating exhaust gases from CVD, PECVD or plasma etch reactors |
| 07/27/1999 | US5928425 Chemical catcher |
| 07/27/1999 | US5928422 Regulating cylinder unit in a single-crystal pulling apparatus and a jig for installing them |
| 07/27/1999 | US5928421 Method of forming gallium nitride crystal |
| 07/27/1999 | US5928390 Vertical processing apparatus |
| 07/27/1999 | US5928389 Method and apparatus for priority based scheduling of wafer processing within a multiple chamber semiconductor wafer processing tool |
| 07/27/1999 | US5928077 Clean room for manufacturing of semiconductor device |
| 07/27/1999 | US5928062 Vertical polishing device and method |
| 07/27/1999 | US5927995 Reduction of threading dislocations by amorphization and recrystallization |
| 07/27/1999 | US5927994 Method for manufacturing thin film |
| 07/27/1999 | US5927993 Backside processing method |
| 07/27/1999 | US5927992 Method of forming a dielectric in an integrated circuit |
| 07/27/1999 | US5927991 Method for forming triple well in semiconductor device |
| 07/27/1999 | US5927589 Method and fixture for use in bonding a chip to a substrate |
| 07/27/1999 | US5927560 Dispensing pump for epoxy encapsulation of integrated circuits |
| 07/27/1999 | US5927505 Overmolded package body on a substrate |
| 07/27/1999 | US5927503 Tray for processing and/or shipping integrated circuit device |
| 07/27/1999 | US5927308 Megasonic cleaning system |
| 07/27/1999 | US5927306 Silicon carbide |
| 07/27/1999 | US5927305 Cleaning apparatus |
| 07/27/1999 | US5927303 Substrate processing apparatus |
| 07/27/1999 | US5927302 Method for rinsing plate-shaped articles and cleaning bath and cleaning equipment used in the same |
| 07/27/1999 | US5927263 Method for manufacturing completely circular semiconductor wafers |
| 07/27/1999 | US5927193 Process for via fill |
| 07/27/1999 | US5927077 Processing system hot plate construction substrate |
| 07/27/1999 | US5926951 Method of stacking electronic components |
| 07/23/1999 | CA2259725A1 Method of fabricating capacitors in semiconductor devices |
| 07/22/1999 | WO1999036965A1 A high voltage transistor having a field oxide gate region |
| 07/22/1999 | WO1999036964A1 Source-down fet |
| 07/22/1999 | WO1999036963A1 Vertical igbt with an soi structure |
| 07/22/1999 | WO1999036957A1 Semiconductor package |
| 07/22/1999 | WO1999036956A1 Etching methods for anisotropic platinum profile |
| 07/22/1999 | WO1999036955A1 Plasma annealing of substrates to improve adhesion |
| 07/22/1999 | WO1999036954A1 Semiconductor device and method of manufacturing the same |
| 07/22/1999 | WO1999036953A1 Nanoporous silica dielectric films modified by electron beam exposure and having low dielectric constant and low water content |
| 07/22/1999 | WO1999036952A1 Metallization process and apparatus |
| 07/22/1999 | WO1999036951A1 Method of eliminating edge effect in chemical vapor deposition of a metal |
| 07/22/1999 | WO1999036950A1 Exposure system, exposure apparatus, and coating developing exposure apparatus |
| 07/22/1999 | WO1999036948A1 Integrated large area microstructures and micromechanical devices |
| 07/22/1999 | WO1999036947A1 Method for using a hard mask for critical dimension growth containment |
| 07/22/1999 | WO1999036946A1 Wafer aligner in center of front end frame of vacuum system |
| 07/22/1999 | WO1999036945A1 Method and device for separating and transferring electronic components |
| 07/22/1999 | WO1999036944A1 Method and device for drying an object |
| 07/22/1999 | WO1999036943A1 Device for carrying out wet treatment of substrates |
| 07/22/1999 | WO1999036941A2 Trench isolation for micromechanical devices |
| 07/22/1999 | WO1999036931A2 Low ceiling temperature process for a plasma reactor with heated source of a polymer-hardening precursor material |
| 07/22/1999 | WO1999036790A2 Test probe interface unit and method of manufacturing the same |
| 07/22/1999 | WO1999036599A1 Semiconductor etching process and apparatus |
| 07/22/1999 | WO1999036589A1 Method of cleaning a cvd cold-wall chamber and exhaust lines |
| 07/22/1999 | WO1999036588A1 Method and apparatus for improved chemical vapor deposition processes using tunable temperature controlled gas injectors |
| 07/22/1999 | WO1999036587A1 Vertical plasma enhanced process apparatus and method |
| 07/22/1999 | WO1999036586A1 Apparatus and method for plasma enhanced chemical vapor deposition (pecvd) in a single wafer reactor |
| 07/22/1999 | WO1999036585A1 Free floating shield and semiconductor processing system |
| 07/22/1999 | WO1999036484A1 Curable epoxy-based compositions |
| 07/22/1999 | WO1999036353A1 Process for the formation of oxide ceramic thin film |
| 07/22/1999 | WO1999036336A1 Semiconductor wafer cassette positioning and detection mechanism |
| 07/22/1999 | WO1999036196A1 A cleaning/buffing apparatus for use in a wafer processing device |
| 07/22/1999 | WO1999023699A3 Polygon representation in an integrated circuit layout |
| 07/22/1999 | WO1999001893A8 Method for producing layered structures on a substrate, substrate and semiconductor components produced according to said method |
| 07/22/1999 | WO1998057378A9 Latch-up free power mos-bipolar transistor |
| 07/22/1999 | DE19901922A1 Loading and unloading mechanism for integrated circuit into or from holding socket |
| 07/22/1999 | DE19900165A1 Method for forming shaped wire connection |
| 07/22/1999 | DE19860809A1 New di-tert.-butyl 5-norbornene-2.3-dicarboxylate and copolymers useful in photoresist, e.g. for structurizing silicon wafer |
| 07/22/1999 | DE19860731A1 Installation for washing substrates during manufacture of semiconductor components |
| 07/22/1999 | DE19843179A1 Production of semiconductor device especially with very fine pattern |
| 07/22/1999 | DE19842459A1 Signal transfer system in microcomputer having circuits operating with different source voltage |
| 07/22/1999 | DE19842245A1 Manufacturing semiconductor component, containing integrated logic circuit and DRAM |
| 07/22/1999 | DE19840402A1 DMOS power element structure production |
| 07/22/1999 | DE19838857A1 Semiconductor arrangement for memory cell evaluation |
| 07/22/1999 | DE19837037A1 Reticle for stepwise and repetition illumination in semiconductor manufacture |
| 07/22/1999 | DE19806231C1 Device for gripping an object by a gripping component with interacting adjustable gripping components |
| 07/22/1999 | DE19802161A1 Stacked vias manufacturing method for microelectronic component with several wiring planes |