Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
07/1999
07/01/1999WO1999033087A1 Focus rings and methods therefor
07/01/1999WO1999033086A1 Techniques for etching a transition metal-containing layer
07/01/1999WO1999032940A1 Repetitively projecting a mask pattern using a time-saving height measurement
07/01/1999WO1999032938A2 Illumination system for projector
07/01/1999WO1999032935A1 Photosensitive resin composition and process for producing the same
07/01/1999WO1999032890A1 Micromechanical device and corresponding production method
07/01/1999WO1999032691A1 Insulating material, substrate covered with an insulating film, method of producing the same, and thin-film device
07/01/1999WO1999032685A1 Method for selectively depositing bismuth based ferroelectric films
07/01/1999WO1999032684A1 Method for deposition of ferroelectric thin films
07/01/1999WO1999032570A1 A composition for chemical mechanical polishing
07/01/1999WO1999032381A1 Semiconductor wafer input/output handling system
07/01/1999WO1999032208A1 Method for sealing and/or joining an end of a ceramic filter
07/01/1999WO1999025023B1 Asic routing architecture
07/01/1999WO1999021274A3 Integrated electronic circuit comprising an oscillator with passive circuit elements
07/01/1999WO1999020552A8 Wafer transport device
07/01/1999WO1999019526A3 Apparatus and method for adjusting density distribution of a plasma
07/01/1999WO1998019336A9 Uv/halogen treatment for dry oxide etching
07/01/1999DE19860062A1 Register constraints for construction of low power VLSI circuits
07/01/1999DE19860061A1 Checking for combinational equivalence in circuits
07/01/1999DE19857852A1 Semiconductor component with first conductivity semiconductor substrate
07/01/1999DE19857610A1 Method for programming power independent memory modules with cell matrix of NAND type
07/01/1999DE19849938A1 Flash memory with tunnel insulation films
07/01/1999DE19848834A1 Applying integrated circuit flip-chip to substrate
07/01/1999DE19835898A1 Semiconductor component with stacked coupling contact(s)
07/01/1999DE19829864A1 Semiconductor module with marking aperture section
07/01/1999DE19827214A1 Semiconductor device production involves impurity implantation into a silicide layer
07/01/1999DE19757560A1 Verfahren zur Herstellung einer porösen Schicht mit Hilfe eines elektrochemischen Ätzprozesses A process for preparing a porous layer with the aid of an electrochemical etching process
07/01/1999DE19757119A1 Chemical mechanical polishing of tungsten@ via plugs
07/01/1999DE19756887A1 Kunststoffverbundkörper Plastic composite
07/01/1999DE19756601A1 Verfahren zum Herstellen eines Speicherzellen-Arrays A method for manufacturing a memory cell array
07/01/1999DE19756536A1 Polishing disc-shaped workpieces, such as semiconductor discs secured on support plates
07/01/1999DE19755967A1 Depth profile analysis of thin layers or films in silicon wafers near surface using spectrometric methods
07/01/1999DE19752517A1 Liquid applicator for surfaces of semiconductor, glass, ceramic disc, etc.
07/01/1999DE19752509A1 Object measuring device for measuring e.g. semiconductor wafers, at selected positions by image processing
06/1999
06/30/1999EP0926927A1 Apparatus and method for preparing organic EL devices
06/30/1999EP0926831A2 Pass transistor circuit
06/30/1999EP0926830A2 Level conversion circuit and semiconductor integrated circuit employing the same
06/30/1999EP0926784A2 Method of fabricating opto-electronic devices
06/30/1999EP0926741A2 Gate structure and method of forming same
06/30/1999EP0926740A2 A transient voltage suppressor
06/30/1999EP0926739A1 A structure of and method for forming a mis field effect transistor
06/30/1999EP0926737A2 A screened EEPROM cell
06/30/1999EP0926736A2 Semiconductor integrated circuit having thereon on-chip capacitors
06/30/1999EP0926734A2 Method and apparatus for delivering electrical power to a semiconducteur die
06/30/1999EP0926732A2 Process for producing semiconductor device and pressure-sensitive adhesive sheet for surface protection
06/30/1999EP0926731A1 Process for the final passivation of intergrated circuits
06/30/1999EP0926728A1 Method of manufacturing a BiCMOS semiconductor device
06/30/1999EP0926727A1 Process for manufacturing semiconductor device with migrated gate material
06/30/1999EP0926726A1 Fabrication process and electronic device having front-back through contacts for bonding onto boards
06/30/1999EP0926725A2 Defect induced buried oxide (dibox) for throughput SOI
06/30/1999EP0926724A2 Patterning of porous silicon using silicon carbide mask
06/30/1999EP0926723A1 Process for forming front-back through contacts in micro-integrated electronic devices
06/30/1999EP0926722A2 Method for detecting under-etched vias
06/30/1999EP0926721A2 Dual damascene with bond pads
06/30/1999EP0926720A2 Tape carrier manufacture
06/30/1999EP0926719A2 Method and apparatus for heat-treating an SOI substrate and method of preparing an SOI substrate by using the same
06/30/1999EP0926718A2 Heat treatment method for monocrystalline silicon wafers
06/30/1999EP0926717A2 Polysilicon capacitor electrode
06/30/1999EP0926716A1 Method and apparatus for plasma processing
06/30/1999EP0926715A2 Chemical mechanical polishing for isolation dielectric planarization
06/30/1999EP0926714A1 Silicon wafer storage water and silicon wafer storage method
06/30/1999EP0926713A2 Method and apparatus for etching a semiconductor article and method of preparing a semiconductor article by using the same
06/30/1999EP0926712A2 SOI substrate producing method and apparatus
06/30/1999EP0926711A2 Gate electrode fabrication method
06/30/1999EP0926710A2 Method of manufacturing a gate electrode
06/30/1999EP0926709A2 Method of manufacturing an SOI structure
06/30/1999EP0926708A2 Method and apparatus for processing semiconductor wafers
06/30/1999EP0926707A2 Heat treatment apparatus, heat treatment process employing the same, and process for producing semiconductor article
06/30/1999EP0926706A2 Substrate processing apparatus, substrate support apparatus, substrate processing method, and substrate manufacturing method
06/30/1999EP0926699A1 Method and apparatus for deflecting charged particles
06/30/1999EP0926556A2 Projection exposure system and exposure method
06/30/1999EP0926506A2 Integrated circuit with latch up prevention during burn in testing
06/30/1999EP0926430A1 Apparatus and method for the control of the function of an industrial installation
06/30/1999EP0926429A1 Distribution system for a working gas and supply installation for a working gas using said system
06/30/1999EP0926271A1 SINGLE CRYSTAL SiC AND PROCESS FOR PREPARING THE SAME
06/30/1999EP0926270A1 Process and apparatus for producing a single crystal
06/30/1999EP0926269A2 Anodizing apparatus and method and porous substrate
06/30/1999EP0926260A2 Using antibody - antigen interaction for formation of a patterened metal film
06/30/1999EP0926259A2 Reactor for chemical vapour phase deposition
06/30/1999EP0925933A2 Substrate for recording head, recording head and method for producing same
06/30/1999EP0925888A1 Sample separating apparatus and method, and substrate manufacture method
06/30/1999EP0925887A1 Object separating apparatus and method, and method of manufacturing semiconductor substrate
06/30/1999EP0925609A1 Stacked read-only memory
06/30/1999EP0925607A1 Method for producing a dram cellular arrangement
06/30/1999EP0925606A1 Liquid source formation of thin films using hexamethyl-disilazane
06/30/1999EP0925605A1 Method and apparatus for etching a semiconductor wafer
06/30/1999EP0925604A2 A method of manufacturing an electronic device whereby a conductive layer is provided on an electrically insulating substrate, from which layer a conductor pattern is formed
06/30/1999EP0925600A1 Thin film electrostatic shield for inductive plasma processing
06/30/1999EP0925585A1 Giant magnetoresistive effect memory cell
06/30/1999EP0925529A1 Alkysulfonyloximes for high-resolution i-line photoresists of high sensitivity
06/30/1999EP0925513A1 Wafer scale high density probe assembly, apparatus for use thereof and methods of fabrication thereof
06/30/1999EP0925510A1 Integrated compliant probe for wafer level test and burn-in
06/30/1999EP0925497A1 Apparatus and method for detecting micro defects in semi-conductors
06/30/1999EP0925178A1 Memory device using movement of protons
06/30/1999EP0925149A1 Aerodynamic aerosol chamber
06/30/1999EP0925142A1 Laser removal of foreign materials from surfaces
06/30/1999EP0787355B1 Process for producing a read-only storage cell arrangement with vertical mos transistors
06/30/1999EP0733270B1 Radiation-emitting semiconductor diode and method of manufacturing such a diode
06/30/1999CN1221497A Metal ion reduction of aminochromatic chromophores and their use in synthesis of low metal bottom anti-reflective coatings for photoresists
06/30/1999CN1221460A Temp. controlling method and apparatus for plasma processing chamber
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