Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/1999
11/02/1999US5977785 Method and apparatus for rapidly varying the operating temperature of a semiconductor device in a testing environment
11/02/1999US5977701 Color cathode ray tube with improved transmittance of selective wavelengths
11/02/1999US5977643 Chip-size semiconductor package
11/02/1999US5977642 Dendrite interconnect for planarization and method for producing same
11/02/1999US5977641 Semiconductor device and method for manufacturing the same
11/02/1999US5977638 Edge metal for interconnect layers
11/02/1999US5977637 Integrated electronic device having flip-chip connection with circuit board
11/02/1999US5977636 Method of forming an electrically conductive contact plug, method of forming a reactive or diffusion barrier layer over a substrate, integrated circuitry, and method of forming a layer of titanium boride
11/02/1999US5977635 Multi-level conductive structure including low capacitance material
11/02/1999US5977634 Diffusion barrier for electrical interconnects in an integrated circuit
11/02/1999US5977632 Flip chip bump structure and method of making
11/02/1999US5977631 Semiconductor device including a semiconductor package with electromagnetic coupling slots
11/02/1999US5977629 Condensed memory matrix
11/02/1999US5977628 Semiconductor device mounted in resin sealed container
11/02/1999US5977627 Packaging construction for very large scale integrated-circuit chips
11/02/1999US5977620 Lead frame having a Ni-Mn alloy layer and a Pd layer
11/02/1999US5977617 Semiconductor device having multilayer film carrier
11/02/1999US5977613 Electronic component, method for making the same, and lead frame and mold assembly for use therein
11/02/1999US5977609 Method and apparatus for insulating material using trenches
11/02/1999US5977608 Modified poly-buffered isolation
11/02/1999US5977607 Method of forming isolated regions of oxide
11/02/1999US5977606 Dielectric isolated high voltage semiconductor device
11/02/1999US5977604 Buried layer in a semiconductor formed by bonding
11/02/1999US5977602 Semiconductor device having an oxygen-rich punchthrough region extending through the length of the active region
11/02/1999US5977601 Method for etching memory gate stack using thin resist layer
11/02/1999US5977600 Formation of shortage protection region
11/02/1999US5977599 Formation of a metal via using a raised metal plug structure
11/02/1999US5977598 High load resistance implemented in a separate polysilicon layer with diffusion barrier therein for preventing load punch through therefrom
11/02/1999US5977597 Layout structure of semiconductor memory with cells positioned in translated relation in first and second directions
11/02/1999US5977596 Depletion controlled isolation stage
11/02/1999US5977595 Apparatus and method for electrostatic discharge protection with improved current dispersion
11/02/1999US5977594 Protecting circuit for a semiconductor circuit
11/02/1999US5977593 Semiconductor device and method of manufacturing the same
11/02/1999US5977592 Semiconductor device having an improved structure and capable of greatly reducing its occupied area
11/02/1999US5977591 High-voltage-resistant MOS transistor, and corresponding manufacturing process
11/02/1999US5977590 Semiconductor device having insulation gate type field effect transistor of high breakdown voltage
11/02/1999US5977589 DRAM cell arrangement and method for the production thereof
11/02/1999US5977588 Radio frequency power MOSFET device having improved performance characteristics
11/02/1999US5977587 Semiconductor device and a method for wiring of a semiconductor device
11/02/1999US5977586 Non-volatile integrated low-doped drain device with partially overlapping gate regions
11/02/1999US5977585 Deposited tunneling oxide
11/02/1999US5977584 Memory devices containing dual-string NOR memory arrays therein
11/02/1999US5977583 Semiconductor memory device including memory cells having a capacitor on bit line structure
11/02/1999US5977582 Capacitor comprising improved TaOx -based dielectric
11/02/1999US5977581 Dielectric material and process to create same
11/02/1999US5977580 Memory device and fabrication method thereof
11/02/1999US5977579 Trench dram cell with vertical device and buried word lines
11/02/1999US5977578 Method of forming dynamic random access memory circuitry and dynamic random access memory
11/02/1999US5977577 Ferroelectric based memory devices utilizing low curie point ferroelectrics and encapsulation
11/02/1999US5977575 Semiconductor sensor device comprised of plural sensor chips connected to function as a unit
11/02/1999US5977574 High density gate array cell architecture with sharing of well taps between cells
11/02/1999US5977573 Wiring pattern for a semiconductor integrated circuit device
11/02/1999US5977570 Semiconductor device and manufacturing method thereof
11/02/1999US5977564 Semiconductor device
11/02/1999US5977563 Active matrix substrate and correcting method of structural defect
11/02/1999US5977561 Elevated source/drain MOSFET with solid phase diffused source/drain extension
11/02/1999US5977560 Thin film transistor constructions with polycrystalline silicon-germanium alloy doped with carbon in the channel region
11/02/1999US5977559 Thin-film transistor having a catalyst element in its active regions
11/02/1999US5977553 Mechanism for preventing metallic ion contamination of a wafer in ion implantation equipment
11/02/1999US5977551 Method capable of accurately simulating ion implantation at a high speed
11/02/1999US5977550 Charged-particle-beam optical systems
11/02/1999US5977543 Sample for transmission electron microscope analysis having no conductive material in the electron beam path, and its manufacturing method
11/02/1999US5977526 Heater for high vacuum optical view port
11/02/1999US5977519 Heating element with a diamond sealing material
11/02/1999US5977512 Multi-wavelength laser soldering device with substrate cleaning beam
11/02/1999US5977216 Silicone rubber compositions for high-voltage electrical insulators and polymeric bushings
11/02/1999US5977041 Aqueous rinsing composition
11/02/1999US5976994 Method and system for locally annealing a microstructure formed on a substrate and device formed thereby
11/02/1999US5976993 Method for reducing the intrinsic stress of high density plasma films
11/02/1999US5976991 Deposition of silicon dioxide and silicon oxynitride using bis(tertiarybutylamino) silane
11/02/1999US5976990 Method for optimization of thin film deposition
11/02/1999US5976989 Thin film transistor fabrication method, active matrix substrate fabrication method, and liquid crystal display device
11/02/1999US5976988 Etching material and etching method
11/02/1999US5976987 In-situ corner rounding during oxide etch for improved plug fill
11/02/1999US5976986 Low pressure and low power C12 /HC1 process for sub-micron metal etching
11/02/1999US5976985 Processing methods of forming contact openings and integrated circuitry
11/02/1999US5976984 Process of making unlanded vias
11/02/1999US5976983 Method of cleaning semiconductor wafers after lapping
11/02/1999US5976982 Methods for protecting device components from chemical mechanical polish induced defects
11/02/1999US5976981 Method for manufacturing a reverse crown capacitor for DRAM memory cell
11/02/1999US5976980 Method and apparatus providing a mechanical probe structure in an integrated circuit die
11/02/1999US5976979 Sequential oxygen plasma treatment and chemical mechanical polish (CMP) planarizing method for forming planarized low dielectric constant dielectric layer
11/02/1999US5976978 Process for repairing data transmission lines of imagers
11/02/1999US5976977 Process for DRAM capacitor formation
11/02/1999US5976976 Method of forming titanium silicide and titanium by chemical vapor deposition
11/02/1999US5976975 Refractory metal capped low resistivity metal conductor lines and vias
11/02/1999US5976974 Method of forming redundant signal traces and corresponding electronic components
11/02/1999US5976973 Dry etching wiring layers using photoresist pattern
11/02/1999US5976972 Method of making semiconductor apparatus having wiring groove and contact hole formed in a self-alignment manner
11/02/1999US5976971 Fabrication process of a semiconductor device having an interconnection structure
11/02/1999US5976970 Depositing metal in trenches in semiconductor substrate
11/02/1999US5976969 Multilayer; forming aperture in dielectric; coating with refractory; overcoating with aluminum
11/02/1999US5976968 Coating a metal over quartz substrate; then photoresist; patterning; etching; removal; phase shifting
11/02/1999US5976967 Dual damascene process for multi-level metallization and interconnection structure
11/02/1999US5976966 Converting a hydrogen silsesquioxane film to an oxide using a first heat treatment and a second heat treatment with the second heat treatment using rapid thermal processing
11/02/1999US5976965 Method for arranging minute metallic balls
11/02/1999US5976964 Method of improving interconnect of semiconductor device by utilizing a flattened ball bond
11/02/1999US5976963 Self-aligned metallurgy
11/02/1999US5976962 Method of fabricating semiconductor device
11/02/1999US5976961 Multilayer; controlling dope concentration