Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/1999
11/11/1999WO1999057761A1 Method for fabricating a lateral rf mos device with a non-diffusion source-backside connection
11/11/1999WO1999057760A1 Semiconductor device
11/11/1999WO1999057759A1 Method of manufacturing a radiation hardened semiconductor device having active regions and isolation regions
11/11/1999WO1999057758A1 A two-step borophosphosilicate glass deposition process and related devices and apparatus
11/11/1999WO1999057757A1 Method for etching silicon dioxide using fluorocarbon gas chemistry
11/11/1999WO1999057756A1 A novel non-hbr shallow trench isolation etch process
11/11/1999WO1999057755A1 Selective dry etching method
11/11/1999WO1999057754A1 Wet processing methods for the manufacture of electronic components
11/11/1999WO1999057753A1 Apparatus for improved biasing and retaining of a workpiece in a workpiece processing system
11/11/1999WO1999057752A1 Method and device for changing a semiconductor wafer position
11/11/1999WO1999057751A2 Method and apparatus for controlling the radial temperature gradient of a wafer while ramping the wafer temperature
11/11/1999WO1999057750A2 Method of manufacturing a semiconductor device
11/11/1999WO1999057747A1 Cvd apparatus and process for depositing titanium films
11/11/1999WO1999057746A1 Method and apparatus for ionized physical vapor deposition
11/11/1999WO1999057745A1 Charged particle beam illumination of blanking aperture array
11/11/1999WO1999057732A1 Lighting system, especially for extreme ultraviolet lithography
11/11/1999WO1999057728A1 A two bit rom cell and process for producing same
11/11/1999WO1999057727A1 Eeprom
11/11/1999WO1999057726A1 Circuit with a sensor and non-volatile memory
11/11/1999WO1999057607A1 Protection of lithographic components from particle contamination
11/11/1999WO1999057606A1 Mirror projection system for a scanning lithographic projection apparatus, and lithographic apparatus comprising such a system
11/11/1999WO1999057596A1 Lithographic apparatus comprising a dedicated mirror projection system
11/11/1999WO1999057583A1 Broadband diffractive diffuser and associated methods
11/11/1999WO1999057344A1 Silicon semiconductor wafer and method for producing the same
11/11/1999WO1999057343A1 Injector for reactor
11/11/1999WO1999057342A1 Method and device for plating substrate
11/11/1999WO1999057332A1 A method of etching an opening
11/11/1999WO1999057331A1 Microchamber
11/11/1999WO1999057330A1 Oxide/organic polymer multilayer thin films deposited by chemical vapor deposition
11/11/1999WO1999057329A1 A sub-atmospheric chemical vapor deposition system with dopant bypass
11/11/1999WO1999056972A1 Indirect endpoint detection by chemical reaction and chemiluminescence
11/11/1999WO1999056920A1 Dual arm apparatus with co-axial drive shafts
11/11/1999WO1999056595A1 Tiltable z-axis platform based on uni-directional tilt platform
11/11/1999WO1999048136A3 Solar cell arrangement
11/11/1999WO1999045591A9 An integrated circuit package having interchip bonding and method therefor
11/11/1999WO1999045582A9 A method for generation of electrical conducting or semiconducting structures in three dimensions and methods for erasure of the same structures
11/11/1999DE19919962A1 Insulating trench isolation for MOS-transistors in the manufacture of DRAM
11/11/1999DE19914775A1 Guide hole arrangement in testing device of semiconductor integrated circuits
11/11/1999DE19907062A1 Manufacture of DRAM cell capacitor
11/11/1999DE19821910C1 Stacked capacitor manufacturing method
11/11/1999DE19820816A1 Bond pad structure used for micromechanical sensors
11/11/1999DE19820439A1 Method of preventing the snap-down effect in a power rectifier with a high breakdown voltage
11/11/1999DE19819542A1 Schaltungsanordnung mit einem Sensorelement und einem nichtflüchtigen Speichermittel Circuit arrangement having a sensor element and a non-volatile memory means
11/11/1999DE19819211A1 Holder for semiconductor bars during optoelectronic component manufacture
11/11/1999DE19819200A1 Verfahren zur Herstellung von Kontaktstrukturen in Halbleiterbauelementen A process for the production of contact structures in semiconductor devices
11/11/1999CA2331277A1 Planar resist structure, in particular encapsulation for electronic components and thermomechanical production process
11/11/1999CA2331079A1 Method and device for changing a semiconductor wafer position
11/11/1999CA2330998A1 A method of etching an opening
11/11/1999CA2329441A1 Laminated integrated circuit package
11/11/1999CA2296583A1 Charged particle beam illumination of blanking aperture array
11/11/1999CA2270662A1 Field effect transistor, control method for controlling such a field effect transistor and a frequency mixer means including such a field effect transistor
11/10/1999EP0955681A2 Optical semiconductor device and method of fabricating the same
11/10/1999EP0955679A2 Stack capacitor with improved plug conductivity
11/10/1999EP0955678A1 Improvements in or relating to digital-to-analog converters
11/10/1999EP0955676A2 Wafer-scale assembly of chip-size packages
11/10/1999EP0955674A2 Fabrication of hybrid polycrystalline and amorphous silicon structures
11/10/1999EP0955673A1 Method for manufacturing of EEPROM devices
11/10/1999EP0955672A2 Interconnect structures for integrated circuits
11/10/1999EP0955671A1 A method of recycling a delaminated wafer and a silicon wafer used for the recycling
11/10/1999EP0955670A2 Method of forming oxide film on an SOI layer and method of fabricating a bonded wafer
11/10/1999EP0955669A2 Improvements in or relating to integrated circuit assemblies
11/10/1999EP0955665A2 Plasma chemical vapor deposition apparatus
11/10/1999EP0955642A2 Formation of thin films resistors
11/10/1999EP0955641A1 Illumination system,particularly for deep ultraviolet lithography
11/10/1999EP0955593A2 Method of estimating layout area of semiconductor integrated circuit, and CAD apparatus therefor
11/10/1999EP0955566A2 Semiconductor device and alignment method
11/10/1999EP0955563A1 A photoresist composition
11/10/1999EP0955562A1 Chemically amplified resist
11/10/1999EP0955126A2 Surface grinding method and apparatus for thin plate work
11/10/1999EP0954948A1 Model based temperature controller for semiconductor thermal processors
11/10/1999EP0954890A1 Excimer laser with greater spectral bandwidth and beam stability
11/10/1999EP0954880A1 Silicon-germanium hetero-bipolar transistor, and method for making its various epitactiv layers
11/10/1999EP0954878A1 Improved leadframe structure and process for packaging integrated circuits
11/10/1999EP0954877A1 Methods for reducing plasma-induced charging damage
11/10/1999EP0954875A1 Modulator for plasma-immersion ion implantation
11/10/1999EP0954621A1 Method and apparatus for reducing deposition of material in the exhaust pipe of a reaction furnace
11/10/1999EP0954425A1 Method for transfer molding standard electronic packages and apparatus formed thereby
11/10/1999EP0954408A1 Polishing apparatus
11/10/1999EP0954389A1 Roller with treading and system including same
11/10/1999EP0840900B1 Optical structure and method for its production
11/10/1999CN2348493Y Reaction box of large area sedimentation amorphous silicon
11/10/1999CN2348490Y Semiconductor packing device
11/10/1999CN2348489Y Structure-improved semiconductor gluing device
11/10/1999CN2348488Y Automatic feeding material supply device for wire holder apartment
11/10/1999CN1234909A Semiconductor device and process for manufacturing same
11/10/1999CN1234908A Process for mfg. of semiconductor wafer, semiconductor chip and IC card
11/10/1999CN1234613A P-shape channelled metal-oxide semiconductor FET transistor structure
11/10/1999CN1234612A Substrate-triggering type electrostatic discharge protective semiconductor and method thereof
11/10/1999CN1234611A Semiconductor device and producing method thereof
11/10/1999CN1234609A Method of making semiconductor memory unit in dynamic random access memory
11/10/1999CN1234608A Method for producing integrated circuit
11/10/1999CN1234607A Method for forming slotted isolation structure
11/10/1999CN1234606A High-productivity Al, Cu thin-film spattering technology for producing small contact through-hole for BEOL wiring
11/10/1999CN1234605A Semiconductor device and producing method therefor
11/10/1999CN1234604A Solder-ball carrying belt and producing method therefor
11/10/1999CN1234603A Grinding method and method for producing grinding granules used in said grinding method
11/10/1999CN1234602A Method for producing semiconductor device
11/10/1999CN1234601A Method for recovering SOI substrate and regenerated substrate
11/10/1999CN1234588A Formation of thin-film resistance
11/10/1999CN1234567A Element mounting method, IC card and producing method therefor
1 ... 5613 5614 5615 5616 5617 5618 5619 5620 5621 5622 5623 5624 5625 5626 5627 5628 5629 5630 5631 5632 5633 ... 6590