Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/1999
11/09/1999US5980768 Introducing substrate having thereon photoresist mask into plasma reactor; flowing into plasma reactor an etchant oxygen-free source gas comprising nitrogen; removing defects by employing plasma struck with etchant source gas
11/09/1999US5980766 Process optimization in gas phase dry etching
11/09/1999US5980764 Used as base substance for gadgets in etching process or chemical vapor deposition facilities for producing semiconductor devices
11/09/1999US5980763 Electronic device manufacture
11/09/1999US5980762 Method of micromachining a semiconductor
11/09/1999US5980720 Forming insulation film on front surface of wafer; etching back surface; decorating defect-containing portion of front surface with copper
11/09/1999US5980706 Electrode semiconductor workpiece holder
11/09/1999US5980702 Sputtering apparatus for improved step coverage
11/09/1999US5980687 Plasma processing apparatus comprising a compensating-process-gas supply means in synchronism with a rotating magnetic field
11/09/1999US5980686 System and method for gas distribution in a dry etch process
11/09/1999US5980684 Processing apparatus for substrates
11/09/1999US5980647 Spinning workpiece about an axis, directing stream of cleaning fluid though movable port over workpiece, varying traverse rate of port to effect cleaning over all points of wafer
11/09/1999US5980643 Workpiece, including exposed aluminum metallized surfaces, is treated with alkaline, water-based solution containing one or more components that form aluminosilicate on exposed aluminum metallized surfaces to remove residues
11/09/1999US5980638 Double window exhaust arrangement for wafer plasma processor
11/09/1999US5980637 System for depositing a material on a substrate using light energy
11/09/1999US5980636 Electrical connection device for forming metal bump electrical connection
11/09/1999US5980633 Single-crystal semiconductor epitaxially grown on porous semiconductor substrate is bonded to insulator substrate, and semiconductor substrate is removed by etching, grinding, or a combination of both, where no heat treatment is necessary
11/09/1999US5980631 Method for manufacturing III-V semiconductor layers containing nitrogen
11/09/1999US5980608 Providing storage and dispensing vessel with interior containing solid phase physical sorbent medium with sorbate fluid being sorbed onto medium; flowing carrier gas through vessel to desorb sorbate fluid and discharge fluid
11/09/1999US5980591 System for processing a plurality of objects contained in a plurality of cassettes
11/09/1999US5980368 Polishing tool having a sealed fluid chamber for support of polishing pad
11/09/1999US5980361 Method and device for polishing semiconductor wafers
11/09/1999US5980270 Soldering with resilient contacts
11/09/1999US5980265 Low resistance, stable ohmic contacts to silicon carbide, and method of making the same
11/09/1999US5980213 Getter pump module and system
11/09/1999US5980195 Positioning apparatus for substrates to be processed
11/09/1999US5980194 Wafer position error detection and correction system
11/09/1999US5980193 Magnetically levitated robot and method of increasing levitation force
11/09/1999US5980188 Semiconductor manufacturing device including sensor for sensing mis-loading of a wafer
11/09/1999US5980187 Mechanism for transporting semiconductor-process masks
11/09/1999US5980186 Fork cover for vertical furnace
11/09/1999US5980183 Integrated intrabay buffer, delivery, and stocker system
11/09/1999US5980119 Single-crystal component to be applied to optical module and its fabrication method
11/09/1999US5979892 Controlled cilia for object manipulation
11/09/1999US5979784 Method of forming local interconnection of a static random access memory
11/09/1999US5979756 Cassette for semiconductor manufacture and management, method for manufacturing the cassette, and equipment for semiconductor fabrication
11/09/1999US5979743 Method for making an IC device using a single-headed bonder
11/09/1999US5979739 Semiconductor die bonding apparatus having multiple bonding system
11/09/1999US5979730 Mounting beam removal equipment
11/09/1999US5979728 Apparatus for breaking and separating dies from a wafer
11/09/1999US5979480 Semiconductor production device, method of adjusting its internal pressure and method of processing an object of processing
11/09/1999US5979475 Specimen holding method and fluid treatment method of specimen surface and systems therefor
11/09/1999US5979474 Cleaning equipment for semiconductor substrates
11/09/1999US5979469 Method for rinsing a high density sponge
11/09/1999US5979306 Heating pressure processing apparatus
11/09/1999CA2157994C Electronic device assembly
11/08/1999CA2271184A1 Integrated circuit device including scan-path testing function
11/04/1999WO1999056510A1 Method of producing ceramic multilayer substrate
11/04/1999WO1999056509A1 Flip chip devices with flexible conductive adhesive
11/04/1999WO1999056508A1 Rigid interconnect device and method of making
11/04/1999WO1999056324A2 Method for producing contact structures in solar cells
11/04/1999WO1999056318A1 Semiconductor device and manufacture thereof
11/04/1999WO1999056316A1 Encapsulation of microelectronic assemblies
11/04/1999WO1999056314A1 Method of forming side dielectrically isolated semiconductor devices and mos semiconductor devices fabricated by this method
11/04/1999WO1999056313A1 Semiconductor device and process for manufacturing the same
11/04/1999WO1999056312A1 Flip chip with integrated flux, mask and underfill
11/04/1999WO1999056310A2 Method for etching low k dielectric layers
11/04/1999WO1999056309A1 Protective member for inner surface of chamber and plasma processing apparatus
11/04/1999WO1999056307A1 Improved heater for use in substrate processing apparatus to deposit tungsten
11/04/1999WO1999056306A1 Device for fixing substrates
11/04/1999WO1999056305A2 Method of forming high aspect ratio apertures
11/04/1999WO1999056157A2 Optical system with anti-reflection coating
11/04/1999WO1999056113A1 A system and method for inspecting semiconductor wafers
11/04/1999WO1999056106A1 Chemical-mechanical-planarization (cmp) slurry quality control process and particle size distribution measuring systems
11/04/1999WO1999056078A1 Endpoint detection in chemical mechanical polishing (cmp) by substrate holder elevation detection
11/04/1999WO1999056077A1 Method and device for measuring the thickness of thin films near a sample's edge and in a damascene-type structure.
11/04/1999WO1999056057A1 Fluid storage and dispensing system
11/04/1999WO1999055934A1 Energy transfer system and method for thermal processing applications
11/04/1999WO1999055933A1 Film growth system and method for spherical-shaped semiconductor integrated circuits
11/04/1999WO1999055642A1 Ferroelectric thick-layer structures based on lead perovskites and method for their production
11/04/1999WO1999055526A1 LOW λ DIELECTRIC INORGANIC/ORGANIC HYBRID FILMS AND METHOD OF MAKING
11/04/1999WO1999055493A1 Polishing grinding wheel and substrate polishing method with this grinding wheel
11/04/1999WO1999048137A3 Method and device for treating wafers presenting components during thinning of the wafer and separation of the components
11/04/1999WO1999044241A3 Semiconductor device comprising a mos transistor
11/04/1999WO1999043582A8 Door assembly for semiconductor wafer manufacturing
11/04/1999WO1999041957A8 Method of making microwave, multifunction modules using fluoropolymer composite substrates
11/04/1999WO1999041772A3 A method of component manufacture
11/04/1999WO1999040614A3 Method of manufacturing a semiconductor device with linearly doping profile
11/04/1999WO1999022402A3 Rapid thermal processing (rtp) system with rotating substrate
11/04/1999WO1997049125A3 Method of manufacturing an electronic device comprising thin-film transistors
11/04/1999EP0846336A3 Method of manufacturing an electronic device comprising thin film transistors
11/04/1999DE19919958A1 Production of semiconductor device, e.g. DRAM
11/04/1999DE19919955A1 Semiconductor component with high voltage strength
11/04/1999DE19917994A1 Insulation structure for semiconductor component, e.g. bipolar transistor
11/04/1999DE19916599A1 Ferro-electrical split word line memory with drive circuit for data storage
11/04/1999DE19908446A1 Dynamic random access memory (DRAM) cell capacitor fabricating method
11/04/1999DE19903629A1 Integrated semiconductor memory circuit, especially embedded DRAM
11/04/1999DE19901426A1 Multi-chamber system of etching apparatus for production of semiconductor components
11/04/1999DE19842684C1 Integrated circuit high-permittivity capacitor arranged on support structure in semiconductor arrangement e.g. for DRAM circuit or ADC
11/04/1999DE19838741A1 A metal-insulator-metal capacitor for a dynamic random access memory (DRAM) device
11/04/1999DE19832995C1 Memory device using resistive ferroelectric memory cells
11/04/1999DE19832993C1 Resistive ferroelectric memory cell
11/04/1999DE19821742C1 Manipulation arrangement, especially for test head for wafer test arrangement
11/04/1999DE19820223C1 Variable doping epitaxial layer manufacturing method
11/04/1999DE19819570A1 Anordnung zum Testen mehrerer Speicherchips auf einem Wafer Arrangement for testing multiple memory chips on a wafer
11/04/1999DE19819458A1 Micromechanical component manufacturing method for e.g. capacitive acceleration sensor
11/04/1999DE19819259A1 Semiconductor used as optoelectronic element
11/04/1999DE19818478A1 Vorrichtung zum Fixieren von Substraten A device for fixing substrates
11/04/1999CA2330040A1 Low kappa dielectric inorganic/organic hybrid films and method of making
11/04/1999CA2329118A1 Device for fixing substrates
1 ... 5616 5617 5618 5619 5620 5621 5622 5623 5624 5625 5626 5627 5628 5629 5630 5631 5632 5633 5634 5635 5636 ... 6590