| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 01/11/2000 | US6012970 Process for forming a semiconductor device |
| 01/11/2000 | US6012967 Polishing method and polishing apparatus |
| 01/11/2000 | US6012966 Precision polishing apparatus with detecting means |
| 01/11/2000 | US6012894 Automatic lot organization method |
| 01/11/2000 | US6012858 Apparatus and method for forming liquid film |
| 01/11/2000 | US6012833 Large-scale-integration circuit device and method of manufacturing same |
| 01/11/2000 | US6012751 Device for introducing a vacuum to the vacuum chuck of a semiconductor device fabrication facility |
| 01/11/2000 | US6012626 Method of forming ball grid array contacts |
| 01/11/2000 | US6012625 Process and device for forming raised metallised contacts |
| 01/11/2000 | US6012607 Dispense system of a photoresist coating machine |
| 01/11/2000 | US6012600 Pressure responsive clamp for a processing chamber |
| 01/11/2000 | US6012509 Mechanism and method for holding a substrate on a substrate stage of a substrate treatment apparatus |
| 01/11/2000 | US6012479 Integrated gas control device |
| 01/11/2000 | US6012478 Gas supply device for semiconductor manufacturing apparatus |
| 01/11/2000 | US6012472 Method and arrangement for drying substrates after treatment in a liquid |
| 01/11/2000 | US6012470 Rotation flat surface in closed drying chamber |
| 01/11/2000 | US6012469 Etch residue clean |
| 01/11/2000 | US6012335 High sensitivity micro-machined pressure sensors and acoustic transducers |
| 01/11/2000 | US6012235 Vacuum processing apparatus and operating method therefor |
| 01/11/2000 | US6012224 Method of forming compliant microelectronic mounting device |
| 01/11/2000 | US6012193 Apparatus for washing disc-shaped workpieces |
| 01/11/2000 | US6012192 Substrate processing apparatus |
| 01/11/2000 | CA2102384C High impedance plasma ion implantation method and apparatus |
| 01/11/2000 | CA2089099C Broad beam flux density control |
| 01/06/2000 | WO2000001208A1 Assembly of an electronic component with spring packaging |
| 01/06/2000 | WO2000001016A1 Thin-film transistor and method of manufacture thereof |
| 01/06/2000 | WO2000001015A1 Semiconductor device and method of manufacture thereof |
| 01/06/2000 | WO2000001014A1 Method for producing and separating semiconductor light-emitting diodes |
| 01/06/2000 | WO2000001012A1 Hydrogenated oxidized silicon carbon material |
| 01/06/2000 | WO2000001011A1 Isotropically etching sidewall spacers to be used for both an nmos source/drain implant and a pmos ldd implant |
| 01/06/2000 | WO2000001010A2 Method for producing semiconductor components |
| 01/06/2000 | WO2000001009A1 Dielectric separation wafer and production method thereof |
| 01/06/2000 | WO2000001008A1 Ulsi mos with high dielectric constant gate insulator |
| 01/06/2000 | WO2000001007A1 Plasma processing method |
| 01/06/2000 | WO2000001006A1 Low resistance barrier layer for isolating, adhering, and passivating copper metal in semiconductor fabrication |
| 01/06/2000 | WO2000001005A1 Method for forming monocrystalline silicon layer, method for manufacturing semiconductor device, and semiconductor device |
| 01/06/2000 | WO2000001004A1 Method of forming single-crystal silicon layer and method of manufacturing semiconductor device |
| 01/06/2000 | WO2000001003A1 Device and method for plasma processing |
| 01/06/2000 | WO2000001002A1 Method and apparatus for vacuum processing |
| 01/06/2000 | WO2000001000A1 Dc sputtering process for making smooth electrodes and thin film ferroelectric capacitors having improved memory retention |
| 01/06/2000 | WO2000000999A1 Elastomer bonded parts for plasma processes and method for manufacture and use thereof |
| 01/06/2000 | WO2000000998A2 Electrode for plasma processes and method for manufacture and use thereof |
| 01/06/2000 | WO2000000993A1 Multiple coil antenna for inductively-coupled plasma generation systems |
| 01/06/2000 | WO2000000992A2 Focus ring arrangement for substantially eliminating unconfined plasma in a plasma processing chamber |
| 01/06/2000 | WO2000000874A1 System and method for controlling the manufacture of discrete parts in semiconductor fabrication using model predictive control |
| 01/06/2000 | WO2000000873A1 System and method for controlling a multi-arm polishing tool |
| 01/06/2000 | WO2000000817A1 A system and method for analyzing topological features on a surface |
| 01/06/2000 | WO2000000664A1 Susceptor for barrel reactor |
| 01/06/2000 | WO2000000663A1 Method and device for displacing wafers in a deposition reactor |
| 01/06/2000 | WO2000000661A1 Sputter target |
| 01/06/2000 | WO2000000567A1 Chemical mechanical polishing slurry useful for copper/tantalum substrate |
| 01/06/2000 | WO2000000566A1 Hot-melt adhesive composition, heat-bonding film adhesive and adhering method using hot-melt adhesive composition |
| 01/06/2000 | WO2000000561A1 Chemical mechanical polishing slurry useful for copper/tantalum substrates |
| 01/06/2000 | WO2000000560A2 Chemical mechanical polishing slurry and method for using same |
| 01/06/2000 | WO2000000497A1 Precursors for growth of heterometal-oxide films by mocvd |
| 01/06/2000 | WO2000000303A1 Method and apparatus for immersion treatment of semiconductor and other devices |
| 01/06/2000 | WO2000000302A1 Cross flow centrifugal processor |
| 01/06/2000 | WO2000000301A1 Offset rotor flat media processor |
| 01/06/2000 | WO1999057342A8 Method and device for plating substrate |
| 01/06/2000 | WO1999053117A3 Film deposition system |
| 01/06/2000 | CA2336342A1 Precursors for growth of heterometal-oxide films by mocvd |
| 01/06/2000 | CA2335035A1 Chemical mechanical polishing slurry and method for using same |
| 01/06/2000 | CA2335034A1 Chemical mechanical polishing slurry useful for copper/tantalum substrates |
| 01/06/2000 | CA2335033A1 Chemical mechanical polishing slurry useful for copper/tantalum substrate |
| 01/05/2000 | EP0969519A2 Solar cell having depressions in the substrate and production process therefor |
| 01/05/2000 | EP0969516A2 MOSFET with structured source/drain region and method for producing the same |
| 01/05/2000 | EP0969514A2 Trench capacitor DRAM cell and method of making the same |
| 01/05/2000 | EP0969512A1 Microstructure comprising an integrated circuit in a substrate whose surface is provided with a planar coil |
| 01/05/2000 | EP0969508A2 Radiant-energy configurable fuse structure |
| 01/05/2000 | EP0969507A1 EEPROM memory cell and corresponding manufacturing method |
| 01/05/2000 | EP0969506A2 DRAM Capacitor and method of manufacturing the same |
| 01/05/2000 | EP0969505A2 SOI substrate |
| 01/05/2000 | EP0969504A1 Semiconductor device |
| 01/05/2000 | EP0969503A2 Electronic circuit device |
| 01/05/2000 | EP0969502A2 Resin encapsulated electronic parts and method of manufacturing the same |
| 01/05/2000 | EP0969501A1 Method of making power semiconductor components |
| 01/05/2000 | EP0969500A2 Single crystal silicon on polycrystalline silicon integrated circuits |
| 01/05/2000 | EP0969499A2 Crystal growth process for a semiconductor device |
| 01/05/2000 | EP0969498A2 Visual inspection apparatus and method |
| 01/05/2000 | EP0969497A2 Precision product container |
| 01/05/2000 | EP0969473A1 An interleaved sense amplifier with a single-sided precharge device |
| 01/05/2000 | EP0969328A2 Position detection apparatus and exposure apparatus |
| 01/05/2000 | EP0969288A2 Test arrangement for bond pad |
| 01/05/2000 | EP0969126A2 Method of fabrication of Si nanostructures |
| 01/05/2000 | EP0969120A2 Method and apparatus for plasma deposition |
| 01/05/2000 | EP0969119A2 Method and device for coating of objects |
| 01/05/2000 | EP0969065A2 Die attach adhesives for use in microelectronic |
| 01/05/2000 | EP0969064A2 Method of making an electronic component using reworkable underfill encapsulants |
| 01/05/2000 | EP0969062A2 Method of making electronic components using reworkable adhesives |
| 01/05/2000 | EP0969060A2 Underfill encapsulant compositions for use in electronic devices |
| 01/05/2000 | EP0969058A2 Method of making encapsulated electronic component with reworkable package encapsulants |
| 01/05/2000 | EP0969057A1 Dual-valent rare earth additives to polishing slurries |
| 01/05/2000 | EP0968979A1 Etching of Bi-based metal oxides ceramics |
| 01/05/2000 | EP0968969A2 Process of producing silica glass products used for photolithography and optical members produced by the process |
| 01/05/2000 | EP0968631A1 Method for forming metal conductor models on electrically insulating supports |
| 01/05/2000 | EP0968549A1 Initiation connector for airbag systems |
| 01/05/2000 | EP0968533A1 High performance display pixel for electronic displays |
| 01/05/2000 | EP0968532A1 Lateral silicon carbide semiconductor device having a drift region with a varying doping level |
| 01/05/2000 | EP0968529A2 Semiconductor device and method of manufacturing such a device |
| 01/05/2000 | EP0968528A2 Method of manufacturing a semiconductor device comprising a field effect transistor |