| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 01/13/2000 | DE19830438A1 Verfahren zur Dekontamination von Mikrolithographie-Projektionsbelichtungsanlagen A process for the decontamination of microlithography projection exposure apparatuses |
| 01/13/2000 | DE19829614A1 Verfahren zur Herstellung eines Leistungshalbleiterbauelementes Method for producing a power semiconductor component |
| 01/13/2000 | DE19823196A1 Verfahren und Einrichtung zur Durchführung von Arbeitsschritten an miniaturisierten Baugruppen Method and apparatus for performing operations on miniaturized modules |
| 01/13/2000 | CA2336770A1 Vapor deposition routes to nanoporous silica |
| 01/13/2000 | CA2336378A1 Large area x-ray imager with vented seam and method of fabrication |
| 01/12/2000 | EP0971570A1 Printed wiring board and its manufacturing method |
| 01/12/2000 | EP0971418A2 Semiconductor device having reduced effective substrate resistivity and associated methods |
| 01/12/2000 | EP0971416A1 Memory device and method of manufacturing the same, and integrated circuit and method of manufacturing semiconductor device |
| 01/12/2000 | EP0971415A1 Process for the fabrication of a semiconductor non-volatile memory device with Shallow Trench Isolation (STI) |
| 01/12/2000 | EP0971414A1 Trench capacitor with insulating collar and buried contact and corresponding manufacturing process |
| 01/12/2000 | EP0971413A2 Semiconductor device and method of forming the same |
| 01/12/2000 | EP0971409A1 Method for forming copper-containing metal studs |
| 01/12/2000 | EP0971406A2 Chip-sized semiconductor device |
| 01/12/2000 | EP0971405A2 Method for manufacturing a substrate for a polymer stud grid array |
| 01/12/2000 | EP0971404A1 Double sidewall raised silicided source/drain CMOS transistor |
| 01/12/2000 | EP0971403A1 Method for forming copper-containing metal studs |
| 01/12/2000 | EP0971402A2 Wafer for heavy metal monitoring and method for manufacturing same |
| 01/12/2000 | EP0971401A2 Method of manufacturing semiconductor devices and a resin molding machine therefor |
| 01/12/2000 | EP0971400A2 Method for producing low dielectric coatings from hydrogen silsesquioxane resin |
| 01/12/2000 | EP0971399A1 Semiconductor wafer, method for producing the same, and wafer chuck |
| 01/12/2000 | EP0971398A1 Manufacturing process for semiconductor wafer |
| 01/12/2000 | EP0971397A1 Method and device for activating semiconductor impurities |
| 01/12/2000 | EP0971396A1 Method for manufacturing bonded wafer and bonded wafer |
| 01/12/2000 | EP0971395A1 "A method of fabricating an SOI wafer and SOI wafer fabricated by the method" |
| 01/12/2000 | EP0971394A1 Semiconductor substrate and semiconductor device |
| 01/12/2000 | EP0971393A1 Capacitor for integrated circuit and its fabrication method |
| 01/12/2000 | EP0971392A1 Capacitor for integrated circuit and its fabrication method |
| 01/12/2000 | EP0971391A2 A method for reducing particles from an electrostatic chuck and an equipment for manufacturing a semiconductor |
| 01/12/2000 | EP0971390A1 Device for conveying integrated circuits |
| 01/12/2000 | EP0971360A1 Semiconductor memory cell |
| 01/12/2000 | EP0971254A2 System using a polar coordinate stage and continuous image rotation to compensate for stage rotation |
| 01/12/2000 | EP0971055A2 "Method for heat treatment of silicon substrate, substrate treated by the method, and epitaxial wafer utilizing the substrate |
| 01/12/2000 | EP0971009A2 Adhesive composition for bonding semiconductor chips |
| 01/12/2000 | EP0970946A2 Allylated amide compounds and die attach adhesives prepared therefrom |
| 01/12/2000 | EP0970744A2 Chemical generator with controlled mixing and concentration feedback and adjustment |
| 01/12/2000 | EP0970526A2 Power semiconductor devices |
| 01/12/2000 | EP0970524A2 SiC SEMICONDUCTOR ARRAY WITH ENHANCED CHANNEL MOBILITY |
| 01/12/2000 | EP0970523A1 Radio architecture |
| 01/12/2000 | EP0970520A2 Mounting structure and mounting process from semiconductor devices |
| 01/12/2000 | EP0970519A1 Integration of low-k polymers into interlevel dielectrics using controlled electron-beam radiation |
| 01/12/2000 | EP0970518A1 Trench-isolated bipolar devices |
| 01/12/2000 | EP0970517A1 Unbalanced bipolar electrostatic chuck power supplies and methods therefor |
| 01/12/2000 | EP0970516A1 Strontium bismuth niobate tantalate ferroelectric thin film |
| 01/12/2000 | EP0970515A1 A process for photoresist removal |
| 01/12/2000 | EP0970514A1 A method of producing thin silicon films |
| 01/12/2000 | EP0970513A4 Well boosting threshold voltage rollup |
| 01/12/2000 | EP0970513A2 Well boosting threshold voltage rollup |
| 01/12/2000 | EP0970512A1 Method for applying a protecting lacquer on a wafer |
| 01/12/2000 | EP0970511A1 Method and apparatus for removing a liquid from a surface |
| 01/12/2000 | EP0970510A1 System for transferring wafers from cassettes to furnaces and method |
| 01/12/2000 | EP0970509A1 Process and device for treating substrates in a fluid container |
| 01/12/2000 | EP0970437A1 Electronic module for chip card |
| 01/12/2000 | EP0970337A1 Method for cooling a furnace, and furnace provided with a cooling device |
| 01/12/2000 | EP0970267A1 Susceptor designs for silicon carbide thin films |
| 01/12/2000 | EP0970156A1 Chemical-mechanical polishing slurry formulation and method for tungsten and titanium thin films |
| 01/12/2000 | EP0944482A4 Apparatus and method for recovering photoresist developers and strippers |
| 01/12/2000 | EP0875074A4 Semiconductor devices, and methods for same |
| 01/12/2000 | EP0700524B1 Process for producing surface micromechanical structures |
| 01/12/2000 | EP0680663B1 Method of mounting a piezoelectric element to a substrate |
| 01/12/2000 | CN1241353A System and method for packaging integrated circuits |
| 01/12/2000 | CN1241297A High density electrical connectors |
| 01/12/2000 | CN1241296A Integrated semi-conducting storage assembly |
| 01/12/2000 | CN1241275A Method and system for configuring array of logic devices |
| 01/12/2000 | CN1241036A Semiconductor device and its mfg. method |
| 01/12/2000 | CN1241035A Cylindrical storage capacitor for memory cell and method for fabricating the same |
| 01/12/2000 | CN1241034A Semiconductor device and method of manufacturing the same |
| 01/12/2000 | CN1241031A Method for fabricating semiconductor memory device and structure thereof |
| 01/12/2000 | CN1241030A High dielectric capacitor and method for fabricating thereof |
| 01/12/2000 | CN1241029A Method for manufacturing capacitors in DRAM |
| 01/12/2000 | CN1241028A Method for manufacturing semiconductor device capable of effectively carrying out hydrogen passivation |
| 01/12/2000 | CN1241027A Narrow-channel effect free transistor and method of forming thereof |
| 01/12/2000 | CN1241026A Improved SAC process flow method using isolating spacer |
| 01/12/2000 | CN1241025A Manufacturing method of thin film transistor liquid crystal display |
| 01/12/2000 | CN1241024A Method for fabricating DRAM cell capacitor |
| 01/12/2000 | CN1241023A Capacitor and method for fabricating the same |
| 01/12/2000 | CN1241022A Method and apparatus for monitoring charge neutralization operation |
| 01/12/2000 | CN1241021A Chipping detection system and method |
| 01/12/2000 | CN1241020A Method for fabricating MOS transistor |
| 01/12/2000 | CN1241019A Process for using sulfur to passivate surface of semiconductor made of group IIIA-VA compounds |
| 01/12/2000 | CN1241018A Deep trench capacitor |
| 01/12/2000 | CN1241017A Apparatus and method for controlling process module of semiconductor wafer spinner system |
| 01/12/2000 | CN1241016A Semiconductor substrate and manufacturing method of semiconductor substrate |
| 01/12/2000 | CN1241002A Interleaved sense amplifier with single-sided precharge device |
| 01/12/2000 | CN1240841A High density plasma CVD process for making dielectric anti-reflective coatings |
| 01/12/2000 | CN1240675A Manufacture and application of 3D photoelectric electrode of semiconductor film |
| 01/12/2000 | CN1048359C Flexible wiring board having terminal array and its connection structure with circuit board |
| 01/12/2000 | CN1048356C Self growth method for gallium arsenide surface passivation membrane |
| 01/12/2000 | CN1048355C Method for preparation of gallium arsenide surface passivation protective membrane |
| 01/12/2000 | CN1048354C T-shape grid making method for semiconductor device |
| 01/11/2000 | USRE36490 Power and signal line bussing method for memory devices |
| 01/11/2000 | US6014507 Integrated circuit routes designing method and apparatus |
| 01/11/2000 | US6014456 Method of correcting mask pattern and mask, method of exposure, apparatus thereof, and photomask and semiconductor device using the same |
| 01/11/2000 | US6014455 Projection exposure apparatus and device manufacturing method |
| 01/11/2000 | US6014421 Radiation reduction exposure apparatus and method of manufacturing semiconductor device |
| 01/11/2000 | US6014337 Semiconductor storage device |
| 01/11/2000 | US6014329 Flash-erasable semiconductor memory device having an improved reliability |
| 01/11/2000 | US6014328 Memory cell allowing write and erase with low voltage power supply and nonvolatile semiconductor memory device provided with the same |
| 01/11/2000 | US6014318 Resin-sealed type ball grid array IC package and manufacturing method thereof |
| 01/11/2000 | US6014310 High dielectric TiO2 -SiN composite films for memory applications |
| 01/11/2000 | US6014218 Device and method for end-point monitoring used in the polishing of components, in particular semiconductor components |