Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/1999
12/15/1999EP0963602A1 Heterolithic microwave integrated circuits and process of making hmic circuits
12/15/1999EP0963601A1 Method for producing a silicium capacitor
12/15/1999EP0963600A1 Thin titanium film as self-regulating filter for silicon migration into aluminum metal lines
12/15/1999EP0963599A1 Method and device for cleaning substrate surfaces
12/15/1999EP0963598A1 Method for transferring a thin film comprising a step of generating inclusions
12/15/1999EP0963586A1 A scalable flash eeprom memory cell, method of manufacturing and operation thereof
12/15/1999EP0963573A1 Alignment device and lithographic apparatus comprising such a device
12/15/1999EP0963572A1 POSITIONING DEVICE HAVING THREE COIL SYSTEMS MUTUALLY ENCLOSING ANGLES OF 120o, AND LITHOGRAPHIC DEVICE COMPRISING SUCH A POSITIONING DEVICE
12/15/1999EP0963552A1 System for detecting amine and other basic molecular contamination in a gas
12/15/1999EP0963459A2 Wafer support system
12/15/1999EP0963458A1 Process for low temperature cvd using bi-carboxylates
12/15/1999EP0963419A1 Composition for oxide cmp
12/15/1999EP0873343A4 Metal complex source reagents for chemical vapor deposition
12/15/1999EP0847314B1 Method of manufacturing a sintered structure on a substrate
12/15/1999EP0830708B1 Plasma processing system with reduced particle contamination
12/15/1999EP0792571B1 Method and device for measuring ion flow in a plasma
12/15/1999EP0753193A4 Improvements in an apparatus and method of use of radiofrequency identification tags
12/15/1999EP0692146B1 Charge-coupled device array for spectroscopic detection
12/15/1999EP0648375B1 Triple-gate flash eeprom memory and method for making same
12/15/1999CN2354241Y Integrated circuit for dynamic direct access storage device
12/15/1999CN1238857A Self-aligned non-volatile storage cell
12/15/1999CN1238595A Differential amplifier circuit
12/15/1999CN1238564A Insulated gate transistor, method of manufacturing same, and semiconductor integrated circuit device
12/15/1999CN1238562A Semiconductor device
12/15/1999CN1238559A Reworkable thermoplastic encapsulant
12/15/1999CN1238558A Method for fabricating semiconductor device
12/15/1999CN1238557A Semiconductor integrated circuit device and process for manufacturing the same
12/15/1999CN1238556A Ultra compact DRAM cell and method of making thereof
12/15/1999CN1238555A Semiconductor device and method for forming the same
12/15/1999CN1238554A Removal of post-active-ion-etch polymer on Al/Cu metal line
12/15/1999CN1238553A Method for manufacturing semiconductor device
12/15/1999CN1238532A Transistor circuit having dynamic threshold voltage
12/15/1999CN1238531A Integrated circuit with improved off chip drivers
12/15/1999CN1238481A Automation system using file server and its control method
12/15/1999CN1238394A Process of controlling grain growth in metal films
12/15/1999CN1238367A Energy beam curable hydrophilic pressure sensitive adhesive composition and use thereof
12/15/1999CN1238365A Edge polishing composition
12/15/1999CN1238344A Polymer and forming method of micro pattern using the same
12/15/1999CN1047470C 半导体器件 Semiconductor devices
12/15/1999CN1047469C Technology for producing lateral current limiting structure of semiconductor mesa
12/15/1999CN1047432C Silicon microheating actuating pump and its mfg. technology
12/15/1999CN1047413C Single crystal ingot and its producing method
12/15/1999CN1047331C Wafer retaining platen and lifting means
12/14/1999USRE36441 Semiconductor device and a method of manufacturing same
12/14/1999US6002989 System for quality control where inspection frequency of inspection apparatus is reset to minimize expected total loss based on derived frequency function and loss value
12/14/1999US6002971 Time optimal trajectory for cluster tool robots
12/14/1999US6002951 Multi-layer ceramic substrate having high TC superconductor circuitry
12/14/1999US6002840 Substrate transport apparatus
12/14/1999US6002791 Photomask inspection apparatus
12/14/1999US6002744 Method and apparatus for generating X-ray or EUV radiation
12/14/1999US6002636 Semiconductor memory drive capable of canceling power supply noise
12/14/1999US6002625 Cell array and sense amplifier structure exhibiting improved noise characteristic and reduced size
12/14/1999US6002610 Non-volatile memory element for programmable logic applications and operational methods therefor
12/14/1999US6002609 Semiconductor device having a security circuit for preventing illegal access
12/14/1999US6002606 Semiconductor memory device
12/14/1999US6002592 Electronic device and method for manufacturing electronic device
12/14/1999US6002575 Adherent separator for self-defining discontinuous film
12/14/1999US6002574 Thin film capacitors
12/14/1999US6002572 Processing apparatus and a processing method
12/14/1999US6002523 Laser illumination method
12/14/1999US6002516 Vertical cassette elevator and load lock viewer
12/14/1999US6002487 Alignment method for performing alignment between shot areas on a wafer
12/14/1999US6002466 Lithography exposure device
12/14/1999US6002465 Stage device, exposure apparatus using the same, and device production method
12/14/1999US6002301 Transistor and power amplifier
12/14/1999US6002263 Probe station having inner and outer shielding
12/14/1999US6002262 Method of and apparatus for measuring flatness of semiconductor wafers that have not been subjected to donor-killer treatment
12/14/1999US6002202 Rigid thin windows for vacuum applications
12/14/1999US6002180 Multi chip module with conductive adhesive layer
12/14/1999US6002178 Multiple chip module configuration to simplify testing process and reuse of known-good chip-size package (CSP)
12/14/1999US6002176 Differential copper deposition on integrated circuit surfaces
12/14/1999US6002175 Semiconductor device with improved connection hole for embedding an electrically conductive layer portion
12/14/1999US6002174 Barrier materials for semiconductor devices
12/14/1999US6002172 Substrate structure and method for improving attachment reliability of semiconductor chips and modules
12/14/1999US6002170 Chip carrier with embedded leads and chip package using same
12/14/1999US6002166 Semiconductor device
12/14/1999US6002163 Electronic device pad relocation, precision placement, and packaging in arrays
12/14/1999US6002162 Overall VPP well form
12/14/1999US6002161 Semiconductor device having inductor element made of first conductive layer of spiral configuration electrically connected to second conductive layer of insular configuration
12/14/1999US6002160 Semiconductor isolation process to minimize weak oxide problems
12/14/1999US6002159 SiC semiconductor device comprising a pn junction with a voltage absorbing edge
12/14/1999US6002151 Non-volatile trench semiconductor device
12/14/1999US6002150 Compound material T gate structure for devices with gate dielectrics having a high dielectric constant
12/14/1999US6002148 Silicon carbide transistor and method
12/14/1999US6002147 Hybrid microwave-frequency integrated circuit
12/14/1999US6002146 Solid-State image sensing device, method for driving thereof and camera employing the same
12/14/1999US6002144 Zener diode semiconductor device with contact portions
12/14/1999US6002143 Hybrid vertical type power semiconductor device
12/14/1999US6002113 Apparatus for processing silicon devices with improved temperature control
12/14/1999US6002109 System and method for thermal processing of a semiconductor substrate
12/14/1999US6002101 Method of manufacturing a semiconductor device by using a homogenized rectangular laser beam
12/14/1999US6001760 Aluminum nitride sintered body, metal embedded article, electronic functional material and electrostatic chuck
12/14/1999US6001747 Process to improve adhesion of cap layers in integrated circuits
12/14/1999US6001746 Method of forming an undoped silicate glass layer on a semiconductor wafer
12/14/1999US6001745 Method for forming a VIA in an inter metal dielectric (IMD) containing spin on glass (SOG)
12/14/1999US6001744 Etching semiconductor crystal with aqueous solution of sulfuric acid, saturated with potassium dichromate to obtain mirror surface for epitaxial growth
12/14/1999US6001743 Method for fabricating a self-aligned contact
12/14/1999US6001742 Method for etching tantalum oxide layer
12/14/1999US6001741 Method for making field effect devices and capacitors with improved thin film dielectrics and resulting devices
12/14/1999US6001740 Planarization of a non-conformal device layer in semiconductor fabrication
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