Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/1999
12/29/1999EP0967660A2 Power MOSFET and method for fabricating the same
12/29/1999EP0967657A2 NMOS-Transistor
12/29/1999EP0967654A1 Non-volatile semiconductor memory device
12/29/1999EP0967653A2 Semiconductor DRAM trench capacitor
12/29/1999EP0967652A1 DRAM cell array layout
12/29/1999EP0967651A2 Semiconductor memory with capacitor dielectric
12/29/1999EP0967649A2 Palladium surface coatings suitable for wirebonding and process for forming palladium surface coatings
12/29/1999EP0967648A2 Semiconductor clamping device
12/29/1999EP0967647A2 Method of sealing a surface mount package type semiconductor device
12/29/1999EP0967646A1 Low leakage, low capacitance isolation material
12/29/1999EP0967645A2 Method of producing semiconductor device
12/29/1999EP0967644A2 DRAM trench capacitor
12/29/1999EP0967643A2 Low-resistance salicide fill for trench capacitors
12/29/1999EP0967642A1 Semiconductor device including a plurality of bipolar transistors
12/29/1999EP0967641A2 Semiconductor device fabrication
12/29/1999EP0967640A2 Method of making a self-aligned contact
12/29/1999EP0967639A1 CVD/PVD method of filling structures using discontinuous CVD Al liner
12/29/1999EP0967638A2 Semiconductor fuse
12/29/1999EP0967637A1 Semiconductor device and manufacturing method
12/29/1999EP0967636A2 Electrically isolated semiconductor devices
12/29/1999EP0967634A1 Method of producing semiconductor wafer
12/29/1999EP0967633A1 Gas inlets for wafer processing chamber
12/29/1999EP0967632A1 Gas inlets for wafer processing chamber
12/29/1999EP0967537A2 Temperature control apparatus and method with recirculated coolant
12/29/1999EP0967457A2 System and method for optically measuring dielectric thickness in semiconductor devices
12/29/1999EP0967260A1 Polishing composition and surface treating composition
12/29/1999EP0967049A1 Polishing apparatus
12/29/1999EP0967048A1 Two-sided flattening apparatus
12/29/1999EP0966764A1 Source-down fet
12/29/1999EP0966762A1 As/P HYBRID nLDD JUNCTION AND MEDIUM Vdd OPERATION FOR HIGH SPEED MICROPROCESSORS
12/29/1999EP0966761A1 Vertical igbt with an soi structure
12/29/1999EP0966758A2 A method of providing a vertical interconnect between thin film microelectronic devices
12/29/1999EP0966757A1 Semiconductor and method relating to semiconductors
12/29/1999EP0966756A2 Ion implantation process
12/29/1999EP0966755A1 Method of manufacturing a semiconductor device by low temperature cvd
12/29/1999EP0966752A1 Correction device for correcting the lens defects in particle-optical apparatus
12/29/1999EP0966553A1 Process for low temperature cvd using bi-amides
12/29/1999EP0966474A1 Novel copper(i) precursors for chemical deposit in gas phase of metallic copper
12/29/1999EP0966421A2 A method for purification of acids for use in semiconductor processing
12/29/1999EP0966338A1 Integrated pad and belt for chemical mechanical polishing
12/29/1999EP0577766B1 Apparatus and method for high throughput sputtering
12/29/1999CN2356421Y Automatic cleaning machine for integrated circuit packaging mould
12/29/1999CN1240052A Method of manufacturing semiconductor device
12/29/1999CN1239863A Low-expansion circuit board and multilayer circuit board
12/29/1999CN1239835A 电子电路 Electronic circuit
12/29/1999CN1239833A Nonvolatile memory with high coupling rate and its manufacture
12/29/1999CN1239832A Read-only memory and its manufacture
12/29/1999CN1239831A Semiconductor device and method for fabricating the same
12/29/1999CN1239830A Semiconductor device provided with base barrier film for solder bump and method for manufacturing the same
12/29/1999CN1239829A Method and apparatus for retention of fragile conductive trace with protective clamp
12/29/1999CN1239828A Method for fabricating ferroelectric memory device
12/29/1999CN1239827A Manufacture of flash memory unit
12/29/1999CN1239826A Manufacture of the separated grid structure for flash memory
12/29/1999CN1239825A Manufacture of tunneling oxide unit for EPROM
12/29/1999CN1239824A Flash memory with separated grid and source injection and its manufacture
12/29/1999CN1239823A Plug manufacturing method
12/29/1999CN1239822A Plug manufacturing method
12/29/1999CN1239821A Method of forming trench isolation without dent thereof
12/29/1999CN1239820A Method for forming integrated circuit
12/29/1999CN1239819A Method for fabricating semiconductor device having different gate oxide layers
12/29/1999CN1239818A Method of reducing the micro load produced during nitride etching
12/29/1999CN1239817A Step-by-step analysis method and system
12/29/1999CN1239816A Method for fabricating capacitor of semiconductor memory device
12/29/1999CN1239815A Method for forming self aligned contact in semiconductor device
12/29/1999CN1239777A Crystal chip detecting method
12/29/1999CN1047894C Substrate housing and docking system
12/29/1999CN1047872C Semiconductor device and method for fabricating the same
12/29/1999CN1047871C Furnace for manufacturing semiconductor device and method of forming gate oxide film utilizing the same
12/29/1999CN1047870C Process and device for chemically treating substrates
12/29/1999CN1047866C Self-bootstrapping device
12/29/1999CA2335054A1 Integrated roller transport pod and asynchronous conveyor
12/29/1999CA2298695A1 Plastic integrated circuit package and method and leadframe for making the package
12/28/1999USRE36475 Method of forming a via plug in a semiconductor device
12/28/1999US6009545 System for analyzing a failure in a semiconductor wafer by calculating correlation coefficient between collated data of defects per prescribed unit and failures per prescribed unit
12/28/1999US6009327 Hand-off method in a personal communication service system
12/28/1999US6009255 Method of deposition profile simulation
12/28/1999US6009248 Delay optimization system to conduct optimization for satisfying delay constraints on the circuit and method therefor
12/28/1999US6009144 X-ray system and X-ray exposure apparatus
12/28/1999US6009027 Test method and circuit for semiconductor memory
12/28/1999US6009023 High performance DRAM structure employing multiple thickness gate oxide
12/28/1999US6009011 Non-volatile memory and method for operating the same
12/28/1999US6009010 Static semiconductor memory device having data lines in parallel with power supply lines
12/28/1999US6008978 Discharging method and processing apparatus having discharging function
12/28/1999US6008906 Optical method for the characterization of the electrical properties of semiconductors and insulating films
12/28/1999US6008885 Scanning exposure apparatus
12/28/1999US6008884 Projection lens system and apparatus
12/28/1999US6008883 Apparatus and method for exposure
12/28/1999US6008882 Stage device, method of controlling same, and exposure apparatus using said stage device
12/28/1999US6008880 Exposure tool and method capable of correcting high (N-TH) order light exposure errors depending upon an interfield coordinate
12/28/1999US6008716 Fuse structure connecting first level and second level interconnections in inter-layer insulator
12/28/1999US6008713 Monolithic inductor
12/28/1999US6008679 Semiconductor integrated circuit and semiconductor input system
12/28/1999US6008663 Eliminating phase shift in an integrated circuit tester
12/28/1999US6008610 Position control apparatus for fine stages carried by a coarse stage on a high-precision scanning positioning system
12/28/1999US6008544 Semiconductor device and manufacturing method of the semiconductor device
12/28/1999US6008543 Conductive bumps on pads for flip chip application
12/28/1999US6008542 Semiconductor device having long pads and short pads alternated for fine pitch without sacrifice of probing
12/28/1999US6008540 Integrated circuit dielectric and method
12/28/1999US6008539 Multilayer
12/28/1999US6008537 Semiconductor device with heat dissipation metal layer and metal projections