Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/2000
06/28/2000EP1014448A2 Nonvolatile semiconductor memory device and method of manufacturing the same
06/28/2000EP1014447A1 One-time-programmable memory cell manufactured in CMOS tecnology
06/28/2000EP1014446A1 Semiconductor device protected against analysis
06/28/2000EP1014445A1 Carrier substrate for producing semiconductor device
06/28/2000EP1014444A1 Integrated circuit with protection layer and fabrication method therefor
06/28/2000EP1014442A2 Method for forming a dram capacitor and capacitor made thereby
06/28/2000EP1014441A1 Method for manufacturing EEPROM with periphery
06/28/2000EP1014440A2 Area array air gap structure for intermetal dielectric application
06/28/2000EP1014439A1 Method of manufacturing an inter- or intra-metal dielectric comprising air in an integrated circuit
06/28/2000EP1014438A2 A measurement system
06/28/2000EP1014437A2 In-situ measurement method and apparatus for semiconductor processing
06/28/2000EP1014436A2 Process for producing a substrate
06/28/2000EP1014435A2 Field-effect transistor and method of producing the same
06/28/2000EP1014434A1 Method for anisotropically plasma-dryetching a silicon nitride layer with a gas mixture containing fluorine
06/28/2000EP1014433A1 Dry etching gas
06/28/2000EP1014432A1 Method for forming the gate oxide of metal-oxide-semiconductor devices
06/28/2000EP1014431A2 Method of fabricating epitaxial silicon-germanium layers
06/28/2000EP1014430A1 Method for relieving lattice mismatch stress in semiconductor devices
06/28/2000EP1014429A1 Method and device for exposure control, method and device for exposure, and method of manufacture of device
06/28/2000EP1014428A2 Integrated circuit capacitor
06/28/2000EP1014427A2 Processing apparatus having integrated pumping system
06/28/2000EP1014426A2 Apparatus and method for processing a substrate
06/28/2000EP1014425A1 Mechanism and method for supporting substrate to be coated with film
06/28/2000EP1014422A1 Ion implantation control using charge collection, optical emission spectroscopy and mass analysis
06/28/2000EP1014421A1 Wafer holder of ion implantation apparatus
06/28/2000EP1014420A2 Lateral stress relief mechanism for vacuum bellows
06/28/2000EP1014381A1 Semiconductor memory device and storage method thereof
06/28/2000EP1014267A1 Method and apparatus for parallel redundancy in semiconductor memories
06/28/2000EP1014193A1 Photoresist compositions suitable for deep-UV wavelength imaging
06/28/2000EP1014139A2 Optical system, especially for a projection exposure system for microlithography, having a optical mount comprising actuators
06/28/2000EP1014096A2 Substrate and method for inspection
06/28/2000EP1014058A1 Temperature probe and measurement method for low pressure process
06/28/2000EP1014030A1 Movable x/y stage for coordinate measurement
06/28/2000EP1012884A1 Non-volatile memory cell
06/28/2000EP1012880A1 Substrate for electronic packaging, pin jig fixture
06/28/2000EP1012879A4 Fabrication method for reduced-dimension integrated circuits
06/28/2000EP1012879A2 Fabrication method for reduced-dimension integrated circuits
06/28/2000EP1012878A1 Reduction of charge loss in nonvolatile memory cells by phosphorous implantation into pecvd nitride/oxynitride films
06/28/2000EP1012877A1 Method for selective plasma etch
06/28/2000EP1012876A2 Combined cmp and wafer cleaning apparatus and associated methods
06/28/2000EP1012875A1 Tray storing and feeding apparatus
06/28/2000EP1012874A1 Device and process for treating substrates in a fluid container
06/28/2000EP1012869A1 Apparatus for coupling power through a workpiece in a semiconductor wafer processing system
06/28/2000EP1012868A2 Ion accelerator for use in ion implanter
06/28/2000EP1012865A1 Method and apparatus for controlling a workpiece in a vacuum chamber
06/28/2000EP1012783A2 Data-conversion method for a multibeam laser writer for very complex microlithographic patterns
06/28/2000EP1012547A1 Miniature silicon condenser microphone
06/28/2000EP1012478A2 In situ getter pump system and method
06/28/2000EP1012358A1 Inflatable elastomeric element for rapid thermal processing (rtp) system
06/28/2000EP1012100A1 Wire brake
06/28/2000EP1011932A1 Substrate transport drive system
06/28/2000EP1011922A1 Polishing pad for a semiconductor substrate
06/28/2000EP1011919A1 Improved polishing pads and methods relating thereto
06/28/2000EP0876681B1 Semiconductor neuron with variable input weights
06/28/2000EP0782765B1 Polymer stud grid array package
06/28/2000EP0641493B1 Ii-vi laser diodes with quantum wells grown by atomic layer epitaxy and migration enhanced epitaxy
06/28/2000CN2385436Y Discrete component part aging jig mounted on surface
06/28/2000CN1258367A Transistor circuit, display panel and electronic apparatus
06/28/2000CN1258324A Secondary edge reflector for horizontal reactor
06/28/2000CN1258311A Aqueous composition, aqueous cutting fluid using same, method for preparation thereof, and cutting method using cutting fuid
06/28/2000CN1258302A Light-absorbing polymers and application thereof to antireflection film
06/28/2000CN1258241A Polishing pad for semi-conductor substrate
06/28/2000CN1258190A Method for mfg. printed circuit board
06/28/2000CN1258104A Semiconductor device and its mfg. method
06/28/2000CN1258103A Semiconductor device
06/28/2000CN1258102A Semiconductor device and its mfg. method
06/28/2000CN1258100A Semiconductor device and its mfg. method
06/28/2000CN1258099A Semiconductor device interconnecting structure and mfg. method
06/28/2000CN1258098A Back electrode type electronic component and electronic assembly mounting same to printed circuit board
06/28/2000CN1258097A Method for forming double inserted wiring
06/28/2000CN1258096A Semiconductor device contactor, detection device and method thereby and cleaning method
06/28/2000CN1258095A Semiconductor structure and mfg. method
06/28/2000CN1258094A Nitride semiconductor growth method, semiconductor device and its mfg. method
06/28/2000CN1258093A Sample processing system
06/28/2000CN1258092A 样品加工系统 Sample processing system
06/28/2000CN1258091A Sample processing system
06/28/2000CN1258079A Semiconductor memory device
06/28/2000CN1258057A Information processing device
06/28/2000CN1258040A Circuit structure and method for resolution of conversion sensor
06/28/2000CN1053996C Method for mfg. dynamic RAM
06/28/2000CN1053995C Method for making alignment mark of integrated circuit
06/28/2000CN1053994C 半导体器件 Semiconductor devices
06/28/2000CN1053993C Anti-reflective layer and method for mfg. same
06/28/2000CN1053933C Improved compositions and method for polishing
06/27/2000US6081916 IC with test cells having separate data and test paths
06/27/2000US6081910 Circuit for allowing a two-pass fuse blow to memory chips combining an array built-in self-test with redundancy capabilities
06/27/2000US6081662 Semiconductor device including trench isolation structure and a method of manufacturing thereof
06/27/2000US6081614 Surface position detecting method and scanning exposure method using the same
06/27/2000US6081581 X-ray illumination system and X-ray exposure apparatus
06/27/2000US6081578 Three-mirror system for lithographic projection, and projection apparatus comprising such a mirror system
06/27/2000US6081476 Clock-synchronized read-only memory
06/27/2000US6081474 Semiconductor memory
06/27/2000US6081469 Combined precharging and homogenizing circuit
06/27/2000US6081460 Integrated circuit devices having voltage level responsive mode-selection circuits therein and methods of operating same
06/27/2000US6081454 Electrically erasable programmable read-only memory with threshold value controller for data programming
06/27/2000US6081445 Method to write/read MRAM arrays
06/27/2000US6081444 Static memory adopting layout that enables minimization of cell area
06/27/2000US6081443 Semiconductor memory device
06/27/2000US6081417 Capacitor having a ferroelectric layer
06/27/2000US6081414 Apparatus for improved biasing and retaining of a workpiece in a workpiece processing system
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