| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 07/11/2000 | US6087216 Method of manufacturing DRAM capacitor |
| 07/11/2000 | US6087215 Method of fabricating a DRAM device |
| 07/11/2000 | US6087213 Semiconductor memory device and manufacturing method thereof |
| 07/11/2000 | US6087212 Method for forming a storage node in a semiconductor memory |
| 07/11/2000 | US6087211 Method for forming a semiconductor device having non-volatile memory cells, High-voltage transistors, and low-voltage, deep sub-micron transistors |
| 07/11/2000 | US6087210 Method of manufacturing a CMOS Transistor |
| 07/11/2000 | US6087209 Formation of low resistance, ultra shallow LDD junctions employing a sub-surface, non-amorphous implant |
| 07/11/2000 | US6087208 Method for increasing gate capacitance by using both high and low dielectric gate material |
| 07/11/2000 | US6087207 Providing channel layer over substrate, doped barrierlayer, protective layer, etch stop layer; providing mask over surface; etching; depositing metal over mask |
| 07/11/2000 | US6087206 Method of fabricating a top-gate type thin film transistor with dangling bonds of silicon partly combined with hydrogen |
| 07/11/2000 | US6087205 Forming undoped indium tin oxide transparent conductor film on insulator; forming doped indium tin oxide film; patterning laminations, forming amorphous silicon layer over source/drain electrodes along with heat treatment |
| 07/11/2000 | US6087204 Method of making a multi-layer lead frame |
| 07/11/2000 | US6087203 Method for adhering and sealing a silicon chip in an integrated circuit package |
| 07/11/2000 | US6087202 Process for manufacturing semiconductor packages comprising an integrated circuit |
| 07/11/2000 | US6087201 Method of manufacturing ball grid array electronic component |
| 07/11/2000 | US6087199 Method for fabricating a very dense chip package |
| 07/11/2000 | US6087197 Aggregate of semiconductor micro-needles and method of manufacturing the same, and semiconductor apparatus and method of manufacturing the same |
| 07/11/2000 | US6087196 Depositing semiconductor organic material in solvent onto substrate by ink jet printing; evaporating solvent whereby organic material remains on substrate |
| 07/11/2000 | US6087191 Method for repairing surface defects |
| 07/11/2000 | US6087076 Method of manufacturing semiconductor devices by performing coating, heating, exposing and developing in a low-oxygen or oxygen free controlled environment |
| 07/11/2000 | US6087074 Forming semitransparent phase shifting mask having periphery of pattern element area, light shielding portion formed by semitransparent phase shifting portion and transparent portion with optimal size combination |
| 07/11/2000 | US6087071 Process for increasing thermostability of a resist through electron beam exposure |
| 07/11/2000 | US6087068 Undercoating composition for photolithographic resist |
| 07/11/2000 | US6087065 Photoresist film for deep ultra violet and method for forming photoresist film pattern using the same |
| 07/11/2000 | US6087063 Positive-working photoresist composition |
| 07/11/2000 | US6087053 Accuracy |
| 07/11/2000 | US6087048 Exposing the perimeter of a pattern shape through a mask having a fine aperture which delineates only the outline of the desired shape whereby the interior portion of the shape is cut-out upon development to form accurate pattern |
| 07/11/2000 | US6087047 Semi-transparent film comprising a nickel-silicon oxide, nitride, hydride or oxynitride, coated onto transparent substrate |
| 07/11/2000 | US6087046 Exposing to delineate mask substrate using an electron beam at a first exposure intensity, then exposing portions at a second intensity to elongate corner areas of mask pattern |
| 07/11/2000 | US6087021 Electrically conductive metallurgical bonds using components having low melting point constituent |
| 07/11/2000 | US6087005 Article comprising diamond substrate having silica layer securely adhered thereto |
| 07/11/2000 | US6086994 Plastic film containing heat-conductive dielectric filler and having one surface subjected to high frequency sputter-etching, layer of heat-conductive pressure sensitive adhesive comprising hydrophilic alkyl (meth)acrylate polymer |
| 07/11/2000 | US6086976 Semiconductor wafer, handling apparatus, and method |
| 07/11/2000 | US6086962 Method for deposition of diamond-like carbon and silicon-doped diamond-like carbon coatings from a hall-current ion source |
| 07/11/2000 | US6086960 Method for improving the quality of a titanium nitride layer including carbon and oxygen |
| 07/11/2000 | US6086952 Chemical vapor deposition of a copolymer of p-xylylene and a multivinyl silicon/oxygen comonomer |
| 07/11/2000 | US6086951 Method for forming metallic capacitor |
| 07/11/2000 | US6086947 Method of depositing materials on a wafer to eliminate the effect of cracks in the deposition |
| 07/11/2000 | US6086945 Forming a silicon thin film on a surface of a heat resistant substrate by using polycrystalline silicon fine particles as a raw material, heating the silicon thin film to recrystallize the film and enlarge the particle diameter of fine particles |
| 07/11/2000 | US6086777 Tantalum barrier metal removal by using CF4 /o2 plasma dry etch |
| 07/11/2000 | US6086734 Thin-film depositing apparatus |
| 07/11/2000 | US6086727 Movable flux regulator disposed between target and wafer for partially blocking portion of target material from being deposited on said wafer during deposition of target material, wherein movable flux regulator is tiltable in x,y, and z-axis |
| 07/11/2000 | US6086705 Bonding of micro elements |
| 07/11/2000 | US6086699 Thin film-forming method and thin film-forming apparatus therefor |
| 07/11/2000 | US6086680 Low-mass susceptor |
| 07/11/2000 | US6086679 Deposition systems and processes for transport polymerization and chemical vapor deposition |
| 07/11/2000 | US6086678 Pressure equalization system for chemical vapor deposition reactors |
| 07/11/2000 | US6086671 Method for growing a silicon single crystal |
| 07/11/2000 | US6086670 Silicon wafer and method for producing the same |
| 07/11/2000 | US6086665 Solution for forming ferroelectric film and method for forming ferroelectric film |
| 07/11/2000 | US6086641 Bonding a pellet to the top or the bottom of a lead frame by paste-like adhesive or organic resin adhesive. |
| 07/11/2000 | US6086626 Method for verification of combinational circuits using a filtering oriented approach |
| 07/11/2000 | US6086460 Method and apparatus for conditioning a polishing pad used in chemical mechanical planarization |
| 07/11/2000 | US6086457 Washing transfer station in a system for chemical mechanical polishing |
| 07/11/2000 | US6086456 Polishing method using a hydrostatic fluid bearing support having fluctuating fluid flow |
| 07/11/2000 | US6086454 Method of fabricating a semiconductor device using a CMP process |
| 07/11/2000 | US6086453 Wafer Pattern imaging apparatus |
| 07/11/2000 | US6086362 Multi-function chamber for a substrate processing system |
| 07/11/2000 | US6086323 Method for supplying wafers to an IC manufacturing process |
| 07/11/2000 | US6086269 Method and apparatus for applying a substance to a surface |
| 07/11/2000 | US6086245 Apparatus for infrared pyrometer calibration in a thermal processing system |
| 07/11/2000 | US6086127 Method of making a carrier for at least one wafer |
| 07/11/2000 | US6085968 Solder retention ring for improved solder bump formation |
| 07/11/2000 | US6085967 Method of registrably aligning fabricated wafers preceding bonding |
| 07/11/2000 | US6085966 Sputtering target assembly production method |
| 07/11/2000 | US6085830 Heat sink, and process and apparatus for manufacturing the same |
| 07/11/2000 | US6085764 Cleaning apparatus and method |
| 07/11/2000 | US6085762 Apparatus and method for providing pulsed fluids |
| 07/11/2000 | US6085690 Chemical vapor deposition apparatus |
| 07/11/2000 | US6085688 Method and apparatus for improving processing and reducing charge damage in an inductively coupled plasma reactor |
| 07/11/2000 | US6085670 Tiltable Z-axis platform based on uni-directional tilt platform |
| 07/11/2000 | US6085548 Control vent system for ultra-high purity delivery system for liquefied compressed gases |
| 07/11/2000 | US6085415 Methods to produce insulated conductive through-features in core materials for electric packaging |
| 07/11/2000 | US6085413 Multilayer electrical interconnection device and method of making same |
| 07/11/2000 | US6085412 Method for manufacturing card type memory device |
| 07/11/2000 | US6085411 Fixture for making laminated integrated circuit devices |
| 07/06/2000 | WO2000039858A2 Metal gate double diffusion mosfet with improved switching speed and reduced gate tunnel leakage |
| 07/06/2000 | WO2000039857A1 Integrated circuit impedance device and method of manufacture therefor |
| 07/06/2000 | WO2000039855A1 Avalanche programmed floating gate memory cell structure with the program element comprising an avalanche diode formed in the first polysilicon layer |
| 07/06/2000 | WO2000039854A1 Coaxial type signal line and manufacturing method thereof |
| 07/06/2000 | WO2000039850A1 Electronic power circuit with heat dissipating radiator |
| 07/06/2000 | WO2000039849A1 Dual-damascene interconnect structures and methods of fabricating same |
| 07/06/2000 | WO2000039848A2 Test method and assembly including a test die for testing a semiconductor product die |
| 07/06/2000 | WO2000039847A1 Method for structuring a substrate and device for carrying out said method |
| 07/06/2000 | WO2000039846A1 Method of etching silicon dioxide using hydrogen-containing additive gases in fluorocarbon gas chemistry |
| 07/06/2000 | WO2000039845A1 Method for forming contact hole |
| 07/06/2000 | WO2000039844A1 Materials for polishing liquid for metal, polishing liquid for metal, method for preparation thereof and polishing method using the same |
| 07/06/2000 | WO2000039843A1 Cmp abrasive, liquid additive for cmp abrasive and method for polishing substrate |
| 07/06/2000 | WO2000039842A1 Capacitor electrode structure |
| 07/06/2000 | WO2000039841A1 Method for storing carrier for polishing wafer |
| 07/06/2000 | WO2000039840A1 Method for boron doping wafers using a vertical oven system |
| 07/06/2000 | WO2000039839A2 High aspect ratio sub-micron contact etch process in an inductively-coupled plasma processing system |
| 07/06/2000 | WO2000039838A2 Method for igniting a plasma inside a plasma processing reactor |
| 07/06/2000 | WO2000039837A1 Perforated plasma confinement ring in plasma reactors |
| 07/06/2000 | WO2000039829A1 Method for precise molding and alignment of structures on a substrate using a stretchable mold |
| 07/06/2000 | WO2000039805A1 Floating gate memory apparatus and method for selected programming thereof |
| 07/06/2000 | WO2000039639A1 Photosensitive resin composition |
| 07/06/2000 | WO2000039189A1 Electronic circuit device comprising an epoxy-modified aromatic vinyl-conjugated diene block copolymer |
| 07/06/2000 | WO2000039028A1 Mesoporous silica film from a solution containing a surfactant and methods of making same |
| 07/06/2000 | WO2000039021A1 Chemical delivery systems and methods of delivery |