Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/2000
06/20/2000US6078537 Semiconductor circuit, in particular for use in an integrated module
06/20/2000US6078522 Non-volatile semiconductor memory device
06/20/2000US6078514 Semiconductor device and semiconductor system for high-speed data transfer
06/20/2000US6078506 Tape-ball grid array type semiconductor device having reinforcement plate with slits
06/20/2000US6078493 Fin shaped electrode with conductive oxide alternately stacked over second conductive substance, the second substance layer etched to be shorter than first, second electrode and dielectric between electrodes; capacitance
06/20/2000US6078492 Structure of a capacitor in a semiconductor device having a self align contact window which has a slanted sidewall
06/20/2000US6078393 Phase shift mask inspection apparatus
06/20/2000US6078387 Test apparatus
06/20/2000US6078382 Charged-particle-beam projection-optical system
06/20/2000US6078366 Array substrate comprising semiconductor contact layers having same outline as signal lines
06/20/2000US6078210 Internal voltage generating circuit
06/20/2000US6078195 Logic blocks with mixed low and regular Vt MOSFET devices for VLSI design in the deep sub-micron regime
06/20/2000US6078187 Hemispherical test head for integrated circuit tester employing radially distributed circuit cards
06/20/2000US6078123 Structure and method for mounting a saw device
06/20/2000US6078106 Semiconductor memory device having a plurality of wiring layers
06/20/2000US6078105 Method for manufacturing semiconductor device using spin on glass layer
06/20/2000US6078104 Carrier film and integrated circuit device using the same and method of making the same
06/20/2000US6078103 Dimpled contacts for metal-to-semiconductor connections, and methods for fabricating same
06/20/2000US6078097 Lead frame
06/20/2000US6078096 Semiconductor integrated circuit device having a short circuit preventing circuit
06/20/2000US6078095 Power transistor including a plurality of unit transistors
06/20/2000US6078094 Starter current source device with automatic shut-down capability and method for its manufacture
06/20/2000US6078093 Capacitor structure of semiconductor device for high dielectric constant
06/20/2000US6078091 Inter-conductive layer fuse for integrated circuits
06/20/2000US6078089 Substrate, and electrode structure over the substrate including a cobalt niobate insulating layer and electrode layer of cobalt silicide over the insulating layer; increased operating speeds over conventional transistors
06/20/2000US6078087 SRAM memory device with improved performance
06/20/2000US6078086 Metal oxide semiconductor field effect transistor and method of manufacturing the same
06/20/2000US6078085 Semiconductor integrated circuit and layout apparatus in which guard-ring is interposed between input-output circuits
06/20/2000US6078084 Semiconductor integrated circuit device
06/20/2000US6078082 Field-effect transistor having multi-part channel
06/20/2000US6078081 Semiconductor device for improving short channel effect
06/20/2000US6078080 Asymmetrical transistor with lightly and heavily doped drain regions and ultra-heavily doped source region
06/20/2000US6078079 Semiconductor device and method of manufacturing the same
06/20/2000US6078078 V-gate transistor
06/20/2000US6078077 Power device
06/20/2000US6078076 Vertical channels in split-gate flash memory cell
06/20/2000US6078075 Semiconductor device with a programmable element having a P-type substrate and floating gate with a thin gate dielectric
06/20/2000US6078074 Semiconductor device having multilayer metal interconnection
06/20/2000US6078073 Semiconductor apparatus formed by SAC (self-aligned contact) method and manufacturing method therefor
06/20/2000US6078072 Semiconductor device having a capacitor
06/20/2000US6078071 High-speed compound semiconductor device having an improved gate structure
06/20/2000US6078069 Bidirectional horizontal charge transfer device
06/20/2000US6078067 Semiconductor device having mutually different two gate threshold voltages
06/20/2000US6078063 Light-emitting gallium nitride-based compound semiconductor device
06/20/2000US6078060 Active matrix display devices and methods of manufacturing the active matrix display devices
06/20/2000US6078059 Fabrication of a thin film transistor and production of a liquid display apparatus
06/20/2000US6078054 Charged particle beam optical system
06/20/2000US6078035 Integrated circuit processing utilizing microwave radiation
06/20/2000US6078030 Component heater for use in semiconductor manufacturing equipment
06/20/2000US6078020 Apparatus and method for manufacturing semiconductor device
06/20/2000US6077894 Instruments and wearable articles which suppress generation of organic materials as much as possible when used in clean room
06/20/2000US6077792 Method of forming foamed polymeric material for an integrated circuit
06/20/2000US6077791 Method of forming passivation layers using deuterium containing reaction gases
06/20/2000US6077790 Etching process using a buffer layer
06/20/2000US6077789 Method for forming a passivation layer with planarization
06/20/2000US6077788 Method and apparatus for processing samples
06/20/2000US6077787 Method for radiofrequency wave etching
06/20/2000US6077786 Methods and apparatus for filling high aspect ratio structures with silicate glass
06/20/2000US6077785 Ultrasonic processing of chemical mechanical polishing slurries
06/20/2000US6077784 Chemical-mechanical polishing method
06/20/2000US6077783 Method and apparatus for detecting a polishing endpoint based upon heat conducted through a semiconductor wafer
06/20/2000US6077782 Method to improve the texture of aluminum metallization
06/20/2000US6077781 Single step process for blanket-selective CVD aluminum deposition
06/20/2000US6077780 Method for filling high aspect ratio openings of an integrated circuit to minimize electromigration failure
06/20/2000US6077779 Multi-step deposition to improve the conformality of ionized PVD films
06/20/2000US6077778 Method of improving refresh time in DRAM products
06/20/2000US6077777 Method for forming wires of semiconductor device
06/20/2000US6077776 Polysilicon residue free process by thermal treatment
06/20/2000US6077775 Barrier film of metal ions left behind after annealing of metal halide film
06/20/2000US6077774 Method of forming ultra-thin and conformal diffusion barriers encapsulating copper
06/20/2000US6077773 Damascene process for reduced feature size
06/20/2000US6077772 Methods of forming metal interconnections including thermally treated barrier layers
06/20/2000US6077771 Method for forming a barrier layer
06/20/2000US6077770 Damascene manufacturing process capable of forming borderless via
06/20/2000US6077769 Method of fabricating a daul damascene structure
06/20/2000US6077768 Process for fabricating a multilevel interconnect
06/20/2000US6077767 Modified implementation of air-gap low-K dielectric for unlanded via
06/20/2000US6077765 Structure of bump electrode and method of forming the same
06/20/2000US6077764 Process for depositing high deposition rate halogen-doped silicon oxide layer
06/20/2000US6077763 Process for fabricating a self-aligned contact
06/20/2000US6077762 Method and apparatus for rapidly discharging plasma etched interconnect structures
06/20/2000US6077761 Method for fabricating a transistor gate with a T-like structure
06/20/2000US6077760 Structure and method of manufacturing single-crystal silicon carbide/single-crystal silicon heterojunctions with negative differential resistance characteristics
06/20/2000US6077759 Method of producing semiconductor device
06/20/2000US6077758 Method of crystallizing thin films when manufacturing semiconductor devices
06/20/2000US6077757 Method of forming chip semiconductor devices
06/20/2000US6077755 Method for constructing multiple container capacitor
06/20/2000US6077754 Methods of forming a silicon nitride film, a capacitor dielectric layer and a capacitor
06/20/2000US6077753 Method for manufacturing vertical bipolar transistor having a field shield between an interconnecting layer and the field oxide
06/20/2000US6077752 Method in the manufacturing of a semiconductor device
06/20/2000US6077751 Method of rapid thermal processing (RTP) of ion implanted silicon
06/20/2000US6077750 Method for forming epitaxial Co self-align silicide for semiconductor device
06/20/2000US6077749 Method of making dual channel gate oxide thickness for MOSFET transistor design
06/20/2000US6077748 Advanced trench isolation fabrication scheme for precision polysilicon gate control
06/20/2000US6077747 Method of manufacturing semiconductor device
06/20/2000US6077746 Using p-type halo implant as ROM cell isolation in flat-cell mask ROM process
06/20/2000US6077745 Self-aligned diffused source vertical transistors with stack capacitors in a 4F-square memory cell array
06/20/2000US6077744 Semiconductor trench MOS devices
06/20/2000US6077743 Method for making dynamic random access memory cells having brush-shaped stacked capacitors patterned from a hemispherical grain hard mask
06/20/2000US6077742 Method for making dynamic random access memory (DRAM) cells having zigzag-shaped stacked capacitors with increased capacitance
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