Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2000
10/03/2000US6126532 A polishing pad containing sintered polyurethane polishing pad substrate, a bottom surface including skin layer, a backing sheet, and an adhesive used for the grinding, lapping, shaping and polishing of semiconductor wafers
10/03/2000US6126531 Used to restores the state of agglomeration of the abrasive grains to the initial state to enable reuse of the slurry and thereby reduces the cost of polishing work and improves operating rate of mechanical chemical polishing apparatus
10/03/2000US6126530 Cleaning device for surface plate correcting dresser
10/03/2000US6126518 Chemical mechanical polishing process for layers of semiconductor or isolating materials
10/03/2000US6126517 System for chemical mechanical polishing having multiple polishing stations
10/03/2000US6126514 Polishing slurry and polishing method using the same
10/03/2000US6126511 Polishing device and correcting method therefor
10/03/2000US6126428 Vacuum dispense apparatus for dispensing an encapsulant
10/03/2000US6126382 Apparatus for aligning substrate to chuck in processing chamber
10/03/2000US6126381 Unitary specimen prealigner and continuously rotatable four link robot arm mechanism
10/03/2000US6126380 Robot having a centering and flat finding means
10/03/2000US6126338 Resist coating-developing system
10/03/2000US6126271 Method for manufacturing a liquid jet recording head held in place by a vacuum using a single-point bonder with a particular tip construction and a head manufactured by this method
10/03/2000US6126169 Air bearing operable in a vacuum region
10/03/2000US6126063 Integrated circuit packaging apparatus and method
10/03/2000US6126062 Non-conductive and self-leveling leadframe clamp insert for wirebonding integrated circuits
10/03/2000US6126059 Captured-cell solder printing and reflow methods and apparatuses
10/03/2000US6125863 Offset rotor flat media processor
10/03/2000US6125861 Post-CMP wet-HF cleaning station
10/03/2000US6125859 Method for improved cleaning of substrate processing systems
10/03/2000US6125789 Increasing the sensitivity of an in-situ particle monitor
10/03/2000US6125788 Plasma reactor with enhanced plasma uniformity by gas addition, reduced chamber diameter and reduced RF wafer pedestal diameter
10/03/2000US6125644 Container of coolant
10/03/2000US6125554 Method and apparatus for drying flat objects
10/03/2000US6125551 Gas seal and support for rotating semiconductor processor
10/03/2000US6125522 Manufacturing method for electrostatic deflector
10/03/2000US6125496 Pad and roller assembly for cleaning semiconductor wafers
09/2000
09/30/2000CA2303473A1 Prober for electrical measurement and method of measuring electrical characteristics with said prober
09/30/2000CA2303019A1 Semiconductor device manufacturing method of accurately performing alignment of patterning, and mask for exposure
09/28/2000WO2000057629A1 Laser pattern generator
09/28/2000WO2000057498A1 Electrically programmable memory element with improved contacts
09/28/2000WO2000057483A1 Method and apparatus for injecting charge onto the floating gate of a nonvolatile memory cell
09/28/2000WO2000057482A1 Novel transistor with metal gate and buried counter-doped channel and method for making same
09/28/2000WO2000057481A2 Mos-transistor structure with a trench-gate electrode and a reduced specific closing resistor and methods for producing an mos transistor structure
09/28/2000WO2000057480A1 Novel semiconductor device combining the advantages of solid and soi architectures, and method for making same
09/28/2000WO2000057479A1 Semiconductor device with junctions having dielectric pockets and method for making same
09/28/2000WO2000057477A1 Polycrystalline module and method for producing a semiconductor module
09/28/2000WO2000057476A1 Independently programmable memory segments in isolated n-wells within a pmos eeprom array and method therefor
09/28/2000WO2000057472A1 Method of connecting a connecting wire to a contact of an integrated circuit
09/28/2000WO2000057470A1 Method of disposing lsi
09/28/2000WO2000057469A1 Structure for mounting semiconductor device and mounting method
09/28/2000WO2000057468A2 Electric circuit and its method of production
09/28/2000WO2000057467A1 Method for making integrated circuit chips
09/28/2000WO2000057466A1 Lead frame moisture barrier for molded plastic electronic packages
09/28/2000WO2000057464A1 ROOM TEMPERATURE WET CHEMICAL GROWTH PROCESS OF SiO BASED OXIDES ON SILICON
09/28/2000WO2000057463A1 Heat treating method for thin film and forming method for thin film
09/28/2000WO2000057462A1 Semiconductor device and its production method
09/28/2000WO2000057461A1 Method for producing a mushroom-shaped or t-shaped gate
09/28/2000WO2000057460A1 METHOD FOR GROWING GaN COMPOUND SEMICONDUCTOR CRYSTAL AND SEMICONDUCTOR SUBSTRATE
09/28/2000WO2000057458A1 Method of manufacturing semiconductor device and semiconductor device manufactured by it
09/28/2000WO2000057457A1 Method and apparatus for transporting articles
09/28/2000WO2000057456A1 Cluster tool for wafer processing having an electron beam exposure module
09/28/2000WO2000057455A1 Method and apparatus for processing a wafer
09/28/2000WO2000057454A2 Improved integrated oscillators and tuning circuits
09/28/2000WO2000057423A1 Storage cell array and method for the production thereof
09/28/2000WO2000057326A1 Assistance method and apparatus
09/28/2000WO2000057251A1 Device and method for detecting a workpiece in an automatic processing device
09/28/2000WO2000057249A1 Resist developer and method for forming resist pattern using the same
09/28/2000WO2000057235A2 Multi-beam scanner including a dove prism array
09/28/2000WO2000057162A2 Optical inspection of semi-conductor structures
09/28/2000WO2000057159A1 Apparatus and method for determining the active dopant profile in a semiconductor wafer
09/28/2000WO2000057127A1 Method and apparatus for wafer metrology
09/28/2000WO2000056799A1 Reworkable thermosetting resin compositions
09/28/2000WO2000029637A9 Diffusion barrier materials with improved step coverage
09/28/2000WO2000026941A9 Word line driver for semiconductor memories
09/28/2000WO2000019512A8 Pseudomorphic high electron mobility transistors
09/28/2000EP1145324A3 Mos-transistor structure with a trench-gate electrode and a reduced specific closing resistor and methods for producing an mos transistor structure
09/28/2000DE19912950A1 Semiconductor device, especially a bipolar transistor with a base-collector junction operable in the blocking direction, has a different bandgap interlayer adjacent a space charge zone for stopping minority charge carriers
09/28/2000DE19912252A1 Verfahren zum Wiederaufarbeiten einer Suspension A method for reprocessing a suspension
09/28/2000DE19910886A1 Grabenisolation für elektrisch aktive Bauelemente Grave isolation for electrically active components
09/28/2000DE19907922C1 Leseverstärkeranordnung mit gemeinsamen durchgehendem Diffusionsgebiet der Leseverstärker-Transistoren Sense amplifier configuration with common continuous diffusion region of the sense amplifier transistors
09/28/2000DE19907921C1 Halbleiterspeicheranordnung mit Dummy-Bauelementen auf durchgehenden Diffusionsgebieten A semiconductor memory device with dummy components on continuous diffusion regions
09/28/2000DE10012198A1 Production of a cylindrical capacitor element used in DRAMs uses hemispherical grain silicon with isolating layer and oxide layer
09/28/2000DE10009183A1 Photoresist composition comprises a cyclic olefin polymer, a photosensitive acid generator and a hydrophobic additive selected from non-steroidal (multi)-alicyclic components and a saturated steroid component
09/28/2000CA2367365A1 Electrically programmable memory element with improved contacts
09/28/2000CA2367204A1 Cluster tool for wafer processing having an electron beam exposure module
09/28/2000CA2366563A1 Semi conductor structures
09/28/2000CA2331790A1 Reworkable thermosetting resin compositions
09/28/2000CA2330122A1 Laser pattern generator
09/27/2000EP1039639A2 I/O cell configuration for multiple I/O standards
09/27/2000EP1039595A2 Gas laser oscillator
09/27/2000EP1039557A1 Silicon based conductive material and process for production thereof
09/27/2000EP1039553A2 Method for removing short-circuited sections of a solar cell
09/27/2000EP1039548A2 Field effect controlled semiconductor component
09/27/2000EP1039546A1 Semiconductor device with reduced leakage current and method of manufacturing it
09/27/2000EP1039545A2 Semiconductor device
09/27/2000EP1039544A1 Monolithic integrated circuit comprising an inductor and a method of fabricating the same
09/27/2000EP1039543A2 Circuit chip connector and method of connecting a circuit chip
09/27/2000EP1039541A1 Semiconductor device having an improved structure for preventing cracks, improved small-sized semiconductor and method of manufacturing the same
09/27/2000EP1039540A1 Semiconductor device having an improved structure for preventing cracks, improved small-sized semiconductor and method of manufacturing the same
09/27/2000EP1039538A1 Semiconductor device having an improved structure for preventing cracks, improved small-sized semiconductor and method of manufacturing the same
09/27/2000EP1039536A1 Ferroelectric memory or a method of producing the same
09/27/2000EP1039535A2 Stacked capacitor memory cell and method of manufacture
09/27/2000EP1039534A2 Dynamic random access memory
09/27/2000EP1039533A2 High performance dram and method of manufacture
09/27/2000EP1039532A2 Method for manufacturing semiconductor devices of the bipolar type
09/27/2000EP1039531A2 Interconnection in semiconductor device and method of manufacturing the same
09/27/2000EP1039530A2 Method for manufacturing semiconductor device capable of avoiding flaws and erosion caused by metal chemical-mechanical polishing process
09/27/2000EP1039528A2 In-situ method for preparing and highlighting of defects for failure analysis of semiconductor chips
09/27/2000EP1039527A2 Semiconductor device mounting structure
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