Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2000
10/05/2000WO2000058188A1 Wafer handling robot having x-y stage for wafer handling and positioning
10/05/2000WO2000058054A1 A method and apparatus for stabilizing the process temperature during chemical mechanical polishing
10/05/2000WO2000058053A1 Apparatus and process for reconditioning polishing pads
10/05/2000WO2000058048A1 Hybrid heater with ceramic foil serrated plate and gas assist
10/05/2000WO2000057980A1 Efg crystal growth apparatus
10/05/2000WO2000046859A8 High-voltage transistor with multi-layer conduction region
10/05/2000WO2000029906A3 Antireflective composition for a deep ultraviolet photoresist
10/05/2000WO2000025625A3 Method and apparatus for insertion and retainment of pomade within a dispenser
10/05/2000WO2000025178A3 Photoresists and processes for microlithography
10/05/2000DE19959938A1 Semiconductor device manufacturing method for e.g. GaAs FET involves sticking chips to substrate, sticking lid to substrate and separating chips along adjoining areas
10/05/2000DE19955034A1 Chip set with just one pilot pin for using a graphics interface reference voltage installs on a carrier printed circuit board to control an accelerated graphics interface.
10/05/2000DE19932735A1 Microelectronics manufacturing system cleaning method
10/05/2000DE19915247A1 Spannungsabhängiger Dünnschichtkondensator Voltage-dependent thin film capacitor
10/05/2000DE19915245A1 Electronic component with strip conductor, e.g. coil or coupler for high frequency application and high speed digital circuits, is produced by conductive layer deposition on metal base layer regions exposed by structured photolacquer layer
10/05/2000DE19915034A1 Gas scrubber for semiconductor manufacturing facility includes piston and valve to regulate gas flow in gas pipes based on pressure differential between pressure gauges at inlet and outlet
10/05/2000DE19914905A1 Electrochemical etching cell for etching silicon wafers uses electrode materials that do not contaminate and/or damage the etching body after etching
10/05/2000DE19914815A1 Halbleitermodul Semiconductor module
10/05/2000DE19914718A1 Semiconductor diode surface contact manufacturing method
10/05/2000DE19914496A1 Memory cell structure, especially for a DRAM, has a contact within a substrate for connecting a capacitor and a MOS transistor on opposite substrate surfaces
10/05/2000DE19914338A1 Contact bump for an aluminum connection pad of a semiconductor substrate is produced by electrodepositing zinc and palladium seeds before autocatalytic deposition of a contact metallization
10/05/2000DE19914243A1 Verfahren zur Herstellung hochreiner Lösungen unter Verwendung von gasförmigem Fluorwasserstoff A method for producing high purity solutions using gaseous hydrogen fluoride
10/05/2000DE19913628A1 Anlage zur Fertigung von Halbleiterprodukten Plant for the manufacture of semiconductor products
10/05/2000DE19913375A1 MOS-Transistorstruktur mit einer Trench-Gate-Elektrode und einem verringerten spezifischen Einschaltwiderstand und Verfahren zur Herstellung einer MOS-Transistorstruktur MOS transistor structure with a trench gate electrode and a reduced specific on-resistance and process for producing a MOS transistor structure
10/05/2000DE19910816A1 Dotierpasten zur Erzeugung von p,p+ und n,n+ Bereichen in Halbleitern Dopant pastes for the production of p, p + and n, n + regions in semiconductors
10/05/2000DE19907858C1 Vorrichtung zur elektrostatischen Ablenkung eines Korpuskularstrahles Apparatus for electrostatic deflection of a particle beam
10/05/2000DE10015742A1 Photoresist composition used for processing semiconductors contains mixture of benzophenone and poly(phenylene-alkylene) naphthoquinone-diazide-sulfonates, resin and solvent
10/05/2000DE10014799A1 Exposure device e.g. for reproducing digital image, has light source in the form of several arrays of LEDs
10/05/2000DE10014315A1 Semiconductor memory, especially with a ferroelectric capacitor, has a barrier metal covered at its side by an oxygen penetration preventing film and at its top by a lower capacitor electrode
10/05/2000DE10014195A1 Semiconductor memory component with numerous word lines and individual or paired bit lines and two types of earth voltage lines
10/05/2000DE10012141A1 Single electron transistor having a quantum dot size of a few tens of nanometers is produced by forming the upper gate on trench side walls in an insulation film
10/05/2000DE10011008A1 Method to apply sealant to electronic component uses contact part positioned in liquid sealant film and pressed against component
10/05/2000DE10004436A1 Gripper arrangement of picking apparatus in module IC handler, has shock absorber and sensor which senses module IC during movement of jaws
10/05/2000CA2368441A1 Method for producing high-purity solutions using gaseous hydrogen fluoride
10/04/2000EP1041652A2 Process for fabricating organic circuits
10/04/2000EP1041644A2 Transparent and conductive zinc oxide film with low growth temperature
10/04/2000EP1041643A1 Semiconductor device, a method of manufacturing the same, and a semiconductor device protective circuit
10/04/2000EP1041642A1 A method to fabricate a floating gate with a sloping sidewall for a flash memory
10/04/2000EP1041641A2 A method for manufacturing an electrooptical device
10/04/2000EP1041640A2 Power trench MOS-gated device and method of manufacturing it
10/04/2000EP1041639A1 Process for fabrication of a planar heterostructure
10/04/2000EP1041638A1 High density mos-gated power device and process for forming same
10/04/2000EP1041637A1 High-speed imaging device
10/04/2000EP1041635A2 Semiconductor memory device and method of making the same
10/04/2000EP1041634A1 Power MOSFET having voltage-clamped gate
10/04/2000EP1041633A1 Semiconductor device, method of manufacture thereof, circuit board, and electronic device
10/04/2000EP1041632A1 A compensation structure for a bond wire at high frequency operation
10/04/2000EP1041630A2 Method of accurately performing alignment of patterning in the manufaturing of a semiconductor device, and mask for exposure
10/04/2000EP1041629A1 Manufacturing of cavity fuses on gate conductor level
10/04/2000EP1041628A2 An image sensor ball grid array package and the fabrication thereof
10/04/2000EP1041626A2 Semiconductor Module
10/04/2000EP1041624A1 Method of transferring ultra-thin substrates and application of the method to the manufacture of a multilayer thin film device
10/04/2000EP1041623A2 An isolation collar nitride liner for DRAM process improvement
10/04/2000EP1041622A1 Interconnect structure between conductor layers and fabricating method thereof
10/04/2000EP1041621A2 Multilayered wafer with thrick sacrificial layer using porous silicon or porous silicon oxide and fabrication method thereof
10/04/2000EP1041620A2 Method of transferring ultrathin substrates and application of the method to the manufacture of a multi-layer thin film device
10/04/2000EP1041619A2 System and method for the real time determination of the in situ emissivity of a workpiece during processing
10/04/2000EP1041618A1 Semiconductor device and manufacturing method thereof, circuit board and electronic equipment
10/04/2000EP1041616A1 Stress relaxation electronic part, stress relaxation wiring board, and stress relaxation electronic part mounted body
10/04/2000EP1041615A2 Method for enhancing plasma processing performance by irradiating with light
10/04/2000EP1041614A1 Plasma cleaning process for openings formed in one or more low dielectric constant insulation layers over copper metallization integrated circuit structures
10/04/2000EP1041613A1 Etching process
10/04/2000EP1041612A1 Method for heat-treating silicon wafer and silicon wafer
10/04/2000EP1041611A1 Fine protuberance structure and method of production thereof
10/04/2000EP1041610A1 GaN SINGLE CRYSTALLINE SUBSTRATE AND METHOD OF PRODUCING THE SAME
10/04/2000EP1041609A1 Group III nitride compound semiconductor device and method of producing the same
10/04/2000EP1041604A2 Pneumatically actuated flexure gripper for wafer handling robots
10/04/2000EP1041534A1 Semiconductor device with internal power supply circuit, together with liquid crystal device and electronic equipment using the same
10/04/2000EP1041445A2 Method of improving the etch resistance of photoresists
10/04/2000EP1041444A2 Apparatus and method for manufacturing a semiconductor device
10/04/2000EP1041443A2 Lithographic process for device fabrication using dark-field illumination and apparatus therefor
10/04/2000EP1041441A2 Device manufacturing method
10/04/2000EP1041440A2 System and method for reducing corner rounding in mask fabrication
10/04/2000EP1041379A2 Apparatus and method for detecting defects in the surface of a workpiece
10/04/2000EP1041172A2 Method for reducing topography dependent charging effects in a plasma enhanced semiconductor wafer processing system
10/04/2000EP1041171A1 CVD processing chamber
10/04/2000EP1041170A2 Nickel/vanadium sputtering target with ultra-low alpha emission
10/04/2000EP1040523A1 Power component bearing interconnections
10/04/2000EP1040521A2 Silicon oxide insulator (soi) semiconductor having selectively linked body
10/04/2000EP1040519A1 Plastic composite body
10/04/2000EP1040518A1 CHEMICAL MECHANICAL POLISHING OF FeRAM CAPACITORS
10/04/2000EP1040517A2 Semiconductor component and manufacturing method for semiconductor component
10/04/2000EP1040516A1 Apparatus and method for determining depth profile characteristics of a dopant material in a semiconductor device
10/04/2000EP1040515A1 Method for forming a uniform network of semiconductor islands on an insulating substrate
10/04/2000EP1040514A2 LONG RANGE ORDERED AND EPITAXIAL OXIDES INCLUDING SiO 2?, ON Si, Si x?Ge 1-x?, GaAs AND OTHER SEMICONDUCTORS, MATERIAL SYNTHESIS, AND APPLICATIONS THEREOF
10/04/2000EP1040513A1 High integrity borderless vias with hsq gap filled patterned conductive layers
10/04/2000EP1040512A1 Method of forming a laterally-varying charge profile in a silicon carbide substrate
10/04/2000EP1040511A2 Integrated material management module
10/04/2000EP1040506A1 Device for producing excited/ionized particles in a plasma
10/04/2000EP1040500A1 A plasma generating apparatus having an electrostatic shield
10/04/2000EP1040486A1 Biasing method and structure for reducing band-to-band and/or avalanche currents during the erase of flash memory devices
10/04/2000EP1040485A1 Static memory cell with load circuit using a tunnel diode
10/04/2000EP1040435A1 Timing closure methodology
10/04/2000EP1040292A1 Gas panel
10/04/2000EP1040212A1 Charge for vertical boat growth process and use thereof
10/04/2000EP1038593B1 Device for applying two or several fluids from nozzles
10/04/2000EP1025587A4 Semiconductor flip-chip package and method for the fabrication thereof
10/04/2000EP0839386B1 Method of producing an mos transistor
10/04/2000EP0727098B1 High-voltage ldd-mosfet with increased breakdown voltage and method of fabrication
10/04/2000EP0724773B1 Grid array inspection system
10/04/2000EP0711455B1 Shadow clamp
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