Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/2001
03/22/2001WO2001020669A2 Use of additional bonding finger rows to improve wire bond density
03/22/2001WO2001020667A1 Integrated circuit and method of manufacture thereof
03/22/2001WO2001020666A1 Integrated circuit
03/22/2001WO2001020665A1 Method for producing a copper connection
03/22/2001WO2001020664A1 A self-aligned method for forming deep trenches in shallow trenches for isolation of semiconductor devices
03/22/2001WO2001020663A1 Vacuum processing device
03/22/2001WO2001020662A1 Device for mapping composition ratio of specific element which compound semiconductor wafer contains
03/22/2001WO2001020661A1 Semiconductor wafer with anisotropic conductor film, and method of manufacture thereof
03/22/2001WO2001020660A1 Method of mounting optical and electrical devices, and mounting structure
03/22/2001WO2001020659A1 Method for transferring integrated circuit microchips and implementing device
03/22/2001WO2001020658A1 Wafer coating method for flip chips
03/22/2001WO2001020657A1 Heat sink manufacturing device and manufacturing method
03/22/2001WO2001020656A2 Dmos transistor having a trench gate electrode and method of making the same
03/22/2001WO2001020655A1 Method of plasma etching thin films of difficult to dry etch materials
03/22/2001WO2001020654A1 Process for improving the thickness uniformity of a thin oxide layer in semiconductor wafer fabrication
03/22/2001WO2001020653A1 Arrangement and method for detecting the end of life of an aqueous bath utilized in semiconductor processing
03/22/2001WO2001020652A1 Method and apparatus for cleaning film deposition device
03/22/2001WO2001020649A1 Reducing the coupling between the semiconductor substrate and a coil integrated thereon
03/22/2001WO2001020647A2 Novel chip interconnect and packaging deposition methods and structures
03/22/2001WO2001020646A2 Fill strategies in the optical kerf
03/22/2001WO2001020644A2 Method and apparatus for encapsulating semiconductor chips
03/22/2001WO2001020643A2 Method for producing a memory, comprising a memory cell and a trench isolation
03/22/2001WO2001020419A1 Semiconductor device
03/22/2001WO2001020402A1 Fabrication of finely featured devices by liquid embossing
03/22/2001WO2001020400A1 Halftone phase shift photomask and blanks for halftone phase shift photomask for producing it
03/22/2001WO2001020399A1 Shielding against external excitations while measuring oscillatory semiconductor membranes
03/22/2001WO2001020356A1 Magnetoresistive sensor or memory elements with decreased magnetic switch field
03/22/2001WO2001020347A1 Nano-drive for high resolution positioning and for positioning of a multi-point probe
03/22/2001WO2001020304A2 Self-clearing optical measurement apparatus and methods of use
03/22/2001WO2001020254A1 Spatial averaging technique for ellipsometry and reflectometry
03/22/2001WO2001020252A1 Method and apparatus for performing optical measurements of layers and surface properties
03/22/2001WO2001019935A1 Slurry for forming insoluble silicate during chemical-mechanical polishing
03/22/2001WO2001019746A1 Quartz glass article having sand blast-treated surface and method for cleaning the same
03/22/2001WO2001019723A1 Three-dimensional suspended integrated microstructure and method for making same
03/22/2001WO2001019567A1 Method and system for chemical mechanical polishing with a cylindrical polishing pad
03/22/2001WO2000063964B1 Cmos process
03/22/2001WO2000046847A8 Process for lift off and transfer of semiconductor devices onto an alien substrate
03/22/2001WO2000013236A9 Layered dielectric on silicon carbide semiconductor structures
03/22/2001WO1999066545A8 Process for removing oxide using hydrogen fluoride vapor
03/22/2001US20010000057 Semiconductor mounting apparatus with a chip gripper traveling back and forth
03/22/2001US20010000048 Vacuum processing apparatus and operating method therefor
03/22/2001DE19945008A1 Substrate for a light emitting diode is made of sapphire has a first gallium nitride layer on the upper surface and side of the substrate and a second gallium nitride layer on the base surface and/or lower side of the substrate
03/22/2001DE19944857A1 Elektronenoptische Linsenanordnung mit weit verschiebbarer Achse Electron-optical lens array with wide sliding axis
03/22/2001DE19944551A1 Workpiece chuck for chemical-mechanical polishing of semiconductor disc has fluid film between seating and surface of semiconductor disc held in seating
03/22/2001DE19944012A1 Grabenkondensator mit Kondensatorelektroden und entsprechendes Herstellungsverfahren Grave capacitor capacitor electrode and method of manufacture
03/22/2001DE19944011A1 Speicher mit Isolationsgraben und Verfahren zu seiner Herstellung Memory with isolation trench and process for its preparation
03/22/2001DE19943143A1 Halbleiterbauelement für hohe Sperrspannungen bei gleichzeitig niedrigem Einschaltwiderstand und Verfahren zu dessen Herstellung A semiconductor device for high blocking voltages with a low on-resistance and process for its preparation
03/22/2001DE19942677A1 Compensating component used in metal oxide semiconductor transistor (MOST) comprises an n-conducting drift zone provided in a silicon semiconductor body
03/22/2001DE19942119A1 Surface treatment process for a metallizing semiconductor substrates comprises forming a barrier layer on the metal layer followed by an oxide layer and an antireflection layer
03/22/2001DE19941147A1 Production of epitaxial layer for dynamic random access memory comprises preparing substrate having single crystalline and insulated regions, growing epitaxial layer on single crystalline region and partially removing epitaxial layer
03/22/2001DE19938890A1 Integrierter Schaltkreis und Schaltungsanordnung zur Stromversorgung eines integrierten Schaltkreises The integrated circuit and the circuit arrangement for the power supply of an integrated circuit
03/22/2001DE19937513A1 Injection pipe for introducing a gas into a process reactor for treating semiconductor substrates has a channel with several lateral gas outlet openings having a uniform small diameter along the channel
03/22/2001DE10046668A1 Electric load control circuit uses n-channel MOSFET protected by Zener diode connected across its switched current path and diode between its gate and earth
03/22/2001DE10046652A1 Defocusing calculation method for lithographic process e.g. for semiconductor manufacture, uses evaluation of Gauss function for line width and roughness of patterns obtained by double exposure operations
03/22/2001DE10042951A1 Layer thickness reduction arrangement for disk-shaped carrier element, especially silicon wafer, cutting carrier element to depth equal to desired layer thickness after grinding and etching
03/22/2001DE10042388A1 Ferroelectric random-access memory has equalising device for equalising adjacent bit lines, pre-loading setting device for bit line pre-loading level and reference level generation device for read amplifier
03/22/2001DE10036891A1 Schottky diode production method involves setting up semiconductor substrate, mounting epitaxial layer followed by doping material on substrate, and depositing metal layer on doping material
03/22/2001DE10015698C1 Semiconductor device has additional marking detected for increasing overly alignment of photomask employed during exposure step of semiconductor manufacture
03/22/2001DE10014083A1 Production of a semiconductor device comprises forming a first resist layer on a semiconductor base layer, forming a resist pattern, forming a second resist layer, forming a crosslinked layer
03/22/2001CA2385031A1 A self-aligned method for forming deep trenches in shallow trenches for isolation of semiconductor devices
03/22/2001CA2384784A1 Protective layer for a semiconductor device
03/22/2001CA2381803A1 Nano-drive for high resolution positioning and for positioning of a multi-point probe
03/22/2001CA2350199A1 Heat sink manufacturing device and manufacturing method
03/21/2001EP1085790A1 Connecting material
03/21/2001EP1085586A2 Magnetoresistive element and magnetic memory device
03/21/2001EP1085578A1 Method of manufacturing thin-film transistor
03/21/2001EP1085577A2 Power field-effect transistor having a trench gate electrode and method of making the same
03/21/2001EP1085574A2 Semiconductor device and method of producing the same
03/21/2001EP1085573A1 Method of decreasing the mutual inductance between bond wires in a high frequency amplifying circuit
03/21/2001EP1085570A2 Chip scale surface mount package for semiconductor device and process of fabricating the same
03/21/2001EP1085569A2 Chip scale surface mount packages for semiconductor device and process of fabricating the same
03/21/2001EP1085568A1 Method for the electrical and mechanical interconnection of microelectronic components
03/21/2001EP1085567A1 COG Assembly and connecting material to be used therein
03/21/2001EP1085566A1 Method and apparatus for partially encapsulating semiconductor chips
03/21/2001EP1085565A2 Semiconductor device having sealing film formed on the surface having columnar electrodes thereon and method of manufacturing the same
03/21/2001EP1085564A1 Method for packaging semiconductor device having bump electrodes
03/21/2001EP1085563A2 Process for etching an insulating layer and forming a semiconductor device
03/21/2001EP1085562A2 Apparatus and method for surface finishing a silicon film
03/21/2001EP1085561A1 Chip scale surface mount package for semiconductor device and process of fabricating the same
03/21/2001EP1085560A1 Method for forming silicon film
03/21/2001EP1085558A2 Multiple sided robot blade for semiconductor processing equipment
03/21/2001EP1085557A2 Method and apparatus for heating and cooling substrates
03/21/2001EP1085519A1 Semiconductor integrated device
03/21/2001EP1085434A2 Clock circuit and method of designing the same
03/21/2001EP1085378A1 Radiation-sensitive resin composition
03/21/2001EP1085377A1 Resist compositions and patterning process
03/21/2001EP1085333A1 A method of testing an integrated circuit
03/21/2001EP1085332A2 Semiconductor integrated circuit, liquid crystal apparatus, electronic apparatus and method for testing semiconductor integrated circuit
03/21/2001EP1085327A1 Multi-point probe
03/21/2001EP1085326A2 Multilayer wiring board, manufacturing method thereof, and wafer block contact board
03/21/2001EP1085320A1 A device for detecting an analyte in a sample based on organic materials
03/21/2001EP1085319A1 A device for detecting an analyte in a sample based on organic materials
03/21/2001EP1085106A1 A method and an apparatus for gasifying a liquid material
03/21/2001EP1085067A1 Polishing composition and polishing process
03/21/2001EP1084995A1 Optical member of silica glass for transmitting fluorine excimer laser radiation and method for producing the same
03/21/2001EP1084514A1 GaP-SEMICONDUCTOR ARRANGEMENT AND METHOD FOR PRODUCING THE SAME
03/21/2001EP1084513A1 A method for treating a deposited film for resistivity reduction
03/21/2001EP1084512A1 Plasma treatment for ex-situ contact fill
03/21/2001EP1084511A1 Substrate and method for manufacturing the same
03/21/2001EP1084510A1 Post-etching alkaline treatment process