| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 03/07/2001 | EP1081750A2 Recleaning process for metal plug that minimizes damage to low K dielectric |
| 03/07/2001 | EP1081749A1 Protective member for inner surface of chamber and plasma processing apparatus |
| 03/07/2001 | EP1081748A2 Etch stops and alignment marks for bonded wafers |
| 03/07/2001 | EP1081747A1 Diamond PN junction diode and method for the fabrication thereof |
| 03/07/2001 | EP1081746A2 Metal-oxide-metal structure having a Cu/TaN/Ta2O5 stacked structure incorporated therein |
| 03/07/2001 | EP1081745A2 Method of detaching article and apparatus |
| 03/07/2001 | EP1081744A2 Method and apparatus for preventing edge deposition |
| 03/07/2001 | EP1081711A2 Dynamic type memory |
| 03/07/2001 | EP1081676A1 Active matrix liquid crystal display with pixel capacitor |
| 03/07/2001 | EP1081553A2 Exposure method and scanning exposure apparatus |
| 03/07/2001 | EP1081551A2 Two-dimensional phase element and method of manufacturing the same |
| 03/07/2001 | EP1081537A1 Method for processing conductive layer structures and devices including such conductive layer structures |
| 03/07/2001 | EP1081483A2 Stepper lens aberration measurement pattern and stepper lens aberration characteristics evaluating method |
| 03/07/2001 | EP1081256A2 ZnO crystal growth method, ZnO crystal structure, and semiconductor device using ZnO crystal |
| 03/07/2001 | EP1081255A2 A three-dimensional periodic structure and a method for producing the same |
| 03/07/2001 | EP1081254A1 Process for producing nitrogen doped semiconductor wafers |
| 03/07/2001 | EP1081253A2 Double pressure vessel chemical dispenser unit |
| 03/07/2001 | EP1081249A1 Method for depositing fluorinated silica glass layers |
| 03/07/2001 | EP1081247A2 Arc type ion plating apparatus |
| 03/07/2001 | EP1081200A1 Aqueous dispersion composition for chemical mechanical polishing for use in manufacture of semiconductor devices |
| 03/07/2001 | EP1081106A1 Synthetic quartz glass optical member for ultraviolet light and reduction projection exposure system using the same |
| 03/07/2001 | EP1081093A2 Process for the fabricaiton of micromechanical shallow structures by etching with a vapour phase medium containing hydrofluoric acid |
| 03/07/2001 | EP1080842A1 Method and apparatus for grinding wafer |
| 03/07/2001 | EP1080841A2 Carrier head, polishing apparatus using the carrier head, and method for sensing polished surface state |
| 03/07/2001 | EP1080839A2 Polishing apparatus and dressing method |
| 03/07/2001 | EP1080823A2 High-strength solder joint |
| 03/07/2001 | EP1080797A2 Method and apparatus for cleaning workpiece |
| 03/07/2001 | EP1080664A1 Cleaning rotary brush |
| 03/07/2001 | EP1080615A1 Multiple printed panel for electronics components, and method for constructing bumps, soldering frames, spacers and similar on said multiple printed panel. |
| 03/07/2001 | EP1080609A1 Electroluminescent devices |
| 03/07/2001 | EP1080525A1 Switch circuit and semiconductor switch, for battery-powered equipment |
| 03/07/2001 | EP1080499A1 Semiconductor device comprising a non-volatile memory |
| 03/07/2001 | EP1080495A1 Dual-damascene interconnect structures employing low-k dielectric materials |
| 03/07/2001 | EP1080494A1 Deep submicron metallization using deep uv photoresist |
| 03/07/2001 | EP1080493A1 Fab yield enhancement system |
| 03/07/2001 | EP1080492A1 Device and method for determining the lateral undercut of a structured surface layer |
| 03/07/2001 | EP1080491A1 Method and contact point for producing a wire bonding connection |
| 03/07/2001 | EP1080490A1 Method of manufacturing a semiconductor device comprising a bipolar transistor and a capacitor |
| 03/07/2001 | EP1080489A2 Substrate transfer shuttle |
| 03/07/2001 | EP1080488A1 Method and apparatus for substrate transfer and processing |
| 03/07/2001 | EP1080487A1 Automated wafer buffer for use with wafer processing equipment |
| 03/07/2001 | EP1080486A1 Device for fixing substrates |
| 03/07/2001 | EP1080485A1 Improved heater for use in substrate processing apparatus to deposit tungsten |
| 03/07/2001 | EP1080229A1 Chemically assembled nano-scale devices |
| 03/07/2001 | EP1080170A1 Cleaning composition and method for removing residues |
| 03/07/2001 | EP1080053A1 Ferroelectric thick-layer structures based on lead perovskites and method for their production |
| 03/07/2001 | EP1080036A1 Highly pure aqueous hydrogen peroxide solutions, method for producing same and their use |
| 03/07/2001 | EP1079942A1 Apparatus and method for cleaning semiconductor wafers |
| 03/07/2001 | EP0840664B1 Compositions for polishing silicon wafers and methods |
| 03/07/2001 | CN1286807A Electrically erasable programmable split-gate memory cell |
| 03/07/2001 | CN1286806A Power semiconductor device in wide-band-gap semiconductor |
| 03/07/2001 | CN1286805A Silicon carbide semiconductor switching device |
| 03/07/2001 | CN1286803A Semiconductor component and mfg. method for semiconductor component |
| 03/07/2001 | CN1286802A Production facility for integrated circuits |
| 03/07/2001 | CN1286793A Flash memory array |
| 03/07/2001 | CN1286764A Method for forming micropattern of resist |
| 03/07/2001 | CN1286499A Semiconductor device and its mfg. method |
| 03/07/2001 | CN1286498A Semiconductor device |
| 03/07/2001 | CN1286497A Conductive copper wire with redundant liner |
| 03/07/2001 | CN1286495A Structure of transistor having parameters capable of adjusting independently, and process integration |
| 03/07/2001 | CN1286494A Programming method for mask-type ROM |
| 03/07/2001 | CN1286493A Semiconductor device and mfg. method therefor |
| 03/07/2001 | CN1286415A Calibration method for photoetching |
| 03/07/2001 | CN1286385A Refrigerating system and method for cooling base using said system |
| 03/07/2001 | CN1062979C Method for fabricating gate electrode of CMOS device |
| 03/07/2001 | CN1062978C Method for forming metallic barrier layer in semiconductor device |
| 03/06/2001 | USRE37082 RF transistor package with nickel oxide barrier |
| 03/06/2001 | US6199183 Method of forming a scan path network |
| 03/06/2001 | US6199092 Semiconductor arithmetic circuit |
| 03/06/2001 | US6199029 Topography simulation method and system of plasma-assisted etching process |
| 03/06/2001 | US6199025 Semiconductor device having selectable device type and methods of testing device operation |
| 03/06/2001 | US6198982 Method and apparatus for detecting the presence of particles on a wafer holder of semiconductor exposure equipment |
| 03/06/2001 | US6198978 Semiconductor integrated circuit designing system taking insertion of repeaters into consideration and designing method thereof |
| 03/06/2001 | US6198976 On the fly center-finding during substrate handling in a processing system |
| 03/06/2001 | US6198793 Illumination system particularly for EUV lithography |
| 03/06/2001 | US6198792 Wafer chamber having a gas curtain for extreme-UV lithography |
| 03/06/2001 | US6198682 Hierarchical dynamic memory array architecture using read amplifiers separate from bit line sense amplifiers |
| 03/06/2001 | US6198679 Semiconductor memory device |
| 03/06/2001 | US6198673 Semiconductor integrated circuit having a unit cell including NMOS and PMOS transistors |
| 03/06/2001 | US6198663 Non-volatile semiconductor memory IC |
| 03/06/2001 | US6198658 High density flash memory architecture with columnar substrate coding |
| 03/06/2001 | US6198657 Nonvolatile semiconductor memory device and method of manufacturing the same |
| 03/06/2001 | US6198649 Semiconductor memory device |
| 03/06/2001 | US6198617 Multi-layer metal capacitor |
| 03/06/2001 | US6198616 Method and apparatus for supplying a chucking voltage to an electrostatic chuck within a semiconductor wafer processing system |
| 03/06/2001 | US6198601 Thin film magnetic head having non-linear tapered rails |
| 03/06/2001 | US6198579 Process for the correction of non-rotationally-symmetrical image errors |
| 03/06/2001 | US6198357 Stage having controlled variable resistance load circuit for use in voltage controlled ring oscillator |
| 03/06/2001 | US6198332 Frequency doubler and method of doubling frequency |
| 03/06/2001 | US6198301 Method for determining the hot carrier lifetime of a transistor |
| 03/06/2001 | US6198299 High Resolution analytical probe station |
| 03/06/2001 | US6198197 Surface acoustic wave element and electronic circuit using the same |
| 03/06/2001 | US6198173 SRAM with improved Beta ratio |
| 03/06/2001 | US6198169 Semiconductor device and process for producing same |
| 03/06/2001 | US6198167 Semiconductor structure exhibiting reduced contact resistance and method for fabrication |
| 03/06/2001 | US6198165 Semiconductor device |
| 03/06/2001 | US6198164 Ultra high density integrated circuit semiconductor package and method for fabricating the same |
| 03/06/2001 | US6198162 Method and apparatus for a chip-on-board semiconductor module |
| 03/06/2001 | US6198161 Semiconductor device |
| 03/06/2001 | US6198160 Surface mounted type semiconductor device with wrap-around external leads |