Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
04/2001
04/11/2001CN1290940A Low resistivity tantalum
04/11/2001CN1290769A Nanometer silicon film and its preparing process
04/11/2001CN1290713A Organic anti-reflection paint polymer and its preparing method
04/11/2001CN1064457C Circuit assemly and process for production thereof
04/10/2001US6216253 Method and apparatus for verifying and electrical configuaration using a psuedo-element pattern
04/10/2001US6216055 Partial semiconductor wafer processing
04/10/2001US6216054 Method for controlling preventative maintenance cycles of semiconductor fabricating equipment arranged in a processing line
04/10/2001US6215897 Automated substrate processing system
04/10/2001US6215896 System for enabling the real-time detection of focus-related defects
04/10/2001US6215808 Laser apparatus, exposure apparatus, lithography system, method for producing circuit elements, gas supply system and gas supply method
04/10/2001US6215721 Multi-bank memory device and method for arranging input/output lines
04/10/2001US6215716 Static memory cell having independent data holding voltage
04/10/2001US6215715 Integrated circuit memories including fuses between a decoder and a memory array for disabling defective storage cells in the memory array
04/10/2001US6215707 Charge conserving write method and system for an MRAM
04/10/2001US6215701 Nonvolatile memory cell structure for integration with semiconductor logic devices and method of using same
04/10/2001US6215699 Nonvolatile semiconductor storage device having main block and redundancy block formed on different wells
04/10/2001US6215690 Semiconductor memory devices having shared data line contacts
04/10/2001US6215688 Electronic memory circuit and related manufacturing method
04/10/2001US6215670 Method for manufacturing raised electrical contact pattern of controlled geometry
04/10/2001US6215650 Electrical connections to dielectric materials
04/10/2001US6215646 Dielectric capacitor and method of manufacturing same, and dielectric memory using same
04/10/2001US6215643 Electrostatic chuck and production method therefor
04/10/2001US6215642 Vacuum compatible, deformable electrostatic chuck with high thermal conductivity
04/10/2001US6215641 Electrostatic device for supporting wafers and other components for use at temperatures of up to 230° C.
04/10/2001US6215640 Apparatus and method for actively controlling surface potential of an electrostatic chuck
04/10/2001US6215595 Apparatus and method for laser radiation
04/10/2001US6215545 Substrate processing apparatus
04/10/2001US6215352 Reference voltage generating circuit with MOS transistors having a floating gate
04/10/2001US6215336 Reference type input first stage circuit in a semiconductor integrated circuit
04/10/2001US6215326 Programmable logic device architecture with super-regions having logic regions and a memory region
04/10/2001US6215324 Dynamic burn-in test equipment
04/10/2001US6215322 Conventionally sized temporary package for testing semiconductor dice
04/10/2001US6215321 Probe card for wafer-level measurement, multilayer ceramic wiring board, and fabricating methods therefor
04/10/2001US6215320 High density printed circuit board
04/10/2001US6215197 Semiconductor device having a trench isolation structure and an alignment mark area
04/10/2001US6215196 Electronic component with terminals and spring contact elements extending from areas which are remote from the terminals
04/10/2001US6215194 Wafer sheet with adhesive on both sides and attached semiconductor wafer
04/10/2001US6215191 Compliant lead structures for microelectronic devices
04/10/2001US6215190 Borderless contact to diffusion with respect to gate conductor and methods for fabricating
04/10/2001US6215189 Semiconductor device having interconnect layer and method of manufacturing therefor
04/10/2001US6215188 Low temperature aluminum reflow for multilevel metallization
04/10/2001US6215187 Semiconductor device and manufacturing method thereof
04/10/2001US6215186 System and method of forming a tungstein plug
04/10/2001US6215182 Semiconductor device and method for producing the same
04/10/2001US6215179 Semiconductor device
04/10/2001US6215178 Semiconductor device
04/10/2001US6215174 Lead frame, mold for producing a resin-sealed semiconductor device, resin-sealed semiconductor device using such a lead frame
04/10/2001US6215173 Redundancy fuse block having a small occupied area
04/10/2001US6215172 Grinding technique for integrated circuits
04/10/2001US6215170 Structure for single conductor acting as ground and capacitor plate electrode using reduced area
04/10/2001US6215169 Semiconductor device with adhesive tape not overlapping an opening in the uppermost surface of the semiconductor element surface
04/10/2001US6215168 Doubly graded junction termination extension for edge passivation of semiconductor devices
04/10/2001US6215167 Power semiconductor device employing field plate and manufacturing method thereof
04/10/2001US6215165 Reduced leakage trench isolation
04/10/2001US6215163 Semiconductor device and method of manufacturing the same where the nitrogen concentration in an oxynitride insulating layer is varied
04/10/2001US6215161 Insulator structure for polysilicon resistors
04/10/2001US6215160 Semiconductor device having bipolar transistor and field effect transistor and method of manufacturing the same
04/10/2001US6215159 Semiconductor integrated circuit device
04/10/2001US6215158 Device and method for forming semiconductor interconnections in an integrated circuit substrate
04/10/2001US6215157 Electrostatic discharge protection circuit for a semiconductor integrated circuit and layout thereof
04/10/2001US6215156 Electrostatic discharge protection device with resistive drain structure
04/10/2001US6215155 Silicon-on-insulator configuration which is compatible with bulk CMOS architecture
04/10/2001US6215154 Thin film transistor and method of fabricating the same
04/10/2001US6215153 MOSFET and method for fabricating the same
04/10/2001US6215152 MOSFET having self-aligned gate and buried shield and method of making same
04/10/2001US6215151 Methods of forming integrated circuitry and integrated circuitry
04/10/2001US6215150 Vertically integrated semiconductor device
04/10/2001US6215148 NROM cell with improved programming, erasing and cycling
04/10/2001US6215147 Flash memory structure
04/10/2001US6215146 Semiconductor device and manufacturing method thereof
04/10/2001US6215145 Dense SOI flash memory array structure
04/10/2001US6215144 Silicon-oxide based insulating film formed over semiconductor substrate & a capacitative element made of a high dielectric film, which is formed over second insulating film, formed over an interconnect line made of a high melting point metal
04/10/2001US6215143 DRAM cell capacitor having hemispherical grain silicon on a selected portion of a storage node
04/10/2001US6215142 Analog semiconductor device and method of fabricating the same
04/10/2001US6215141 Semiconductor device including a transistor having portions of source and drain regions removed by the same amount
04/10/2001US6215140 Electrically programmable non-volatile memory cell configuration
04/10/2001US6215136 Integrated circuit capable of low-noise and high-power microwave operation
04/10/2001US6215135 Integrated circuit provided with ESD protection means
04/10/2001US6215133 Light-emitting gallium nitride-based compound semiconductor device
04/10/2001US6215130 Thin film transistors
04/10/2001US6215128 Compact photoemission source, field and objective lens arrangement for high throughput electron beam lithography
04/10/2001US6215127 Method of using critical dimension mapping to qualify a new integrated circuit fabrication tool set
04/10/2001US6215125 Method to operate GEF4 gas in hot cathode discharge ion sources
04/10/2001US6215123 Forming contacts on semiconductor substrates, radiation detectors and imaging devices
04/10/2001US6215106 Thermally processing a substrate
04/10/2001US6215099 Multi-Laser Combustion surface treatment
04/10/2001US6215087 Plasma film forming method and plasma film forming apparatus
04/10/2001US6215061 Photoconductive thin film, and photovoltaic device making use of the same
04/10/2001US6214751 Method for forming thin film in fabricating semiconductor device
04/10/2001US6214750 Alternative structure to SOI using proton beams
04/10/2001US6214749 Process for producing semiconductor devices
04/10/2001US6214748 Dielectric multilayer thin films with resins
04/10/2001US6214747 Method for forming opening in a semiconductor device
04/10/2001US6214746 Dielectric nanoporous material
04/10/2001US6214745 Method of improving surface planarity of chemical-mechanical polishing operation by forming shallow dummy pattern
04/10/2001US6214744 Method for manufacturing semiconductor device capable of improving etching rate ratio of insulator to refractory metal
04/10/2001US6214743 Method and structure for making self-aligned contacts
04/10/2001US6214742 Construction of semiconductors layer of interlayer dielectric, wherein the metal structures have a layer of tin formed on the surface of the metal
04/10/2001US6214741 Method of fabricating a bit line of flash memory
04/10/2001US6214740 Semiconductor manufacturing apparatus