| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 04/11/2001 | EP1091567A2 Charge transfer device, solid state image pickup device using the same, and control method |
| 04/11/2001 | EP1091422A2 Semiconductor device, semiconductor substrate, and manufacture method |
| 04/11/2001 | EP1091420A2 Method for the production of contact structures in solar cells |
| 04/11/2001 | EP1091419A1 Integrated potentiometer and its manufacturing process |
| 04/11/2001 | EP1091418A2 NROM cell with self-aligned programming and erasure areas |
| 04/11/2001 | EP1091417A1 Method for fabricating a semiconductor device with a gate-all-around and device formed thereby |
| 04/11/2001 | EP1091416A2 GaAs MOSFET having low capacitance and on-resistance and method of manufacturing the same |
| 04/11/2001 | EP1091415A2 A V-shaped floating gate for a memory cell |
| 04/11/2001 | EP1091414A2 MOSFET with tapered gate and method of manufacturing it |
| 04/11/2001 | EP1091413A2 Fully-depleted, fully-inverted, short-length and vertical channel, dual-gate, cmos fet |
| 04/11/2001 | EP1091408A1 Non-volatile memory cell with a single level of polysilicon |
| 04/11/2001 | EP1091406A2 Multilayer Interconnection board for semiconductor device, method of forming the same and mounting the semiconductor chip thereon |
| 04/11/2001 | EP1091405A2 Arrangement for diminishing the number of measurement pads on semiconductor chip |
| 04/11/2001 | EP1091401A2 Semiconductor device package and process for production |
| 04/11/2001 | EP1091400A1 Wafer prober |
| 04/11/2001 | EP1091399A1 Semiconductor device and method for manufacturing the same |
| 04/11/2001 | EP1091397A2 Input/output buffer with silicide layer and method of manufacturing |
| 04/11/2001 | EP1091396A2 Plasma processing method |
| 04/11/2001 | EP1091395A1 A cleaning solution for treating a semiconductor substrate |
| 04/11/2001 | EP1091394A2 Method for manufacturing thin semiconductor chips |
| 04/11/2001 | EP1091393A1 Electrode for semiconductor device and its manufacturing method |
| 04/11/2001 | EP1091392A2 A method for forming a contoured floating gate cell |
| 04/11/2001 | EP1091391A1 Wafers holding boat |
| 04/11/2001 | EP1091390A2 Substrate processing apparatus |
| 04/11/2001 | EP1091389A2 Bernoulli and vacuum combined gripper |
| 04/11/2001 | EP1091388A2 Method and apparatus for cleaning a substrate |
| 04/11/2001 | EP1091387A2 Coil for sputter deposition |
| 04/11/2001 | EP1091386A2 Illumination system for electron beam lithography tool |
| 04/11/2001 | EP1091385A1 Electron-beam lithography system and alignment method |
| 04/11/2001 | EP1091383A2 Electron beam imaging apparatus |
| 04/11/2001 | EP1091255A2 Method of aligning mask and workpiece in exposure device |
| 04/11/2001 | EP1091254A2 Resist stripping composition |
| 04/11/2001 | EP1091200A2 System and method for determining stray light in a thermal processing system |
| 04/11/2001 | EP1091024A1 Method and device for plating substrate |
| 04/11/2001 | EP1091019A1 Vacuum exhaust system |
| 04/11/2001 | EP1091018A1 Purification, analysis and deposition of titanium amides |
| 04/11/2001 | EP1091016A2 Self ionized plasma for sputtering copper |
| 04/11/2001 | EP1091015A1 Co-Ti ALLOY SPUTTERING TARGET AND MANUFACTURING METHOD THEREOF |
| 04/11/2001 | EP1091014A1 Ex-situ coating of refractory metal on IMP coils |
| 04/11/2001 | EP1090967A2 Composition for film formation, method of film formation, and insulating film |
| 04/11/2001 | EP1090673A2 Treatment of gas mixtures |
| 04/11/2001 | EP1090535A1 Flip chip devices with flexible conductive adhesive |
| 04/11/2001 | EP1090429A2 Multilayer semiconductor structure with phosphide-passivated germanium substrate |
| 04/11/2001 | EP1090427A1 Ferroelectric field effect transistor having compositionally graded ferroelectric material and method of making the same |
| 04/11/2001 | EP1090425A1 Independently programmable memory segments in isolated n-wells within a pmos eeprom array and method therefor |
| 04/11/2001 | EP1090424A1 A semiconductor device with an operating frequency larger than 50mhz comprising a body composed of a soft ferrite material |
| 04/11/2001 | EP1090423A1 Thin film capacitor element with protection elements |
| 04/11/2001 | EP1090422A1 Method for producing thin substrate layers |
| 04/11/2001 | EP1090421A1 Method and apparatus for dechucking a substrate from an electrostatic chuck |
| 04/11/2001 | EP1090420A1 Endpoint detection in the fabrication of electronic devices |
| 04/11/2001 | EP1090419A1 Device and method for forming a device having a cavity with controlled atmosphere |
| 04/11/2001 | EP1090418A1 Method for producing schottky diodes |
| 04/11/2001 | EP1090417A1 Method for single chamber processing of pecvd-ti and cvd-tin films in ic manufacturing |
| 04/11/2001 | EP1090416A2 Collimated sputtering of semiconductor and other films |
| 04/11/2001 | EP1090415A1 Semiconductor arrangement with ohmic contact and a method for contacting a semiconductor arrangement |
| 04/11/2001 | EP1090414A1 Resin molded article for chamber liner |
| 04/11/2001 | EP1090413A1 Method of forming high aspect ratio apertures |
| 04/11/2001 | EP1090409A1 High sputter and etch resistant window for plasma processing chambers |
| 04/11/2001 | EP1090407A1 Semiconductor process chamber electrode and method for making the same |
| 04/11/2001 | EP1090401A1 Photodefined integral capacitor with self-aligned dielectric and electrodes and method therefor |
| 04/11/2001 | EP1090389A1 Data storage and processing apparatus, and method for fabricating the same |
| 04/11/2001 | EP1090335A1 System and method for controlling the manufacture of discrete parts in semiconductor fabrication using model predictive control |
| 04/11/2001 | EP1090334A1 System and method for controlling a multi-arm polishing tool |
| 04/11/2001 | EP1090331A1 193 nm positive-working photoresist composition |
| 04/11/2001 | EP1090330A2 A compact photoemission source, field and objective lens arrangement for high throughput electron beam lithography |
| 04/11/2001 | EP1090159A1 Deposition of coatings using an atmospheric pressure plasma jet |
| 04/11/2001 | EP1090083A1 Chemical mechanical polishing slurry useful for copper/tantalum substrates |
| 04/11/2001 | EP1090082A1 Cmp slurry containing a solid catalyst |
| 04/11/2001 | EP1090077A1 Molecular coatings |
| 04/11/2001 | EP1090057A1 Reworkable thermosetting resin compositions |
| 04/11/2001 | EP1089937A1 Gas generation system |
| 04/11/2001 | EP1089874A1 LOW $g(k) DIELECTRIC INORGANIC/ORGANIC HYBRID FILMS AND METHOD OF MAKING |
| 04/11/2001 | EP1089851A1 Wafer edge polishing method and apparatus |
| 04/11/2001 | EP1089801A1 Method and apparatus for recovery of water and slurry abrasives used for chemical and mechanical planarization |
| 04/11/2001 | EP1089799A1 Apparatus and method for recovering photoresist developers and strippers |
| 04/11/2001 | EP1066123A4 Improvement in aqueous stripping and cleaning compositions |
| 04/11/2001 | EP0950190B1 Method for the production of a micromechanical semiconductor array |
| 04/11/2001 | EP0904568B1 Metal ion reduction of aminoaromatic chromophores and their use in the synthesis of low metal bottom anti-reflective coatings for photoresists |
| 04/11/2001 | EP0823073B1 Illumination unit for an optical apparatus |
| 04/11/2001 | EP0660967B1 Method for producing integrated circuit devices |
| 04/11/2001 | CN1291352A Integrated circuit with capacity element |
| 04/11/2001 | CN1291350A Gettering device for ion capture |
| 04/11/2001 | CN1291349A Crystal ion-slicing of single crystal films |
| 04/11/2001 | CN1291347A Photoresist film removing method and device therefor |
| 04/11/2001 | CN1291346A Method for using a hard mask for critical dimension growth containment |
| 04/11/2001 | CN1291345A End effector for wafer handlier in processing system |
| 04/11/2001 | CN1291302A Photosensitive resin composition |
| 04/11/2001 | CN1291301A Positive active photodielectric composition |
| 04/11/2001 | CN1291298A Active matrix substrate and liquid crystal display comprising the same |
| 04/11/2001 | CN1291243A Electroplating system having auxiliary electrode exterior to main reactor chamber for contact cleaning operations |
| 04/11/2001 | CN1291241A Apparatus and method for depositing a semiconductor material |
| 04/11/2001 | CN1291072A Assembling device for electronic element |
| 04/11/2001 | CN1291071A Assembling method for electronic element |
| 04/11/2001 | CN1290968A Semiconductor structure and its producing method |
| 04/11/2001 | CN1290964A Standard unit, standard unit array and its layout and wiring system and method |
| 04/11/2001 | CN1290962A Electronic device, its producing method and its producing device |
| 04/11/2001 | CN1290960A Electronic beam writing method, electronic beam etching equipment and its mask thereof |
| 04/11/2001 | CN1290959A Liquid phase growing method liquid growing equipment and solar cell |
| 04/11/2001 | CN1290958A Nitride III semiconductor device and its producing method |
| 04/11/2001 | CN1290957A Die board mask and method for forming die board mask |