| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 05/01/2001 | US6226187 Integrated circuit package |
| 05/01/2001 | US6226171 Power conducting substrates with high-yield integrated substrate capacitor |
| 05/01/2001 | US6226133 Optical apparatus and a method of transporting the same |
| 05/01/2001 | US6226128 Light-transmitting optical member, manufacturing method thereof, evaluation method therefor, and optical lithography apparatus using the optical member |
| 05/01/2001 | US6226079 Defect assessing apparatus and method, and semiconductor manufacturing method |
| 05/01/2001 | US6226075 Supporting device provided with a gas spring with a gas bearing, and lithographic device provided with such supporting devices |
| 05/01/2001 | US6226074 Exposure monitor mask, exposure adjusting method and method of manufacturing semiconductor devices |
| 05/01/2001 | US6226073 Stage system with driving mechanism, and exposure apparatus having the same |
| 05/01/2001 | US6226072 Stage system and exposure apparatus with the same |
| 05/01/2001 | US6226059 Active matrix display device using aluminum alloy in scanning signal line or video signal line |
| 05/01/2001 | US6226057 Liquid crystal display having overlapped pixel electrodes and method for fabricating the same |
| 05/01/2001 | US6225860 Source voltage detecting circuit |
| 05/01/2001 | US6225858 Performance driven multi-valued variable supply voltage scheme for low power design of VLSI circuits and systems |
| 05/01/2001 | US6225854 Voltage boosting circuit having cross-coupled precharge circuits |
| 05/01/2001 | US6225853 Booster circuit |
| 05/01/2001 | US6225836 Semiconductor integrated circuit device capable of altering an operating mode by an electrical input applied from outside product package |
| 05/01/2001 | US6225818 Integrated circuits including function identification circuits having operating modes that identify corresponding functions of the integrated circuits |
| 05/01/2001 | US6225816 Split resistor probe and method |
| 05/01/2001 | US6225815 Charged particle beam test system |
| 05/01/2001 | US6225798 Semiconductor device tester |
| 05/01/2001 | US6225704 Flip-chip type semiconductor device |
| 05/01/2001 | US6225702 Ball grid array to prevent shorting between a power supply and ground terminal |
| 05/01/2001 | US6225698 Method for making semiconductor devices having gradual slope contacts |
| 05/01/2001 | US6225697 Semiconductor device and method for manufacturing the same |
| 05/01/2001 | US6225695 Grooved semiconductor die for flip-chip heat sink attachment |
| 05/01/2001 | US6225692 Flip chip package for micromachined semiconductors |
| 05/01/2001 | US6225686 Semiconductor device |
| 05/01/2001 | US6225682 Semiconductor memory device having isolation structure and method of fabricating the same |
| 05/01/2001 | US6225680 Semiconductor structure based on silicon carbide material, with a plurality electrically different partial regions |
| 05/01/2001 | US6225677 Inductance device formed on semiconductor substrate |
| 05/01/2001 | US6225676 Semiconductor device with improved inter-element isolation |
| 05/01/2001 | US6225675 Integrated circuitry, methods of fabricating integrated circuitry, methods of forming local interconnects, and methods of forming conductive lines |
| 05/01/2001 | US6225674 Semiconductor structure and method of manufacture |
| 05/01/2001 | US6225673 Integrated circuit which minimizes parasitic action in a switching transistor pair |
| 05/01/2001 | US6225671 Method of reducing defects in anti-reflective coatings and semiconductor structures fabricated thereby |
| 05/01/2001 | US6225669 Non-uniform gate/dielectric field effect transistor |
| 05/01/2001 | US6225666 Low stress active area silicon island structure with a non-rectangular cross-section profile and method for its formation |
| 05/01/2001 | US6225665 Semiconductor device having multiple source regions |
| 05/01/2001 | US6225664 Dielectrically isolated IC driver having upper-side and lower-side arm drivers and power IC having the same |
| 05/01/2001 | US6225663 Semiconductor device having SOI structure and method of fabricating the same |
| 05/01/2001 | US6225661 MOS transistor with stepped gate insulator |
| 05/01/2001 | US6225660 Single poly EPLD cell and its fabricating method |
| 05/01/2001 | US6225659 Trenched gate semiconductor device and method for low power applications |
| 05/01/2001 | US6225658 Semiconductor device manufacture method and semiconductor device comprising capacitor and MISFET |
| 05/01/2001 | US6225657 Semiconductor device and method for manufacturing thereof |
| 05/01/2001 | US6225656 Ferroelectric integrated circuit with protective layer incorporating oxygen and method for fabricating same |
| 05/01/2001 | US6225655 Ferroelectric transistors using thin film semiconductor gate electrodes |
| 05/01/2001 | US6225654 Static ferrolectric memory transistor having improved data retention |
| 05/01/2001 | US6225651 Structure with a micro-electronic component made of a semi-conductor material difficult to etch and with metallized holes |
| 05/01/2001 | US6225650 Comprises a base substrate, a mask layer, and a gallium nitride group crystal layer grown to cover the mask layer; allows growth of a gallium nitride group crystal in the c axis orientation |
| 05/01/2001 | US6225646 Integrated circuit incorporating a memory cell and a transistor elevated above an insulating base |
| 05/01/2001 | US6225645 Semiconductor device and method of manufacturing the same |
| 05/01/2001 | US6225644 Semiconductor TFT, producing method thereof, semiconductor TFT array substrate and liquid crystal display using the same |
| 05/01/2001 | US6225643 SOI cell and method for producing it |
| 05/01/2001 | US6225639 Method of monitoring a patterned transfer process using line width metrology |
| 05/01/2001 | US6225626 Through-the-substrate investigation of flip chip IC's |
| 05/01/2001 | US6225625 Signal detection methods and apparatus |
| 05/01/2001 | US6225616 Solid-state image pickup devices having source follower buffer circuits therein with actively controlled gain characteristics |
| 05/01/2001 | US6225602 Vertical furnace for the treatment of semiconductor substrates |
| 05/01/2001 | US6225601 Heating a substrate support in a substrate handling chamber |
| 05/01/2001 | US6225594 Method and apparatus for securing components of wafer processing fixtures |
| 05/01/2001 | US6225558 Chip size semiconductor package and fabrication method thereof |
| 05/01/2001 | US6225476 Acrylic ester compound having alkoxycarbonyl group or group derived from molecule of lactone compound by removing hydrogen atom bonded to carbon atom; monomer of film-forming resin |
| 05/01/2001 | US6225433 Curable silicone composition and electronic components |
| 05/01/2001 | US6225379 Epoxy resin composition for bonding semiconductor chips |
| 05/01/2001 | US6225241 Catalytic deposition method for a semiconductor surface passivation film |
| 05/01/2001 | US6225240 Rapid acceleration methods for global planarization of spin-on films |
| 05/01/2001 | US6225239 Immersing a iii-v group compound semiconductor substrates in a vessel containing a solution containing phosphonic acid and placing the substrate into a different solution to adsorb metal ions to the surface of the film |
| 05/01/2001 | US6225238 Low dielectric constant polyorganosilicon coatings generated from polycarbosilanes |
| 05/01/2001 | US6225237 Method for forming metal-containing films using metal complexes with chelating O- and/or N-donor ligands |
| 05/01/2001 | US6225236 Method for reforming undercoating surface and method for production of semiconductor device |
| 05/01/2001 | US6225235 Method and device for cleaning and etching individual wafers using wet chemistry |
| 05/01/2001 | US6225234 In situ and ex situ hardmask process for STI with oxide collar application |
| 05/01/2001 | US6225233 Semiconductor device manufacturing machine and method for manufacturing a semiconductor device by using THE same manufacturing machine |
| 05/01/2001 | US6225232 Semiconductor processing methods, and methods of forming capacitor constructions |
| 05/01/2001 | US6225231 Recovery of damages in a field oxide caused by high energy ion implant process |
| 05/01/2001 | US6225230 Method of manufacturing semiconductor device |
| 05/01/2001 | US6225229 Removable photoresist spacers in CMOS transistor fabrication |
| 05/01/2001 | US6225228 Silicon oxide co-deposition/etching process |
| 05/01/2001 | US6225227 Method for manufacturing semiconductor device |
| 05/01/2001 | US6225226 Method for processing and integrating copper interconnects |
| 05/01/2001 | US6225225 Method to form shallow trench isolation structures for borderless contacts in an integrated circuit |
| 05/01/2001 | US6225224 System for dispensing polishing liquid during chemical mechanical polishing of a semiconductor wafer |
| 05/01/2001 | US6225223 Method to eliminate dishing of copper interconnects |
| 05/01/2001 | US6225222 Diffusion barrier enhancement for sub-micron aluminum-silicon contacts |
| 05/01/2001 | US6225221 Method to deposit a copper seed layer for dual damascene interconnects |
| 05/01/2001 | US6225220 Decreases the etching loading effect and the plug loss, thereby improving the reliability of the semiconductor device. |
| 05/01/2001 | US6225219 Method of stabilizing anti-reflection coating layer |
| 05/01/2001 | US6225218 Improve the long-term reliability of a tft or a liquid crystal display device by improving the reliability of contacts. |
| 05/01/2001 | US6225217 Method of manufacturing semiconductor device having multilayer wiring |
| 05/01/2001 | US6225216 Method of forming a local interconnect with improved etch selectivity of silicon dioxide/silicide |
| 05/01/2001 | US6225215 Method for enhancing anti-reflective coatings used in photolithography of electronic devices |
| 05/01/2001 | US6225214 Method for forming contact plug |
| 05/01/2001 | US6225213 Manufacturing method for contact hole |
| 05/01/2001 | US6225211 Method for making stacked and borderless via structures on semiconductor substrates for integrated circuits |
| 05/01/2001 | US6225210 High density plasma deposition at such elevated temperatures increases the surface roughness of the exposed cu metallization, thereby increasing adhesion of the deposited capping layer |
| 05/01/2001 | US6225209 Method of fabricating crack resistant inter-layer dielectric for a salicide process |
| 05/01/2001 | US6225208 Method and structure for improved alignment tolerance in multiple, singularized plugs |
| 05/01/2001 | US6225207 Techniques for triple and quadruple damascene fabrication |
| 05/01/2001 | US6225206 Flip chip C4 extension structure and process |