| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
|---|
| 05/08/2001 | US6228708 Method of manufacturing high voltage mixed-mode device |
| 05/08/2001 | US6228707 Semiconductor arrangement having capacitive structure and manufacture thereof |
| 05/08/2001 | US6228706 Vertical DRAM cell with TFT over trench capacitor |
| 05/08/2001 | US6228705 Overlay process for fabricating a semiconductor device |
| 05/08/2001 | US6228704 Process for manufacturing semiconductor integrated circuit device |
| 05/08/2001 | US6228703 Method of fabricating mixed-mode semiconductor device having a capacitor and a gate |
| 05/08/2001 | US6228702 Method of manufacturing semiconductor device |
| 05/08/2001 | US6228701 Apparatus and method for minimizing diffusion in stacked capacitors formed on silicon plugs |
| 05/08/2001 | US6228700 Method for manufacturing dynamic random access memory |
| 05/08/2001 | US6228699 Cross leakage of capacitors in DRAM or embedded DRAM |
| 05/08/2001 | US6228698 Manufacture of field-effect semiconductor devices |
| 05/08/2001 | US6228697 Method of manufacturing semiconductor device including field effect transistors |
| 05/08/2001 | US6228695 Method to fabricate split-gate with self-aligned source and self-aligned floating gate to control gate |
| 05/08/2001 | US6228694 Method of increasing the mobility of MOS transistors by use of localized stress regions |
| 05/08/2001 | US6228693 Selected site, metal-induced, continuous crystallization method |
| 05/08/2001 | US6228692 Thin film semiconductor device, method for fabricating the same and semiconductor device |
| 05/08/2001 | US6228691 Silicon-on-insulator devices and method for producing the same |
| 05/08/2001 | US6228690 Method of manufacturing fuse element used in memory device and fuse element |
| 05/08/2001 | US6228689 Trench style bump and application of the same |
| 05/08/2001 | US6228688 Flip-chip resin-encapsulated semiconductor device |
| 05/08/2001 | US6228687 Wafer-level package and methods of fabricating |
| 05/08/2001 | US6228685 Framed sheet processing |
| 05/08/2001 | US6228684 Wafer-level package, a method of manufacturing thereof and a method of manufacturing semiconductor devices from such a wafer-level package |
| 05/08/2001 | US6228682 Multi-cavity substrate structure for discrete devices |
| 05/08/2001 | US6228681 Flip chip having integral mask and underfill providing two-stage bump formation |
| 05/08/2001 | US6228680 Low stress method and apparatus for underfilling flip-chip electronic devices |
| 05/08/2001 | US6228679 Apparatus and method for automating the underfill of flip-chip devices |
| 05/08/2001 | US6228678 Flip chip with integrated mask and underfill |
| 05/08/2001 | US6228676 Near chip size integrated circuit package |
| 05/08/2001 | US6228673 Method of fabricating a surface coupled InGaAs photodetector |
| 05/08/2001 | US6228672 Stable surface passivation process for compound semiconductors |
| 05/08/2001 | US6228667 Field emission displays with reduced light leakage |
| 05/08/2001 | US6228666 Method of testing integrated circuit including a DRAM |
| 05/08/2001 | US6228665 Method of measuring oxide thickness during semiconductor fabrication |
| 05/08/2001 | US6228663 Method of forming semiconductor devices using gate insulator thickness and channel length for controlling drive current strength |
| 05/08/2001 | US6228662 Method for removing short-circuited sections of a solar cell |
| 05/08/2001 | US6228651 Preparation of analytical samples, analysis of impurities, preparation of highly purified phosphoric acid and production of semiconductor devices |
| 05/08/2001 | US6228563 Exposure to plasma activated gas; separation; penetration to vapor phase solvent |
| 05/08/2001 | US6228558 Blend of polymer and photoacid generator |
| 05/08/2001 | US6228555 Multilayer; containing melt; carbon black zones with variations in absorption |
| 05/08/2001 | US6228554 Blend of alkali soluble resin and a 1,2-quinonediazide compound |
| 05/08/2001 | US6228544 Exposure to radiation flux |
| 05/08/2001 | US6228542 Photomask method of manufacture method of test/repair and method of use therefor |
| 05/08/2001 | US6228540 Method of forming a photomask of high dimensional accuracy utilizing heat treatment equipment |
| 05/08/2001 | US6228538 Using photosensitive material |
| 05/08/2001 | US6228512 Amorphous layer of molybdenum, ruthenium and crystalline beryllium; multilayer mirrors |
| 05/08/2001 | US6228511 Structure and process for thin film interconnect |
| 05/08/2001 | US6228466 Printed wiring board and method for manufacturing the same |
| 05/08/2001 | US6228452 Adhesive tape for electronic parts |
| 05/08/2001 | US6228438 Plasma reactor for the treatment of large size substrates |
| 05/08/2001 | US6228280 Endpoint detection by chemical reaction and reagent |
| 05/08/2001 | US6228279 Applying a mixture containing hexafluoroethane, a source of hydrogen selected from fluromethane, pentafluooroethane, difluoromethane, a diluent and applying high density plasma to etch antireflective coating |
| 05/08/2001 | US6228278 Methods and apparatus for determining an etch endpoint in a plasma processing system |
| 05/08/2001 | US6228277 Etch endpoint detection |
| 05/08/2001 | US6228276 Method of manufacturing magnetoresistive (MR) sensor element with sunken lead structure |
| 05/08/2001 | US6228236 Sputter magnetron having two rotation diameters |
| 05/08/2001 | US6228235 Magnetron for low pressure, full face erosion |
| 05/08/2001 | US6228234 Apparatus for sputtering |
| 05/08/2001 | US6228229 Method and apparatus for generating a plasma |
| 05/08/2001 | US6228211 Apparatus for etching a glass substrate |
| 05/08/2001 | US6228210 Surface wave coupled plasma etching apparatus |
| 05/08/2001 | US6228209 Equipment for forming a glue layer of an opening |
| 05/08/2001 | US6228196 Method of producing a multi-layer ceramic substrate |
| 05/08/2001 | US6228186 Method for manufacturing metal sputtering target for use in DC magnetron so that target has reduced number of conduction anomalies |
| 05/08/2001 | US6228179 Contacting a semi-conductor substrate with a surface treatment composition containing a complexing agent as a metal deposition preventive in a liquid medium, in which the complexing agent is an ethylenediaminephenol derivative |
| 05/08/2001 | US6228176 Contoured platen design for plasma immerson ion implantation |
| 05/08/2001 | US6228175 Apparatus for generating a wet oxygen stream for a semiconductor processing furnace |
| 05/08/2001 | US6228174 Heat treatment system using ring-shaped radiation heater elements |
| 05/08/2001 | US6228173 Single-substrate-heat-treating apparatus for semiconductor process system |
| 05/08/2001 | US6228171 Heat processing apparatus |
| 05/08/2001 | US6228166 Method for boron contamination reduction in IC fabrication |
| 05/08/2001 | US6228164 Process for producing a single crystal |
| 05/08/2001 | US6228135 Purification of very slightly contaminated air within a clean room |
| 05/08/2001 | US6227946 Robot assisted method of polishing, cleaning and drying workpieces |
| 05/08/2001 | US6227945 Method and apparatus for polishing the outer periphery of disc-shaped workpiece |
| 05/08/2001 | US6227944 Method for processing a semiconductor wafer |
| 05/08/2001 | US6227941 Support structure with multi-layer support material for use during package removal from a multi-layer integrated circuit device |
| 05/08/2001 | US6227939 Temperature controlled chemical mechanical polishing method and apparatus |
| 05/08/2001 | US6227786 Substrate treating apparatus |
| 05/08/2001 | US6227658 Apparatus and method for forming thin film using ink-jet mechanism |
| 05/08/2001 | US6227590 Coating and forming support from fluoropolymer |
| 05/08/2001 | US6227436 Method of fabricating an electronic circuit device and apparatus for performing the method |
| 05/08/2001 | US6227431 Apparatus and method of clamping semiconductor devices using sliding finger supports |
| 05/08/2001 | US6227372 Component carrier tray for high-temperature applications |
| 05/08/2001 | US6227353 System for applying a rotary force to strips of varying widths |
| 05/08/2001 | US6227345 Transfer apparatus of chip components |
| 05/08/2001 | US6227213 Method and an apparatus for the wet treatment of a semiconductor wafer |
| 05/08/2001 | US6227212 Spraying and immersing in cleaning compound and pure water |
| 05/08/2001 | US6227211 Uniformity improvement of high aspect ratio contact by stop layer |
| 05/08/2001 | US6227141 RF powered plasma enhanced chemical vapor deposition reactor and methods |
| 05/08/2001 | US6227140 Semiconductor processing equipment having radiant heated ceramic liner |
| 05/08/2001 | US6226863 Reworkability method for wirebond chips using high performance capacitor |
| 05/08/2001 | CA2187269C Semiconductor substrate and producing method thereof |
| 05/08/2001 | CA2073966C Mosfet structure having reduced gate capacitance and method of forming same |
| 05/08/2001 | CA2056456C High performance passivation for semiconductor devices |
| 05/07/2001 | WO2001048790A1 Baffle plate, apparatus for producing the same, method of producing the same, and gas processing apparatus containing baffle plate |
| 05/03/2001 | WO2001031983A1 Method for providing connection between layers of a circuit board |
| 05/03/2001 | WO2001031978A1 Ceramic heater |
| 05/03/2001 | WO2001031709A1 Semiconductor device with a single base region and method therefor |
| 05/03/2001 | WO2001031706A1 Methods for forming co-axial interconnect lines in a cmos process |