| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 05/02/2001 | EP1096562A2 Method for making a semiconductor device |
| 05/02/2001 | EP1096561A2 Method for rapid dechucking of a semiconductor wafer from an electrostatic chuck |
| 05/02/2001 | EP1096560A2 Method of manufacturing integrated circuits with intermediate manufacturing quality controlling measurements |
| 05/02/2001 | EP1096559A2 Method and apparatus for underfilling semiconductor devices |
| 05/02/2001 | EP1096558A2 Composite laminate and method for manufacturing the same |
| 05/02/2001 | EP1096557A1 Process for defining two self-aligned zones at the upper surface of a substrate |
| 05/02/2001 | EP1096556A1 Chemical-mechanical planarisation of copper |
| 05/02/2001 | EP1096555A2 Semiconductor device and production thereof |
| 05/02/2001 | EP1096554A1 Plasma processing apparatus |
| 05/02/2001 | EP1096553A1 Anisotropic etching method and apparatus |
| 05/02/2001 | EP1096552A1 Method of ion implantation |
| 05/02/2001 | EP1096551A2 Method for making integrated circuits having features with reduced critical dimensions |
| 05/02/2001 | EP1096550A1 Improved semiconductor manufacturing system |
| 05/02/2001 | EP1096549A2 Substrates support devices |
| 05/02/2001 | EP1096548A2 Semiconductor wafer processing apparatus comprising a wafer presence detector and method |
| 05/02/2001 | EP1096547A2 Method and apparatus for plasma etching |
| 05/02/2001 | EP1096545A2 Tilted sputtering target with shield to block contaminants |
| 05/02/2001 | EP1096505A1 NROM cell with generally decoupled primary and secondary injection |
| 05/02/2001 | EP1096501A1 MRAM Device with sense amplifiers |
| 05/02/2001 | EP1096500A1 Magnetization control method, information storage method, magnetic functional device, and information storage device |
| 05/02/2001 | EP1096465A2 Gradation control of an electro-optical display device |
| 05/02/2001 | EP1096321A1 Light exposure method |
| 05/02/2001 | EP1096320A2 Contact exposure device provided with a mask and workpiece interval setting means |
| 05/02/2001 | EP1096318A1 Resist composition and patterning process |
| 05/02/2001 | EP1096317A1 Resist composition and patterning process |
| 05/02/2001 | EP1096312A1 Non absorbing reticle and method of making same |
| 05/02/2001 | EP1096303A2 Electronic device |
| 05/02/2001 | EP1096260A1 Micromechanical device |
| 05/02/2001 | EP1096042A1 Method for fabricating a semiconductor structure including a metal oxide interface with silicon |
| 05/02/2001 | EP1096041A2 Etching of multi-layer metallic composite articles |
| 05/02/2001 | EP1096038A1 Method and apparatus for depositing a film |
| 05/02/2001 | EP1096036A1 Heavy gas plasma sputtering |
| 05/02/2001 | EP1096027A1 Method of manufacturing high purity cobalt sputter targets having a low magnetic permeability |
| 05/02/2001 | EP1095992A2 CMP slurry for planarizing metals |
| 05/02/2001 | EP1095714A2 Megasonic resonator for disk cleaning and method for use thereof |
| 05/02/2001 | EP1095410A2 Semiconductor arrangement with ohmic contact and a method for contacting a semiconductor arrangement |
| 05/02/2001 | EP1095409A1 Silicon carbide horizontal channel buffered gate semiconductor devices |
| 05/02/2001 | EP1095408A1 Vertical semiconductor element with reduced electric surface field |
| 05/02/2001 | EP1095407A1 Integrated silicon-on-insulator integrated circuit with decoupling capacity and method for making such a circuit |
| 05/02/2001 | EP1095406A2 Integrated circuit, method for producing the same and wafer with a number of integrated circuits |
| 05/02/2001 | EP1095405A1 Method and apparatus relating to interconnect lines |
| 05/02/2001 | EP1095404A1 Circuit and a method for the production thereof |
| 05/02/2001 | EP1095403A1 Method for removing defects from silicon bodies by a selective etching process |
| 05/02/2001 | EP1095402A2 Process for the preparation of epitaxial wafers for resistivity measurements |
| 05/02/2001 | EP1095401A1 Method for anisotropic plasma etching of semiconductors |
| 05/02/2001 | EP1095400A1 Methods for plasma etching silicon |
| 05/02/2001 | EP1095399A1 Method for handling a plurality of circuit chips |
| 05/02/2001 | EP1095398A2 Dram storage capacitor |
| 05/02/2001 | EP1095395A1 Rf matching network with distributed outputs |
| 05/02/2001 | EP1095394A1 Feedthrough overlap coil |
| 05/02/2001 | EP1095393A2 System and method to correct for distortion caused by bulk heating in a substrate |
| 05/02/2001 | EP1095392A1 Double slit-valve doors for plasma processing |
| 05/02/2001 | EP1095377A1 Ferroelectric ram arrangement |
| 05/02/2001 | EP1095346A1 Two-dimensional to three-dimensional vlsi design |
| 05/02/2001 | EP1095315A1 Method for decontaminating microlithography projection lighting devices |
| 05/02/2001 | EP1095310A1 A reflection system for imaging on a nonplanar substrate |
| 05/02/2001 | EP1095304A1 Multiplexer for laser lithography |
| 05/02/2001 | EP1095285A1 Method and device for determining the dependence of a first measured quantity on a second measured quantity |
| 05/02/2001 | EP1095264A1 Improved process monitor |
| 05/02/2001 | EP1095252A1 Collector for an automated on-line bath analysis system |
| 05/02/2001 | EP1095171A1 Method and apparatus for increasing wafer throughput between cleanings in semiconductor processing reactors |
| 05/02/2001 | EP1094921A1 Transferring substrates with different holding end effectors |
| 05/02/2001 | EP1060509A4 Crystal ion-slicing of single-crystal films |
| 05/02/2001 | EP1058949A4 Quasi-mesh gate structure including plugs connecting source regions with backside for lateral rf mos devices |
| 05/02/2001 | EP1034457A4 Method of fine feature edge tuning with optically-halftoned mask |
| 05/02/2001 | EP1027734A4 An electrically erasable programmable split-gate memory cell |
| 05/02/2001 | EP0968458A4 Optical proximity correction method for intermediate-pitch features using sub-resolution scattering bars |
| 05/02/2001 | EP0930978A4 Composition and method for polishing a composite |
| 05/02/2001 | EP0706582B1 Improved compositions and methods for polishing |
| 05/02/2001 | CN1293825A Field-effect tranisistor |
| 05/02/2001 | CN1293824A Process for manufacturing semiconductor device |
| 05/02/2001 | CN1293823A Method packaging semiconductor device using antisotropic conductive adhesive |
| 05/02/2001 | CN1293772A Positively photosensitive resin composition |
| 05/02/2001 | CN1293722A Apparatus for moving exhaust tube of barrel reactor |
| 05/02/2001 | CN1293719A Apparatus and method for electrolytically depositing copper on semiconductor workpiece |
| 05/02/2001 | CN1293485A Electron element packaging method |
| 05/02/2001 | CN1293467A Chip parts on glass and connecting material used thereof |
| 05/02/2001 | CN1293455A Perpendicular type metallic oxide semi conductor transistor |
| 05/02/2001 | CN1293454A Integrated circuit possessing differentisl signal line balancing intorsion |
| 05/02/2001 | CN1293452A Channel isolating structure, semi conductor device possessing said structure and channel isolating method |
| 05/02/2001 | CN1293451A Charged particle beam photoetching device and photoetching process of charged particle beam |
| 05/02/2001 | CN1293450A Electron beam exposure method and mask used and electron beam exposure system |
| 05/02/2001 | CN1293449A Exposure mask, its manufacturing method and making method of semiconductor device using same |
| 05/02/2001 | CN1293265A Precursor deposited atom layer containing nitrate |
| 05/02/2001 | CN1065340C Driving circuit for active matrix indicator element and manufacturing method thereof |
| 05/02/2001 | CN1065290C Hole conduction mercury cadimium-tellurium epitaxial material heat treatment process and device |
| 05/02/2001 | CN1065219C Semiconductor ceramics and manufacturing method thereof |
| 05/02/2001 | CN1065182C Diffusion patterning process and screen therefor |
| 05/02/2001 | CA2324910A1 "a device for generating a plurality of laser beams" |
| 05/01/2001 | USRE37158 High performance sub-micron P-channel transistor with germanium implant |
| 05/01/2001 | US6226778 Method and apparatus for determining locations of circuit elements including sequential circuit elements |
| 05/01/2001 | US6226775 Semiconductor integrated circuit designing method of an interconnection thereof and recording medium in which the method is recorded for empty area |
| 05/01/2001 | US6226563 Method for controlling unit process conditions of semiconductor fabricating equipment arranged in a processing line |
| 05/01/2001 | US6226453 Temperature probe with fiber optic core |
| 05/01/2001 | US6226452 Radiant chamber for simultaneous rapid die attach and lead frame embed for ceramic packaging |
| 05/01/2001 | US6226394 Non-lot based method for assembling integrated circuit devices |
| 05/01/2001 | US6226354 Short-wavelength electromagnetic-radiation generator |
| 05/01/2001 | US6226214 Read only memory |
| 05/01/2001 | US6226205 Reference voltage generator for an integrated circuit such as a dynamic random access memory (DRAM) |
| 05/01/2001 | US6226197 Magnetic thin film memory, method of writing information in it, and me |