| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 05/23/2001 | EP1102328A1 Integrated capacitor with hybrid dielectric |
| 05/23/2001 | EP1102327A2 Field effect semiconductor device |
| 05/23/2001 | EP1102320A1 Security ROM memory cell and manufacturing method therefor |
| 05/23/2001 | EP1102319A1 Process for manufacturing electronic devices comprising high voltage mos transistors, and electronic device thus obtained |
| 05/23/2001 | EP1102318A1 Method of forming a diode for integration with a semiconductor device and method of forming a transistor device having an integrated diode |
| 05/23/2001 | EP1102315A2 A method to avoid copper contamination on the sidewall of a via or a dual damascene structure |
| 05/23/2001 | EP1102314A2 Method for manufacturing a SOI substrate |
| 05/23/2001 | EP1102313A2 A top gate self-aligned polysilicon TFT and a method for its production |
| 05/23/2001 | EP1102312A2 Method for selective oxide etching in pre-metal deposition |
| 05/23/2001 | EP1102311A2 Method of and apparatus for dynamic alignment of substrates |
| 05/23/2001 | EP1102305A1 Plasma processing apparatus with an electrically conductive wall |
| 05/23/2001 | EP1102280A2 Semiconductor memory device |
| 05/23/2001 | EP1102182A2 Method of automatic layout design for LSI, mask set and semiconductor integrated circuit manufactured by the method, and recording medium storing the program |
| 05/23/2001 | EP1102137A2 Method of and apparatus for determining substrate offset using optimization techniques |
| 05/23/2001 | EP1102124A2 Exposure apparatus and device manufacturing method |
| 05/23/2001 | EP1102111A2 Liquid crystal display device having improved TFTs and a fabrication method thereof |
| 05/23/2001 | EP1102100A2 Catadioptric objective with beamsplitter |
| 05/23/2001 | EP1102071A1 Holder of electroconductive contactor, and method for producing the same |
| 05/23/2001 | EP1102061A1 Combinatorial x-ray diffractor |
| 05/23/2001 | EP1102058A1 Method and apparatus for inspecting articles |
| 05/23/2001 | EP1102031A2 A pattern dimension measuring method and apparatus |
| 05/23/2001 | EP1101842A2 Substrate for epitaxy of III-V compounds and a method for producing the same |
| 05/23/2001 | EP1101841A2 Substrate for epitaxy of III-V compounds and a method for producing the same |
| 05/23/2001 | EP1101839A2 Methods and apparatus for forming metal layers on substrates |
| 05/23/2001 | EP1101837A1 Moisture corrosion inhibitor layer for Al-alloy metallization layers, particularly for electronic devices and corresponding manufacturing method |
| 05/23/2001 | EP1101835A1 Method and apparatus for physical vapor deposition using modulated power |
| 05/23/2001 | EP1101834A2 Method of depositing materials on substrates |
| 05/23/2001 | EP1101810A2 Silicone-based bonding sheet and semiconductor device |
| 05/23/2001 | EP1101741A2 Quartz glass product for an optical element and process of its manufacture |
| 05/23/2001 | EP1101567A1 A carrier head with a substrate detector |
| 05/23/2001 | EP1101566A2 Workpiece carrier and polishing apparatus having workpiece carrier |
| 05/23/2001 | EP1101523A2 Gas flow purification system and method |
| 05/23/2001 | EP1101249A1 Method and apparatus for superior step coverage and interface control for high k dielectric capacitors and related electrodes |
| 05/23/2001 | EP1101247A1 Method of producing an interconnect structure for an integrated circuit |
| 05/23/2001 | EP1101246A1 Method for improved sputter etch processing |
| 05/23/2001 | EP1101245A2 Method and device for cleaning substrates |
| 05/23/2001 | EP1101243A1 Method for changing a processing medium contained in a processing tank and system for carrying out the method |
| 05/23/2001 | EP1101145A1 Method and apparatus for providing rectangular shaped array of light beams |
| 05/23/2001 | EP1101123A1 Particle beam current monitoring technique |
| 05/23/2001 | EP1101079A1 Dual output capacitance interface circuit |
| 05/23/2001 | EP1100980A2 Processing system and method for chemical vapor deposition |
| 05/23/2001 | EP1100978A1 Method and apparatus for forming amorphous and polycrystalline silicon germanium alloy films |
| 05/23/2001 | EP1100750A1 Method for forming an oxide film with non-uniform thickness at a silicon substrate surface |
| 05/23/2001 | EP1100630A1 Process and apparatus for treating a workpiece such as a semiconductor wafer |
| 05/23/2001 | EP1066418A4 Solution synthesis of mixed-metal chalcogenide nanoparticles and spray deposition of precursor films |
| 05/23/2001 | DE19954895A1 Anordnung zur elektrischen Verbindung zwischen Chips in einer dreidimensional ausgeführten Schaltung Arrangement for electrical connection between circuit chips in a three-dimensionally performed |
| 05/23/2001 | DE19954355A1 Polishing plate for lapping, grinding or polishing disc-shaped workpieces, e.g. silicon or silicon carbide substrate wafers, has its upper layer cut through by a cooling labyrinth |
| 05/23/2001 | DE19953883A1 Anordnung zur Reduzierung des Einschaltwiderstandes von p- oder n-Kanal-Feldeffekttransistoren Arrangement for reduction of the on resistance of p-type or n-channel field-effect transistors |
| 05/23/2001 | DE19953322A1 Device for handling small and micro parts, inserts micro lens on support layer in handling device while applying exact position to positioning layer in layer surface |
| 05/23/2001 | DE19947053C1 Trench capacitor used in the production of integrated circuits or chips comprises a trench formed in a substrate, an insulating collar, a trenched sink, a dielectric layer and a conducting trench filling |
| 05/23/2001 | DE10056999A1 Semiconductor wafer has a pattern composed of several chip regions bordered by several paths |
| 05/23/2001 | DE10053962A1 Non-volatile ferroelectric memory has two sub-word lines connected to gates of respective transistors and connected to shunt lines |
| 05/23/2001 | DE10053724A1 MOS-transistor structure with pedestal for protection against electrostatic discharges, has ESD-protection device provided on MOS-transistor base and transistor configuration is generated with an ESD-protection transistor |
| 05/23/2001 | DE10053025A1 Verfahren und Vorrichtung für die gesteuerte Oxidation von Materialien Method and apparatus for the controlled oxidation of materials |
| 05/23/2001 | DE10051600A1 Production of semiconductor device comprises forming multiple layer film on substrate, patterning, oxynitriding, forming inner wall insulating film, removing multiple |
| 05/23/2001 | DE10050077A1 Contact structure for establishing electrical connection with contact target, has contact substrate with traces on surface connected to silicon bases of contactors to establish signal paths for external components |
| 05/23/2001 | DE10043191A1 Non-volatile ferroelectric memory has column redundancy selection circuit that omits failed column address of main cell array block by replacing column with column of redundancy cell array block |
| 05/23/2001 | DE10039684A1 Solution for selective etching of nickel or alloy from material also contain other metals, useful in e.g. semiconductor device or circuit board manufacture, contains nitric and sulfuric acids, oxidant, chloride ions and water |
| 05/23/2001 | DE10022698A1 Halbleiterspeichereinrichtung A semiconductor memory device |
| 05/23/2001 | DE10007108C1 Galvanically producing microstructures on substrate comprises immersing substrate in electrolyte solution and forming contact sites on surface of substrate |
| 05/23/2001 | DE10000759C1 Production of justifying marks in a structure with integrated circuits comprises applying a first planar metal layer over a semiconductor substrate, applying an insulating layer, inserting metal and depositing a second metal layer |
| 05/23/2001 | CN1296724A Ceramic heater and method for producing the same |
| 05/23/2001 | CN1296643A Thin-film transistor, liquid crystal panel, and method for producing the same |
| 05/23/2001 | CN1296640A Anisotropic conductor film, semiconductor chip, and method of packaging |
| 05/23/2001 | CN1296639A Method of manufacturing semiconductor device with field effect transistor |
| 05/23/2001 | CN1296638A Semiconductor device with transparent link area for silicide applications and fabrication thereof |
| 05/23/2001 | CN1296630A Voltage boosting circuit including capacitor with reduced parasitic capacitance |
| 05/23/2001 | CN1296434A Modular machine tool for polishing and planting substrates |
| 05/23/2001 | CN1296292A Low power consumption semiconductor power switch device and making method thereof |
| 05/23/2001 | CN1296291A Shape-changed hetrointerface bipolar transistor |
| 05/23/2001 | CN1296290A Linear capacitor structure in CMOS technology |
| 05/23/2001 | CN1296289A Semiconductor device |
| 05/23/2001 | CN1296288A System and method for checking outward appearance of semiconductor device |
| 05/23/2001 | CN1296287A Device for checking semiconductor device |
| 05/23/2001 | CN1296285A Improvement for semiconductor discharge tube making method |
| 05/23/2001 | CN1296284A Checking method for figure drawing |
| 05/23/2001 | CN1296177A Optimizing chemical-mechanical planing process by testing oxide/nitride interface |
| 05/23/2001 | CN1296127A Collector |
| 05/23/2001 | CN1296088A Steel wire spring clamp head, wire-guiding frame conveying belt and electroplating system |
| 05/23/2001 | CN1296064A Photoresist cleaning composition |
| 05/23/2001 | CN1296053A Adhesion material and circuit connection method |
| 05/23/2001 | CN1296049A Compositions for chemical-mechanical polishing |
| 05/23/2001 | CN1066289C Electrostatic discharge circuit for high-speed, high-voltage circuit |
| 05/22/2001 | US6237133 Mask pattern data creation method and system that are not subject to data stream data format limitations |
| 05/22/2001 | US6237128 Method and apparatus for enabling parallel layout checking of designing VLSI-chips |
| 05/22/2001 | US6237050 Method for controlling components of semiconductor fabricating equipment arranged in a processing line |
| 05/22/2001 | US6236952 System and method for automatically creating and transmitting test conditions of integrated circuit devices |
| 05/22/2001 | US6236904 Substrate conveying system |
| 05/22/2001 | US6236903 Multiple reaction chamber system having wafer recognition system and method for processing wafer using same |
| 05/22/2001 | US6236902 Apparatus and method for retaining a device for processing |
| 05/22/2001 | US6236615 Semiconductor memory device having memory cell blocks different in data storage capacity without influence on peripheral circuits |
| 05/22/2001 | US6236613 Semiconductor integrated circuit device having a hierarchical power source configuration |
| 05/22/2001 | US6236599 Repair signal generating circuit |
| 05/22/2001 | US6236596 Biasing method and structure for reducing band-to-band and/or avalanche currents during the erase of flash memory devices |
| 05/22/2001 | US6236590 Optimal write conductors layout for improved performance in MRAM |
| 05/22/2001 | US6236559 Capacitor |
| 05/22/2001 | US6236555 Method for rapidly dechucking a semiconductor wafer from an electrostatic chuck utilizing a hysteretic discharge cycle |
| 05/22/2001 | US6236547 Zener zapping device and zener zapping method |
| 05/22/2001 | US6236542 Substrate independent superpolishing process and slurry |
| 05/22/2001 | US6236503 Microscope stand for a wafer inspection microscope |