| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 05/31/2001 | DE10048432A1 Waferoberflächen-Inspektionsverfahren Wafer surface inspection method |
| 05/31/2001 | DE10043172A1 Halbleiter-Baustein und Verfahren zur Herstellung desselben Of the same semiconductor device and methods for making |
| 05/31/2001 | DE10042661A1 Mounting method for semiconductor chip, involves deflecting gripper relative to bonding head so as to lower chip at soldering portion of substrate and then raising it by preset distance before being let go by gripper |
| 05/31/2001 | DE10034845A1 Integrated semiconductor circuit has n-type independent resistance layer and p-type resistance layer, between which PN junction is formed during reverse bias condition |
| 05/31/2001 | DE10032215A1 Capacitor production comprises forming a lower electrode on a semiconductor substrate, surface treating, forming a tantalum oxynitride layer on the upper side of the electrode, crystallizing and forming an upper electrode on the layer |
| 05/31/2001 | DE10032213A1 Kondensator für Halbleiterspeicherbauelement und Verfahren zu dessen Herstellung Capacitor for the semiconductor memory device and method for its production |
| 05/31/2001 | DE10032209A1 Kondensator für Halbleiterspeicherbauelement und Verfahren zu dessen Herstellung Capacitor for the semiconductor memory device and method for its production |
| 05/31/2001 | DE10030143A1 Manufacturing method for photo mask, involves setting amount of correction offset so that size rate of change of resist pattern after transfer may be within permissible on device quality range |
| 05/31/2001 | DE10022696A1 Herstellungsverfahren einer Halbleitereinrichtung und Halbleitereinrichtung Manufacturing method of a semiconductor device and semiconductor device |
| 05/31/2001 | DE10019705A1 Halbleitervorrichtung und Verfahren zum Herstellen desselben Of the same semiconductor device and method of manufacturing |
| 05/31/2001 | CA2392378A1 X-ray zoom lens |
| 05/31/2001 | CA2392307A1 Methods of formation of a silicon nanostructure, a silicon quantum wire array and devices based thereon |
| 05/30/2001 | EP1104226A1 Production method for flexible substrate |
| 05/30/2001 | EP1104092A2 Operational amplifier with digital offset calibration |
| 05/30/2001 | EP1104035A2 Thin film transistors |
| 05/30/2001 | EP1104031A2 Nitride semiconductor, nitride semiconductor device, semiconductor light emiting device and method of fabricating the same |
| 05/30/2001 | EP1104028A2 SiC Nmosfet for use as a power switch and a method of manufacturing the same |
| 05/30/2001 | EP1104027A2 Power semiconductor device having a ballast resistor region |
| 05/30/2001 | EP1104023A1 Process for manufacturing electronic devices comprising non-volatile memory cells |
| 05/30/2001 | EP1104022A1 Process for the fabrication of an integrated circuit comprising low and high voltage MOS transistors and EPROM cells |
| 05/30/2001 | EP1104021A1 Process for the fabrication of integrated circuits with low voltage MOS transistors, EPROM cells and high voltage MOS transistors |
| 05/30/2001 | EP1104020A1 Methods of treating substrates surfaces comprising copper or copper alloy |
| 05/30/2001 | EP1104019A1 Method and device for real time control of the thickness of an integrated circuit layer |
| 05/30/2001 | EP1104018A2 Optimized optical system design for endpoint detection |
| 05/30/2001 | EP1104017A2 Method of flip-chip mounting a semiconductor chip to a circuit board |
| 05/30/2001 | EP1104014A1 Low-noise-low-frequency vertical transistor with high current gain and corresponding method |
| 05/30/2001 | EP1104013A2 Advanced electrolytic polish assisted metal wafer planarization |
| 05/30/2001 | EP1104012A1 Method and apparatus for forming an oxide layer on semiconductor wafers |
| 05/30/2001 | EP1104011A1 Methods of formation of a silicon nanostructure, a silicon quantum wire array and devices based theron |
| 05/30/2001 | EP1104002A1 Electron beam measurement method and electron beam irradiation processing device |
| 05/30/2001 | EP1103980A2 2-bit/cell type nonvolatile semiconductor memory |
| 05/30/2001 | EP1103948A1 Display device capable of collecting substantially all power charged to capacitive load in display panel |
| 05/30/2001 | EP1103947A2 EL display device and electronic apparatus |
| 05/30/2001 | EP1103860A1 Electron-beam lithography system and alignment method |
| 05/30/2001 | EP1103857A2 Optical system |
| 05/30/2001 | EP1103856A1 Positive resist composition & process for forming resist pattern using same |
| 05/30/2001 | EP1103831A2 Flip-chip mounted opto-electronic circuit |
| 05/30/2001 | EP1103639A2 Plating apparatus and method |
| 05/30/2001 | EP1103634A1 Method for contact plated copper deposition |
| 05/30/2001 | EP1103633A1 Method for copper plating deposition |
| 05/30/2001 | EP1103632A1 Apparatus and method for processing semiconductor substrates |
| 05/30/2001 | EP1103631A2 Apparatus and method for depositing material on a substrate |
| 05/30/2001 | EP1103528A2 Silica glass product for an optical element and method for its production |
| 05/30/2001 | EP1103354A1 Substrate transport apparatus and transport teaching system |
| 05/30/2001 | EP1103353A1 Chuck and suction cup for platy material |
| 05/30/2001 | EP1103346A2 Method and apparatus for electrochemical-mechanical planarization |
| 05/30/2001 | EP1103345A2 Cloth cleaning device and polishing machine |
| 05/30/2001 | EP1103076A1 Zinc oxide films containing p-type dopant and process for preparing same |
| 05/30/2001 | EP1103075A1 A thin-film opto-electronic device and a method of making it |
| 05/30/2001 | EP1103074A2 Mosfet having self-aligned gate and buried shield and method of making same |
| 05/30/2001 | EP1103073A1 Method of forming metal interconnects |
| 05/30/2001 | EP1103072A1 Thin-layered semiconductor structure comprising a heat distribution layer |
| 05/30/2001 | EP1103071A1 Detection of nontransient processing anomalies in vacuum manufacturing process |
| 05/30/2001 | EP1103070A1 Low temperature process for fabricating layered superlattice materials and making electronic devices including same |
| 05/30/2001 | EP1103069A1 Misted precursor deposition apparatus and method with improved mist and mist flow |
| 05/30/2001 | EP1103068A1 Improved gate electrode connection structure by in situ chemical vapor deposition of tungsten and tungsten nitride |
| 05/30/2001 | EP1103067A1 Dram memory capacitor and method for the production thereof |
| 05/30/2001 | EP1103066A1 Method and apparatus for endpoint detecting the formation of an hsg polysilicon layer |
| 05/30/2001 | EP1103065A1 Workpiece vibration damper |
| 05/30/2001 | EP1103063A2 Dose monitor for plasma-immersion ion implantation doping system |
| 05/30/2001 | EP1103051A1 Ferroelectric storage assembly |
| 05/30/2001 | EP1103050A1 Resistive ferroelectric storage cell |
| 05/30/2001 | EP1103031A1 Semiconductor component having a passivation |
| 05/30/2001 | EP1103018A1 Diffractive element in extreme-uv lithography condenser |
| 05/30/2001 | EP1102970A1 A sensor for measuring a substrate temperature |
| 05/30/2001 | EP1102947A1 Chemical delivery system having purge system utilizing multiple purge techniques |
| 05/30/2001 | EP1102872A1 Novel organocuprous precursors for chemical vapor deposition of a copper film |
| 05/30/2001 | EP1102871A1 Chemical vapor deposition vaporizer |
| 05/30/2001 | EP1102870A1 Gas distributor plate for a processing apparatus |
| 05/30/2001 | EP1102869A1 Esrf chamber cooling system and process |
| 05/30/2001 | EP1102823A1 Electroconductive, thermoplastic and heat-activated adhesive film |
| 05/30/2001 | EP1102821A1 Composition and method for polishing in metal cmp |
| 05/30/2001 | EP1102616A1 Esrf coolant degassing process |
| 05/30/2001 | EP0988491A4 High capacity gas storage and dispensing system |
| 05/30/2001 | EP0932638A4 Acrylic sheet having uniform distribution of coloring and mineral filler before and after thermoforming |
| 05/30/2001 | EP0914350A4 Oxygen-curable coating composition |
| 05/30/2001 | EP0883699B1 Method and devices for the electrolytic formation of a deposit on an assembly of selected electrodes |
| 05/30/2001 | EP0826165B1 Alignment device and lithographic apparatus provided with such a device |
| 05/30/2001 | EP0800664B1 Metal ion reduction in novolak resin using an ion exchange resin in a polar solvent and photoresists compositions therefrom |
| 05/30/2001 | EP0793860B1 Lateral bipolar transistor |
| 05/30/2001 | EP0620822B1 Hybridization of polynucleotides conjugated with chromophores and fluorophores to generate donor-to-donor energy transfer system |
| 05/30/2001 | CN1297675A Device for positioning electronic circuits arranged on foil |
| 05/30/2001 | CN1297670A Combination bake/chill apparatus incorporating low thermal mass, thermally conductive bakeplate |
| 05/30/2001 | CN1297584A Method of mfg. semiconductor device, semiconductor device, narrow pitch connector, electrostatic actuator, ink jet head, ink-jet printer, micromachine, liquid crystal panel, and electronic device |
| 05/30/2001 | CN1297582A Method for mfg. thin-film transistor |
| 05/30/2001 | CN1297581A Method of mfg. thin-film transistor |
| 05/30/2001 | CN1297579A Process for copper etch back |
| 05/30/2001 | CN1297578A Process for formation of silicon oxide films |
| 05/30/2001 | CN1297577A Method for forming silicon film |
| 05/30/2001 | CN1297576A Method for forming silicon film and ink composition for ink jet |
| 05/30/2001 | CN1297567A Conductive paste, ceramic multilayer substrate, and method for mfg. ceramic multilayer substrate |
| 05/30/2001 | CN1297542A Radiation-sensitive resin composition |
| 05/30/2001 | CN1297530A Method of producing detector belonging to gas sensor, and detector produced in accordance with method |
| 05/30/2001 | CN1297491A Reduced impedance chamber |
| 05/30/2001 | CN1297471A Coating composition |
| 05/30/2001 | CN1297385A Process and apparatus for treating workpiece such as semiconductor wafer |
| 05/30/2001 | CN1297269A Ion producer and static charge removing apparatus |
| 05/30/2001 | CN1297258A Silicon carbide N-Channel field effect transistor using as power switch and its mfg. method |
| 05/30/2001 | CN1297256A Semiconductor device and its mfg. method |
| 05/30/2001 | CN1297255A Mixed fuse technique |