| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 06/05/2001 | US6242284 Method for packaging a semiconductor chip |
| 06/05/2001 | US6242283 Wafer level packaging process of semiconductor |
| 06/05/2001 | US6242282 Circuit chip package and fabrication method |
| 06/05/2001 | US6242281 Saw-singulated leadless plastic chip carrier |
| 06/05/2001 | US6242280 Method of interconnecting an electronic device |
| 06/05/2001 | US6242279 High density wire bond BGA |
| 06/05/2001 | US6242278 Method for forming polycrystal silicon film for semiconductor elements |
| 06/05/2001 | US6242277 Method of fabricating a complementary metal-oxide semiconductor sensor device |
| 06/05/2001 | US6242275 Method for manufacturing quantum wires |
| 06/05/2001 | US6242273 Fractal filter applied to a contamination-free manufacturing signal to improve signal-to-noise ratios |
| 06/05/2001 | US6242272 Reverse profiling method for profiling modulated impurity density distribution of semiconductor device |
| 06/05/2001 | US6242271 Method for establishing reference coordinates for a point on a component |
| 06/05/2001 | US6242270 Method of manufacturing integrated circuits |
| 06/05/2001 | US6242165 Supercritical compositions for removal of organic material and methods of using same |
| 06/05/2001 | US6242164 Multilayer element with conductive thin films and etching target layer, photoresists and exposure, diffusion a photo acid and forming patterns |
| 06/05/2001 | US6242160 Patterning method of chemical amplification type resist film for far ultraviolet radiation |
| 06/05/2001 | US6242136 Photomask substrate |
| 06/05/2001 | US6242111 Heat resistant overcoating |
| 06/05/2001 | US6242107 Methods for etching an aluminum-containing layer |
| 06/05/2001 | US6242106 Fine wire made of a gold alloy, method for its production, and its use |
| 06/05/2001 | US6242103 Substrate for semiconductor die testing |
| 06/05/2001 | US6242075 Planar multilayer ceramic structures with near surface channels |
| 06/05/2001 | US6241955 Method and apparatus for purification of hydride gas streams |
| 06/05/2001 | US6241907 Method and system for providing a package for decapsulating a chip-scale package |
| 06/05/2001 | US6241869 Apparatus and method for electroplating |
| 06/05/2001 | US6241859 Method of forming a self-aligned refractory metal silicide layer |
| 06/05/2001 | US6241847 Polishing semiconductor wafers with slurry that allows an infrared spectrum to be emitted through detects rate of change of intensity level and generates control signal |
| 06/05/2001 | US6241845 Apparatus for reducing process drift in inductive coupled plasma etching such as oxide layer |
| 06/05/2001 | US6241823 Array and method for coating of objects |
| 06/05/2001 | US6241822 Vertical heat treatment apparatus |
| 06/05/2001 | US6241821 Fabricating semiconductor structure via forming amorphous silicon dioxide on surface of silicon substrate, providing alkaline earth metal (barium, strontium) on amorphous silicon dioxide, then heating to form interface |
| 06/05/2001 | US6241820 Single crystal-manufacturing equipment and a method for manufacturing the same |
| 06/05/2001 | US6241597 Cleaning apparatus for maintaining semiconductor equipment |
| 06/05/2001 | US6241596 Method and apparatus for chemical mechanical polishing using a patterned pad |
| 06/05/2001 | US6241593 Carrier head with pressurizable bladder |
| 06/05/2001 | US6241588 Cavitational polishing pad conditioner |
| 06/05/2001 | US6241586 CMP polishing slurry dewatering and reconstitution |
| 06/05/2001 | US6241585 Apparatus and method for chemical mechanical polishing |
| 06/05/2001 | US6241584 Method of washing a semiconductor device |
| 06/05/2001 | US6241583 Chemical mechanical polishing with a plurality of polishing sheets |
| 06/05/2001 | US6241581 Method for dressing a polishing pad, polishing apparatus, and method for manufacturing a semiconductor apparatus |
| 06/05/2001 | US6241456 Wafer inspecting apparatus and method |
| 06/05/2001 | US6241427 System and method for substantially touchless hydrodynamic transport of objects |
| 06/05/2001 | US6241403 Developing method and developing apparatus |
| 06/05/2001 | US6241402 Developing apparatus and method thereof |
| 06/05/2001 | US6241162 Ultrasonic shower cleaning apparatus |
| 06/05/2001 | US6241153 Method for making tamper-preventing, contact-type, smart cards |
| 06/05/2001 | US6241145 Lead-free solder joining method and electronic module manufactured by using the method |
| 06/05/2001 | US6241094 Spool case of bonding wire |
| 06/05/2001 | US6241079 Device for conveying substrates through a substrate processing plant |
| 06/05/2001 | US6241005 Thermal interface member |
| 06/05/2001 | US6240942 Method for conserving a resource by flow interruption |
| 06/05/2001 | US6240938 Device for treating substrates in a fluid container |
| 06/05/2001 | US6240936 Methods of spin cleaning substrates using carbon dioxide liquid |
| 06/05/2001 | US6240933 Methods for cleaning semiconductor surfaces |
| 06/05/2001 | US6240931 Method for removing particles from a surface of an article |
| 06/05/2001 | US6240875 Vertical oven with a boat for the uniform treatment of wafers |
| 06/05/2001 | US6240874 Integrated edge exposure and hot/cool plate for a wafer track system |
| 06/05/2001 | US6240655 Fluid exchange system and an associated spherical-shaped semiconductor integrated circuit manufacturing system |
| 06/05/2001 | US6240634 Method of producing a multichip package module in which rough-pitch and fine-pitch chips are mounted on a board |
| 06/05/2001 | US6240610 Wafer and transport system |
| 06/05/2001 | US6240588 Wafer scrubbing brush core |
| 06/05/2001 | CA2218264C Metallized film capacitor and manufacturing process |
| 06/05/2001 | CA2199346C Semiconductor device and manufacturing method of the same |
| 05/31/2001 | WO2001039559A1 Method and apparatus for plasma treatment |
| 05/31/2001 | WO2001039552A1 Ceramic heater |
| 05/31/2001 | WO2001039376A1 Programmable logic device and programming method |
| 05/31/2001 | WO2001039374A1 Starter device for normally off fets |
| 05/31/2001 | WO2001039373A1 Improved voltage translator circuit |
| 05/31/2001 | WO2001039292A2 Fabrication of nanometer size gaps on an electrode |
| 05/31/2001 | WO2001039281A1 Method for making a photovoltaic wafer or slice and cell comprising same |
| 05/31/2001 | WO2001039275A1 Mos transistor and method for producing the same |
| 05/31/2001 | WO2001039274A1 Retrograde doped buried layer transistor and method for producing the same |
| 05/31/2001 | WO2001039273A1 Method of manufacturing a semiconductor device using a halo implantation |
| 05/31/2001 | WO2001039271A1 Mask-programmable rom memory device and method for producing the same |
| 05/31/2001 | WO2001039269A1 Method and apparatus for personalization of semiconductor |
| 05/31/2001 | WO2001039266A1 Power semiconductor die attach process using conductive adhesive film |
| 05/31/2001 | WO2001039265A1 Top gate thin-film transistor and method of producing the same |
| 05/31/2001 | WO2001039264A1 Method in the fabrication of a silicon bipolar transistor |
| 05/31/2001 | WO2001039263A1 Method and apparatus for sequentially etching a wafer using anisotropic and isotropic etching |
| 05/31/2001 | WO2001039262A1 Method and apparatus for wet-etching semiconductor wafers |
| 05/31/2001 | WO2001039261A1 Method for plasma etching with pulsed substrate electrode power |
| 05/31/2001 | WO2001039260A1 Semiconductor processing silica soot abrasive slurry method for integrated circuit microelectronics |
| 05/31/2001 | WO2001039259A1 Methods of formation of a silicon nanostructure, a silicon quantum wire array and devices based thereon |
| 05/31/2001 | WO2001039258A1 Functional device and method of manufacturing the same |
| 05/31/2001 | WO2001039257A2 Silicon layer highly sensitive to oxygen and method for obtaining same |
| 05/31/2001 | WO2001039256A2 Method for producing an insulation collar in a trench capacitor |
| 05/31/2001 | WO2001039251A2 High performance output buffer with esd protection |
| 05/31/2001 | WO2001039250A2 Conductive interconnection |
| 05/31/2001 | WO2001039248A2 Contact for a trench capacitor of a dram cell arrangement |
| 05/31/2001 | WO2001039220A1 Inductor for integrated circuit and methods of manufacture |
| 05/31/2001 | WO2001039210A1 X-ray zoom lens |
| 05/31/2001 | WO2001038939A2 Method for determining misalignment between a reticle and a wafer |
| 05/31/2001 | WO2001038890A1 Decompressor/prpg for applying pseudo-random and deterministic test patterns |
| 05/31/2001 | WO2001038889A1 Method and apparatus for selectively compacting test responses |
| 05/31/2001 | WO2001038611A1 Silicon wafer for epitaxial wafer, epitaxial wafer, and method of manufacture thereof |
| 05/31/2001 | WO2001038603A2 Metallizing method for dielectrics |
| 05/31/2001 | WO2001038601A1 Precursor deposition using ultrasonic nebulizer |
| 05/31/2001 | WO2001038600A1 Articles coated with aluminum nitride by chemical vapor deposition |
| 05/31/2001 | WO2001038597A2 Method for regulating sputtering processes |