| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 06/14/2001 | US20010003658 Leaving the photoresist layer on the gate electrode after patterning it, then heating to reflow the photoresist to cover the side edges of the gate electrode; three-layer thin film is used as source, drain and pixel electrodes |
| 06/14/2001 | US20010003657 Method for manufacturing a thin-film transistor |
| 06/14/2001 | US20010003656 Electronic device assembly and a method of connecting electronic devices constituting the same |
| 06/14/2001 | US20010003655 Which can correct position of an electron-beam based on an amount of position of the electron beam, while reflecting charge-up of a semiconductor wafer used, obtaining alignment accuracy in superposing |
| 06/14/2001 | US20010003620 High purity, siliconized silicon carbide having high thermal shock resistance |
| 06/14/2001 | US20010003607 Alternate steps of imp and sputtering process to improve sidewall coverage |
| 06/14/2001 | US20010003572 Mini-environment control system and method |
| 06/14/2001 | US20010003567 Article feeding apparatus |
| 06/14/2001 | US20010003511 Voltage-level shifter and semiconductor memory using the same |
| 06/14/2001 | US20010003501 Polypyrrole and/ or polythiophene |
| 06/14/2001 | US20010003481 Process and equipment for recovering developer from photoresist development waste and reusing it |
| 06/14/2001 | US20010003480 Apertures and illuminating apparatus including aperture openings dimensioned to compensate for directional critical dimension differences |
| 06/14/2001 | US20010003477 Liquid crystal display apparatus and TFT panel |
| 06/14/2001 | US20010003385 Process of packaging semiconductor chip in synthetic resin produced from pressurized granular synthetic resin and molding die used therein |
| 06/14/2001 | US20010003382 Semiconductor device comprising layered positional detection marks and manufacturing method therof |
| 06/14/2001 | US20010003381 Method to locate particles of a predetermined species within a solid and resulting structures |
| 06/14/2001 | US20010003379 Semiconductor device and method of fabricating the same |
| 06/14/2001 | US20010003378 Semiconductor device and manufacturing method therefor |
| 06/14/2001 | US20010003371 Unit type clip lead terminal, clip lead terminal connecting method, lead terminal connecting board, and method of producing board with lead terminals |
| 06/14/2001 | US20010003368 Open drain input/output structure and manufacturing method thereof in semiconductor device |
| 06/14/2001 | US20010003367 Trenched dmos device with low gate charges |
| 06/14/2001 | US20010003366 Semiconductor device, nonvolatile semiconductor storage apparatus using the device, and manufacuture method of the device |
| 06/14/2001 | US20010003365 Semiconductor device including a capacity element for analog circuit and manufacturing method of that |
| 06/14/2001 | US20010003364 Semiconductor and fabrication method thereof |
| 06/14/2001 | US20010003334 Ceramic heating jig |
| 06/14/2001 | US20010003299 Liquid processing apparatus and liquid processing method |
| 06/14/2001 | US20010003298 Comprising primary electrode chargeable to form plasma of the gas in the chamber, dielectric covering primary electrode, dielectric having surface adapted to receive substrate and having a conduit therethrough |
| 06/14/2001 | US20010003296 Forming a projecting electrode by applying and hardening a thermosetting conductive adhesive on first connecting electrode, applying a hardenable conductive adhesive on projecting electrode, aligning components, hardening |
| 06/14/2001 | US20010003287 Fluid control apparatus |
| 06/14/2001 | US20010003272 Method for improving the rate of a plasma enhanced vacuum treatment |
| 06/14/2001 | US20010003271 Processing apparatus with a chamber having therein a high-corrosion-resistant sprayed film |
| 06/14/2001 | US20010003270 Rf powered plasma enhanced chemical vapor deposition reactor and methods of effecting plasma enhanced chemical vapor deposition |
| 06/14/2001 | US20010003269 Etch stop layer system |
| 06/14/2001 | CA2394458A1 Methods for producing packaged integrated circuit devices & packaged integrated circuit devices produced thereby |
| 06/13/2001 | EP1107655A2 Low profile interconnect structure |
| 06/13/2001 | EP1107654A1 Sheet for printed wiring board, method of forming via, resin sheet having filled via, printed wiring board and method of manufacturing the same |
| 06/13/2001 | EP1107653A1 Discharge electrode, high-frequency plasma generator, method of power feeding, and method of manufacturing semiconductor device |
| 06/13/2001 | EP1107332A2 Photoelectric conversion device |
| 06/13/2001 | EP1107330A2 Modification of infrared reflectivity using silicon dioxide thin films derived from silsesquioxane resins |
| 06/13/2001 | EP1107329A2 Magnetic tunnel junction device, magnetic memory adopting the same, magnetic memory cell and access method of the same |
| 06/13/2001 | EP1107320A2 Sheet manufacturing method, sheet, sheet manufacturing apparatus, and solar cell |
| 06/13/2001 | EP1107317A1 Memory device |
| 06/13/2001 | EP1107313A2 On-chip test circuit to control the succession of exposure masks |
| 06/13/2001 | EP1107309A1 Manufacturing process for non-volatile floating gate memory cells and control circuitry |
| 06/13/2001 | EP1107308A1 Methods for fabricating a multilevel interconnection for an integrated circuit device utilizing a selective overlayer |
| 06/13/2001 | EP1107307A1 Semiconductor package, semiconductor device, electronic device, and method of manufacturing semiconductor package |
| 06/13/2001 | EP1107306A1 Semiconductor package, semiconductor device, electronic device and production method for semiconductor package |
| 06/13/2001 | EP1107305A2 Method for mounting a semiconductor device |
| 06/13/2001 | EP1107304A2 Article comprising a dielectric material of Zr-Ge-Ti-O or Hf-Ge-Ti-O and method of making the same |
| 06/13/2001 | EP1107303A2 Surface treatment anneal of silicon-oxy-carbide semiconductor surface layer |
| 06/13/2001 | EP1107302A2 Method and apparatus for reducing fixed charges in a semiconductor device |
| 06/13/2001 | EP1107301A2 Methods for cleaning substrate surfaces after etch operations |
| 06/13/2001 | EP1107300A2 Preconditioning abrasive articles for use in chemical-mechanical polishing |
| 06/13/2001 | EP1107299A2 Process for producing semiconductor devices |
| 06/13/2001 | EP1107298A2 Solution containing metal component, method of and apparatus for forming thin metal film |
| 06/13/2001 | EP1107297A1 Apparatus for manufacturing semiconductor device and method of manufacture thereof |
| 06/13/2001 | EP1107296A2 Method of manufacturing a nitride system III-V compound layer and method of manufacturing a substrate |
| 06/13/2001 | EP1107295A2 Composite member separating method, thin film manufacturing method, and composite member separating apparatus |
| 06/13/2001 | EP1107294A2 Method for making diaphragm-based sensors and apparatus constructed therewith |
| 06/13/2001 | EP1107292A1 Apparatus and process for controlling a mini-environment |
| 06/13/2001 | EP1107291A2 Ceramic heating jig |
| 06/13/2001 | EP1107290A2 Wafer scrubbing brush core |
| 06/13/2001 | EP1107289A2 Planarization apparatus |
| 06/13/2001 | EP1107288A2 Substrate processing system and method |
| 06/13/2001 | EP1107282A2 Method and apparatus for semiconductor wafer process monitoring |
| 06/13/2001 | EP1107258A1 Multibit MTJ stacked cell memory sensing method and apparatus |
| 06/13/2001 | EP1107066A2 Lithographic apparatus with mask clamping apparatus |
| 06/13/2001 | EP1107039A2 System for compensating direction and position variations of laser produced illumination |
| 06/13/2001 | EP1107034A2 Device and method for supporting an optical element with reduced deformation |
| 06/13/2001 | EP1107012A1 Visual inspection apparatus |
| 06/13/2001 | EP1106994A2 Inspection apparatus and method |
| 06/13/2001 | EP1106990A2 Method for measuring water concentration in ammonia |
| 06/13/2001 | EP1106946A2 Supercritical drying method and supercritical drying apparatus |
| 06/13/2001 | EP1106826A2 Flow rate control with a positive displacement liquid pump |
| 06/13/2001 | EP1106715A1 Self aligning non contact shadow ring process kit |
| 06/13/2001 | EP1106712A1 Method and apparatus of producing thin film of metal or metal compound |
| 06/13/2001 | EP1106709A2 Pulsed-mode RF bias for side-wall coverage improvement |
| 06/13/2001 | EP1106708A2 Two step AIN-PVD for improved film properties |
| 06/13/2001 | EP1106663A1 Slurry for chemical mechanical polishing silicon dioxide |
| 06/13/2001 | EP1106305A2 Chemical mechanical planarization system |
| 06/13/2001 | EP1106040A1 Method for producing interconnections with electrically conductive cross connections between the top and the bottom part of a substrate and interconnections having such cross connections |
| 06/13/2001 | EP1105950A1 Laser repetition rate multiplier |
| 06/13/2001 | EP1105925A1 Method for double-sided patterning of high temperature superconducting circuits |
| 06/13/2001 | EP1105921A1 Process for mapping metal contaminant concentration on a silicon wafer surface |
| 06/13/2001 | EP1105920A1 Pattern formation method using light-induced suppression of etching |
| 06/13/2001 | EP1105919A1 A system and method for residue entrapment utilizing a polish and sacrificial fill for semiconductor fabrication |
| 06/13/2001 | EP1105917A1 Elastomer bonded parts for plasma processes and method for manufacture and use thereof |
| 06/13/2001 | EP1105908A1 Ion beam generation apparatus |
| 06/13/2001 | EP1105890A1 Magnetoresistive element and the use thereof as storage element in a storage cell array |
| 06/13/2001 | EP1105880A1 Method and apparatus for providing an embedded flash-eeprom technology |
| 06/13/2001 | EP1105879A1 Mram array having a plurality of memory banks |
| 06/13/2001 | EP1105878A2 Storage cell array and corresponding production method |
| 06/13/2001 | EP1105875A1 On-chip word line voltage generation for dram embedded in logic process |
| 06/13/2001 | EP1105780A1 Reaction force isolation system for a planar motor |
| 06/13/2001 | EP1105778A1 Silicate-containing alkaline compositions for cleaning microelectronic substrates |
| 06/13/2001 | EP1105743A1 Method for manufacturing a magnetic sensor device |
| 06/13/2001 | EP1105742A1 Method for measuring two-dimensional potential distribution in cmos semiconductor components |
| 06/13/2001 | EP1105703A1 Method and apparatus for monitoring plasma processing operations |
| 06/13/2001 | EP1105605A1 Pod door to port door retention system |
| 06/13/2001 | EP1105549A1 High throughput organometallic vapor phase epitaxy (omvpe) apparatus |