| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 04/30/2002 | US6381005 Mask holding device, exposure apparatus and device manufacturing method |
| 04/30/2002 | US6381002 Process for controlling a gap between a mask and a workpiece in proximity exposure and a proximity exposure device |
| 04/30/2002 | US6380799 Internal voltage generation circuit having stable operating characteristics at low external supply voltages |
| 04/30/2002 | US6380795 Semiconductor integrated circuit |
| 04/30/2002 | US6380792 Semiconductor integrated circuit |
| 04/30/2002 | US6380768 Display device capable of collecting substantially all power charged to capacitive load in display panel |
| 04/30/2002 | US6380765 Double pass transistor logic with vertical gate transistors |
| 04/30/2002 | US6380764 Semiconductor integrated circuit device, recording medium stored with cell library, and method for designing semiconductor integrated circuit |
| 04/30/2002 | US6380756 Burin carrier and semiconductor die assembly |
| 04/30/2002 | US6380754 Removable electrical interconnect apparatuses including an engagement proble |
| 04/30/2002 | US6380753 Screening method of semiconductor device and apparatus thereof |
| 04/30/2002 | US6380751 Wafer probe station having environment control enclosure |
| 04/30/2002 | US6380684 Plasma generating apparatus and semiconductor manufacturing method |
| 04/30/2002 | US6380636 Nonvolatile semiconductor memory device having an array structure suitable to high-density integrationization |
| 04/30/2002 | US6380635 Apparatus and methods for coupling conductive leads of semiconductor assemblies |
| 04/30/2002 | US6380634 Conductor wires and semiconductor device using them |
| 04/30/2002 | US6380632 Center bond flip-chip semiconductor device and method of making it |
| 04/30/2002 | US6380631 Apparatus and methods of packaging and testing die |
| 04/30/2002 | US6380629 Wafer level stack package and method of fabricating the same |
| 04/30/2002 | US6380628 Microstructure liner having improved adhesion |
| 04/30/2002 | US6380627 Low resistance barrier layer for isolating, adhering, and passivating copper metal in semiconductor fabrication |
| 04/30/2002 | US6380626 Semiconductor device for attachment to a semiconductor substrate |
| 04/30/2002 | US6380622 Electric apparatus having a contact intermediary member and method for manufacturing the same |
| 04/30/2002 | US6380621 Semiconductor device and manufacturing method thereof |
| 04/30/2002 | US6380620 Tape ball grid array semiconductor |
| 04/30/2002 | US6380618 Fabrication of integrated circuits on both sides of a semiconductor wafer |
| 04/30/2002 | US6380615 Chip size stack package, memory module having the same, and method of fabricating the module |
| 04/30/2002 | US6380613 Semiconductor device |
| 04/30/2002 | US6380612 Thin film formed by inductively coupled plasma |
| 04/30/2002 | US6380611 Treatment for film surface to reduce photo footing |
| 04/30/2002 | US6380610 Dislocation free local oxidation of silicon with suppression of narrow space field oxide thinning effect |
| 04/30/2002 | US6380609 Silicided undoped polysilicon for capacitor bottom plate |
| 04/30/2002 | US6380607 Semiconductor device and method for reducing parasitic capacitance between data lines |
| 04/30/2002 | US6380606 Locos isolation process using a layered pad nitride and dry field oxidation stack and semiconductor device employing the same |
| 04/30/2002 | US6380602 Semiconductor device |
| 04/30/2002 | US6380601 Multilayer semiconductor structure with phosphide-passivated germanium substrate |
| 04/30/2002 | US6380599 Method and apparatus for trench isolation process with pad gate and trench edge spacer elimination |
| 04/30/2002 | US6380598 Radiation hardened semiconductor memory |
| 04/30/2002 | US6380596 Method of forming a local interconnect, method of fabricating integrated circuitry comprising an sram cell having a local interconnect and having circuitry peripheral to the sram cell, and method of forming contact plugs |
| 04/30/2002 | US6380595 Semiconductor device and manufacturing method therefor |
| 04/30/2002 | US6380594 Semiconductor device |
| 04/30/2002 | US6380590 SOI chip having multiple threshold voltage MOSFETs by using multiple channel materials and method of fabricating same |
| 04/30/2002 | US6380589 Semiconductor-on-insulator (SOI) tunneling junction transistor SRAM cell |
| 04/30/2002 | US6380588 Semiconductor device having uniform spacers |
| 04/30/2002 | US6380587 Semiconductor read-only memory device and method of fabricating the same |
| 04/30/2002 | US6380585 Nonvolatile semiconductor device capable of increased electron injection efficiency |
| 04/30/2002 | US6380584 Semiconductor memory device with single and double sidewall spacers |
| 04/30/2002 | US6380583 Method to increase coupling ratio of source to floating gate in split-gate flash |
| 04/30/2002 | US6380582 Autoaligned etching process for realizing word lines in memory devices integrated semiconductor substrates |
| 04/30/2002 | US6380581 DRAM technology compatible non volatile memory cells with capacitors connected to the gates of the transistors |
| 04/30/2002 | US6380580 Method of making a thin film capacitor with an improved top electrode |
| 04/30/2002 | US6380579 Capacitor of semiconductor device |
| 04/30/2002 | US6380578 High-speed stacked capacitor in SOI structure |
| 04/30/2002 | US6380576 Selective polysilicon stud growth |
| 04/30/2002 | US6380575 DRAM trench cell |
| 04/30/2002 | US6380574 Ferroelectric capacitor with a self-aligned diffusion barrier |
| 04/30/2002 | US6380573 Substrate with channel; ferroelectric dielectric; barrier electrode |
| 04/30/2002 | US6380569 High power unipolar FET switch |
| 04/30/2002 | US6380567 Semiconductor device and fabrication method thereof |
| 04/30/2002 | US6380561 Semiconductor device and process for producing the same |
| 04/30/2002 | US6380560 Semiconductor device forming a pixel matrix circuit |
| 04/30/2002 | US6380559 Thin film transistor array substrate for a liquid crystal display |
| 04/30/2002 | US6380558 Semiconductor device and method of fabricating the same |
| 04/30/2002 | US6380557 Test chip for evaluating fillers of molding material with dams formed on a semiconductor substrate to define slits for capturing the fillers |
| 04/30/2002 | US6380556 Test structure used to measure metal bottom coverage in trenches and vias/contacts and method for creating the test structure |
| 04/30/2002 | US6380551 Optical function device with photonic band gap and/or filtering characteristics |
| 04/30/2002 | US6380518 Heat treatment apparatus and substrate processing system |
| 04/30/2002 | US6380506 Use of hot carrier effects to trim analog transistor pair |
| 04/30/2002 | US6380492 Contact film used for devices having ball grid array structure and device mounting structure |
| 04/30/2002 | US6380479 Photovoltaic element and method for manufacture thereof |
| 04/30/2002 | US6380271 Mixing a polybenzoxazole precursor or a polybenzoxazole resin with an oligomer, forming film from resulting mixture, heating film in nitrogen containing oxygen to give rise to thermal decomposition and gasification of oligomer to form resin layer |
| 04/30/2002 | US6380108 Pendeoepitaxial methods of fabricating gallium nitride semiconductor layers on weak posts, and gallium nitride semiconductor structures fabricated thereby |
| 04/30/2002 | US6380106 Forming spaced conductive lines over a semiconductor structure; forming filler material over conductive lines and semiconductor structure; forming permeable dielectric layer; vaporizing filler material; depositing insulating layer |
| 04/30/2002 | US6380105 Low volatility solvent-based method for forming thin film nanoporous aerogels on semiconductor substrates |
| 04/30/2002 | US6380104 Method for forming composite gate dielectric layer equivalent to silicon oxide gate dielectric layer |
| 04/30/2002 | US6380103 Rapid thermal etch and rapid thermal oxidation |
| 04/30/2002 | US6380102 Method for fabricating gate oxide film of semiconductor device |
| 04/30/2002 | US6380100 Semiconductor processing apparatuses, and methods of forming antireflective coating materials over substrates |
| 04/30/2002 | US6380099 Porous region removing method and semiconductor substrate manufacturing method |
| 04/30/2002 | US6380098 Composition for a wiring, a wiring using the composition, manufacturing method thereof, a display using the wiring and a manufacturing method thereof |
| 04/30/2002 | US6380097 Method for obtaining a sulfur-passivated semiconductor surface |
| 04/30/2002 | US6380096 In-situ integrated oxide etch process particularly useful for copper dual damascene |
| 04/30/2002 | US6380095 Silicon trench etch using silicon-containing precursors to reduce or avoid mask erosion |
| 04/30/2002 | US6380094 Method for preventing redeposition of etching products onto substrate surfaces during a tungsten re-etching process in the production of LSI circuits |
| 04/30/2002 | US6380092 Gas phase planarization process for semiconductor wafers |
| 04/30/2002 | US6380091 Dual damascene arrangement for metal interconnection with oxide dielectric layer and low K dielectric constant layer |
| 04/30/2002 | US6380090 Protecting method applied to the semiconductor manufacturing process |
| 04/30/2002 | US6380089 Method of manufacturing semiconductor device |
| 04/30/2002 | US6380088 Method to form a recessed source drain on a trench side wall with a replacement gate technique |
| 04/30/2002 | US6380087 CMP process utilizing dummy plugs in damascene process |
| 04/30/2002 | US6380085 Method of manufacturing semiconductor devices |
| 04/30/2002 | US6380084 Method to form high performance copper damascene interconnects by de-coupling via and metal line filling |
| 04/30/2002 | US6380083 Process for semiconductor device fabrication having copper interconnects |
| 04/30/2002 | US6380082 Method of fabricating Cu interconnects with reduced Cu contamination |
| 04/30/2002 | US6380081 Method of vaporizing liquid sources and apparatus therefor |
| 04/30/2002 | US6380080 Methods for preparing ruthenium metal films |
| 04/30/2002 | US6380079 Metal wiring in semiconductor device and method for fabricating the same |
| 04/30/2002 | US6380078 Method for fabrication of damascene interconnects and related structures |
| 04/30/2002 | US6380077 Method of forming contact opening |
| 04/30/2002 | US6380076 Dielectric filling of electrical wiring planes |