| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 05/07/2002 | US6383837 Method of manufacturing a multi-chip semiconductor device effective to improve alignment |
| 05/07/2002 | US6383836 Diode and method for manufacturing the same |
| 05/07/2002 | US6383831 Methods of forming thin-film transistor display devices |
| 05/07/2002 | US6383826 Method for determining etch depth |
| 05/07/2002 | US6383825 Method and system for testing semiconductor dice, semiconductor packages and semiconductor wafers |
| 05/07/2002 | US6383824 Method of using scatterometry measurements to control deposition processes |
| 05/07/2002 | US6383823 Probe for scanning probe microscope (SPM) and SPM device |
| 05/07/2002 | US6383821 Semiconductor device and process |
| 05/07/2002 | US6383724 Organic removal process |
| 05/07/2002 | US6383723 Method to clean substrate and improve photoresist profile |
| 05/07/2002 | US6383718 Photomask and pattern forming method employing the same |
| 05/07/2002 | US6383709 Positive resist composition comprising N-(n-octylsulfonyloxy) succinimide |
| 05/07/2002 | US6383708 Positive resist composition |
| 05/07/2002 | US6383697 Lithographic imaging and printing, photoresists with mask, demagnification |
| 05/07/2002 | US6383689 Fine resist pattern comprising plurality of opaque patterns and transparent opening pattern; uniform thickness; semiconductors |
| 05/07/2002 | US6383659 Autopolymerizable epoxy resin or curable phenolic resin; semiconductor packaging; filler, curing catalyst, and thermoplastic resin |
| 05/07/2002 | US6383606 Semiconductor wafer diaphragm |
| 05/07/2002 | US6383574 Ion implantation method for fabricating magnetoresistive (MR) sensor element |
| 05/07/2002 | US6383566 Reduction of tungsten- or molybdenum halide or organometallic compound; vapor deposition; glazings, mirrors, emissive screens |
| 05/07/2002 | US6383555 Misted precursor deposition apparatus and method with improved mist and mist flow |
| 05/07/2002 | US6383466 Method of dehydroxylating a hydroxylated material and method of making a mesoporous film |
| 05/07/2002 | US6383414 Slurries containing 2-mercaptothiazole, 2-mercaptobenzothiazole, or benzothiazole |
| 05/07/2002 | US6383410 Ammonium fluoride or an organic derivative of ammonium fluoride or polyammonium fluoride, ethylene glycol and an amine |
| 05/07/2002 | US6383403 Dry etching method |
| 05/07/2002 | US6383357 Three-dimensional metallic structure |
| 05/07/2002 | US6383346 Method for forming thin films |
| 05/07/2002 | US6383334 Method and apparatus for controlling the temperature of a gas distribution plate in a process reactor |
| 05/07/2002 | US6383333 Protective member for inner surface of chamber and plasma processing apparatus |
| 05/07/2002 | US6383332 For semiconductors |
| 05/07/2002 | US6383331 Device for discharging two or more media with media nozzles |
| 05/07/2002 | US6383330 Quartz wafer processing chamber |
| 05/07/2002 | US6383327 Conductive pattern producing method |
| 05/07/2002 | US6383304 Cleaning semiconductors; drying |
| 05/07/2002 | US6383303 High volume fluid head |
| 05/07/2002 | US6383302 Apparatus and method for manufacturing semiconductor device |
| 05/07/2002 | US6383300 Heat treatment apparatus and cleaning method of the same |
| 05/07/2002 | US6383299 Silicon oxide film, method of forming the silicon oxide film, and apparatus for depositing the silicon oxide film |
| 05/07/2002 | US6383294 Coated film forming apparatus |
| 05/07/2002 | US6383292 Semiconductor device encapsulators |
| 05/07/2002 | US6383291 Process solution supplying apparatus |
| 05/07/2002 | US6383289 Apparatus for liquid carbon dioxide systems |
| 05/07/2002 | US6383288 Method of forming diamond film |
| 05/07/2002 | US6383286 Method of making semiconductor super-atom and aggregate thereof |
| 05/07/2002 | US6383240 Containing amphipathic compound; polishing semiconductors |
| 05/07/2002 | US6383065 Catalytic reactive pad for metal CMP |
| 05/07/2002 | US6383060 Method of polishing silicon wafer |
| 05/07/2002 | US6383058 Adaptive endpoint detection for chemical mechanical polishing |
| 05/07/2002 | US6382902 Method for controlling handling robot |
| 05/07/2002 | US6382901 Wafer flat zone aligner |
| 05/07/2002 | US6382900 Apparatus for conveyance of semiconductor chips |
| 05/07/2002 | US6382896 Front-opening unified pod closing/opening control structure |
| 05/07/2002 | US6382895 Substrate processing apparatus |
| 05/07/2002 | US6382849 Developing method and developing apparatus |
| 05/07/2002 | US6382609 Chuck table |
| 05/07/2002 | US6382495 Chip junction nozzle |
| 05/07/2002 | US6382419 Wafer container box |
| 05/07/2002 | US6382413 Disk holder and disk storage device |
| 05/07/2002 | US6382395 Method and system for package orientation checking for laser mark operations |
| 05/07/2002 | US6382292 Method and apparatus for separating composite member using fluid |
| 05/07/2002 | US6382249 Vacuum exhaust system |
| 05/07/2002 | US6381873 Method for drying a polymer coating on a substrate |
| 05/07/2002 | US6381872 Method for drying a semiconductor wafer, a mixture for drying, and a dryer |
| 05/07/2002 | US6381838 BGA package and method of manufacturing the same |
| 05/07/2002 | US6381796 Spinning washer for wafers |
| 05/02/2002 | WO2002035903A2 Electronic component, component mounting equipment, and component mounting method |
| 05/02/2002 | WO2002035897A1 Use of metallic treatment on copper foil to produce fine lines and replace oxide process in printed circuit board production |
| 05/02/2002 | WO2002035610A1 Nonvolatile semiconductor storage and method for manufacturing the same |
| 05/02/2002 | WO2002035609A1 Method for producing a gate oxide formed on a semiconductor substrate |
| 05/02/2002 | WO2002035608A2 Implanted hidden interconnections in a semiconductor device for preventing reverse engineering |
| 05/02/2002 | WO2002035606A1 Semiconductor device and its production method |
| 05/02/2002 | WO2002035605A1 Method for forming contacts in integrated circuits |
| 05/02/2002 | WO2002035604A1 Treated substrate transfer system in semiconductor treatment equipment |
| 05/02/2002 | WO2002035603A1 Wafer prover device, and ceramic substrate used for wafer prover device |
| 05/02/2002 | WO2002035602A1 Bump forming method and bump forming device |
| 05/02/2002 | WO2002035601A1 Laser thermal process for fabricating field-effect transistors |
| 05/02/2002 | WO2002035600A2 Method for producing a dmos transistor |
| 05/02/2002 | WO2002035599A1 Production method for silicon wafer and silicon wafer |
| 05/02/2002 | WO2002035598A1 Method and device for cleaning a semiconductor wafer |
| 05/02/2002 | WO2002035597A2 Multilayer devices having frequency agile materials |
| 05/02/2002 | WO2002035596A1 Highly selective ionic lithography method |
| 05/02/2002 | WO2002035595A1 Flexible laser system for severing semiconductor wafers |
| 05/02/2002 | WO2002035594A1 Method for manufacturing semiconductor device |
| 05/02/2002 | WO2002035593A1 Wafer manufacturing method, polishing apparatus, and wafer |
| 05/02/2002 | WO2002035592A1 Polishing device |
| 05/02/2002 | WO2002035591A1 Method for applying a substrate |
| 05/02/2002 | WO2002035590A1 Heat-treating device |
| 05/02/2002 | WO2002035589A1 Method for shifting the bandgap energy of a quantum well layer |
| 05/02/2002 | WO2002035588A1 Production method of semiconductor device and production system of semiconductor device |
| 05/02/2002 | WO2002035587A1 Method of producing semiconductor device and processing conditions setting device |
| 05/02/2002 | WO2002035586A2 Monitoring substrate processing using reflected radiation |
| 05/02/2002 | WO2002035585A1 Apparatus and method to dice integrated circuits from a wafer using a pressurized jet |
| 05/02/2002 | WO2002035584A1 Method for processing a wafer of integrated circuits |
| 05/02/2002 | WO2002035583A1 Arrangement for transporting a semiconductor wafer carrier |
| 05/02/2002 | WO2002035582A1 Treatment device for wafers |
| 05/02/2002 | WO2002035559A2 Magnetic layer formed of multiple sub-element layers |
| 05/02/2002 | WO2002035300A2 Method and apparatus for embedded process control framework in tool systems |
| 05/02/2002 | WO2002035289A2 Method and materials for printing particle-enhanced electrical contacts |
| 05/02/2002 | WO2002035273A1 Catadioptric system and exposure device having this system |
| 05/02/2002 | WO2002035217A2 Methods for continuous embedded process monitoring and optical inspection of substrates using specular signature analysis |
| 05/02/2002 | WO2002035195A1 Temperature measuring method, heat treating device and method, computer program, and radiation thermometer |