| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 06/11/2002 | US6403422 Semiconductor device and method of manufacturing the same |
| 06/11/2002 | US6403421 Semiconductor nonvolatile memory device and method of producing the same |
| 06/11/2002 | US6403420 Nitrogen implant after bit-line formation for ONO flash memory devices |
| 06/11/2002 | US6403419 Method of manufacturing a flash memory device |
| 06/11/2002 | US6403418 Method of fabricating cup-shape cylindrical capacitor of high density DRAMs |
| 06/11/2002 | US6403417 Method for in-situ fabrication of a landing via and a strip contact in an embedded memory |
| 06/11/2002 | US6403416 Method for making a double-cylinder-capacitor structure for dynamic random access memory (DRAM) |
| 06/11/2002 | US6403415 Semiconductor device having a metal barrier layer for a dielectric material having a high dielectric constant and a method of manufacture thereof |
| 06/11/2002 | US6403414 Method for producing low carbon/oxygen conductive layers |
| 06/11/2002 | US6403413 Manufacturing method of semiconductor integrated circuit device having a capacitor |
| 06/11/2002 | US6403412 Method for in-situ formation of bottle shaped trench by gas phase etching |
| 06/11/2002 | US6403411 Method for manufacturing lower electrode of DRAM capacitor |
| 06/11/2002 | US6403410 Plasma doping system and plasma doping method |
| 06/11/2002 | US6403409 Method for fabricating top gate type polycrystalline silicon thin film transistor |
| 06/11/2002 | US6403408 Thin-film transistors and method for producing the same |
| 06/11/2002 | US6403407 Method of forming fully self-aligned TFT with improved process window |
| 06/11/2002 | US6403406 Thin film transistor (tft); forming polycrystalline silicon and having an off-set area or a lightly doped drain (ldd) structure |
| 06/11/2002 | US6403405 Method of manufacturing SOI element having body contact |
| 06/11/2002 | US6403404 Method of selectively forming a silicide layer on a logic area of a semiconductor substrate |
| 06/11/2002 | US6403402 Semiconductor chip having an underplate metal layer |
| 06/11/2002 | US6403400 Bumpless flip chip assembly with strips-in-via and plating |
| 06/11/2002 | US6403399 Method of rapid wafer bumping |
| 06/11/2002 | US6403398 Semiconductor device, manufacturing method thereof and aggregate type semiconductor device |
| 06/11/2002 | US6403396 Method for generation of electrically conducting or semiconducting structures in three dimensions and methods for erasure of the same structures |
| 06/11/2002 | US6403395 Electro-optical device, method for making the same, and electronic apparatus |
| 06/11/2002 | US6403394 Reduced leakage trench isolation |
| 06/11/2002 | US6403387 Method and apparatus for transfer molding encapsulation of a semiconductor die with attached heat sink |
| 06/11/2002 | US6403385 Method of inspecting a semiconductor wafer for defects |
| 06/11/2002 | US6403367 Integrated portable biological detection system |
| 06/11/2002 | US6403322 Acoustic detection of dechucking and apparatus therefor |
| 06/11/2002 | US6403291 Multiple exposure method |
| 06/11/2002 | US6403288 Coating with copolymer comprising hydroxystyrene derivative monomer having acid dissociable group; exposure to radiation; development |
| 06/11/2002 | US6403287 Spin coating heated photoresist on wafer; exposure to light; development; semiconductors |
| 06/11/2002 | US6403281 Alkylene glycol di(meth)acrylate or alkylene glycol di(2-norbornene-5-carboxylate) crosslinking monomers; durability, contrast, resolution, adhesion; photolithography; semiconductors |
| 06/11/2002 | US6403268 Reticles for charged-particle beam microlithography |
| 06/11/2002 | US6403215 A polymer having acid groups and a neutralizer, for wafer circuit pattern protective coatings easily removed by washing with water |
| 06/11/2002 | US6403211 Liquid crystal polymer for flexible circuits |
| 06/11/2002 | US6403168 Electronics |
| 06/11/2002 | US6403160 Wet spinning a coating solution containing antimony on a substrate, drying, prebaking and baking the coated layer; dielectrics |
| 06/11/2002 | US6403156 Method of forming an A1203 film in a semiconductor device |
| 06/11/2002 | US6403155 High purity, siliconized silicon carbide having high thermal shock resistance |
| 06/11/2002 | US6403047 Treatment of gas mixtures |
| 06/11/2002 | US6403040 Improved to allow reduction of ripples and of balance shift without degrading the capability; means for changing the area of contact between ground electrode and the ions |
| 06/11/2002 | US6403009 Circuit encapsulation |
| 06/11/2002 | US6402978 Magnetic polishing fluids for polishing metal substrates |
| 06/11/2002 | US6402974 Etching-back with controlled amounts of oxygen-containing feed gas using a plasma process; nonpitting |
| 06/11/2002 | US6402970 Method of making a support circuit for a semiconductor chip assembly |
| 06/11/2002 | US6402925 Prevent accumulation by polishing |
| 06/11/2002 | US6402907 Method of forming a barrier layer |
| 06/11/2002 | US6402885 Magnetically enhanced inductively coupled plasma reactor with magnetically confined plasma |
| 06/11/2002 | US6402884 Planarizing solutions, planarizing machines and methods for mechanical or chemical-mechanical planarization of microelectronic-device substrate assemblies |
| 06/11/2002 | US6402882 Device and method for ion beam etching using space-time detection |
| 06/11/2002 | US6402866 Powdered metallic sheet method for deposition of substrate conductors |
| 06/11/2002 | US6402850 Depositing polysilicon films having improved uniformity and apparatus therefor |
| 06/11/2002 | US6402849 Process tube having slit type process gas injection portion and hole type waste gas exhaust portion, and apparatus for fabricating semiconductor device |
| 06/11/2002 | US6402848 Single-substrate-treating apparatus for semiconductor processing system |
| 06/11/2002 | US6402847 Dry processing apparatus and dry processing method |
| 06/11/2002 | US6402845 Process liquid dispense method and apparatus |
| 06/11/2002 | US6402844 Substrate processing method and substrate processing unit |
| 06/11/2002 | US6402843 Non-contact workpiece holder |
| 06/11/2002 | US6402836 Method for epitaxial growth on a substrate |
| 06/11/2002 | US6402598 Chemical mechanical polishing apparatus and method of washing contaminants off of the polishing head thereof |
| 06/11/2002 | US6402597 Polishing apparatus and method |
| 06/11/2002 | US6402594 Polishing method for wafer and holding plate |
| 06/11/2002 | US6402592 Electrochemical methods for polishing copper films on semiconductor substrates |
| 06/11/2002 | US6402588 Polishing apparatus |
| 06/11/2002 | US6402509 Substrate processing apparatus and substrate processing method |
| 06/11/2002 | US6402508 Heat and cooling treatment apparatus and substrate processing system |
| 06/11/2002 | US6402497 Mold clamping device with improved clamping force transmission mechanism |
| 06/11/2002 | US6402479 Apparatus for pumping out transfer chambers for transferring semiconductor equipment |
| 06/11/2002 | US6402401 Substrate processing apparatus and substrate processing method |
| 06/11/2002 | US6402400 Substrate processing apparatus |
| 06/11/2002 | US6402399 Developing method and developing apparatus |
| 06/11/2002 | US6402380 Fluid bearing operable in a vacuum region |
| 06/11/2002 | US6402014 Method of forming bumps |
| 06/11/2002 | US6402009 Apparatus and method for shaping lead frame for semiconductor device and lead frame for semiconductor device |
| 06/11/2002 | US6401930 Universal handling container |
| 06/11/2002 | US6401929 Insert for use in transporting a wafer carrier |
| 06/11/2002 | US6401765 Lead frame tooling design for exposed pad features |
| 06/11/2002 | US6401734 Substrate treating apparatus |
| 06/11/2002 | US6401732 Thermocapillary dryer |
| 06/11/2002 | US6401580 Method for sawing wafers employing multiple indexing techniques for multiple die dimensions |
| 06/11/2002 | US6401554 Device for testing wafer-transporting robot |
| 06/11/2002 | US6401361 Apparatus and method for drying wafers by a solvent |
| 06/11/2002 | US6401359 Vacuum processing method and apparatus |
| 06/11/2002 | US6401353 Substrate dryer |
| 06/11/2002 | US6401317 Apparatus for fabricating a semiconductor device |
| 06/06/2002 | WO2002045465A1 Ceramic heater, and ceramic heater resistor paste |
| 06/06/2002 | WO2002045245A2 Xyz-axes table |
| 06/06/2002 | WO2002045184A1 Field effect transistors and materials and methods for their manufacture |
| 06/06/2002 | WO2002045183A2 Substrate with semiconductor layer, electronic component, electronic circuit, printable composition and method for production thereof |
| 06/06/2002 | WO2002045179A1 Light-emitting device and its manufacturing method and visible-light-emitting device |
| 06/06/2002 | WO2002045176A1 Self-aligned non-volatile memory cell |
| 06/06/2002 | WO2002045175A1 Nonvolatile storage device and method for manufacturing nonvolatile storage device |
| 06/06/2002 | WO2002045173A1 A semiconductor device and a method for production thereof |
| 06/06/2002 | WO2002045171A1 Planar structure and methods of fabricating non-volatile memory devices |
| 06/06/2002 | WO2002045170A1 Flash-eeprom storage device and corresponding production method |
| 06/06/2002 | WO2002045169A1 Non-volatile nor single-transistor semiconductor memory cell |
| 06/06/2002 | WO2002045168A1 Semiconductor device |
| 06/06/2002 | WO2002045167A2 Thin films for magnetic devices |